[Scan]
initial_time=2016-01-18T16:37:28
final_time=2016-01-18T16:37:51
ip_count=19
run=1024
dataset=1
scan=30
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.75444E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-7.50875E-10
ql2_vset=
ql2_vmon=-2.14577E-4
ql2_imon=1.24005E-9
ql3_vset=
ql3_vmon=-8.80017E1
ql3_imon=-2.42751E-9
ql4_vset=
ql4_vmon=9.05991E-4
ql4_imon=1.37638E-8
mult1=-9.71631E-9
mult2=-2.70863E-9
rf_tmon=-4.39226E-3
rf_agc=3.28529E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.45707E-3
ql5_imon=6.79553E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65501E0
bslens_imon=2.38398E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19789E1
lens5a_imon=2.02049E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12577E2
lens4a_imon=2.05075E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5389E1
cs_ef1b_imon=2.84019E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04673E2
lens23_imon=1.02075E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04434E1
cs_ea1_imon=2.56273E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96222E0
lens1_imon=1.5593E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64806E1
os_ef1alow_imon=2.98102E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03873E1
cs_ea2_imon=1.47613E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8471E1
cs_ef1a_imon=2.95412E-5
olens2_vset=0.0E0
olens2_vmon=1.12057E-3
olens2_imon=1.06951E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11471E1
os_restr1_imon=4.27821E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15117E1
os_ea1_imon=2.35992E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64163E1
os_ef1bup_imon=3.08646E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21375E0
cs_ionrep_imon=1.19298E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92093E2
cs_nozzle_imon=1.93491E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=2.94599E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99966E1
olens4_imon=4.17004E-9
tplens_vset=0.0E0
tplens_vmon=-1.74349E0
tplens_imon=-1.46693E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99414E1
iondef3_imon=8.7443E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98368E1
iondef2_imon=9.27521E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03267E2
lens6_imon=2.98197E-4
ql6_vset=1.0E-1
ql6_vmon=9.68456E-2
ql6_imon=9.19044E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22378E0
ionrepsh_imon=1.75256E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33846E1
lens5b_imon=2.1826E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74631E1
cs_ef2b_imon=3.13069E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.25505E0
os_ea2_imon=-6.70525E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06198E2
lens4b_imon=2.00573E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71558E1
cs_ef2a_imon=3.16218E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02537E0
os_ef2alow_imon=-2.53117E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04108E-1
os_ef2bup_imon=-5.29116E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11289E1
os_restr2_imon=3.40209E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23089E2
cs_ionfoca_imon=6.28229E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.23865E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58299E1
iondef1_imon=5.26152E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50094E1
iondef4_imon=5.41616E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27954E1
olens3_imon=2.55444E-8
olens1_vset=0.0E0
olens1_vmon=1.40667E-3
olens1_imon=1.24896E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14371E0
cs_ionaccel_imon=-1.71379E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02153E2
cs_ionfocb_imon=1.47304E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.64184E-6
window_vset=0.0E0
window_vmon=2.86222E-1
window_imon=-8.92876E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82828E2
mask1_imon=2.39105E-4
mask2_vset=0.0E0
mask2_vmon=-1.87223E1
mask2_imon=-6.13339E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92666E3
multa_neg_imon=7.58338E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.27379E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=6.8401E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.20476E0
defgridb_imon=6.04019E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33224E1
os_fil1_imon=9.41748E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06787E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65006E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30563E1
cs_fil1_imon=9.96924E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61611E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65754E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52184E-2
os_fil2_imon=-2.61453E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.8439E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.0394E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37088E-1
cs_fil2_imon=-2.4553E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28365E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22186E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.12413E-2
chamber_ion_pmon=2.23392E-9
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.39492E-1
res40_imon=-2.61256E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.457E3	0.0E0	1.47E2	4.1E1	-7.22418E-2	-8.80025E1	-2.86102E-4	-8.80019E1	8.82149E-4	3.6478E-3	9.73225E-2	1.57945E1	-1.98242E1	-1.9924E1	1.50022E1	2.24347E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.13139E-2
2.0E0	3.271E3	3.0E0	3.16E2	1.6E2	-7.24736E-2	-8.80023E1	-5.96046E-4	-8.8002E1	1.14441E-3	3.48091E-3	9.72509E-2	1.58179E1	-1.9796E1	-1.99276E1	1.50118E1	2.23915E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.11298E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80024E1	-4.76837E-4	-8.80019E1	9.53674E-4	3.55244E-3	9.70364E-2	1.58053E1	-1.98302E1	-1.99414E1	1.50028E1	2.23429E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.13698E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23189E-2	-8.80025E1	-1.19209E-4	-8.80019E1	9.53674E-4	3.52859E-3	9.71317E-2	1.58073E1	-1.98346E1	-1.9926E1	1.503E1	2.23526E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.12587E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80023E1	-4.29153E-4	-8.80019E1	7.39098E-4	3.43323E-3	9.73463E-2	1.58345E1	-1.98128E1	-1.99313E1	1.50124E1	2.2406E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.12775E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.201E-2	-8.80023E1	-3.33786E-4	-8.80018E1	7.39098E-4	3.57628E-3	9.73225E-2	1.58083E1	-1.98164E1	-1.99173E1	1.49836E1	2.23869E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.12051E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17779E-2	-8.80025E1	-4.52995E-4	-8.80022E1	6.91414E-4	3.62396E-3	9.7394E-2	1.58268E1	-1.98198E1	-1.9916E1	1.49986E1	2.23429E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.11482E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.13143E-2	-8.80023E1	-1.66893E-4	-8.80021E1	1.0252E-3	3.45707E-3	9.72986E-2	1.57999E1	-1.98188E1	-1.99342E1	1.50138E1	2.24155E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.1187E-2
1.2E1	8.4E1	0.0E0	4.85E2	3.23E2	-7.14689E-2	-8.80026E1	-4.76837E-4	-8.80015E1	8.58307E-4	3.71933E-3	9.72033E-2	1.58149E1	-1.9838E1	-1.99414E1	1.49998E1	2.23915E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.1185E-2
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.80026E1	-3.57628E-4	-8.80018E1	8.34465E-4	3.26633E-3	9.71079E-2	1.58297E1	-1.98281E1	-1.99384E1	1.50376E1	2.24012E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.12587E-2
1.4E1	9.7E1	0.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80024E1	-7.15256E-5	-8.80018E1	8.58307E-4	3.62396E-3	9.71556E-2	1.57753E1	-1.98422E1	-1.99342E1	1.50154E1	2.23297E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.12957E-2
1.5E1	6.1E1	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80026E1	7.15256E-5	-8.80018E1	7.62939E-4	3.50475E-3	9.69648E-2	1.58179E1	-1.98458E1	-1.9924E1	1.50328E1	2.23526E-9	2.51334E-3	2.51334E-3	6.31837E-3	2.12034E-2
1.6E1	3.43E2	0.0E0	6.47E2	4.41E2	-7.26282E-2	-8.80025E1	-2.14577E-4	-8.80018E1	8.34465E-4	3.50475E-3	9.74417E-2	1.58342E1	-1.98347E1	-1.9917E1	1.50381E1	2.24109E-9	2.51552E-3	2.51552E-3	6.35692E-3	2.12957E-2
1.7E1	7.93E2	0.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80024E1	-2.6226E-4	-8.80016E1	7.86781E-4	3.45707E-3	9.72271E-2	1.57744E1	-1.98395E1	-1.99016E1	1.50083E1	2.2345E-9	2.51498E-3	2.51498E-3	6.32328E-3	2.12067E-2
1.8E1	3.541E3	1.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80024E1	2.38419E-5	-8.80014E1	1.07288E-3	3.50475E-3	9.7084E-2	1.58359E1	-1.985E1	-1.99317E1	1.50113E1	2.2369E-9	2.5199E-3	2.5199E-3	6.30221E-3	2.11908E-2
1.9E1	1.851E3	1.0E0	7.68E2	5.29E2	-7.36328E-2	-8.80024E1	-2.6226E-4	-8.80017E1	7.86781E-4	3.55244E-3	9.6941E-2	1.57662E1	-1.98422E1	-1.99185E1	1.50148E1	2.23961E-9	2.51758E-3	2.51758E-3	6.3074E-3	2.11785E-2
2.0E1	2.2E1	0.0E0	8.08E2	5.58E2	-7.23189E-2	-8.80027E1	-3.8147E-4	-8.80017E1	7.86781E-4	3.45707E-3	9.71317E-2	1.58405E1	-1.98275E1	-1.98771E1	1.50196E1	2.24109E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.11666E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80026E1	-3.09944E-4	-8.80017E1	7.62939E-4	3.29018E-3	9.72509E-2	1.58238E1	-1.98546E1	-1.99396E1	1.50154E1	2.24062E-9	2.5225E-3	2.5225E-3	6.31299E-3	2.11829E-2
2.2E1	1.5E1	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80026E1	-2.86102E-4	-8.80016E1	8.58307E-4	3.52859E-3	9.71317E-2	1.58292E1	-1.98204E1	-1.9926E1	1.5028E1	2.23487E-9	2.51847E-3	2.51847E-3	6.29128E-3	2.12051E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80027E1	-2.14577E-4	-8.80017E1	9.05991E-4	3.45707E-3	9.68456E-2	1.58299E1	-1.98368E1	-1.99414E1	1.50094E1	2.23392E-9	2.51954E-3	2.51954E-3	6.33436E-3	2.12413E-2
