[Scan]
initial_time=2016-01-18T16:29:46
final_time=2016-01-18T16:30:14
ip_count=19
run=1024
dataset=1
scan=16
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.82974E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-7.69532E-10
ql2_vset=
ql2_vmon=-2.6226E-4
ql2_imon=1.27521E-9
ql3_vset=
ql3_vmon=-8.80017E1
ql3_imon=-2.47054E-9
ql4_vset=
ql4_vmon=1.19209E-3
ql4_imon=1.35223E-8
mult1=-9.35509E-9
mult2=-2.76652E-9
rf_tmon=-5.13728E-3
rf_agc=3.27087E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.52859E-3
ql5_imon=6.7575E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66373E0
bslens_imon=2.29262E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19899E1
lens5a_imon=1.9928E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12596E2
lens4a_imon=2.04999E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53766E1
cs_ef1b_imon=2.85908E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.022E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04646E1
cs_ea1_imon=2.53535E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00711E0
lens1_imon=1.50674E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65083E1
os_ef1alow_imon=2.98594E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03654E1
cs_ea2_imon=1.46828E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84574E1
cs_ef1a_imon=2.95783E-5
olens2_vset=0.0E0
olens2_vmon=1.19209E-3
olens2_imon=1.09861E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11592E1
os_restr1_imon=4.25995E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15065E1
os_ea1_imon=2.33059E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.07424E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24669E0
cs_ionrep_imon=1.19863E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92047E2
cs_nozzle_imon=1.93359E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01965E1
cs_anode1_imon=2.97946E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99969E1
olens4_imon=4.28246E-9
tplens_vset=0.0E0
tplens_vmon=-1.74177E0
tplens_imon=-1.26308E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99179E1
iondef3_imon=8.55442E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98338E1
iondef2_imon=9.22855E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03304E2
lens6_imon=2.98458E-4
ql6_vset=1.0E-1
ql6_vmon=9.74178E-2
ql6_imon=9.25338E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24128E0
ionrepsh_imon=1.76389E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34012E1
lens5b_imon=2.18026E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.29836E0
os_ea2_imon=-6.74261E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06181E2
lens4b_imon=2.00504E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71306E1
cs_ef2a_imon=3.16434E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03173E0
os_ef2alow_imon=-2.41047E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.19648E-1
os_ef2bup_imon=-5.25761E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11394E1
os_restr2_imon=3.40941E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23091E2
cs_ionfoca_imon=6.30721E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.23812E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58173E1
iondef1_imon=5.17297E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49914E1
iondef4_imon=5.50744E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2795E1
olens3_imon=2.57101E-8
olens1_vset=0.0E0
olens1_vmon=1.52588E-3
olens1_imon=1.2783E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13915E0
cs_ionaccel_imon=-1.93835E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02169E2
cs_ionfocb_imon=1.47493E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.62297E-6
window_vset=0.0E0
window_vmon=2.78009E-1
window_imon=-8.31936E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82828E2
mask1_imon=2.3899E-4
mask2_vset=0.0E0
mask2_vmon=-1.87197E1
mask2_imon=-6.6255E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92683E3
multa_neg_imon=7.0872E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93691E3
defgrida_imon=6.1391E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.21698E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.21209E0
defgridb_imon=6.33377E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33149E1
os_fil1_imon=9.45718E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06482E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66708E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30465E1
cs_fil1_imon=9.99429E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61933E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6783E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.16399E-2
os_fil2_imon=-2.7861E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80896E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=9.65749E-2
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38845E-1
cs_fil2_imon=-2.55785E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.83939E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22557E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=2.12403E-2
chamber_ion_pmon=2.23623E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.58091E-1
res40_imon=-2.51859E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.492E3	1.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80021E1	0.0E0	-8.8002E1	7.15256E-4	3.05176E-3	9.71794E-2	1.58074E1	-1.98115E1	-1.99363E1	1.50206E1	2.21401E-9	2.51116E-3	2.51116E-3	6.31288E-3	2.12772E-2
2.0E0	3.428E3	5.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80023E1	1.43051E-4	-8.8002E1	1.00136E-3	3.05176E-3	9.74178E-2	1.58599E1	-1.98279E1	-1.99103E1	1.50139E1	2.22838E-9	2.51752E-3	2.51752E-3	6.29721E-3	2.11412E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80019E1	2.14577E-4	-8.8002E1	5.72205E-4	2.95639E-3	9.72033E-2	1.58014E1	-1.98676E1	-1.98906E1	1.50292E1	2.22755E-9	2.51085E-3	2.51085E-3	6.35493E-3	2.11166E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80018E1	7.15256E-5	-8.8002E1	5.96046E-4	3.0756E-3	9.72509E-2	1.58251E1	-1.98464E1	-1.99288E1	1.5045E1	2.22916E-9	2.51525E-3	2.51525E-3	6.31278E-3	2.12232E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80017E1	2.38419E-5	-8.80018E1	7.15256E-4	2.7895E-3	9.71556E-2	1.58185E1	-1.98152E1	-1.9948E1	1.50403E1	2.21401E-9	2.51225E-3	2.51225E-3	6.33486E-3	2.12034E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.8002E1	-7.15256E-5	-8.80019E1	7.15256E-4	3.14713E-3	9.74178E-2	1.58263E1	-1.9832E1	-1.99534E1	1.50503E1	2.22945E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.12034E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80017E1	2.38419E-5	-8.80019E1	4.52995E-4	3.19481E-3	9.73701E-2	1.57684E1	-1.98139E1	-1.99313E1	1.50346E1	2.24207E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.12772E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80018E1	1.43051E-4	-8.8002E1	4.52995E-4	3.00407E-3	9.74178E-2	1.58528E1	-1.98621E1	-1.99119E1	1.50467E1	2.23869E-9	2.52276E-3	2.52276E-3	6.35601E-3	2.10968E-2
1.2E1	9.1E1	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80021E1	-4.76837E-5	-8.80018E1	6.67572E-4	2.88486E-3	9.75132E-2	1.58149E1	-1.97912E1	-1.99312E1	1.50142E1	2.23332E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.12587E-2
1.3E1	7.0E0	1.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80021E1	1.43051E-4	-8.80019E1	5.48363E-4	2.81334E-3	9.74655E-2	1.58341E1	-1.97936E1	-1.99366E1	1.50094E1	2.24012E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.11115E-2
1.4E1	9.6E1	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.8002E1	-1.90735E-4	-8.80024E1	8.34465E-4	2.86102E-3	9.74655E-2	1.58047E1	-1.97954E1	-1.99354E1	1.504E1	2.23429E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.12034E-2
1.5E1	6.8E1	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.8002E1	-7.15256E-5	-8.80021E1	8.82149E-4	2.93255E-3	9.74655E-2	1.58315E1	-1.98759E1	-1.99331E1	1.50491E1	2.23235E-9	2.52428E-3	2.52428E-3	6.33486E-3	2.12772E-2
1.6E1	3.6E2	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80021E1	-7.15256E-5	-8.8002E1	7.86781E-4	2.81334E-3	9.74417E-2	1.57843E1	-1.9832E1	-1.98873E1	1.50172E1	2.23964E-9	2.52599E-3	2.52599E-3	6.32896E-3	2.1187E-2
1.7E1	8.98E2	2.0E0	6.87E2	4.7E2	-7.17779E-2	-8.80017E1	1.43051E-4	-8.80021E1	5.24521E-4	3.05176E-3	9.7537E-2	1.58335E1	-1.98326E1	-1.99462E1	1.50394E1	2.24207E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.12403E-2
1.8E1	3.584E3	2.0E0	7.27E2	5.0E2	-7.22418E-2	-8.8002E1	2.38419E-5	-8.80019E1	6.19888E-4	3.33786E-3	9.7394E-2	1.58227E1	-1.98151E1	-1.99355E1	1.50149E1	2.23623E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.12587E-2
1.9E1	1.908E3	2.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80021E1	2.38419E-4	-8.80018E1	2.38419E-4	3.38554E-3	9.74894E-2	1.58546E1	-1.98567E1	-1.99047E1	1.5031E1	2.23392E-9	2.51954E-3	2.51954E-3	6.30202E-3	2.12594E-2
2.0E1	2.3E1	0.0E0	8.08E2	5.58E2	-7.17779E-2	-8.80022E1	9.53674E-5	-8.80018E1	5.48363E-4	3.40939E-3	9.75132E-2	1.57909E1	-1.9841E1	-1.99258E1	1.50274E1	2.24402E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.13513E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.16233E-2	-8.80022E1	-2.86102E-4	-8.80018E1	6.4373E-4	3.38554E-3	9.7537E-2	1.57879E1	-1.98236E1	-1.9924E1	1.49842E1	2.24694E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.12403E-2
2.2E1	1.2E1	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80022E1	-1.43051E-4	-8.80021E1	5.24521E-4	3.3617E-3	9.75132E-2	1.58439E1	-1.98133E1	-1.99372E1	1.49992E1	2.24251E-9	2.52492E-3	2.52492E-3	6.29128E-3	2.1187E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80022E1	-2.6226E-4	-8.80017E1	1.19209E-3	3.52859E-3	9.74178E-2	1.58173E1	-1.98338E1	-1.99179E1	1.49914E1	2.23623E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.12403E-2
