[Scan]
initial_time=2016-01-18T16:49:30
final_time=2016-01-18T16:49:50
ip_count=19
run=1024
dataset=1
scan=56
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.82723E-6
ql1_vset=
ql1_vmon=-8.80033E1
ql1_imon=-7.29561E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=1.13815E-9
ql3_vset=
ql3_vmon=-8.80016E1
ql3_imon=-2.34144E-9
ql4_vset=
ql4_vmon=1.19209E-3
ql4_imon=1.40898E-8
mult1=-1.0386E-8
mult2=-2.71542E-9
rf_tmon=-4.29711E-3
rf_agc=3.34271E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.3617E-3
ql5_imon=6.21986E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66133E0
bslens_imon=2.29983E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19803E1
lens5a_imon=2.0011E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12545E2
lens4a_imon=2.05129E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54145E1
cs_ef1b_imon=2.78016E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04661E2
lens23_imon=1.02143E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04381E1
cs_ea1_imon=2.63052E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97226E0
lens1_imon=1.61849E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64656E1
os_ef1alow_imon=2.98558E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03432E1
cs_ea2_imon=1.46504E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=2.92576E-5
olens2_vset=0.0E0
olens2_vmon=1.40667E-3
olens2_imon=1.02037E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11358E1
os_restr1_imon=4.27941E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14957E1
os_ea1_imon=2.39223E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63689E1
os_ef1bup_imon=3.0764E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24008E0
cs_ionrep_imon=1.17664E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92052E2
cs_nozzle_imon=1.93636E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01581E1
cs_anode1_imon=2.89476E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.24703E-9
tplens_vset=0.0E0
tplens_vmon=-1.70933E0
tplens_imon=-3.93075E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9975E1
iondef3_imon=8.76711E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98482E1
iondef2_imon=9.3403E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03217E2
lens6_imon=2.98249E-4
ql6_vset=1.0E-1
ql6_vmon=9.68456E-2
ql6_imon=8.78322E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23107E0
ionrepsh_imon=1.72568E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33802E1
lens5b_imon=2.18134E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74735E1
cs_ef2b_imon=3.14308E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.21845E0
os_ea2_imon=-6.09372E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06225E2
lens4b_imon=2.00515E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71426E1
cs_ef2a_imon=3.14848E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06056E0
os_ef2alow_imon=-2.47895E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.52374E-1
os_ef2bup_imon=-5.27923E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11418E1
os_restr2_imon=3.37842E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.28811E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.23127E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57737E1
iondef1_imon=5.21623E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50034E1
iondef4_imon=5.38851E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27952E1
olens3_imon=2.50796E-8
olens1_vset=0.0E0
olens1_vmon=1.19209E-3
olens1_imon=1.19121E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17039E0
cs_ionaccel_imon=-1.84105E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02144E2
cs_ionfocb_imon=1.47424E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56477E1
einzel_imon=7.7419E-6
window_vset=0.0E0
window_vmon=2.64194E-1
window_imon=-7.95896E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8281E2
mask1_imon=2.39066E-4
mask2_vset=0.0E0
mask2_vmon=-1.87029E1
mask2_imon=-6.30114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.33955E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.31574E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50155E3
multb_neg_imon=6.7916E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42863E0
defgridb_imon=6.067E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33336E1
os_fil1_imon=9.39795E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06644E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62587E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30831E1
cs_fil1_imon=9.96191E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62324E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63394E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1313E-2
os_fil2_imon=-2.64795E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91107E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.49988E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36902E-1
cs_fil2_imon=-2.22148E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.89945E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22268E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.12587E-2
chamber_ion_pmon=2.23332E-9
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.95021E-1
res40_imon=-2.58346E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=221
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.272E3	1.0E0	1.47E2	4.1E1	-7.29374E-2	-8.80031E1	-3.8147E-4	-8.80018E1	8.34465E-4	3.76701E-3	9.67979E-2	1.58113E1	-1.98122E1	-1.99444E1	1.50387E1	2.23332E-9	2.51443E-3	2.51443E-3	6.32936E-3	2.1185E-2
2.0E0	2.899E3	1.0E0	3.16E2	1.6E2	-7.32464E-2	-8.80028E1	-4.05312E-4	-8.80017E1	8.10623E-4	3.67165E-3	9.67264E-2	1.58056E1	-1.98043E1	-1.99457E1	1.50259E1	2.23623E-9	2.51225E-3	2.51225E-3	6.33486E-3	2.1185E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80026E1	-6.19888E-4	-8.80015E1	1.09673E-3	3.60012E-3	9.65118E-2	1.58138E1	-1.98511E1	-1.99425E1	1.50225E1	2.23623E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.11942E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.201E-2	-8.80027E1	-5.00679E-4	-8.80017E1	9.05991E-4	3.40939E-3	9.68456E-2	1.58445E1	-1.98204E1	-1.98995E1	1.50268E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.80028E1	-5.00679E-4	-8.80016E1	7.86781E-4	3.6478E-3	9.65357E-2	1.57967E1	-1.9831E1	-1.99307E1	1.49951E1	2.23869E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.12413E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80031E1	-4.05312E-4	-8.80013E1	9.05991E-4	3.60012E-3	9.66549E-2	1.58047E1	-1.9841E1	-1.99336E1	1.50358E1	2.23869E-9	2.52276E-3	2.52276E-3	6.29128E-3	2.12413E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.80029E1	-7.62939E-4	-8.80016E1	7.86781E-4	3.38554E-3	9.66549E-2	1.57963E1	-1.98356E1	-1.99252E1	1.50184E1	2.23332E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.12034E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80027E1	-6.19888E-4	-8.80015E1	9.05991E-4	3.76701E-3	9.66311E-2	1.58456E1	-1.9826E1	-1.99498E1	1.50016E1	2.24499E-9	2.51007E-3	2.51007E-3	6.34037E-3	2.12587E-2
1.2E1	7.3E1	0.0E0	4.85E2	3.23E2	-7.19325E-2	-8.80027E1	-7.86781E-4	-8.80018E1	1.07288E-3	3.3617E-3	9.67264E-2	1.58014E1	-1.98458E1	-1.99661E1	1.50088E1	2.23818E-9	2.51116E-3	2.51116E-3	6.31837E-3	2.13884E-2
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80026E1	-7.39098E-4	-8.80015E1	7.62939E-4	3.67165E-3	9.67264E-2	1.58209E1	-1.98344E1	-1.99366E1	1.50154E1	2.22821E-9	2.51847E-3	2.51847E-3	6.30202E-3	2.13502E-2
1.4E1	1.33E2	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80029E1	-9.29832E-4	-8.80015E1	1.00136E-3	3.69549E-3	9.65357E-2	1.58095E1	-1.98428E1	-1.99414E1	1.5007E1	2.23915E-9	2.5188E-3	2.5188E-3	6.34037E-3	2.12034E-2
1.5E1	5.9E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.8003E1	-5.96046E-4	-8.80012E1	8.34465E-4	3.83854E-3	9.63211E-2	1.58008E1	-1.98181E1	-1.99325E1	1.50155E1	2.23964E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.1332E-2
1.6E1	2.99E2	0.0E0	6.47E2	4.41E2	-7.18554E-2	-8.80028E1	-3.8147E-4	-8.80016E1	6.91414E-4	3.71933E-3	9.6488E-2	1.58005E1	-1.98549E1	-1.99107E1	1.50112E1	2.23915E-9	2.51662E-3	2.51662E-3	6.29645E-3	2.12772E-2
1.7E1	8.28E2	2.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80028E1	-8.10623E-4	-8.80014E1	8.10623E-4	3.57628E-3	9.67026E-2	1.58059E1	-1.98591E1	-1.99702E1	1.50334E1	2.23678E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.12051E-2
1.8E1	3.381E3	1.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80028E1	-4.76837E-4	-8.80015E1	9.53674E-4	3.62396E-3	9.66311E-2	1.58101E1	-1.98483E1	-1.99564E1	1.50052E1	2.23171E-9	2.5147E-3	2.5147E-3	6.31858E-3	2.1258E-2
1.9E1	1.729E3	0.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80028E1	-4.52995E-4	-8.80013E1	7.39098E-4	3.60012E-3	9.66072E-2	1.58011E1	-1.98531E1	-1.99276E1	1.501E1	2.23915E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.12218E-2
2.0E1	1.6E1	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80029E1	-7.39098E-4	-8.80015E1	7.15256E-4	3.45707E-3	9.67264E-2	1.58168E1	-1.98116E1	-1.99644E1	1.49878E1	2.24109E-9	2.51443E-3	2.51443E-3	6.3074E-3	2.12218E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.37103E-2	-8.80026E1	-4.52995E-4	-8.80015E1	7.62939E-4	3.45707E-3	9.69172E-2	1.57771E1	-1.98386E1	-1.9942E1	1.49896E1	2.23356E-9	2.51709E-3	2.51709E-3	6.31798E-3	2.12067E-2
2.2E1	1.7E1	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80031E1	-4.76837E-4	-8.80016E1	7.86781E-4	3.57628E-3	9.67979E-2	1.58244E1	-1.98122E1	-1.99644E1	1.49993E1	2.23138E-9	2.5199E-3	2.5199E-3	6.28006E-3	2.12403E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80033E1	-6.67572E-4	-8.80016E1	1.19209E-3	3.3617E-3	9.68456E-2	1.57737E1	-1.98482E1	-1.9975E1	1.50034E1	2.23332E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.12587E-2
