[Scan]
initial_time=2016-01-18T16:27:52
final_time=2016-01-18T16:28:19
ip_count=19
run=1024
dataset=1
scan=13
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.14689E-2
qbias_imon=-3.78777E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-7.38919E-10
ql2_vset=
ql2_vmon=1.90735E-4
ql2_imon=1.21328E-9
ql3_vset=
ql3_vmon=-8.80022E1
ql3_imon=-2.45513E-9
ql4_vset=
ql4_vmon=7.62939E-4
ql4_imon=1.34697E-8
mult1=-9.77126E-9
mult2=-2.68014E-9
rf_tmon=-3.42996E-3
rf_agc=3.48487E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.29018E-3
ql5_imon=6.5794E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68077E0
bslens_imon=2.40257E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19683E1
lens5a_imon=1.98045E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12606E2
lens4a_imon=2.05312E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54079E1
cs_ef1b_imon=2.87911E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04675E2
lens23_imon=1.02267E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04768E1
cs_ea1_imon=2.53281E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98846E0
lens1_imon=1.45009E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64765E1
os_ef1alow_imon=2.98455E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03615E1
cs_ea2_imon=1.4757E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84556E1
cs_ef1a_imon=2.95802E-5
olens2_vset=0.0E0
olens2_vmon=6.4373E-4
olens2_imon=1.10583E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.24389E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15178E1
os_ea1_imon=2.30895E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63626E1
os_ef1bup_imon=3.07938E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20227E0
cs_ionrep_imon=1.18613E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92076E2
cs_nozzle_imon=1.93622E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=2.99199E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9997E1
olens4_imon=4.17007E-9
tplens_vset=0.0E0
tplens_vmon=-1.76889E0
tplens_imon=-1.28111E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99526E1
iondef3_imon=8.78836E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98269E1
iondef2_imon=9.24374E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03289E2
lens6_imon=2.98273E-4
ql6_vset=1.0E-1
ql6_vmon=9.7537E-2
ql6_imon=9.12619E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24399E0
ionrepsh_imon=1.74476E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3382E1
lens5b_imon=2.1918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74714E1
cs_ef2b_imon=3.12786E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.28338E0
os_ea2_imon=-7.36447E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06241E2
lens4b_imon=2.00585E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71535E1
cs_ef2a_imon=3.16855E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05544E0
os_ef2alow_imon=-2.50994E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.90544E-1
os_ef2bup_imon=-5.26993E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11371E1
os_restr2_imon=3.41872E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23113E2
cs_ionfoca_imon=6.29268E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02039E1
cs_anode2_imon=2.23653E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57672E1
iondef1_imon=5.21829E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50323E1
iondef4_imon=5.31709E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27952E1
olens3_imon=2.57194E-8
olens1_vset=0.0E0
olens1_vmon=1.83582E-3
olens1_imon=1.27908E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14901E0
cs_ionaccel_imon=-1.94025E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02147E2
cs_ionfocb_imon=1.47311E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56376E1
einzel_imon=7.84353E-6
window_vset=0.0E0
window_vmon=2.82684E-1
window_imon=-8.46876E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82834E2
mask1_imon=2.3918E-4
mask2_vset=0.0E0
mask2_vmon=-1.875E1
mask2_imon=-6.91185E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92729E3
multa_neg_imon=6.61225E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.48363E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.00854E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2238E0
defgridb_imon=5.93787E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33137E1
os_fil1_imon=9.43794E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07081E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66918E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30483E1
cs_fil1_imon=9.97779E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61487E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6844E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.07094E-2
os_fil2_imon=-2.6853E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86749E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=7.76499E-2
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37343E-1
cs_fil2_imon=-2.80325E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07724E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22637E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=2.12051E-2
chamber_ion_pmon=2.24251E-9
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.4362E-1
res40_imon=-2.52763E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.569E3	0.0E0	1.47E2	4.1E1	-7.201E-2	-8.80019E1	4.76837E-5	-8.80021E1	7.39098E-4	3.17097E-3	9.76086E-2	1.58029E1	-1.98176E1	-1.99294E1	1.50232E1	2.2406E-9	2.52061E-3	2.52061E-3	6.29128E-3	2.12232E-2
2.0E0	3.487E3	3.0E0	3.16E2	1.6E2	-7.10051E-2	-8.80018E1	2.6226E-4	-8.80021E1	6.91414E-4	3.19481E-3	9.75609E-2	1.58247E1	-1.98304E1	-1.99383E1	1.50418E1	2.23693E-9	2.51677E-3	2.51677E-3	6.30464E-3	2.12491E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.19325E-2	-8.80021E1	1.19209E-4	-8.80025E1	6.4373E-4	3.29018E-3	9.75132E-2	1.58035E1	-1.98081E1	-1.99355E1	1.50208E1	2.23392E-9	2.5131E-3	2.5131E-3	6.29665E-3	2.11689E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.20871E-2	-8.80022E1	1.19209E-4	-8.80023E1	7.39098E-4	3.02792E-3	9.74417E-2	1.58023E1	-1.98188E1	-1.99306E1	1.50076E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80021E1	-2.38419E-5	-8.80022E1	6.91414E-4	3.31402E-3	9.73463E-2	1.58059E1	-1.98092E1	-1.99444E1	1.50232E1	2.23964E-9	2.52384E-3	2.52384E-3	6.32356E-3	2.12775E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80021E1	2.38419E-5	-8.80019E1	7.39098E-4	2.90871E-3	9.72509E-2	1.58056E1	-1.98045E1	-1.99296E1	1.49958E1	2.24109E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.12403E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17779E-2	-8.8002E1	2.38419E-5	-8.80019E1	9.77516E-4	3.00407E-3	9.72986E-2	1.58356E1	-1.98471E1	-1.99145E1	1.50106E1	2.21593E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.1185E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.16233E-2	-8.8002E1	-9.53674E-5	-8.80021E1	9.77516E-4	2.74181E-3	9.72509E-2	1.58138E1	-1.97903E1	-1.99402E1	1.50443E1	2.23429E-9	2.51116E-3	2.51116E-3	6.3074E-3	2.12587E-2
1.2E1	8.7E1	0.0E0	4.85E2	3.23E2	-7.14689E-2	-8.80022E1	1.19209E-4	-8.80022E1	9.29832E-4	2.95639E-3	9.72986E-2	1.58059E1	-1.9826E1	-1.99185E1	1.50238E1	2.23869E-9	2.51847E-3	2.51847E-3	6.29128E-3	2.11689E-2
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.09279E-2	-8.80019E1	-7.15256E-5	-8.80023E1	9.53674E-4	2.59876E-3	9.73463E-2	1.58089E1	-1.98128E1	-1.99252E1	1.5019E1	2.23665E-9	2.51915E-3	2.51915E-3	6.30182E-3	2.12016E-2
1.4E1	1.1E2	0.0E0	5.66E2	3.82E2	-7.18554E-2	-8.80022E1	-7.15256E-5	-8.80018E1	6.4373E-4	3.05176E-3	9.76801E-2	1.58377E1	-1.98122E1	-1.99089E1	1.50196E1	2.24634E-9	2.51954E-3	2.51954E-3	6.29665E-3	2.12051E-2
1.5E1	8.1E1	0.0E0	6.06E2	4.11E2	-7.13915E-2	-8.80019E1	-2.86102E-4	-8.80017E1	7.86781E-4	2.86102E-3	9.7537E-2	1.58522E1	-1.98092E1	-1.99449E1	1.49896E1	2.23818E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.12403E-2
1.6E1	3.28E2	0.0E0	6.47E2	4.41E2	-7.18554E-2	-8.80019E1	-2.6226E-4	-8.80019E1	7.86781E-4	3.02792E-3	9.73463E-2	1.57848E1	-1.98526E1	-1.9939E1	1.50304E1	2.24109E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.12403E-2
1.7E1	8.74E2	1.0E0	6.87E2	4.7E2	-7.17007E-2	-8.80017E1	0.0E0	-8.8002E1	7.62939E-4	3.17097E-3	9.7394E-2	1.58297E1	-1.98523E1	-1.99555E1	1.50172E1	2.23623E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.12218E-2
1.8E1	3.746E3	5.0E0	7.27E2	5.0E2	-7.21643E-2	-8.80018E1	-7.15256E-5	-8.80024E1	7.62939E-4	3.0756E-3	9.72509E-2	1.58362E1	-1.98428E1	-1.99048E1	1.50155E1	2.23011E-9	2.51417E-3	2.51417E-3	6.3074E-3	2.11689E-2
1.9E1	1.862E3	0.0E0	7.68E2	5.29E2	-7.17007E-2	-8.80018E1	9.53674E-5	-8.80024E1	6.67572E-4	3.26633E-3	9.71317E-2	1.57934E1	-1.98141E1	-1.99438E1	1.50247E1	2.23964E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.12594E-2
2.0E1	1.6E1	0.0E0	8.08E2	5.58E2	-7.14689E-2	-8.80016E1	4.76837E-5	-8.80023E1	6.19888E-4	3.38554E-3	9.72986E-2	1.5815E1	-1.98576E1	-1.99408E1	1.50236E1	2.23764E-9	2.5225E-3	2.5225E-3	6.31858E-3	2.12016E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.14689E-2	-8.80019E1	3.57628E-4	-8.80023E1	9.77516E-4	3.24249E-3	9.75132E-2	1.57789E1	-1.98272E1	-1.99354E1	1.5013E1	2.23392E-9	2.51954E-3	2.51954E-3	6.34518E-3	2.11689E-2
2.2E1	1.9E1	0.0E0	8.89E2	6.17E2	-7.17779E-2	-8.80016E1	2.38419E-5	-8.80022E1	9.77516E-4	3.50475E-3	9.7394E-2	1.58061E1	-1.98434E1	-1.99532E1	1.50205E1	2.24304E-9	2.51334E-3	2.51334E-3	6.32936E-3	2.12587E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.14689E-2	-8.80018E1	1.90735E-4	-8.80022E1	7.62939E-4	3.29018E-3	9.7537E-2	1.57672E1	-1.98269E1	-1.99526E1	1.50323E1	2.24251E-9	2.51847E-3	2.51847E-3	6.29128E-3	2.12051E-2
