[Scan]
initial_time=2016-01-18T16:34:55
final_time=2016-01-18T16:35:17
ip_count=19
run=1024
dataset=1
scan=25
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.19325E-2
qbias_imon=-3.79515E-6
ql1_vset=
ql1_vmon=-8.80031E1
ql1_imon=-8.02338E-10
ql2_vset=
ql2_vmon=-1.66893E-4
ql2_imon=1.25481E-9
ql3_vset=
ql3_vmon=-8.8002E1
ql3_imon=-2.4858E-9
ql4_vset=
ql4_vmon=9.29832E-4
ql4_imon=1.36369E-8
mult1=-1.03424E-8
mult2=-2.68069E-9
rf_tmon=-3.97168E-3
rf_agc=3.38082E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.45707E-3
ql5_imon=6.73091E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6385E0
bslens_imon=2.54496E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20073E1
lens5a_imon=1.99172E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12539E2
lens4a_imon=2.04527E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53864E1
cs_ef1b_imon=2.85011E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04649E2
lens23_imon=1.02442E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05367E1
cs_ea1_imon=2.57753E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96565E0
lens1_imon=1.45266E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64817E1
os_ef1alow_imon=2.97383E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.02915E1
cs_ea2_imon=1.48775E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84556E1
cs_ef1a_imon=2.94673E-5
olens2_vset=0.0E0
olens2_vmon=8.58307E-4
olens2_imon=1.08857E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11315E1
os_restr1_imon=4.25446E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15576E1
os_ea1_imon=2.34212E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63543E1
os_ef1bup_imon=3.08886E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21365E0
cs_ionrep_imon=1.16403E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91993E2
cs_nozzle_imon=1.93384E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02116E1
cs_anode1_imon=2.97244E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99972E1
olens4_imon=4.20822E-9
tplens_vset=0.0E0
tplens_vmon=-1.71113E0
tplens_imon=-1.09497E-8
iondef3_vset=-2.0E1
iondef3_vmon=-1.99426E1
iondef3_imon=8.95457E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98116E1
iondef2_imon=9.28622E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03308E2
lens6_imon=2.98267E-4
ql6_vset=1.0E-1
ql6_vmon=9.70364E-2
ql6_imon=9.51123E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28815E0
ionrepsh_imon=1.78011E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33688E1
lens5b_imon=2.15611E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74768E1
cs_ef2b_imon=3.1396E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.21244E0
os_ea2_imon=-7.57175E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06235E2
lens4b_imon=2.00958E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71275E1
cs_ef2a_imon=3.15594E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05398E0
os_ef2alow_imon=-2.63366E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00706E-1
os_ef2bup_imon=-5.2262E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11262E1
os_restr2_imon=3.42005E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.231E2
cs_ionfoca_imon=6.28703E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01931E1
cs_anode2_imon=2.23499E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57825E1
iondef1_imon=5.14053E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50232E1
iondef4_imon=5.39417E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27951E1
olens3_imon=2.56826E-8
olens1_vset=0.0E0
olens1_vmon=1.43051E-3
olens1_imon=1.26797E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15215E0
cs_ionaccel_imon=-1.8274E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02171E2
cs_ionfocb_imon=1.47417E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56567E1
einzel_imon=7.76777E-6
window_vset=0.0E0
window_vmon=2.66339E-1
window_imon=-8.50857E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82832E2
mask1_imon=2.39171E-4
mask2_vset=0.0E0
mask2_vmon=-1.87056E1
mask2_imon=-5.93688E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.36478E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9375E3
defgrida_imon=6.84567E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.15209E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32036E0
defgridb_imon=5.89396E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3316E1
os_fil1_imon=9.41366E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07312E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65921E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30459E1
cs_fil1_imon=9.97422E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62383E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66951E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31876E-2
os_fil2_imon=-2.69815E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90077E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.58317E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36893E-1
cs_fil2_imon=-2.56493E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.09567E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2226E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.12218E-2
chamber_ion_pmon=2.24012E-9
chamber_cvt_pmon=2.52538E-3
foreline_cvt_pmon=2.52538E-3
chamber_tmon=1.40035E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.06498E-1
res40_imon=-2.48075E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=149
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.359E3	0.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80025E1	-9.53674E-5	-8.80018E1	8.58307E-4	3.14713E-3	9.7394E-2	1.58038E1	-1.97939E1	-1.99036E1	1.5034E1	2.23487E-9	2.5131E-3	2.5131E-3	6.33436E-3	2.1187E-2
2.0E0	3.208E3	5.0E0	3.16E2	1.6E2	-7.17007E-2	-8.80025E1	1.19209E-4	-8.80019E1	3.33786E-4	3.19481E-3	9.74417E-2	1.58075E1	-1.98208E1	-1.99408E1	1.50058E1	2.23964E-9	2.51632E-3	2.51632E-3	6.28056E-3	2.12232E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.23189E-2	-8.80023E1	-1.66893E-4	-8.80016E1	6.19888E-4	3.45707E-3	9.73701E-2	1.58154E1	-1.98547E1	-1.99375E1	1.5024E1	2.2327E-9	2.51359E-3	2.51359E-3	6.31858E-3	2.12204E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80023E1	-7.15256E-5	-8.80018E1	8.58307E-4	3.26633E-3	9.72271E-2	1.58388E1	-1.986E1	-1.99574E1	1.5034E1	2.22548E-9	2.52324E-3	2.52324E-3	6.31242E-3	2.12957E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.8002E1	-1.43051E-4	-8.80021E1	8.58307E-4	3.00407E-3	9.72986E-2	1.57807E1	-1.97966E1	-1.99228E1	1.50418E1	2.22904E-9	2.52293E-3	2.52293E-3	6.31879E-3	2.11616E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80023E1	-2.38419E-4	-8.80018E1	6.19888E-4	3.26633E-3	9.74655E-2	1.57987E1	-1.98434E1	-1.99222E1	1.50322E1	2.24109E-9	2.51662E-3	2.51662E-3	6.29098E-3	2.10931E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80021E1	-2.38419E-4	-8.8002E1	7.15256E-4	3.12328E-3	9.72509E-2	1.57963E1	-1.98621E1	-1.99492E1	1.50256E1	2.24207E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.10565E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80021E1	-2.38419E-4	-8.8002E1	8.34465E-4	3.31402E-3	9.75847E-2	1.58047E1	-1.98344E1	-1.99378E1	1.50148E1	2.24012E-9	2.52209E-3	2.52209E-3	6.35692E-3	2.12772E-2
1.2E1	9.1E1	1.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80025E1	-2.6226E-4	-8.80021E1	7.86781E-4	3.14713E-3	9.72271E-2	1.58095E1	-1.98591E1	-1.9936E1	1.50274E1	2.24402E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.12403E-2
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80023E1	-1.66893E-4	-8.80018E1	7.39098E-4	3.38554E-3	9.6941E-2	1.58156E1	-1.98305E1	-1.99154E1	1.50214E1	2.22945E-9	2.5199E-3	2.5199E-3	6.34037E-3	2.12587E-2
1.4E1	1.05E2	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80023E1	0.0E0	-8.80018E1	9.29832E-4	3.21865E-3	9.6941E-2	1.58071E1	-1.98645E1	-1.99264E1	1.50149E1	2.23392E-9	2.51203E-3	2.51203E-3	6.32896E-3	2.12232E-2
1.5E1	7.4E1	1.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80025E1	2.6226E-4	-8.8002E1	1.23978E-3	3.31402E-3	9.71079E-2	1.57902E1	-1.9847E1	-1.99585E1	1.5016E1	2.22654E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.12403E-2
1.6E1	3.18E2	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80024E1	2.86102E-4	-8.80016E1	1.00136E-3	3.29018E-3	9.71556E-2	1.58275E1	-1.98254E1	-1.9939E1	1.49962E1	2.21882E-9	2.51334E-3	2.51334E-3	6.31837E-3	2.12403E-2
1.7E1	8.78E2	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.80026E1	-1.66893E-4	-8.80015E1	1.04904E-3	3.43323E-3	9.6941E-2	1.57995E1	-1.98539E1	-1.99371E1	1.50034E1	2.22268E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.1185E-2
1.8E1	3.587E3	0.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80027E1	-1.43051E-4	-8.80018E1	8.58307E-4	3.71933E-3	9.69887E-2	1.58032E1	-1.98647E1	-1.9952E1	1.5028E1	2.24012E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.1185E-2
1.9E1	1.844E3	2.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80025E1	4.76837E-5	-8.80017E1	1.0252E-3	3.71933E-3	9.72271E-2	1.57945E1	-1.98555E1	-1.99426E1	1.49896E1	2.23235E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.12587E-2
2.0E1	2.3E1	0.0E0	8.08E2	5.58E2	-7.13915E-2	-8.80024E1	-4.29153E-4	-8.80016E1	8.34465E-4	3.50475E-3	9.71317E-2	1.58439E1	-1.98086E1	-1.99349E1	1.50557E1	2.23392E-9	2.51739E-3	2.51739E-3	6.35059E-3	2.10429E-2
2.1E1	0.0E0	1.0E0	8.49E2	5.88E2	-7.16233E-2	-8.80024E1	-2.38419E-5	-8.80018E1	8.34465E-4	3.62396E-3	9.72271E-2	1.57879E1	-1.98145E1	-1.99425E1	1.49703E1	2.23773E-9	2.51686E-3	2.51686E-3	6.3074E-3	2.1196E-2
2.2E1	1.5E1	0.0E0	8.89E2	6.17E2	-7.23189E-2	-8.80031E1	-1.90735E-4	-8.80017E1	8.10623E-4	3.55244E-3	9.68218E-2	1.5747E1	-1.98266E1	-1.98939E1	1.5022E1					
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.19325E-2	-8.80031E1	-1.66893E-4	-8.8002E1	9.29832E-4	3.45707E-3	9.70364E-2	1.57825E1	-1.98116E1	-1.99426E1	1.50232E1	2.24012E-9	2.52538E-3	2.52538E-3	6.30192E-3	2.12218E-2
