[Scan]
initial_time=2016-01-18T16:41:46
final_time=2016-01-18T16:42:06
ip_count=19
run=1024
dataset=1
scan=39
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.11597E-2
qbias_imon=-3.8305E-6
ql1_vset=
ql1_vmon=-8.80029E1
ql1_imon=-7.22575E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=1.30655E-9
ql3_vset=
ql3_vmon=-8.80016E1
ql3_imon=-2.45628E-9
ql4_vset=
ql4_vmon=6.91414E-4
ql4_imon=1.39724E-8
mult1=-9.79188E-9
mult2=-2.67138E-9
rf_tmon=-5.08193E-3
rf_agc=3.34719E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.43323E-3
ql5_imon=7.00283E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66851E0
bslens_imon=2.45491E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19652E1
lens5a_imon=1.98868E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12567E2
lens4a_imon=2.04927E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53778E1
cs_ef1b_imon=2.80539E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04656E2
lens23_imon=1.0207E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04155E1
cs_ea1_imon=2.57599E-5
lens1_vset=-2.7E0
lens1_vmon=-2.95513E0
lens1_imon=1.67256E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64993E1
os_ef1alow_imon=2.97189E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04566E1
cs_ea2_imon=1.51046E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84731E1
cs_ef1a_imon=2.9463E-5
olens2_vset=0.0E0
olens2_vmon=9.53674E-4
olens2_imon=1.04299E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11472E1
os_restr1_imon=4.27688E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15018E1
os_ea1_imon=2.37214E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64452E1
os_ef1bup_imon=3.08613E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23741E0
cs_ionrep_imon=1.1641E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92067E2
cs_nozzle_imon=1.93596E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=2.92612E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9997E1
olens4_imon=4.21715E-9
tplens_vset=0.0E0
tplens_vmon=-1.68979E0
tplens_imon=-3.47571E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9916E1
iondef3_imon=8.82751E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.9798E1
iondef2_imon=9.32336E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03278E2
lens6_imon=2.98353E-4
ql6_vset=1.0E-1
ql6_vmon=9.69172E-2
ql6_imon=8.87013E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23067E0
ionrepsh_imon=1.71468E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33792E1
lens5b_imon=2.19033E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.13082E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.24598E0
os_ea2_imon=-4.83471E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06244E2
lens4b_imon=2.00465E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71456E1
cs_ef2a_imon=3.16398E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05396E0
os_ef2alow_imon=-2.54382E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.72797E-1
os_ef2bup_imon=-5.13868E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11406E1
os_restr2_imon=3.39139E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.27063E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01857E1
cs_anode2_imon=2.24281E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58107E1
iondef1_imon=5.30146E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49995E1
iondef4_imon=5.37049E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2795E1
olens3_imon=2.54241E-8
olens1_vset=0.0E0
olens1_vmon=1.57356E-3
olens1_imon=1.21475E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16438E0
cs_ionaccel_imon=-1.77257E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02132E2
cs_ionfocb_imon=1.47493E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56483E1
einzel_imon=7.67342E-6
window_vset=0.0E0
window_vmon=2.82815E-1
window_imon=-7.23817E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82812E2
mask1_imon=2.39102E-4
mask2_vset=0.0E0
mask2_vmon=-1.87275E1
mask2_imon=-5.36411E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.33629E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.25276E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50084E3
multb_neg_imon=7.55666E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49242E0
defgridb_imon=5.93688E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33267E1
os_fil1_imon=9.40348E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06849E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63327E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30692E1
cs_fil1_imon=9.97405E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6242E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.645E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.90961E-2
os_fil2_imon=-2.62392E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.13877E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37161E-1
cs_fil2_imon=-2.34161E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.43054E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22015E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3282E-3
inlet_lpb_pmon=2.11385E-2
chamber_ion_pmon=2.23782E-9
chamber_cvt_pmon=2.51575E-3
foreline_cvt_pmon=2.51575E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.07946E-1
res40_imon=-2.41408E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.341E3	2.0E0	1.47E2	4.1E1	-7.201E-2	-8.80024E1	-3.33786E-4	-8.80019E1	7.62939E-4	3.60012E-3	9.68456E-2	1.58168E1	-1.98139E1	-1.99514E1	1.50184E1	2.21401E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.12587E-2
2.0E0	3.133E3	3.0E0	3.16E2	1.6E2	-7.22418E-2	-8.80027E1	-2.38419E-4	-8.80019E1	6.4373E-4	3.69549E-3	9.70125E-2	1.57665E1	-1.98459E1	-1.99451E1	1.50455E1	2.21873E-9	2.51954E-3	2.51954E-3	6.30202E-3	2.12594E-2
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80026E1	-7.39098E-4	-8.80016E1	7.86781E-4	3.83854E-3	9.69172E-2	1.5848E1	-1.98712E1	-1.99331E1	1.50202E1	2.22481E-9	2.51804E-3	2.51804E-3	6.30182E-3	2.11829E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80026E1	-7.15256E-4	-8.8002E1	9.05991E-4	3.86238E-3	9.69887E-2	1.58074E1	-1.98294E1	-1.99413E1	1.5038E1	2.23773E-9	2.51203E-3	2.51203E-3	6.31817E-3	2.12413E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.80025E1	-7.39098E-4	-8.80018E1	7.86781E-4	3.86238E-3	9.71556E-2	1.57955E1	-1.98168E1	-1.99535E1	1.5001E1	2.23198E-9	2.51549E-3	2.51549E-3	6.32784E-3	2.11754E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80028E1	-7.86781E-4	-8.80018E1	7.62939E-4	3.55244E-3	9.6941E-2	1.58327E1	-1.98369E1	-1.99237E1	1.50292E1	2.23755E-9	2.51874E-3	2.51874E-3	6.33648E-3	2.11201E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.05415E-2	-8.80028E1	-4.29153E-4	-8.80017E1	7.15256E-4	3.3617E-3	9.69172E-2	1.58077E1	-1.98068E1	-1.99372E1	1.50431E1	2.23583E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.11689E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.06958E-2	-8.80032E1	-3.09944E-4	-8.80018E1	6.19888E-4	3.21865E-3	9.71079E-2	1.57843E1	-1.98398E1	-1.99336E1	1.50214E1	2.23915E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.11115E-2
1.2E1	9.5E1	0.0E0	4.85E2	3.23E2	-7.15461E-2	-8.80029E1	-3.57628E-4	-8.80015E1	6.91414E-4	3.95775E-3	9.67979E-2	1.57975E1	-1.98278E1	-1.99204E1	1.5019E1	2.23526E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.12957E-2
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.80028E1	-2.38419E-4	-8.80019E1	1.0252E-3	3.57628E-3	9.70125E-2	1.58209E1	-1.98788E1	-1.99231E1	1.50016E1	2.24109E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.12218E-2
1.4E1	1.2E2	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.8003E1	-6.19888E-4	-8.80016E1	8.82149E-4	3.50475E-3	9.6941E-2	1.57921E1	-1.98182E1	-1.99306E1	1.50278E1	2.23869E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.11689E-2
1.5E1	6.5E1	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.80027E1	-2.6226E-4	-8.80015E1	7.62939E-4	3.45707E-3	9.68933E-2	1.58029E1	-1.98272E1	-1.99089E1	1.50184E1	2.2372E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.12587E-2
1.6E1	3.22E2	0.0E0	6.47E2	4.41E2	-7.15461E-2	-8.80028E1	-5.72205E-4	-8.80018E1	8.58307E-4	3.40939E-3	9.72271E-2	1.5825E1	-1.98588E1	-1.99242E1	1.50226E1	2.24304E-9	2.51662E-3	2.51662E-3	6.29645E-3	2.12403E-2
1.7E1	8.16E2	3.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80027E1	-3.8147E-4	-8.80018E1	8.58307E-4	3.52859E-3	9.6941E-2	1.58305E1	-1.98627E1	-1.9924E1	1.5031E1	2.23915E-9	2.52099E-3	2.52099E-3	6.34037E-3	2.12403E-2
1.8E1	3.319E3	2.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80026E1	-2.38419E-4	-8.80015E1	7.39098E-4	3.62396E-3	9.70602E-2	1.57943E1	-1.98216E1	-1.99337E1	1.50358E1	2.23583E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.12594E-2
1.9E1	1.821E3	1.0E0	7.68E2	5.29E2	-7.22418E-2	-8.80031E1	-2.6226E-4	-8.80015E1	6.91414E-4	3.38554E-3	9.70602E-2	1.58203E1	-1.9811E1	-1.99438E1	1.50503E1	2.23869E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.12051E-2
2.0E1	2.1E1	0.0E0	8.08E2	5.58E2	-7.23964E-2	-8.80028E1	-2.38419E-5	-8.80015E1	8.34465E-4	3.33786E-3	9.71556E-2	1.58309E1	-1.98438E1	-1.99552E1	1.50222E1	2.23863E-9	2.52027E-3	2.52027E-3	6.32978E-3	2.11641E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.14689E-2	-8.80029E1	-4.76837E-5	-8.80014E1	7.39098E-4	3.52859E-3	9.70125E-2	1.58179E1	-1.98099E1	-1.99438E1	1.5057E1	2.2298E-9	2.52169E-3	2.52169E-3	6.29844E-3	2.119E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.10051E-2	-8.80026E1	-2.86102E-4	-8.80014E1	3.09944E-4	3.14713E-3	9.6941E-2	1.58168E1	-1.98486E1	-1.99158E1	1.50416E1	2.24123E-9	2.52351E-3	2.52351E-3	6.3074E-3	2.11694E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.11597E-2	-8.80029E1	-3.8147E-4	-8.80016E1	6.91414E-4	3.43323E-3	9.69172E-2	1.58107E1	-1.9798E1	-1.9916E1	1.49995E1	2.23782E-9	2.51575E-3	2.51575E-3	6.3282E-3	2.11385E-2
