[Scan]
initial_time=2016-01-18T16:31:02
final_time=2016-01-18T16:31:30
ip_count=19
run=1024
dataset=1
scan=18
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.18554E-2
qbias_imon=-3.7163E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-7.41982E-10
ql2_vset=
ql2_vmon=-1.43051E-4
ql2_imon=1.21163E-9
ql3_vset=
ql3_vmon=-8.8002E1
ql3_imon=-2.52852E-9
ql4_vset=
ql4_vmon=6.4373E-4
ql4_imon=1.35811E-8
mult1=-9.38114E-9
mult2=-2.58215E-9
rf_tmon=-5.05808E-3
rf_agc=3.24184E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.21865E-3
ql5_imon=6.61337E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64793E0
bslens_imon=2.17162E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19995E1
lens5a_imon=1.99218E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12579E2
lens4a_imon=2.04955E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53829E1
cs_ef1b_imon=2.86645E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04672E2
lens23_imon=1.0211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04475E1
cs_ea1_imon=2.50787E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97756E0
lens1_imon=1.83892E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64944E1
os_ef1alow_imon=2.98565E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03802E1
cs_ea2_imon=1.46799E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84689E1
cs_ef1a_imon=2.95124E-5
olens2_vset=0.0E0
olens2_vmon=1.07288E-3
olens2_imon=1.10037E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11645E1
os_restr1_imon=4.2569E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14957E1
os_ea1_imon=2.33196E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63763E1
os_ef1bup_imon=3.07288E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23794E0
cs_ionrep_imon=1.18484E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92066E2
cs_nozzle_imon=1.93378E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01734E1
cs_anode1_imon=2.97314E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99972E1
olens4_imon=4.31272E-9
tplens_vset=0.0E0
tplens_vmon=-1.73759E0
tplens_imon=-1.11298E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99626E1
iondef3_imon=8.69475E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98299E1
iondef2_imon=9.31415E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0331E2
lens6_imon=2.98197E-4
ql6_vset=1.0E-1
ql6_vmon=9.74655E-2
ql6_imon=9.31299E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22437E0
ionrepsh_imon=1.75468E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34076E1
lens5b_imon=2.18401E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74802E1
cs_ef2b_imon=3.13647E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.26685E0
os_ea2_imon=-4.51082E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.062E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7131E1
cs_ef2a_imon=3.17505E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03776E0
os_ef2alow_imon=-2.49813E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.10553E-1
os_ef2bup_imon=-5.25748E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11291E1
os_restr2_imon=3.41727E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.28194E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02099E1
cs_anode2_imon=2.23743E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58386E1
iondef1_imon=5.72165E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50358E1
iondef4_imon=5.33857E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27954E1
olens3_imon=2.56619E-8
olens1_vset=0.0E0
olens1_vmon=1.4782E-3
olens1_imon=1.27466E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15041E0
cs_ionaccel_imon=-1.84478E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02168E2
cs_ionfocb_imon=1.47341E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56486E1
einzel_imon=7.76082E-6
window_vset=0.0E0
window_vmon=2.60547E-1
window_imon=-6.59718E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82835E2
mask1_imon=2.39168E-4
mask2_vset=0.0E0
mask2_vmon=-1.87259E1
mask2_imon=-6.63193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.21882E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93681E3
defgrida_imon=6.46138E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50068E3
multb_neg_imon=7.14803E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41441E0
defgridb_imon=5.73934E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33142E1
os_fil1_imon=9.44337E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06895E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66445E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30441E1
cs_fil1_imon=9.98974E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6199E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67736E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25591E-2
os_fil2_imon=-2.83136E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83127E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=9.57359E-2
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37143E-1
cs_fil2_imon=-2.42592E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.27701E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22564E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.12051E-2
chamber_ion_pmon=2.23297E-9
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.05543E-1
res40_imon=-2.56763E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.466E3	2.0E0	1.47E2	4.1E1	-7.08504E-2	-8.80024E1	-4.29153E-4	-8.80021E1	8.34465E-4	3.26633E-3	9.72033E-2	1.57819E1	-1.98434E1	-1.99378E1	1.4998E1	2.23964E-9	2.52384E-3	2.52384E-3	6.28592E-3	2.12232E-2
2.0E0	3.355E3	4.0E0	3.16E2	1.6E2	-7.03869E-2	-8.80024E1	-9.53674E-5	-8.80023E1	6.67572E-4	3.29018E-3	9.68695E-2	1.5832E1	-1.9811E1	-1.99524E1	1.50234E1	2.23332E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.12218E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.03869E-2	-8.80021E1	-7.15256E-5	-8.8002E1	1.00136E-3	2.76566E-3	9.70125E-2	1.58038E1	-1.98293E1	-1.99526E1	1.50352E1	2.23665E-9	2.51581E-3	2.51581E-3	6.31299E-3	2.11454E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.09279E-2	-8.80023E1	-7.15256E-5	-8.8002E1	1.04904E-3	3.12328E-3	9.70602E-2	1.5848E1	-1.9835E1	-1.99222E1	1.50298E1	2.23678E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.12051E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.10825E-2	-8.80022E1	2.38419E-5	-8.80021E1	1.09673E-3	3.05176E-3	9.72986E-2	1.5768E1	-1.98332E1	-1.99185E1	1.5025E1	2.23964E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.12232E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.06958E-2	-8.80021E1	9.53674E-5	-8.80021E1	8.10623E-4	3.19481E-3	9.73701E-2	1.58327E1	-1.98299E1	-1.99508E1	1.5016E1	2.23963E-9	2.52027E-3	2.52027E-3	6.32978E-3	2.12204E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.11597E-2	-8.8002E1	2.38419E-5	-8.8002E1	9.53674E-4	3.57628E-3	9.74178E-2	1.57977E1	-1.9811E1	-1.99163E1	1.50208E1	2.24347E-9	2.51417E-3	2.51417E-3	6.32896E-3	2.11148E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.201E-2	-8.8002E1	2.6226E-4	-8.80022E1	9.05991E-4	3.21865E-3	9.73225E-2	1.58209E1	-1.98446E1	-1.98657E1	1.50268E1	2.23138E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.12034E-2
1.2E1	9.7E1	0.0E0	4.85E2	3.23E2	-7.06958E-2	-8.80022E1	3.33786E-4	-8.80023E1	7.86781E-4	3.40939E-3	9.74417E-2	1.58203E1	-1.97437E1	-1.99537E1	1.50244E1	2.22974E-9	2.51915E-3	2.51915E-3	6.36349E-3	2.12768E-2
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.06958E-2	-8.8002E1	1.90735E-4	-8.80021E1	6.67572E-4	3.50475E-3	9.74417E-2	1.57818E1	-1.9841E1	-1.99181E1	1.50124E1	2.23107E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.12232E-2
1.4E1	1.21E2	0.0E0	5.66E2	3.82E2	-7.17007E-2	-8.80021E1	-2.38419E-5	-8.80021E1	9.05991E-4	3.12328E-3	9.73701E-2	1.58398E1	-1.98293E1	-1.99319E1	1.50202E1	2.21786E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.12218E-2
1.5E1	6.7E1	0.0E0	6.06E2	4.11E2	-7.14689E-2	-8.80021E1	2.38419E-5	-8.80023E1	7.62939E-4	3.31402E-3	9.73225E-2	1.58077E1	-1.98549E1	-1.99498E1	1.50149E1	2.21401E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.12218E-2
1.6E1	3.55E2	0.0E0	6.47E2	4.41E2	-7.13915E-2	-8.80019E1	4.76837E-5	-8.80022E1	9.29832E-4	3.50475E-3	9.72509E-2	1.58286E1	-1.98334E1	-1.99331E1	1.50208E1	2.21495E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.12232E-2
1.7E1	8.55E2	2.0E0	6.87E2	4.7E2	-7.17779E-2	-8.80021E1	2.14577E-4	-8.8002E1	6.4373E-4	3.02792E-3	9.72271E-2	1.58492E1	-1.9847E1	-1.99696E1	1.49968E1	2.21401E-9	2.51225E-3	2.51225E-3	6.31288E-3	2.12218E-2
1.8E1	3.568E3	1.0E0	7.27E2	5.0E2	-7.12368E-2	-8.80024E1	4.76837E-5	-8.8002E1	6.19888E-4	3.05176E-3	9.73701E-2	1.58576E1	-1.982E1	-1.99366E1	1.50172E1	2.21401E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.11298E-2
1.9E1	1.858E3	1.0E0	7.68E2	5.29E2	-7.15461E-2	-8.80023E1	-2.38419E-5	-8.80021E1	8.58307E-4	3.12328E-3	9.71079E-2	1.5866E1	-1.98404E1	-1.99131E1	1.50443E1	2.21401E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.12403E-2
2.0E1	1.3E1	0.0E0	8.08E2	5.58E2	-7.23964E-2	-8.80023E1	-1.43051E-4	-8.80023E1	6.67572E-4	3.17097E-3	9.71317E-2	1.5851E1	-1.98458E1	-1.99216E1	1.50322E1	2.21401E-9	2.51116E-3	2.51116E-3	6.31837E-3	2.11666E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.16233E-2	-8.80024E1	-4.76837E-5	-8.80018E1	1.0252E-3	3.52859E-3	9.72033E-2	1.59206E1	-1.98216E1	-1.98074E1	1.50242E1	2.21401E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.11689E-2
2.2E1	7.0E0	0.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80023E1	-1.43051E-4	-8.8002E1	6.91414E-4	3.33786E-3	9.74178E-2	1.58278E1	-1.98376E1	-1.99158E1	1.50163E1	2.22536E-9	2.5131E-3	2.5131E-3	6.30202E-3	2.13139E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.18554E-2	-8.80023E1	-1.43051E-4	-8.8002E1	6.4373E-4	3.21865E-3	9.74655E-2	1.58386E1	-1.98299E1	-1.99626E1	1.50358E1	2.23297E-9	2.51954E-3	2.51954E-3	6.30202E-3	2.12051E-2
