[Scan]
initial_time=2016-01-18T16:27:14
final_time=2016-01-18T16:27:41
ip_count=19
run=1024
dataset=1
scan=12
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.81479E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-7.3117E-10
ql2_vset=
ql2_vmon=-2.6226E-4
ql2_imon=1.22857E-9
ql3_vset=
ql3_vmon=-8.80022E1
ql3_imon=-2.46012E-9
ql4_vset=
ql4_vmon=9.53674E-4
ql4_imon=1.3468E-8
mult1=-9.1504E-9
mult2=-2.84437E-9
rf_tmon=-4.67465E-3
rf_agc=3.32314E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.21865E-3
ql5_imon=6.71506E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62168E0
bslens_imon=2.26017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19646E1
lens5a_imon=2.00831E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12642E2
lens4a_imon=2.05111E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54013E1
cs_ef1b_imon=2.87314E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04663E2
lens23_imon=1.01836E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.03985E1
cs_ea1_imon=2.52598E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00771E0
lens1_imon=1.95735E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64795E1
os_ef1alow_imon=2.9863E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03654E1
cs_ea2_imon=1.47658E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84562E1
cs_ef1a_imon=2.95964E-5
olens2_vset=0.0E0
olens2_vmon=8.34465E-4
olens2_imon=1.10605E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11256E1
os_restr1_imon=4.24481E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14645E1
os_ea1_imon=2.29346E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63677E1
os_ef1bup_imon=3.07712E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19802E0
cs_ionrep_imon=1.19395E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92092E2
cs_nozzle_imon=1.93719E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02212E1
cs_anode1_imon=3.00432E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99971E1
olens4_imon=4.22345E-9
tplens_vset=0.0E0
tplens_vmon=-1.761E0
tplens_imon=-5.48088E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99107E1
iondef3_imon=8.66978E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98446E1
iondef2_imon=9.52415E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03348E2
lens6_imon=2.98436E-4
ql6_vset=1.0E-1
ql6_vmon=9.74178E-2
ql6_imon=9.69875E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23588E0
ionrepsh_imon=1.77002E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33556E1
lens5b_imon=2.17558E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.73414E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.3248E0
os_ea2_imon=-5.22853E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06237E2
lens4b_imon=2.0059E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71396E1
cs_ef2a_imon=3.17047E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06717E0
os_ef2alow_imon=-2.51138E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.38269E-1
os_ef2bup_imon=-5.4342E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1131E1
os_restr2_imon=3.42995E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.28198E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02031E1
cs_anode2_imon=2.24461E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58449E1
iondef1_imon=5.40369E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50277E1
iondef4_imon=5.40653E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27948E1
olens3_imon=2.57233E-8
olens1_vset=0.0E0
olens1_vmon=1.33514E-3
olens1_imon=1.28305E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15837E0
cs_ionaccel_imon=-1.85186E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02148E2
cs_ionfocb_imon=1.47342E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56735E1
einzel_imon=7.77434E-6
window_vset=0.0E0
window_vmon=2.66597E-1
window_imon=-9.43659E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82818E2
mask1_imon=2.39217E-4
mask2_vset=0.0E0
mask2_vmon=-1.87413E1
mask2_imon=-5.65243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92617E3
multa_neg_imon=7.10883E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93743E3
defgrida_imon=6.65461E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=6.96103E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.23314E0
defgridb_imon=5.94083E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33129E1
os_fil1_imon=9.43495E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07053E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6683E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30443E1
cs_fil1_imon=9.97873E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62426E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68182E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.89314E-2
os_fil2_imon=-2.72603E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=7.94315E-2
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3755E-1
cs_fil2_imon=-2.20947E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0281E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.226E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.12232E-2
chamber_ion_pmon=2.23202E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.98335E-1
res40_imon=-2.57626E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=144
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.487E3	0.0E0	1.47E2	4.1E1	-7.201E-2	-8.80019E1	4.76837E-5	-8.8002E1	6.67572E-4	3.0756E-3	9.75132E-2	1.58002E1	-1.98145E1	-1.99419E1	1.50329E1	2.23818E-9	2.51007E-3	2.51007E-3	6.31837E-3	2.10748E-2
2.0E0	3.49E3	3.0E0	3.16E2	1.6E2	-7.22418E-2	-8.80018E1	-1.66893E-4	-8.80022E1	7.62939E-4	3.09944E-3	9.74417E-2	1.57981E1	-1.98146E1	-1.99089E1	1.5031E1	2.23918E-9	2.52131E-3	2.52131E-3	6.34982E-3	2.11712E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80015E1	-3.09944E-4	-8.80023E1	9.53674E-4	3.09944E-3	9.76324E-2	1.57933E1	-1.98146E1	-1.99053E1	1.50058E1	2.23369E-9	2.51804E-3	2.51804E-3	6.34661E-3	2.1108E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80014E1	-9.53674E-5	-8.80021E1	1.14441E-3	3.14713E-3	9.77278E-2	1.58327E1	-1.98015E1	-1.99337E1	1.50641E1	2.23964E-9	2.52384E-3	2.52384E-3	6.32896E-3	2.11689E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80018E1	-2.6226E-4	-8.8002E1	9.05991E-4	3.19481E-3	9.71556E-2	1.57807E1	-1.98218E1	-1.99155E1	1.50388E1	2.24597E-9	2.52099E-3	2.52099E-3	6.34037E-3	2.12034E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.14689E-2	-8.80017E1	-4.76837E-5	-8.80022E1	8.10623E-4	3.33786E-3	9.73701E-2	1.58407E1	-1.98194E1	-1.99222E1	1.50286E1	2.23623E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.11115E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.10825E-2	-8.80016E1	2.38419E-4	-8.80023E1	8.10623E-4	3.40939E-3	9.76563E-2	1.57596E1	-1.98326E1	-1.99264E1	1.50605E1	2.23818E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.11115E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.14689E-2	-8.80015E1	0.0E0	-8.80019E1	9.77516E-4	3.12328E-3	9.75609E-2	1.58267E1	-1.98191E1	-1.99529E1	1.50404E1	2.23869E-9	2.51525E-3	2.51525E-3	6.35601E-3	2.12957E-2
1.2E1	8.2E1	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80017E1	-1.66893E-4	-8.80022E1	8.58307E-4	3.33786E-3	9.73463E-2	1.58056E1	-1.98373E1	-1.99432E1	1.5019E1	2.23869E-9	2.52061E-3	2.52061E-3	6.29128E-3	2.1187E-2
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80017E1	-7.15256E-5	-8.80019E1	9.77516E-4	3.09944E-3	9.7537E-2	1.58035E1	-1.98428E1	-1.99312E1	1.50202E1	2.23963E-9	2.52139E-3	2.52139E-3	6.31299E-3	2.12016E-2
1.4E1	1.2E2	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80017E1	-1.43051E-4	-8.80016E1	9.29832E-4	3.26633E-3	9.7394E-2	1.58377E1	-1.9817E1	-1.99426E1	1.50334E1	2.23526E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.1185E-2
1.5E1	7.9E1	0.0E0	6.06E2	4.11E2	-7.37874E-2	-8.80016E1	4.76837E-5	-8.80017E1	7.39098E-4	3.19481E-3	9.75847E-2	1.57747E1	-1.98657E1	-1.99246E1	1.49986E1	2.24251E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.12232E-2
1.6E1	3.52E2	0.0E0	6.47E2	4.41E2	-7.39421E-2	-8.80018E1	4.76837E-5	-8.80016E1	7.15256E-4	3.00407E-3	9.73701E-2	1.57955E1	-1.98428E1	-1.99419E1	1.50094E1	2.24012E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.12034E-2
1.7E1	9.22E2	1.0E0	6.87E2	4.7E2	-7.46377E-2	-8.8002E1	-2.14577E-4	-8.80019E1	1.0252E-3	2.7895E-3	9.72509E-2	1.58347E1	-1.98633E1	-1.9924E1	1.50184E1	2.24012E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.11482E-2
1.8E1	3.551E3	2.0E0	7.27E2	5.0E2	-7.41738E-2	-8.8002E1	-2.86102E-4	-8.80019E1	1.00136E-3	3.02792E-3	9.73225E-2	1.58365E1	-1.98326E1	-1.99113E1	1.49968E1	2.2406E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.12413E-2
1.9E1	1.872E3	2.0E0	7.68E2	5.29E2	-7.35556E-2	-8.8002E1	-4.76837E-4	-8.8002E1	1.09673E-3	2.93255E-3	9.72271E-2	1.57856E1	-1.98501E1	-1.9962E1	1.50319E1	2.22364E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.12218E-2
2.0E1	1.6E1	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80018E1	-2.86102E-4	-8.80018E1	1.28746E-3	3.21865E-3	9.7394E-2	1.58359E1	-1.98156E1	-1.99227E1	1.50171E1	2.21401E-9	2.52058E-3	2.52058E-3	6.32784E-3	2.12441E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80023E1	-4.05312E-4	-8.80018E1	7.62939E-4	3.14713E-3	9.71317E-2	1.57971E1	-1.98318E1	-1.99245E1	1.50375E1	2.2265E-9	2.52147E-3	2.52147E-3	6.33706E-3	2.11364E-2
2.2E1	1.2E1	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80019E1	-1.90735E-4	-8.80019E1	9.29832E-4	3.05176E-3	9.72033E-2	1.57951E1	-1.98891E1	-1.99414E1	1.5001E1	2.23869E-9	2.52492E-3	2.52492E-3	6.3074E-3	2.11689E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80018E1	-2.6226E-4	-8.80022E1	9.53674E-4	3.21865E-3	9.74178E-2	1.58449E1	-1.98446E1	-1.99107E1	1.50277E1	2.23202E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.12232E-2
