[Scan]
initial_time=2016-01-18T16:46:48
final_time=2016-01-18T16:47:08
ip_count=19
run=1024
dataset=1
scan=50
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.80255E-6
ql1_vset=
ql1_vmon=-8.80028E1
ql1_imon=-6.93727E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.25089E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-2.40265E-9
ql4_vset=
ql4_vmon=1.23978E-3
ql4_imon=1.41356E-8
mult1=-9.99587E-9
mult2=-2.80949E-9
rf_tmon=-4.81622E-3
rf_agc=3.30201E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.33786E-3
ql5_imon=6.35946E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66973E0
bslens_imon=2.26758E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1937E1
lens5a_imon=1.98905E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12563E2
lens4a_imon=2.05041E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53998E1
cs_ef1b_imon=2.76919E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04654E2
lens23_imon=1.02327E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04364E1
cs_ea1_imon=2.61309E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98023E0
lens1_imon=1.62114E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6482E1
os_ef1alow_imon=2.97504E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03923E1
cs_ea2_imon=1.47998E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84407E1
cs_ef1a_imon=2.92863E-5
olens2_vset=0.0E0
olens2_vmon=6.67572E-4
olens2_imon=1.00933E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1151E1
os_restr1_imon=4.28157E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15085E1
os_ea1_imon=2.38096E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63704E1
os_ef1bup_imon=3.07646E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21659E0
cs_ionrep_imon=1.16888E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92034E2
cs_nozzle_imon=1.93673E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02027E1
cs_anode1_imon=2.90168E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99969E1
olens4_imon=4.23818E-9
tplens_vset=0.0E0
tplens_vmon=-1.69469E0
tplens_imon=-2.74111E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99573E1
iondef3_imon=8.71365E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98511E1
iondef2_imon=9.46294E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03243E2
lens6_imon=2.98294E-4
ql6_vset=1.0E-1
ql6_vmon=9.65834E-2
ql6_imon=8.92544E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24047E0
ionrepsh_imon=1.71468E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33817E1
lens5b_imon=2.1749E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74645E1
cs_ef2b_imon=3.12923E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.16884E0
os_ea2_imon=-7.66289E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06214E2
lens4b_imon=2.0059E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71052E1
cs_ef2a_imon=3.15692E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09323E0
os_ef2alow_imon=-2.46952E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.62077E-1
os_ef2bup_imon=-5.23155E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11404E1
os_restr2_imon=3.36875E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.28422E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.22465E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58315E1
iondef1_imon=5.27208E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50292E1
iondef4_imon=5.46849E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27954E1
olens3_imon=2.51822E-8
olens1_vset=0.0E0
olens1_vmon=7.62939E-4
olens1_imon=1.18473E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15572E0
cs_ionaccel_imon=-1.67984E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02156E2
cs_ionfocb_imon=1.47514E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56592E1
einzel_imon=7.75895E-6
window_vset=0.0E0
window_vmon=2.31943E-1
window_imon=-8.60213E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82835E2
mask1_imon=2.3926E-4
mask2_vset=0.0E0
mask2_vmon=-1.8723E1
mask2_imon=-6.61857E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.37669E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.56863E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.10856E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28098E0
defgridb_imon=6.2748E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33304E1
os_fil1_imon=9.4484E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06992E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61722E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30794E1
cs_fil1_imon=9.98964E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61704E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62267E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.22499E-2
os_fil2_imon=-2.72488E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80988E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.95564E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34761E-1
cs_fil2_imon=-2.413E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.12374E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22026E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=2.1187E-2
chamber_ion_pmon=2.23011E-9
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.58137E-1
res40_imon=-2.51069E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.325E3	1.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80027E1	-2.86102E-4	-8.80014E1	9.05991E-4	3.6478E-3	9.67979E-2	1.58362E1	-1.98505E1	-1.99402E1	1.50097E1	2.23468E-9	2.51693E-3	2.51693E-3	6.33538E-3	2.11454E-2
2.0E0	2.966E3	4.0E0	3.16E2	1.6E2	-7.24736E-2	-8.80025E1	-1.90735E-4	-8.80012E1	1.0252E-3	3.93391E-3	9.67979E-2	1.58014E1	-1.98288E1	-1.99334E1	1.5016E1	2.23487E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.12051E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.17779E-2	-8.80026E1	-3.57628E-4	-8.80015E1	5.96046E-4	3.3617E-3	9.69172E-2	1.58145E1	-1.98347E1	-1.99326E1	1.50311E1	2.23171E-9	2.51359E-3	2.51359E-3	6.34099E-3	2.12016E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.26282E-2	-8.80027E1	0.0E0	-8.80015E1	1.00136E-3	3.50475E-3	9.65834E-2	1.58032E1	-1.98251E1	-1.9936E1	1.50207E1	2.23076E-9	2.52025E-3	2.52025E-3	6.30212E-3	2.11889E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80027E1	-1.66893E-4	-8.80014E1	8.34465E-4	3.50475E-3	9.66311E-2	1.5841E1	-1.98163E1	-1.98959E1	1.50118E1	2.23392E-9	2.50882E-3	2.50882E-3	6.32356E-3	2.12232E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80028E1	-2.14577E-4	-8.80013E1	7.15256E-4	3.45707E-3	9.68695E-2	1.58007E1	-1.98275E1	-1.99188E1	1.50148E1	2.23623E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.1185E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.201E-2	-8.80028E1	-9.53674E-5	-8.80013E1	7.39098E-4	3.21865E-3	9.69172E-2	1.57837E1	-1.98546E1	-1.9916E1	1.5034E1	2.23235E-9	2.51443E-3	2.51443E-3	6.34037E-3	2.12218E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80023E1	-9.53674E-5	-8.80016E1	8.82149E-4	3.38554E-3	9.68456E-2	1.5816E1	-1.97853E1	-1.99745E1	1.50196E1	2.22558E-9	2.51552E-3	2.51552E-3	6.34037E-3	2.12587E-2
1.2E1	7.1E1	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80021E1	-1.90735E-4	-8.80015E1	8.82149E-4	3.86238E-3	9.69648E-2	1.58329E1	-1.98446E1	-1.9942E1	1.50292E1	2.23138E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.12218E-2
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.16233E-2	-8.80027E1	-1.90735E-4	-8.80015E1	6.91414E-4	3.67165E-3	9.68933E-2	1.5766E1	-1.98316E1	-1.99655E1	1.50214E1	2.22268E-9	2.52538E-3	2.52538E-3	6.3074E-3	2.12034E-2
1.4E1	1.16E2	0.0E0	5.66E2	3.82E2	-7.07733E-2	-8.80026E1	-2.86102E-4	-8.80015E1	1.19209E-3	3.55244E-3	9.66311E-2	1.58341E1	-1.98278E1	-1.9951E1	1.49956E1	2.23429E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.11482E-2
1.5E1	6.3E1	0.0E0	6.06E2	4.11E2	-7.07733E-2	-8.80026E1	-5.00679E-4	-8.80016E1	1.14441E-3	3.74317E-3	9.63211E-2	1.58233E1	-1.989E1	-1.99054E1	1.49784E1	2.23583E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.11689E-2
1.6E1	2.7E2	1.0E0	6.47E2	4.41E2	-7.13915E-2	-8.80024E1	-3.8147E-4	-8.80013E1	9.53674E-4	3.62396E-3	9.67264E-2	1.58137E1	-1.98068E1	-1.99588E1	1.5001E1	2.23107E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.1187E-2
1.7E1	8.19E2	4.0E0	6.87E2	4.7E2	-7.10825E-2	-8.80025E1	-5.72205E-4	-8.80015E1	7.39098E-4	3.67165E-3	9.67264E-2	1.5789E1	-1.98192E1	-1.99414E1	1.49836E1	2.2372E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.12034E-2
1.8E1	3.397E3	0.0E0	7.27E2	5.0E2	-7.19325E-2	-8.80024E1	-7.39098E-4	-8.80013E1	7.86781E-4	3.69549E-3	9.66549E-2	1.58023E1	-1.98212E1	-1.99143E1	1.50046E1	2.23964E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.10968E-2
1.9E1	1.842E3	2.0E0	7.68E2	5.29E2	-7.20871E-2	-8.80026E1	-6.67572E-4	-8.80011E1	9.29832E-4	3.24249E-3	9.6941E-2	1.58174E1	-1.98399E1	-1.9936E1	1.50088E1	2.23429E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.12403E-2
2.0E1	2.7E1	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.80029E1	-7.39098E-4	-8.80015E1	6.67572E-4	3.00407E-3	9.69172E-2	1.58001E1	-1.98122E1	-1.99451E1	1.50611E1	2.23818E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.11666E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80029E1	-8.82149E-4	-8.80018E1	1.0252E-3	2.93255E-3	9.67264E-2	1.58085E1	-1.98133E1	-1.99408E1	1.50074E1	2.22945E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.11482E-2
2.2E1	1.2E1	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80028E1	-4.76837E-4	-8.80014E1	9.77516E-4	3.29018E-3	9.66787E-2	1.58085E1	-1.98523E1	-1.99266E1	1.50178E1	2.23583E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.12232E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80028E1	-6.19888E-4	-8.80013E1	1.23978E-3	3.33786E-3	9.65834E-2	1.58315E1	-1.98511E1	-1.99573E1	1.50292E1	2.23011E-9	2.51525E-3	2.51525E-3	6.29128E-3	2.1187E-2
