[Scan]
initial_time=2016-01-18T16:41:18
final_time=2016-01-18T16:41:38
ip_count=19
run=1024
dataset=1
scan=38
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.79635E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-7.04813E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.27105E-9
ql3_vset=
ql3_vmon=-8.80018E1
ql3_imon=-2.37511E-9
ql4_vset=
ql4_vmon=7.62939E-4
ql4_imon=1.39307E-8
mult1=-1.09565E-8
mult2=-2.71063E-9
rf_tmon=-4.82485E-3
rf_agc=3.27388E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.14848E-3
ql5_imon=6.62315E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65137E0
bslens_imon=2.45858E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19658E1
lens5a_imon=1.99015E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12571E2
lens4a_imon=2.04913E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53832E1
cs_ef1b_imon=2.81331E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04652E2
lens23_imon=1.02165E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04511E1
cs_ea1_imon=2.6017E-5
lens1_vset=-2.7E0
lens1_vmon=-2.9484E0
lens1_imon=1.62114E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64716E1
os_ef1alow_imon=2.97621E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04186E1
cs_ea2_imon=1.45757E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84682E1
cs_ef1a_imon=2.93549E-5
olens2_vset=0.0E0
olens2_vmon=1.12057E-3
olens2_imon=1.04499E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11604E1
os_restr1_imon=4.26787E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14963E1
os_ea1_imon=2.37288E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63455E1
os_ef1bup_imon=3.08073E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21292E0
cs_ionrep_imon=1.18614E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9203E2
cs_nozzle_imon=1.93449E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=2.92323E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99969E1
olens4_imon=4.25841E-9
tplens_vset=0.0E0
tplens_vmon=-1.68E0
tplens_imon=-3.54917E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99402E1
iondef3_imon=8.78711E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98002E1
iondef2_imon=9.14339E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0327E2
lens6_imon=2.98225E-4
ql6_vset=1.0E-1
ql6_vmon=9.69172E-2
ql6_imon=9.19557E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26434E0
ionrepsh_imon=1.73157E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33976E1
lens5b_imon=2.17637E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74507E1
cs_ef2b_imon=3.12326E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.20374E0
os_ea2_imon=-6.12025E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06156E2
lens4b_imon=2.00432E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71222E1
cs_ef2a_imon=3.16434E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03774E0
os_ef2alow_imon=-2.68798E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.90817E-1
os_ef2bup_imon=-5.1603E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11316E1
os_restr2_imon=3.39031E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.29451E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.23956E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57843E1
iondef1_imon=5.21698E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50265E1
iondef4_imon=5.40653E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2795E1
olens3_imon=2.54121E-8
olens1_vset=0.0E0
olens1_vmon=1.78814E-3
olens1_imon=1.2211E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16017E0
cs_ionaccel_imon=-1.75455E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02165E2
cs_ionfocb_imon=1.47572E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56705E1
einzel_imon=7.53647E-6
window_vset=0.0E0
window_vmon=3.02636E-1
window_imon=-8.82392E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82806E2
mask1_imon=2.39156E-4
mask2_vset=0.0E0
mask2_vmon=-1.87071E1
mask2_imon=-6.33718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92609E3
multa_neg_imon=7.04245E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9368E3
defgrida_imon=6.45844E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.01306E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.20743E0
defgridb_imon=6.22705E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33279E1
os_fil1_imon=9.42504E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06909E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63533E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3067E1
cs_fil1_imon=9.95855E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62474E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64485E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.7782E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87503E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.11644E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38715E-1
cs_fil2_imon=-2.22749E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02209E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22057E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.11666E-2
chamber_ion_pmon=2.24012E-9
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.13642E-1
res40_imon=-2.55103E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.381E3	1.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80025E1	-4.05312E-4	-8.80013E1	9.53674E-4	3.50475E-3	9.69172E-2	1.58311E1	-1.98328E1	-1.99459E1	1.50178E1	2.23332E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.10931E-2
2.0E0	2.974E3	4.0E0	3.16E2	1.6E2	-7.22418E-2	-8.80028E1	-5.72205E-4	-8.80018E1	9.29832E-4	3.6478E-3	9.69648E-2	1.58116E1	-1.98577E1	-1.99537E1	1.50246E1	2.23728E-9	2.52096E-3	2.52096E-3	6.3034E-3	2.12148E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80026E1	-5.24521E-4	-8.80016E1	7.86781E-4	3.60012E-3	9.67979E-2	1.5825E1	-1.98175E1	-1.99384E1	1.50202E1	2.23575E-9	2.51744E-3	2.51744E-3	6.35071E-3	2.12333E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23189E-2	-8.80027E1	-3.8147E-4	-8.80016E1	7.62939E-4	3.43323E-3	9.71079E-2	1.58433E1	-1.9831E1	-1.99325E1	1.50132E1	2.23678E-9	2.52707E-3	2.52707E-3	6.30202E-3	2.12232E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80027E1	-2.14577E-4	-8.80016E1	9.29832E-4	3.8147E-3	9.68456E-2	1.58239E1	-1.98344E1	-1.99294E1	1.50154E1	2.23202E-9	2.50989E-3	2.50989E-3	6.3074E-3	2.11689E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80027E1	-4.05312E-4	-8.80016E1	8.58307E-4	3.69549E-3	9.70364E-2	1.58251E1	-1.98254E1	-1.99276E1	1.50148E1	2.23235E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.11666E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.10825E-2	-8.80026E1	-4.76837E-4	-8.80014E1	9.05991E-4	3.74317E-3	9.70602E-2	1.58012E1	-1.98495E1	-1.99458E1	1.50304E1	2.2372E-9	2.52318E-3	2.52318E-3	6.34037E-3	2.12772E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.15461E-2	-8.80028E1	-2.86102E-4	-8.80014E1	8.58307E-4	4.07696E-3	9.71794E-2	1.57708E1	-1.98653E1	-1.99355E1	1.50226E1	2.23637E-9	2.51896E-3	2.51896E-3	6.3121E-3	2.11377E-2
1.2E1	9.7E1	0.0E0	4.85E2	3.23E2	-7.17007E-2	-8.80028E1	-1.90735E-4	-8.80012E1	9.77516E-4	3.62396E-3	9.6941E-2	1.58009E1	-1.9821E1	-1.99394E1	1.50348E1	2.24155E-9	2.51739E-3	2.51739E-3	6.28592E-3	2.13139E-2
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.15461E-2	-8.80028E1	-4.05312E-4	-8.80014E1	7.39098E-4	3.74317E-3	9.69648E-2	1.58026E1	-1.98759E1	-1.99414E1	1.5028E1	2.23829E-9	2.51807E-3	2.51807E-3	6.32808E-3	2.1203E-2
1.4E1	9.2E1	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80028E1	-1.66893E-4	-8.80013E1	8.58307E-4	3.76701E-3	9.67741E-2	1.57939E1	-1.98278E1	-1.99378E1	1.50142E1	2.2372E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.12403E-2
1.5E1	6.0E1	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80025E1	-3.33786E-4	-8.80012E1	6.19888E-4	3.52859E-3	9.7084E-2	1.57975E1	-1.98476E1	-1.99095E1	1.50375E1	2.23332E-9	2.52428E-3	2.52428E-3	6.29645E-3	2.11666E-2
1.6E1	3.25E2	0.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80023E1	-3.8147E-4	-8.80016E1	5.24521E-4	3.8147E-3	9.71317E-2	1.58281E1	-1.98561E1	-1.99426E1	1.5016E1	2.23583E-9	2.51632E-3	2.51632E-3	6.33436E-3	2.1187E-2
1.7E1	8.34E2	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80025E1	-5.48363E-4	-8.80016E1	7.15256E-4	3.8147E-3	9.70602E-2	1.58155E1	-1.9841E1	-1.99402E1	1.50181E1	2.23963E-9	2.51581E-3	2.51581E-3	6.32418E-3	2.12957E-2
1.8E1	3.361E3	1.0E0	7.27E2	5.0E2	-7.13143E-2	-8.80025E1	-5.72205E-4	-8.80018E1	1.07288E-3	3.69549E-3	9.6941E-2	1.58251E1	-1.98248E1	-1.99101E1	1.50102E1	2.24538E-9	2.51632E-3	2.51632E-3	6.33977E-3	2.12051E-2
1.9E1	1.814E3	0.0E0	7.68E2	5.29E2	-7.15461E-2	-8.80025E1	-6.4373E-4	-8.80017E1	5.00679E-4	3.88622E-3	9.66787E-2	1.57915E1	-1.98537E1	-1.99708E1	1.50248E1	2.23764E-9	2.51359E-3	2.51359E-3	6.31858E-3	2.11829E-2
2.0E1	1.3E1	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80024E1	-6.67572E-4	-8.80017E1	8.34465E-4	3.83854E-3	9.6941E-2	1.57987E1	-1.98549E1	-1.99125E1	1.5016E1	2.22916E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.13139E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80025E1	-2.6226E-4	-8.80017E1	1.3113E-3	3.91006E-3	9.68456E-2	1.57879E1	-1.98434E1	-1.99077E1	1.50479E1	2.22945E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.11666E-2
2.2E1	1.3E1	0.0E0	8.89E2	6.17E2	-7.16233E-2	-8.80027E1	-4.76837E-4	-8.80016E1	6.91414E-4	3.76701E-3	9.70602E-2	1.57849E1	-1.98257E1	-1.9929E1	1.50503E1	2.22252E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.12957E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80027E1	-6.19888E-4	-8.80018E1	7.62939E-4	4.14848E-3	9.69172E-2	1.57843E1	-1.98002E1	-1.99402E1	1.50265E1	2.24012E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.11666E-2
