[Scan]
initial_time=2016-01-18T16:29:08
final_time=2016-01-18T16:29:36
ip_count=19
run=1024
dataset=1
scan=15
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.82324E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-7.35927E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=1.1645E-9
ql3_vset=
ql3_vmon=-8.80021E1
ql3_imon=-2.40811E-9
ql4_vset=
ql4_vmon=7.62939E-4
ql4_imon=1.35021E-8
mult1=-9.2511E-9
mult2=-2.6723E-9
rf_tmon=-5.05808E-3
rf_agc=3.30378E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.3617E-3
ql5_imon=6.48069E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6403E0
bslens_imon=2.37553E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19688E1
lens5a_imon=1.99677E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12551E2
lens4a_imon=2.04833E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54181E1
cs_ef1b_imon=2.87674E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04646E2
lens23_imon=1.02233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04561E1
cs_ea1_imon=2.53499E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96806E0
lens1_imon=1.44545E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64849E1
os_ef1alow_imon=2.97441E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03504E1
cs_ea2_imon=1.46684E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=2.96648E-5
olens2_vset=0.0E0
olens2_vmon=9.05991E-4
olens2_imon=1.1023E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11502E1
os_restr1_imon=4.26535E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14945E1
os_ea1_imon=2.3259E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63545E1
os_ef1bup_imon=3.07136E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2527E0
cs_ionrep_imon=1.18349E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92053E2
cs_nozzle_imon=1.93489E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01965E1
cs_anode1_imon=2.97369E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99972E1
olens4_imon=4.18209E-9
tplens_vset=0.0E0
tplens_vmon=-1.70752E0
tplens_imon=-3.39E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99343E1
iondef3_imon=8.75269E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98352E1
iondef2_imon=9.37995E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0327E2
lens6_imon=2.98223E-4
ql6_vset=1.0E-1
ql6_vmon=9.72986E-2
ql6_imon=9.41384E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2563E0
ionrepsh_imon=1.77002E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34283E1
lens5b_imon=2.17882E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74946E1
cs_ef2b_imon=3.12217E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.26952E0
os_ea2_imon=-6.05767E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06226E2
lens4b_imon=2.0076E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71306E1
cs_ef2a_imon=3.1647E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06417E0
os_ef2alow_imon=-2.46814E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.26856E-1
os_ef2bup_imon=-5.17832E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11424E1
os_restr2_imon=3.4159E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23093E2
cs_ionfoca_imon=6.29892E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01659E1
cs_anode2_imon=2.2374E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58014E1
iondef1_imon=5.25949E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50334E1
iondef4_imon=5.36328E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27952E1
olens3_imon=2.56101E-8
olens1_vset=0.0E0
olens1_vmon=1.81198E-3
olens1_imon=1.28314E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16258E0
cs_ionaccel_imon=-1.74374E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02153E2
cs_ionfocb_imon=1.47244E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56435E1
einzel_imon=7.63378E-6
window_vset=0.0E0
window_vmon=2.49778E-1
window_imon=-8.10312E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82828E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.87437E1
mask2_imon=-5.86866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.20977E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.5753E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.22419E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31134E0
defgridb_imon=5.98409E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33134E1
os_fil1_imon=9.42378E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07569E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66864E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30441E1
cs_fil1_imon=9.9645E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61957E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67956E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.04791E-2
os_fil2_imon=-2.85217E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.74889E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=8.16228E-2
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37809E-1
cs_fil2_imon=-2.68999E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.74038E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22413E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=2.12403E-2
chamber_ion_pmon=2.24012E-9
chamber_cvt_pmon=2.52428E-3
foreline_cvt_pmon=2.52428E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.28969E-1
res40_imon=-2.60509E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.53E3	2.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80021E1	-1.43051E-4	-8.80022E1	7.15256E-4	3.43323E-3	9.74655E-2	1.58203E1	-1.98605E1	-1.99225E1	1.50166E1	2.21401E-9	2.52099E-3	2.52099E-3	6.34037E-3	2.12957E-2
2.0E0	3.334E3	4.0E0	3.16E2	1.6E2	-7.33239E-2	-8.80022E1	4.76837E-5	-8.80021E1	8.10623E-4	3.45707E-3	9.73225E-2	1.57945E1	-1.98152E1	-1.99402E1	1.50467E1	2.22821E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.1187E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80021E1	-3.09944E-4	-8.80021E1	6.4373E-4	3.3617E-3	9.7537E-2	1.57987E1	-1.98062E1	-1.99113E1	1.50136E1	2.23623E-9	2.52647E-3	2.52647E-3	6.31837E-3	2.13142E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80021E1	-1.66893E-4	-8.80018E1	6.91414E-4	3.38554E-3	9.74178E-2	1.58119E1	-1.98483E1	-1.99185E1	1.50316E1	2.21978E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.12403E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80019E1	-3.09944E-4	-8.80017E1	7.39098E-4	3.21865E-3	9.72033E-2	1.57903E1	-1.98519E1	-1.99546E1	1.50118E1	2.21305E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.10931E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80019E1	-2.6226E-4	-8.80019E1	6.91414E-4	3.12328E-3	9.74178E-2	1.58101E1	-1.98483E1	-1.99264E1	1.50136E1	2.21401E-9	2.50898E-3	2.50898E-3	6.34037E-3	2.11666E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.8002E1	-9.53674E-5	-8.80016E1	8.34465E-4	3.24249E-3	9.72033E-2	1.58067E1	-1.98051E1	-1.99319E1	1.50282E1	2.21401E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.1185E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.8002E1	-2.6226E-4	-8.80015E1	6.67572E-4	3.14713E-3	9.72033E-2	1.57955E1	-1.98476E1	-1.99319E1	1.50376E1	2.22252E-9	2.52061E-3	2.52061E-3	6.29665E-3	2.11509E-2
1.2E1	8.3E1	0.0E0	4.85E2	3.23E2	-7.201E-2	-8.80022E1	-4.76837E-4	-8.8002E1	8.58307E-4	2.76566E-3	9.73463E-2	1.58059E1	-1.9817E1	-1.99294E1	1.50226E1	2.21779E-9	2.51417E-3	2.51417E-3	6.30202E-3	2.10608E-2
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80021E1	-2.86102E-4	-8.80018E1	5.48363E-4	3.12328E-3	9.7084E-2	1.58227E1	-1.98723E1	-1.99306E1	1.50214E1	2.23623E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.11115E-2
1.4E1	1.17E2	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80023E1	-1.90735E-4	-8.80018E1	7.86781E-4	2.90871E-3	9.73225E-2	1.58023E1	-1.98392E1	-1.99095E1	1.50214E1	2.23332E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.12218E-2
1.5E1	7.5E1	0.0E0	6.06E2	4.11E2	-7.18554E-2	-8.80022E1	2.38419E-5	-8.80019E1	9.05991E-4	3.17097E-3	9.70364E-2	1.58303E1	-1.98411E1	-1.99254E1	1.50167E1	2.23041E-9	2.51552E-3	2.51552E-3	6.29098E-3	2.11666E-2
1.6E1	3.24E2	0.0E0	6.47E2	4.41E2	-7.15461E-2	-8.80022E1	-7.15256E-5	-8.80021E1	7.15256E-4	3.29018E-3	9.72033E-2	1.57738E1	-1.98239E1	-1.99328E1	1.50334E1	2.23297E-9	2.52169E-3	2.52169E-3	6.29665E-3	2.12232E-2
1.7E1	8.48E2	0.0E0	6.87E2	4.7E2	-7.18554E-2	-8.80021E1	-2.38419E-5	-8.8002E1	3.57628E-4	3.40939E-3	9.72033E-2	1.57796E1	-1.98358E1	-1.99237E1	1.50346E1	2.2426E-9	2.52027E-3	2.52027E-3	6.3074E-3	2.11641E-2
1.8E1	3.625E3	2.0E0	7.27E2	5.0E2	-7.18554E-2	-8.80019E1	-3.57628E-4	-8.80018E1	9.05991E-4	3.24249E-3	9.72509E-2	1.58147E1	-1.98281E1	-1.99242E1	1.50302E1	2.23678E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.11689E-2
1.9E1	1.805E3	2.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80021E1	-2.6226E-4	-8.80018E1	9.53674E-4	3.14713E-3	9.72748E-2	1.58326E1	-1.98543E1	-1.99476E1	1.50185E1	2.23773E-9	2.51785E-3	2.51785E-3	6.28821E-3	2.12309E-2
2.0E1	1.6E1	0.0E0	8.08E2	5.58E2	-7.201E-2	-8.80021E1	-4.52995E-4	-8.80018E1	9.77516E-4	3.26633E-3	9.71794E-2	1.5805E1	-1.98181E1	-1.99332E1	1.50286E1	2.24122E-9	2.51867E-3	2.51867E-3	6.33211E-3	2.11712E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.18554E-2	-8.80022E1	-3.09944E-4	-8.80018E1	1.00136E-3	3.31402E-3	9.72033E-2	1.57831E1	-1.98287E1	-1.99125E1	1.50109E1	2.24513E-9	2.51849E-3	2.51849E-3	6.30036E-3	2.13672E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80023E1	-7.15256E-5	-8.80021E1	9.05991E-4	3.52859E-3	9.72986E-2	1.58209E1	-1.9817E1	-1.99083E1	1.50034E1	2.23011E-9	2.51525E-3	2.51525E-3	6.31817E-3	2.11509E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80023E1	-5.72205E-4	-8.80021E1	7.62939E-4	3.3617E-3	9.72986E-2	1.58014E1	-1.98352E1	-1.99343E1	1.50334E1	2.24012E-9	2.52428E-3	2.52428E-3	6.34037E-3	2.12403E-2
