[Scan]
initial_time=2016-01-18T16:55:46
final_time=2016-01-18T16:56:05
ip_count=19
run=1024
dataset=1
scan=70
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.77992E-6
ql1_vset=
ql1_vmon=-8.80029E1
ql1_imon=-6.91116E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.22683E-9
ql3_vset=
ql3_vmon=-8.80015E1
ql3_imon=-2.28946E-9
ql4_vset=
ql4_vmon=1.3113E-3
ql4_imon=1.39604E-8
mult1=-9.25877E-9
mult2=-2.7266E-9
rf_tmon=-5.31753E-3
rf_agc=3.23302E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.52859E-3
ql5_imon=6.31249E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62528E0
bslens_imon=2.48368E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19526E1
lens5a_imon=1.99785E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12517E2
lens4a_imon=2.05262E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54217E1
cs_ef1b_imon=2.81151E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.0237E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04393E1
cs_ea1_imon=2.61105E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0035E0
lens1_imon=1.80595E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65401E1
os_ef1alow_imon=2.99063E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03528E1
cs_ea2_imon=1.48631E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84004E1
cs_ef1a_imon=2.9063E-5
olens2_vset=0.0E0
olens2_vmon=1.26362E-3
olens2_imon=1.01976E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11201E1
os_restr1_imon=4.30103E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14999E1
os_ea1_imon=2.39368E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64182E1
os_ef1bup_imon=3.10019E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23407E0
cs_ionrep_imon=1.17881E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92022E2
cs_nozzle_imon=1.93514E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02127E1
cs_anode1_imon=2.889E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9997E1
olens4_imon=4.31463E-9
tplens_vset=0.0E0
tplens_vmon=-1.67087E0
tplens_imon=-3.6063E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99594E1
iondef3_imon=8.75269E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98645E1
iondef2_imon=9.08435E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0324E2
lens6_imon=2.98328E-4
ql6_vset=1.0E-1
ql6_vmon=9.63211E-2
ql6_imon=8.7049E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26952E0
ionrepsh_imon=1.72207E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33628E1
lens5b_imon=2.18927E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74243E1
cs_ef2b_imon=3.11533E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.27914E0
os_ea2_imon=-9.01373E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06193E2
lens4b_imon=2.00399E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71804E1
cs_ef2a_imon=3.18741E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09E0
os_ef2alow_imon=-2.58346E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.55978E-1
os_ef2bup_imon=-5.55313E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11123E1
os_restr2_imon=3.33661E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23104E2
cs_ionfoca_imon=6.29207E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01419E1
cs_anode2_imon=2.21037E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58161E1
iondef1_imon=5.07564E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50046E1
iondef4_imon=5.7417E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27953E1
olens3_imon=2.51482E-8
olens1_vset=0.0E0
olens1_vmon=1.40667E-3
olens1_imon=1.20094E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17759E0
cs_ionaccel_imon=-1.8879E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02031E2
cs_ionfocb_imon=1.47064E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.96534E-6
window_vset=0.0E0
window_vmon=2.02326E-1
window_imon=-6.98589E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82729E2
mask1_imon=2.38688E-4
mask2_vset=0.0E0
mask2_vmon=-1.865E1
mask2_imon=-4.78747E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92852E3
multa_neg_imon=5.63441E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.15352E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50242E3
multb_neg_imon=7.24943E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.20006E0
defgridb_imon=6.16794E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33375E1
os_fil1_imon=9.42132E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06831E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62388E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30856E1
cs_fil1_imon=9.96474E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63147E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63244E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.93784E-2
os_fil2_imon=-2.85818E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16335E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.51148E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3755E-1
cs_fil2_imon=-2.49778E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.23872E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22336E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32483E-3
inlet_lpb_pmon=2.1198E-2
chamber_ion_pmon=2.23652E-9
chamber_cvt_pmon=2.51065E-3
foreline_cvt_pmon=2.51065E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-7.17887E-1
res40_imon=-2.80331E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=217
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.308E3	1.0E0	1.47E2	4.1E1	-7.17779E-2	-8.80022E1	-1.90735E-4	-8.80009E1	8.10623E-4	3.31402E-3	9.64165E-2	1.58227E1	-1.9838E1	-1.9927E1	1.4974E1	2.23429E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.11298E-2
2.0E0	2.963E3	2.0E0	3.16E2	1.6E2	-7.16233E-2	-8.80022E1	-2.38419E-4	-8.8001E1	8.82149E-4	3.33786E-3	9.64642E-2	1.5753E1	-1.9838E1	-1.99636E1	1.50268E1	2.24402E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.11482E-2
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.19325E-2	-8.80023E1	-2.14577E-4	-8.80008E1	8.10623E-4	3.33786E-3	9.67741E-2	1.58238E1	-1.98334E1	-1.99496E1	1.50196E1	2.24597E-9	2.52428E-3	2.52428E-3	6.29098E-3	2.12587E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23964E-2	-8.80023E1	-7.15256E-5	-8.80012E1	7.39098E-4	3.74317E-3	9.67026E-2	1.5866E1	-1.98687E1	-1.99504E1	1.50322E1	2.23678E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.11328E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80027E1	-5.24521E-4	-8.80014E1	9.05991E-4	3.48091E-3	9.64642E-2	1.57644E1	-1.9811E1	-1.99456E1	1.50382E1	2.23623E-9	2.52538E-3	2.52538E-3	6.30192E-3	2.12957E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.36328E-2	-8.80027E1	-4.05312E-4	-8.80014E1	7.62939E-4	3.67165E-3	9.64642E-2	1.58126E1	-1.98257E1	-1.99431E1	1.5031E1	2.23678E-9	2.52276E-3	2.52276E-3	6.35059E-3	2.1187E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80027E1	-4.05312E-4	-8.80015E1	7.39098E-4	3.71933E-3	9.65595E-2	1.57993E1	-1.98398E1	-1.99228E1	1.5031E1	2.23526E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.12034E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80027E1	-3.33786E-4	-8.80014E1	8.34465E-4	3.52859E-3	9.67503E-2	1.58251E1	-1.98074E1	-1.99276E1	1.50244E1	2.24012E-9	2.52318E-3	2.52318E-3	6.33486E-3	2.13327E-2
1.2E1	9.4E1	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80026E1	-4.05312E-4	-8.80014E1	7.62939E-4	3.62396E-3	9.67026E-2	1.57885E1	-1.98337E1	-1.99285E1	1.50094E1	2.23818E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.12587E-2
1.3E1	8.0E0	2.0E0	5.25E2	3.53E2	-7.286E-2	-8.80028E1	-4.52995E-4	-8.80014E1	6.4373E-4	3.6478E-3	9.65357E-2	1.58221E1	-1.98322E1	-1.99113E1	1.50286E1	2.24207E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.12218E-2
1.4E1	1.13E2	1.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80028E1	-3.57628E-4	-8.80013E1	3.57628E-4	3.45707E-3	9.6488E-2	1.58552E1	-1.98722E1	-1.98484E1	1.50334E1	2.23623E-9	2.52428E-3	2.52428E-3	6.29645E-3	2.11666E-2
1.5E1	6.9E1	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80026E1	-6.91414E-4	-8.80012E1	6.4373E-4	3.74317E-3	9.65357E-2	1.58109E1	-1.98027E1	-1.99561E1	1.5016E1	2.24207E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.12772E-2
1.6E1	3.7E2	0.0E0	6.47E2	4.41E2	-7.33239E-2	-8.80027E1	-5.72205E-4	-8.80013E1	6.19888E-4	3.6478E-3	9.67741E-2	1.5783E1	-1.98569E1	-1.99426E1	1.50118E1	2.24402E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.12403E-2
1.7E1	8.42E2	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80026E1	-5.72205E-4	-8.80014E1	1.00136E-3	3.52859E-3	9.63211E-2	1.58203E1	-1.98328E1	-1.99549E1	1.5037E1	2.23138E-9	2.52757E-3	2.52757E-3	6.30192E-3	2.12218E-2
1.8E1	3.302E3	1.0E0	7.27E2	5.0E2	-7.26282E-2	-8.80026E1	-7.62939E-4	-8.80015E1	7.15256E-4	3.3617E-3	9.65357E-2	1.58323E1	-1.98669E1	-1.99185E1	1.50473E1	2.23429E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.13327E-2
1.9E1	1.816E3	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80026E1	-5.96046E-4	-8.80015E1	8.58307E-4	3.52859E-3	9.64642E-2	1.57973E1	-1.98364E1	-1.99567E1	1.50172E1	2.24207E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.13142E-2
2.0E1	2.3E1	0.0E0	8.08E2	5.58E2	-7.41738E-2	-8.80027E1	-5.72205E-4	-8.80014E1	1.09673E-3	3.12328E-3	9.62734E-2	1.58339E1	-1.98552E1	-1.9936E1	1.50334E1	2.24155E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.12232E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80029E1	-3.57628E-4	-8.80016E1	1.0252E-3	2.98023E-3	9.63211E-2	1.58142E1	-1.98698E1	-1.9944E1	1.5013E1	2.23487E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.12957E-2
2.2E1	1.7E1	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.8003E1	-6.91414E-4	-8.80015E1	1.12057E-3	3.3617E-3	9.6488E-2	1.57097E1	-1.97741E1	-2.0056E1	1.50094E1	2.2379E-9	2.51923E-3	2.51923E-3	6.33757E-3	2.12112E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80029E1	-7.15256E-4	-8.80015E1	1.3113E-3	3.52859E-3	9.63211E-2	1.58161E1	-1.98645E1	-1.99594E1	1.50046E1	2.23652E-9	2.51065E-3	2.51065E-3	6.32483E-3	2.1198E-2
