[Scan]
initial_time=2016-01-18T16:30:24
final_time=2016-01-18T16:30:52
ip_count=19
run=1024
dataset=1
scan=17
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.18554E-2
qbias_imon=-3.78515E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-7.7188E-10
ql2_vset=
ql2_vmon=1.43051E-4
ql2_imon=1.25387E-9
ql3_vset=
ql3_vmon=-8.80018E1
ql3_imon=-2.47403E-9
ql4_vset=
ql4_vmon=7.86781E-4
ql4_imon=1.35547E-8
mult1=-9.82467E-9
mult2=-2.68069E-9
rf_tmon=-4.86691E-3
rf_agc=3.25765E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.29018E-3
ql5_imon=6.67322E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66614E0
bslens_imon=2.41158E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19959E1
lens5a_imon=2.0011E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12576E2
lens4a_imon=2.05096E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53923E1
cs_ef1b_imon=2.8735E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0467E2
lens23_imon=1.02222E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04393E1
cs_ea1_imon=2.52454E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00771E0
lens1_imon=1.48511E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64963E1
os_ef1alow_imon=2.97874E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04051E1
cs_ea2_imon=1.45999E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84544E1
cs_ef1a_imon=2.95855E-5
olens2_vset=0.0E0
olens2_vmon=6.19888E-4
olens2_imon=1.09787E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.25346E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15173E1
os_ea1_imon=2.31256E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63665E1
os_ef1bup_imon=3.07424E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22626E0
cs_ionrep_imon=1.17664E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92062E2
cs_nozzle_imon=1.93561E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01869E1
cs_anode1_imon=2.96864E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99969E1
olens4_imon=4.25322E-9
tplens_vset=0.0E0
tplens_vmon=-1.65225E0
tplens_imon=-3.31791E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99161E1
iondef3_imon=8.78153E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98206E1
iondef2_imon=9.23936E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03297E2
lens6_imon=2.98541E-4
ql6_vset=1.0E-1
ql6_vmon=9.71317E-2
ql6_imon=9.24969E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26952E0
ionrepsh_imon=1.77254E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34949E1
lens5b_imon=2.1954E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74784E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.31398E0
os_ea2_imon=-6.16582E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06224E2
lens4b_imon=2.00652E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7139E1
cs_ef2a_imon=3.16182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05636E0
os_ef2alow_imon=-2.5258E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08836E-1
os_ef2bup_imon=-5.17832E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11274E1
os_restr2_imon=3.42887E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.30721E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.23812E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57909E1
iondef1_imon=5.23426E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50076E1
iondef4_imon=5.39572E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27951E1
olens3_imon=2.57365E-8
olens1_vset=0.0E0
olens1_vmon=1.21593E-3
olens1_imon=1.27513E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-1.81582E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02168E2
cs_ionfocb_imon=1.47295E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56315E1
einzel_imon=7.69865E-6
window_vset=0.0E0
window_vmon=2.84617E-1
window_imon=-8.5356E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82821E2
mask1_imon=2.39135E-4
mask2_vset=0.0E0
mask2_vmon=-1.87077E1
mask2_imon=-6.58946E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.09441E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.49599E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.17733E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38953E0
defgridb_imon=6.14631E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33125E1
os_fil1_imon=9.48637E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07119E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66563E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30449E1
cs_fil1_imon=9.99531E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61999E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67926E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24138E-2
os_fil2_imon=-2.71402E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80896E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.05082E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38197E-1
cs_fil2_imon=-2.64795E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.41892E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22653E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=2.12587E-2
chamber_ion_pmon=2.24109E-9
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.7551E-1
res40_imon=-2.63032E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.463E3	3.0E0	1.47E2	4.1E1	-7.19325E-2	-8.80018E1	9.53674E-5	-8.80018E1	5.24521E-4	3.57628E-3	9.74417E-2	1.58347E1	-1.98609E1	-1.99408E1	1.50292E1	2.2372E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.11482E-2
2.0E0	3.416E3	1.0E0	3.16E2	1.6E2	-7.23189E-2	-8.80018E1	9.53674E-5	-8.80022E1	8.82149E-4	3.31402E-3	9.73225E-2	1.58087E1	-1.98049E1	-1.99408E1	1.50118E1	2.23526E-9	2.52647E-3	2.52647E-3	6.34037E-3	2.12034E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.09279E-2	-8.80019E1	-2.38419E-5	-8.80018E1	5.24521E-4	3.43323E-3	9.72033E-2	1.57826E1	-1.98411E1	-1.99211E1	1.50292E1	2.2426E-9	2.51693E-3	2.51693E-3	6.32418E-3	2.12016E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.12368E-2	-8.80018E1	-1.90735E-4	-8.80021E1	7.39098E-4	3.60012E-3	9.74178E-2	1.58263E1	-1.98404E1	-1.99414E1	1.50202E1	2.23637E-9	2.52131E-3	2.52131E-3	6.3074E-3	2.11534E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.11597E-2	-8.80022E1	1.90735E-4	-8.80022E1	5.96046E-4	3.48091E-3	9.75609E-2	1.58238E1	-1.98688E1	-1.99166E1	1.50352E1	2.23362E-9	2.51755E-3	2.51755E-3	6.32371E-3	2.1186E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.15461E-2	-8.8002E1	7.15256E-5	-8.80017E1	9.53674E-4	3.38554E-3	9.74655E-2	1.57747E1	-1.98176E1	-1.99348E1	1.5019E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.13915E-2	-8.80023E1	1.43051E-4	-8.80021E1	8.82149E-4	3.50475E-3	9.74178E-2	1.58185E1	-1.98251E1	-1.99207E1	1.50322E1	2.22075E-9	2.52318E-3	2.52318E-3	6.29098E-3	2.12218E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.05415E-2	-8.8002E1	-4.76837E-5	-8.80019E1	8.82149E-4	3.19481E-3	9.76324E-2	1.57921E1	-1.9829E1	-1.9924E1	1.5019E1	2.24442E-9	2.51954E-3	2.51954E-3	6.28592E-3	2.12051E-2
1.2E1	9.9E1	0.0E0	4.85E2	3.23E2	-7.13143E-2	-8.80021E1	-4.76837E-5	-8.8002E1	7.39098E-4	3.71933E-3	9.74655E-2	1.58256E1	-1.98476E1	-1.99425E1	1.50346E1	2.22268E-9	2.51334E-3	2.51334E-3	6.34037E-3	2.12218E-2
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.18554E-2	-8.8002E1	-3.09944E-4	-8.8002E1	8.82149E-4	3.38554E-3	9.72271E-2	1.57842E1	-1.98588E1	-1.99567E1	1.50178E1	2.21401E-9	2.51417E-3	2.51417E-3	6.31817E-3	2.11148E-2
1.4E1	1.43E2	0.0E0	5.66E2	3.82E2	-7.17779E-2	-8.80023E1	0.0E0	-8.80018E1	9.53674E-4	3.52859E-3	9.71556E-2	1.58305E1	-1.982E1	-1.99125E1	1.50232E1	2.21695E-9	2.51693E-3	2.51693E-3	6.32978E-3	2.11641E-2
1.5E1	6.9E1	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80023E1	9.53674E-5	-8.8002E1	9.77516E-4	3.48091E-3	9.73701E-2	1.57891E1	-1.98302E1	-1.99155E1	1.50112E1	2.21305E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.12218E-2
1.6E1	3.76E2	1.0E0	6.47E2	4.41E2	-7.286E-2	-8.80022E1	-4.76837E-5	-8.80018E1	1.04904E-3	3.45707E-3	9.6941E-2	1.58035E1	-1.98176E1	-1.99047E1	1.50575E1	2.21401E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.12403E-2
1.7E1	8.94E2	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80024E1	-7.15256E-5	-8.80018E1	7.62939E-4	3.24249E-3	9.73463E-2	1.58431E1	-1.9847E1	-1.99185E1	1.50286E1	2.21497E-9	2.5188E-3	2.5188E-3	6.34037E-3	2.12218E-2
1.8E1	3.673E3	2.0E0	7.27E2	5.0E2	-7.286E-2	-8.80022E1	-1.90735E-4	-8.80016E1	8.34465E-4	3.33786E-3	9.72509E-2	1.57879E1	-1.98476E1	-1.99573E1	1.50109E1	2.23041E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.12034E-2
1.9E1	1.936E3	4.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80021E1	2.38419E-5	-8.80017E1	8.58307E-4	2.76566E-3	9.73463E-2	1.58365E1	-1.98362E1	-1.99294E1	1.50136E1	2.23964E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.10968E-2
2.0E1	3.3E1	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.80022E1	-2.38419E-5	-8.8002E1	1.16825E-3	2.90871E-3	9.74178E-2	1.58315E1	-1.98535E1	-1.99248E1	1.50124E1	2.2372E-9	2.52757E-3	2.52757E-3	6.34588E-3	2.12403E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80021E1	2.38419E-5	-8.8002E1	1.12057E-3	3.12328E-3	9.72271E-2	1.58144E1	-1.98275E1	-1.99461E1	1.50311E1	2.23869E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.12232E-2
2.2E1	1.2E1	0.0E0	8.89E2	6.17E2	-7.17007E-2	-8.80021E1	-3.57628E-4	-8.80015E1	7.86781E-4	3.52859E-3	9.72509E-2	1.57957E1	-1.98338E1	-1.99029E1	1.50046E1	2.23964E-9	2.51954E-3	2.51954E-3	6.33436E-3	2.11509E-2
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.18554E-2	-8.80021E1	1.43051E-4	-8.80018E1	7.86781E-4	3.29018E-3	9.71317E-2	1.57909E1	-1.98206E1	-1.99161E1	1.50076E1	2.24109E-9	2.51443E-3	2.51443E-3	6.29098E-3	2.12587E-2
