[Scan]
initial_time=2016-01-18T16:35:25
final_time=2016-01-18T16:35:48
ip_count=19
run=1024
dataset=1
scan=26
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.8096E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-6.85656E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=1.21822E-9
ql3_vset=
ql3_vmon=-8.80017E1
ql3_imon=-2.45074E-9
ql4_vset=
ql4_vmon=8.58307E-4
ql4_imon=1.36001E-8
mult1=-9.57029E-9
mult2=-2.78989E-9
rf_tmon=-4.91061E-3
rf_agc=3.30437E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.14713E-3
ql5_imon=6.69825E-10
bslens_vset=-6.2E0
bslens_vmon=-6.60245E0
bslens_imon=2.33948E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1964E1
lens5a_imon=2.02453E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12573E2
lens4a_imon=2.04794E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53887E1
cs_ef1b_imon=2.8544E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0466E2
lens23_imon=1.02161E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0476E1
cs_ea1_imon=2.56239E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02213E0
lens1_imon=1.74106E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6453E1
os_ef1alow_imon=2.97045E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03792E1
cs_ea2_imon=1.4654E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8437E1
cs_ef1a_imon=2.95855E-5
olens2_vset=0.0E0
olens2_vmon=1.21593E-3
olens2_imon=1.08775E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1164E1
os_restr1_imon=4.2686E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14831E1
os_ea1_imon=2.32951E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63533E1
os_ef1bup_imon=3.06559E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22146E0
cs_ionrep_imon=1.17917E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92059E2
cs_nozzle_imon=1.93644E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01899E1
cs_anode1_imon=2.95531E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9997E1
olens4_imon=4.25246E-9
tplens_vset=0.0E0
tplens_vmon=-1.71834E0
tplens_imon=-1.08283E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9936E1
iondef3_imon=8.91852E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98369E1
iondef2_imon=9.32227E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03299E2
lens6_imon=2.98313E-4
ql6_vset=1.0E-1
ql6_vmon=9.71556E-2
ql6_imon=9.48083E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24729E0
ionrepsh_imon=1.77038E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33964E1
lens5b_imon=2.17125E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74525E1
cs_ef2b_imon=3.13587E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.2533E0
os_ea2_imon=-7.3915E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06268E2
lens4b_imon=2.00525E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71588E1
cs_ef2a_imon=3.1683E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06237E0
os_ef2alow_imon=-2.69879E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.14242E-1
os_ef2bup_imon=-5.39456E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11238E1
os_restr2_imon=3.4141E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23127E2
cs_ionfoca_imon=6.30325E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01959E1
cs_anode2_imon=2.22875E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58115E1
iondef1_imon=5.31357E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50196E1
iondef4_imon=5.49663E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2795E1
olens3_imon=2.56657E-8
olens1_vset=0.0E0
olens1_vmon=1.52588E-3
olens1_imon=1.26422E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16138E0
cs_ionaccel_imon=-1.82303E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02211E2
cs_ionfocb_imon=1.47266E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56207E1
einzel_imon=7.63378E-6
window_vset=0.0E0
window_vmon=2.65996E-1
window_imon=-6.15698E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82797E2
mask1_imon=2.39041E-4
mask2_vset=0.0E0
mask2_vmon=-1.87401E1
mask2_imon=-7.63461E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.13407E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.61135E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.02231E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35044E0
defgridb_imon=6.07782E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33162E1
os_fil1_imon=9.43579E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08362E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65907E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30467E1
cs_fil1_imon=9.97128E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62059E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67046E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33166E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81496E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.52517E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35737E-1
cs_fil2_imon=-2.28154E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.79714E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22331E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34518E-3
inlet_lpb_pmon=2.12232E-2
chamber_ion_pmon=2.24155E-9
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.46988E-1
res40_imon=-2.46093E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.387E3	1.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80023E1	-5.48363E-4	-8.80019E1	5.96046E-4	3.17097E-3	9.7084E-2	1.58368E1	-1.98328E1	-1.99372E1	1.50292E1	2.23332E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.11666E-2
2.0E0	3.287E3	4.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80024E1	-1.90735E-4	-8.80019E1	9.53674E-4	3.17097E-3	9.71317E-2	1.57963E1	-1.9814E1	-1.99552E1	1.50094E1	2.23583E-9	2.51525E-3	2.51525E-3	6.29665E-3	2.1187E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.20871E-2	-8.80025E1	-1.90735E-4	-8.80019E1	1.09673E-3	3.00407E-3	9.70125E-2	1.57789E1	-1.97966E1	-1.99179E1	1.50244E1	2.24459E-9	2.5225E-3	2.5225E-3	6.30182E-3	2.11829E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.201E-2	-8.80025E1	-3.57628E-4	-8.80019E1	9.53674E-4	3.43323E-3	9.73225E-2	1.58131E1	-1.98332E1	-1.99191E1	1.5014E1	2.22945E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.11298E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80028E1	-1.43051E-4	-8.80021E1	8.58307E-4	3.71933E-3	9.67979E-2	1.58079E1	-1.986E1	-1.99537E1	1.5011E1	2.23869E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.10608E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.15461E-2	-8.80028E1	-1.43051E-4	-8.80019E1	4.05312E-4	3.43323E-3	9.70602E-2	1.58099E1	-1.98496E1	-1.99126E1	1.50471E1	2.23818E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.12218E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80026E1	-3.09944E-4	-8.80021E1	8.34465E-4	3.43323E-3	9.69648E-2	1.57704E1	-1.98218E1	-1.9924E1	1.50124E1	2.24694E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.1185E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.80025E1	-1.43051E-4	-8.8002E1	7.39098E-4	3.31402E-3	9.68218E-2	1.58105E1	-1.98392E1	-1.99157E1	1.50142E1	2.23526E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.11666E-2
1.2E1	8.8E1	0.0E0	4.85E2	3.23E2	-7.19325E-2	-8.80025E1	-6.19888E-4	-8.8002E1	5.72205E-4	3.3617E-3	9.72033E-2	1.58047E1	-1.98573E1	-1.99124E1	1.50225E1	2.21891E-9	2.5225E-3	2.5225E-3	6.3074E-3	2.12204E-2
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80028E1	-3.09944E-4	-8.80019E1	1.16825E-3	2.90871E-3	9.69648E-2	1.58197E1	-1.98266E1	-1.9954E1	1.5031E1	2.21873E-9	2.51203E-3	2.51203E-3	6.31278E-3	2.13139E-2
1.4E1	1.1E2	0.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80026E1	-5.24521E-4	-8.80017E1	1.14441E-3	3.40939E-3	9.67979E-2	1.58564E1	-1.9778E1	-1.99102E1	1.50309E1	2.24889E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.13327E-2
1.5E1	7.2E1	0.0E0	6.06E2	4.11E2	-7.30146E-2	-8.80025E1	-3.33786E-4	-8.80015E1	1.16825E-3	3.05176E-3	9.70364E-2	1.58174E1	-1.98499E1	-1.99378E1	1.50306E1	2.23138E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.12403E-2
1.6E1	3.5E2	0.0E0	6.47E2	4.41E2	-7.26282E-2	-8.80024E1	-1.19209E-4	-8.80016E1	8.58307E-4	2.90871E-3	9.70125E-2	1.58263E1	-1.98537E1	-1.99179E1	1.50124E1	2.24012E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.12587E-2
1.7E1	8.01E2	0.0E0	6.87E2	4.7E2	-7.27828E-2	-8.80026E1	-2.14577E-4	-8.80017E1	8.34465E-4	2.88486E-3	9.67741E-2	1.57422E1	-1.98242E1	-1.99498E1	1.50016E1	2.24012E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.11666E-2
1.8E1	3.572E3	0.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80025E1	-1.90735E-4	-8.80017E1	7.39098E-4	3.02792E-3	9.68218E-2	1.58047E1	-1.98344E1	-1.99312E1	1.50238E1	2.23583E-9	2.51739E-3	2.51739E-3	6.29665E-3	2.1187E-2
1.9E1	1.85E3	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80024E1	0.0E0	-8.80018E1	6.67572E-4	2.90871E-3	9.69172E-2	1.58191E1	-1.98645E1	-1.99312E1	1.50178E1	2.23863E-9	2.52362E-3	2.52362E-3	6.36349E-3	2.11641E-2
2.0E1	2.3E1	0.0E0	8.08E2	5.58E2	-7.201E-2	-8.80024E1	2.38419E-5	-8.80018E1	1.00136E-3	3.02792E-3	9.69887E-2	1.57531E1	-1.98387E1	-1.99579E1	1.50039E1	2.24442E-9	2.5131E-3	2.5131E-3	6.33977E-3	2.12413E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80023E1	1.90735E-4	-8.8002E1	1.09673E-3	3.38554E-3	9.72748E-2	1.58221E1	-1.98293E1	-1.99478E1	1.50262E1	2.23869E-9	2.52707E-3	2.52707E-3	6.31817E-3	2.12051E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80023E1	-3.33786E-4	-8.80018E1	7.15256E-4	3.31402E-3	9.70364E-2	1.58327E1	-1.98393E1	-1.99201E1	1.50449E1	2.23583E-9	2.51525E-3	2.51525E-3	6.33977E-3	2.12051E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80024E1	-3.8147E-4	-8.80017E1	8.58307E-4	3.14713E-3	9.71556E-2	1.58115E1	-1.98369E1	-1.9936E1	1.50196E1	2.24155E-9	2.5131E-3	2.5131E-3	6.34518E-3	2.12232E-2
