[Scan]
initial_time=2016-01-18T16:43:09
final_time=2016-01-18T16:43:29
ip_count=19
run=1024
dataset=1
scan=42
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.77508E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-7.21395E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=1.23209E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-2.44361E-9
ql4_vset=
ql4_vmon=5.72205E-4
ql4_imon=1.3989E-8
mult1=-9.53661E-9
mult2=-2.67922E-9
rf_tmon=-3.51154E-3
rf_agc=3.42099E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.6478E-3
ql5_imon=6.88064E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64511E0
bslens_imon=2.30704E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20031E1
lens5a_imon=2.01588E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1257E2
lens4a_imon=2.04862E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53784E1
cs_ef1b_imon=2.77836E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02208E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04243E1
cs_ea1_imon=2.61826E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04436E0
lens1_imon=1.84921E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64963E1
os_ef1alow_imon=2.97045E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0351E1
cs_ea2_imon=1.46288E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83902E1
cs_ef1a_imon=2.94918E-5
olens2_vset=0.0E0
olens2_vmon=8.34465E-4
olens2_imon=1.03565E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11676E1
os_restr1_imon=4.28121E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15149E1
os_ea1_imon=2.36484E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6447E1
os_ef1bup_imon=3.09947E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23828E0
cs_ionrep_imon=1.1734E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92037E2
cs_nozzle_imon=1.9342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01791E1
cs_anode1_imon=2.90341E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.19145E-9
tplens_vset=0.0E0
tplens_vmon=-1.70993E0
tplens_imon=-1.62358E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99273E1
iondef3_imon=8.88968E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98171E1
iondef2_imon=9.23215E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03247E2
lens6_imon=2.98097E-4
ql6_vset=1.0E-1
ql6_vmon=9.70602E-2
ql6_imon=9.05073E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24849E0
ionrepsh_imon=1.75019E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33832E1
lens5b_imon=2.20153E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74405E1
cs_ef2b_imon=3.1128E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.22927E0
os_ea2_imon=-6.45421E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06218E2
lens4b_imon=2.00691E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.14272E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.01852E0
os_ef2alow_imon=-2.35641E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98625E-1
os_ef2bup_imon=-5.16751E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11592E1
os_restr2_imon=3.37986E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23109E2
cs_ionfoca_imon=6.2845E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01947E1
cs_anode2_imon=2.22443E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58491E1
iondef1_imon=5.20902E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50292E1
iondef4_imon=5.49302E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27949E1
olens3_imon=2.5301E-8
olens1_vset=0.0E0
olens1_vmon=1.4782E-3
olens1_imon=1.20541E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13375E0
cs_ionaccel_imon=-1.69328E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02141E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56357E1
einzel_imon=7.64459E-6
window_vset=0.0E0
window_vmon=3.23059E-1
window_imon=-7.92292E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82835E2
mask1_imon=2.39261E-4
mask2_vset=0.0E0
mask2_vmon=-1.87161E1
mask2_imon=-3.88648E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92523E3
multa_neg_imon=9.04109E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93876E3
defgrida_imon=5.67406E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.49882E3
multb_neg_imon=1.01622E-4
defgridb_vset=0.0E0
defgridb_vmon=-1.73841E0
defgridb_imon=5.79663E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33286E1
os_fil1_imon=9.41477E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06999E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62467E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30701E1
cs_fil1_imon=9.95843E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61759E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63505E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.96363E-2
os_fil2_imon=-2.67798E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92308E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.67389E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.40168E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01608E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21906E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33388E-3
inlet_lpb_pmon=2.11889E-2
chamber_ion_pmon=2.23731E-9
chamber_cvt_pmon=2.51814E-3
foreline_cvt_pmon=2.51814E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.12751E-1
res40_imon=-2.68077E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=216
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.367E3	0.0E0	1.47E2	4.1E1	-7.201E-2	-8.80028E1	-1.66893E-4	-8.80014E1	5.96046E-4	3.6478E-3	9.67979E-2	1.58643E1	-1.98701E1	-1.99031E1	1.50464E1	2.23915E-9	2.52428E-3	2.52428E-3	6.30192E-3	2.11666E-2
2.0E0	2.933E3	7.0E0	3.16E2	1.6E2	-7.19325E-2	-8.80031E1	-3.57628E-4	-8.80015E1	5.96046E-4	3.48091E-3	9.68456E-2	1.58309E1	-1.98391E1	-1.99396E1	1.49857E1	2.23825E-9	2.51498E-3	2.51498E-3	6.32328E-3	2.11357E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.13915E-2	-8.8003E1	-5.72205E-4	-8.80016E1	3.33786E-4	3.60012E-3	9.68695E-2	1.57932E1	-1.98228E1	-1.99826E1	1.5034E1	2.23105E-9	2.52407E-3	2.52407E-3	6.30171E-3	2.12381E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.13915E-2	-8.80029E1	-3.57628E-4	-8.80017E1	4.76837E-4	3.6478E-3	9.68456E-2	1.57613E1	-1.98434E1	-1.99655E1	1.5016E1	2.23011E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.12051E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17007E-2	-8.80028E1	-4.52995E-4	-8.80019E1	4.52995E-4	3.69549E-3	9.71317E-2	1.57837E1	-1.98356E1	-1.99498E1	1.50184E1	2.23011E-9	2.51203E-3	2.51203E-3	6.31278E-3	2.12413E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.16233E-2	-8.80028E1	-3.57628E-4	-8.80017E1	6.67572E-4	3.60012E-3	9.71317E-2	1.58368E1	-1.97968E1	-1.99378E1	1.50358E1	2.21497E-9	2.51552E-3	2.51552E-3	6.33486E-3	2.12587E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.14689E-2	-8.80031E1	-2.6226E-4	-8.80017E1	7.62939E-4	3.79086E-3	9.70125E-2	1.58353E1	-1.98266E1	-1.9921E1	1.50479E1	2.22442E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.12594E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.09279E-2	-8.80029E1	-5.00679E-4	-8.80019E1	4.76837E-4	3.8147E-3	9.68218E-2	1.58333E1	-1.98387E1	-1.99036E1	1.50292E1	2.22364E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.12218E-2
1.2E1	6.1E1	1.0E0	4.85E2	3.23E2	-7.19325E-2	-8.80027E1	-5.00679E-4	-8.80018E1	6.91414E-4	3.67165E-3	9.69172E-2	1.57807E1	-1.9823E1	-1.99312E1	1.50148E1	2.21968E-9	2.51096E-3	2.51096E-3	6.32356E-3	2.11328E-2
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80028E1	-3.57628E-4	-8.80016E1	8.58307E-4	3.67165E-3	9.68218E-2	1.57795E1	-1.98224E1	-1.99414E1	1.50425E1	2.23818E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.12218E-2
1.4E1	1.09E2	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80027E1	-3.09944E-4	-8.80017E1	7.39098E-4	3.40939E-3	9.67503E-2	1.58564E1	-1.98164E1	-1.99414E1	1.50097E1	2.23818E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.12034E-2
1.5E1	8.9E1	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.80027E1	-1.43051E-4	-8.80017E1	5.96046E-4	3.40939E-3	9.67741E-2	1.5896E1	-1.98699E1	-1.99101E1	1.50247E1	2.23235E-9	2.51443E-3	2.51443E-3	6.34588E-3	2.11482E-2
1.6E1	3.23E2	0.0E0	6.47E2	4.41E2	-7.19325E-2	-8.80026E1	-4.76837E-4	-8.8002E1	6.91414E-4	3.50475E-3	9.67026E-2	1.57614E1	-1.98507E1	-1.99426E1	1.5008E1	2.23235E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.12034E-2
1.7E1	7.64E2	0.0E0	6.87E2	4.7E2	-7.27828E-2	-8.80028E1	-6.4373E-4	-8.80018E1	7.86781E-4	3.43323E-3	9.69648E-2	1.57999E1	-1.98483E1	-1.99089E1	1.501E1	2.2372E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.12034E-2
1.8E1	3.317E3	3.0E0	7.27E2	5.0E2	-7.19325E-2	-8.80028E1	-6.19888E-4	-8.80018E1	9.05991E-4	3.3617E-3	9.6941E-2	1.58075E1	-1.98079E1	-1.99402E1	1.50116E1	2.23818E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.11666E-2
1.9E1	1.798E3	1.0E0	7.68E2	5.29E2	-7.20871E-2	-8.80027E1	-6.19888E-4	-8.80018E1	6.19888E-4	3.62396E-3	9.68456E-2	1.58899E1	-1.98352E1	-1.9965E1	1.50238E1	2.23764E-9	2.51693E-3	2.51693E-3	6.30182E-3	2.1258E-2
2.0E1	1.4E1	0.0E0	8.08E2	5.58E2	-7.08504E-2	-8.80026E1	-4.76837E-4	-8.80017E1	6.19888E-4	3.6478E-3	9.67264E-2	1.57981E1	-1.98645E1	-1.99276E1	1.50311E1	2.24012E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.12034E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.17779E-2	-8.80028E1	-9.53674E-5	-8.80015E1	4.76837E-4	3.60012E-3	9.68218E-2	1.58681E1	-1.9847E1	-1.99237E1	1.50064E1	2.21495E-9	2.51954E-3	2.51954E-3	6.28056E-3	2.11509E-2
2.2E1	1.3E1	0.0E0	8.89E2	6.17E2	-7.23189E-2	-8.8003E1	-3.09944E-4	-8.80015E1	9.53674E-4	3.43323E-3	9.67979E-2	1.58133E1	-1.98753E1	-1.99077E1	1.50364E1	2.22252E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.12413E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80026E1	-3.8147E-4	-8.80013E1	5.72205E-4	3.6478E-3	9.70602E-2	1.58491E1	-1.98171E1	-1.99273E1	1.50292E1	2.23731E-9	2.51814E-3	2.51814E-3	6.33388E-3	2.11889E-2
