[Scan]
initial_time=2016-01-18T16:24:27
final_time=2016-01-18T16:24:46
ip_count=19
run=1024
dataset=1
scan=7
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.76227E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-7.09999E-10
ql2_vset=
ql2_vmon=4.05312E-4
ql2_imon=1.25316E-9
ql3_vset=
ql3_vmon=-8.80021E1
ql3_imon=-2.48251E-9
ql4_vset=
ql4_vmon=9.29832E-4
ql4_imon=1.34642E-8
mult1=-9.83431E-9
mult2=-2.69206E-9
rf_tmon=-3.32279E-3
rf_agc=3.38154E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.02792E-3
ql5_imon=6.42395E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68657E0
bslens_imon=2.34308E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19869E1
lens5a_imon=2.01227E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1256E2
lens4a_imon=2.0492E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54097E1
cs_ef1b_imon=2.8771E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04692E2
lens23_imon=1.02153E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04453E1
cs_ea1_imon=2.52381E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99029E0
lens1_imon=1.57162E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64674E1
os_ef1alow_imon=2.98378E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.45675E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=2.95711E-5
olens2_vset=0.0E0
olens2_vmon=1.40667E-3
olens2_imon=1.10709E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11388E1
os_restr1_imon=4.24949E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14903E1
os_ea1_imon=2.34104E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63731E1
os_ef1bup_imon=3.08541E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20944E0
cs_ionrep_imon=1.18025E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92076E2
cs_nozzle_imon=1.93514E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02061E1
cs_anode1_imon=2.99676E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9997E1
olens4_imon=4.21898E-9
tplens_vset=0.0E0
tplens_vmon=-1.74117E0
tplens_imon=-3.57025E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9971E1
iondef3_imon=8.99422E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98353E1
iondef2_imon=9.21052E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0334E2
lens6_imon=2.98375E-4
ql6_vset=1.0E-1
ql6_vmon=9.74178E-2
ql6_imon=9.21512E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23167E0
ionrepsh_imon=1.7729E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33922E1
lens5b_imon=2.19E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.32119E0
os_ea2_imon=-7.4636E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06229E2
lens4b_imon=2.00897E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71408E1
cs_ef2a_imon=3.15749E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05156E0
os_ef2alow_imon=-2.57986E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79404E-1
os_ef2bup_imon=-5.36212E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11358E1
os_restr2_imon=3.41914E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.2863E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01929E1
cs_anode2_imon=2.2356E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58111E1
iondef1_imon=5.32438E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50216E1
iondef4_imon=5.48942E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27948E1
olens3_imon=2.56585E-8
olens1_vset=0.0E0
olens1_vmon=1.45435E-3
olens1_imon=1.28065E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15897E0
cs_ionaccel_imon=-1.85546E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02157E2
cs_ionfocb_imon=1.4745E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56309E1
einzel_imon=7.78875E-6
window_vset=0.0E0
window_vmon=2.3356E-1
window_imon=-7.70669E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82845E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.87407E1
mask2_imon=-6.55342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=6.76997E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93691E3
defgrida_imon=6.53204E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.12686E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26021E0
defgridb_imon=5.96967E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33171E1
os_fil1_imon=9.45159E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06789E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67146E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30443E1
cs_fil1_imon=9.98834E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61735E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68667E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.94473E-2
os_fil2_imon=-2.78009E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86302E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=7.05375E-2
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.2395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31641E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22664E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31264E-3
inlet_lpb_pmon=2.12603E-2
chamber_ion_pmon=2.22737E-9
chamber_cvt_pmon=2.52164E-3
foreline_cvt_pmon=2.52164E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.86612E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=201
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.556E3	2.0E0	1.47E2	4.1E1	-7.201E-2	-8.80014E1	7.15256E-5	-8.80021E1	1.28746E-3	3.14713E-3	9.74178E-2	1.58079E1	-1.98092E1	-1.99573E1	1.50246E1	2.24012E-9	2.52318E-3	2.52318E-3	6.34037E-3	2.11666E-2
2.0E0	3.493E3	2.0E0	3.16E2	1.6E2	-7.17779E-2	-8.80013E1	3.09944E-4	-8.80021E1	1.09673E-3	3.00407E-3	9.7394E-2	1.58552E1	-1.98588E1	-1.98979E1	1.50138E1	2.242E-9	2.52131E-3	2.52131E-3	6.32328E-3	2.1118E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80014E1	3.33786E-4	-8.80023E1	9.05991E-4	3.14713E-3	9.72748E-2	1.58067E1	-1.9824E1	-1.99142E1	1.50142E1	2.23608E-9	2.51384E-3	2.51384E-3	6.33592E-3	2.11044E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.26282E-2	-8.80015E1	1.90735E-4	-8.80024E1	1.0252E-3	2.47955E-3	9.73463E-2	1.58315E1	-1.98411E1	-1.99272E1	1.50259E1	2.24442E-9	2.51847E-3	2.51847E-3	6.33977E-3	2.10608E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80014E1	4.76837E-4	-8.80025E1	1.09673E-3	2.86102E-3	9.75609E-2	1.57573E1	-1.9833E1	-1.99665E1	1.50091E1	2.23964E-9	2.52276E-3	2.52276E-3	6.33436E-3	2.10788E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80012E1	4.05312E-4	-8.80024E1	1.09673E-3	2.93255E-3	9.74655E-2	1.58044E1	-1.98086E1	-1.9929E1	1.50335E1	2.22558E-9	2.5188E-3	2.5188E-3	6.29098E-3	2.11298E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.18554E-2	-8.80012E1	3.33786E-4	-8.80023E1	1.23978E-3	2.86102E-3	9.7394E-2	1.58144E1	-1.9824E1	-1.99036E1	1.50214E1	2.22268E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.11482E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.8001E1	1.43051E-4	-8.80021E1	1.12057E-3	2.88486E-3	9.76563E-2	1.58197E1	-1.98362E1	-1.99288E1	1.50412E1	2.23011E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.12051E-2
1.2E1	9.7E1	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.80011E1	0.0E0	-8.80024E1	8.82149E-4	2.95639E-3	9.74655E-2	1.57933E1	-1.98248E1	-1.99492E1	1.49986E1	2.21689E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.1185E-2
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80013E1	-1.90735E-4	-8.80022E1	1.0252E-3	3.17097E-3	9.7537E-2	1.57885E1	-1.98417E1	-1.99632E1	1.50416E1	2.24597E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.1185E-2
1.4E1	1.17E2	1.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80016E1	2.38419E-5	-8.80023E1	1.09673E-3	3.24249E-3	9.73463E-2	1.58347E1	-1.98549E1	-1.99276E1	1.5034E1	2.22063E-9	2.51203E-3	2.51203E-3	6.33977E-3	2.11689E-2
1.5E1	6.1E1	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80018E1	3.57628E-4	-8.80023E1	9.05991E-4	3.50475E-3	9.76086E-2	1.57981E1	-1.98338E1	-1.99348E1	1.50124E1	2.2372E-9	2.52318E-3	2.52318E-3	6.33486E-3	2.12218E-2
1.6E1	3.64E2	1.0E0	6.47E2	4.41E2	-7.23189E-2	-8.80015E1	2.86102E-4	-8.80021E1	8.10623E-4	3.43323E-3	9.78231E-2	1.57975E1	-1.98374E1	-1.99179E1	1.50587E1	2.23429E-9	2.52428E-3	2.52428E-3	6.34037E-3	2.12218E-2
1.7E1	8.75E2	0.0E0	6.87E2	4.7E2	-7.33239E-2	-8.80015E1	1.66893E-4	-8.80019E1	7.62939E-4	3.33786E-3	9.73463E-2	1.57938E1	-1.98187E1	-1.99591E1	1.50148E1	2.23623E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.1185E-2
1.8E1	3.61E3	3.0E0	7.27E2	5.0E2	-7.18554E-2	-8.80017E1	7.15256E-5	-8.8002E1	9.53674E-4	3.12328E-3	9.7394E-2	1.58191E1	-1.98545E1	-1.99328E1	1.50202E1	2.22063E-9	2.52061E-3	2.52061E-3	6.33977E-3	2.10788E-2
1.9E1	1.855E3	3.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80015E1	1.66893E-4	-8.80021E1	8.34465E-4	3.17097E-3	9.75609E-2	1.58269E1	-1.98567E1	-1.99414E1	1.50172E1	2.21695E-9	2.51581E-3	2.51581E-3	6.34661E-3	2.11454E-2
2.0E1	1.9E1	0.0E0	8.08E2	5.58E2	-7.23189E-2	-8.80016E1	4.76837E-5	-8.80025E1	1.09673E-3	2.86102E-3	9.74655E-2	1.58026E1	-1.97962E1	-1.99337E1	1.50412E1	2.23202E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.11509E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80017E1	1.19209E-4	-8.80023E1	1.09673E-3	2.81334E-3	9.76563E-2	1.58249E1	-1.9833E1	-1.99367E1	1.50051E1	2.21882E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.12218E-2
2.2E1	1.3E1	0.0E0	8.89E2	6.17E2	-7.16233E-2	-8.80021E1	1.19209E-4	-8.80021E1	1.0252E-3	2.93255E-3	9.75847E-2	1.58234E1	-1.98545E1	-1.99114E1	1.50364E1	2.23731E-9	2.51919E-3	2.51919E-3	6.31269E-3	2.12067E-2
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.80019E1	4.05312E-4	-8.80021E1	9.29832E-4	3.02792E-3	9.74178E-2	1.58111E1	-1.98353E1	-1.9971E1	1.50216E1	2.22737E-9	2.52164E-3	2.52164E-3	6.31264E-3	2.12603E-2
