[Scan]
initial_time=2016-01-18T16:56:39
final_time=2016-01-18T16:56:58
ip_count=19
run=1024
dataset=1
scan=72
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.81305E-6
ql1_vset=
ql1_vmon=-8.8003E1
ql1_imon=-6.93238E-10
ql2_vset=
ql2_vmon=-4.52995E-4
ql2_imon=1.24263E-9
ql3_vset=
ql3_vmon=-8.80014E1
ql3_imon=-2.32016E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=1.40144E-8
mult1=-9.4755E-9
mult2=-2.75454E-9
rf_tmon=-5.01111E-3
rf_agc=3.34477E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.6478E-3
ql5_imon=6.5763E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68476E0
bslens_imon=2.31064E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19713E1
lens5a_imon=2.00795E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.0488E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53664E1
cs_ef1b_imon=2.79025E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04669E2
lens23_imon=1.02161E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04357E1
cs_ea1_imon=2.62367E-5
lens1_vset=-2.7E0
lens1_vmon=-2.94282E0
lens1_imon=1.34812E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65089E1
os_ef1alow_imon=3.00252E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03552E1
cs_ea2_imon=1.45855E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84484E1
cs_ef1a_imon=2.91855E-5
olens2_vset=0.0E0
olens2_vmon=1.00136E-3
olens2_imon=1.03121E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1134E1
os_restr1_imon=4.25778E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14825E1
os_ea1_imon=2.39944E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6387E1
os_ef1bup_imon=3.09983E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20944E0
cs_ionrep_imon=1.16511E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92048E2
cs_nozzle_imon=1.93629E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02278E1
cs_anode1_imon=2.92432E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.17105E-9
tplens_vset=0.0E0
tplens_vmon=-1.70692E0
tplens_imon=-2.02012E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99522E1
iondef3_imon=8.64815E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98386E1
iondef2_imon=9.30425E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0317E2
lens6_imon=2.98256E-4
ql6_vset=1.0E-1
ql6_vmon=9.64165E-2
ql6_imon=8.47363E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27853E0
ionrepsh_imon=1.71775E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33904E1
lens5b_imon=2.17017E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74417E1
cs_ef2b_imon=3.10992E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.21124E0
os_ea2_imon=-6.12977E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06229E2
lens4b_imon=2.00551E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71348E1
cs_ef2a_imon=3.17263E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06537E0
os_ef2alow_imon=-2.37083E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.40962E-1
os_ef2bup_imon=-5.33329E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10925E1
os_restr2_imon=3.36436E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.30505E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.23596E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58437E1
iondef1_imon=5.4145E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50112E1
iondef4_imon=5.34887E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27954E1
olens3_imon=2.50843E-8
olens1_vset=0.0E0
olens1_vmon=1.33514E-3
olens1_imon=1.20768E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16738E0
cs_ionaccel_imon=-1.48065E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02129E2
cs_ionfocb_imon=1.47187E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55949E1
einzel_imon=7.71307E-6
window_vset=0.0E0
window_vmon=2.26953E-1
window_imon=-5.36411E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82811E2
mask1_imon=2.39135E-4
mask2_vset=0.0E0
mask2_vmon=-1.865E1
mask2_imon=-8.5356E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.57027E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.54286E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=6.99708E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.23314E0
defgridb_imon=6.13189E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3326E1
os_fil1_imon=9.40126E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06813E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6277E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30857E1
cs_fil1_imon=9.94419E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62714E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63575E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.87335E-2
os_fil2_imon=-2.47976E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.05523E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.35294E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.67197E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.79714E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22261E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.39014E-3
inlet_lpb_pmon=2.12403E-2
chamber_ion_pmon=2.24012E-9
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.46098E-1
res40_imon=-2.32398E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.338E3	0.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80025E1	-4.76837E-4	-8.80015E1	8.82149E-4	3.60012E-3	9.65595E-2	1.58144E1	-1.98175E1	-1.99166E1	1.50593E1	2.23487E-9	2.52061E-3	2.52061E-3	6.2645E-3	2.13139E-2
2.0E0	2.894E3	3.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80032E1	-3.8147E-4	-8.80017E1	8.34465E-4	3.55244E-3	9.64642E-2	1.58669E1	-1.98294E1	-1.99273E1	1.50214E1	2.23869E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.1187E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.201E-2	-8.8003E1	-4.05312E-4	-8.80016E1	7.86781E-4	3.40939E-3	9.64403E-2	1.58191E1	-1.98139E1	-1.99673E1	1.50208E1	2.23105E-9	2.51611E-3	2.51611E-3	6.3245E-3	2.11425E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.19325E-2	-8.80028E1	-2.38419E-4	-8.80017E1	7.39098E-4	3.74317E-3	9.62496E-2	1.58014E1	-1.9847E1	-1.99349E1	1.50346E1	2.23773E-9	2.51417E-3	2.51417E-3	6.33436E-3	2.11509E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80029E1	-3.09944E-4	-8.80014E1	5.72205E-4	3.50475E-3	9.61781E-2	1.58155E1	-1.98374E1	-1.99336E1	1.50334E1	2.23637E-9	2.51603E-3	2.51603E-3	6.40325E-3	2.12244E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80029E1	-3.09944E-4	-8.80015E1	9.05991E-4	3.38554E-3	9.60827E-2	1.58173E1	-1.9832E1	-1.99197E1	1.4989E1	2.23623E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.12403E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80026E1	-3.8147E-4	-8.80013E1	6.67572E-4	3.50475E-3	9.60112E-2	1.58405E1	-1.98661E1	-1.99506E1	1.50238E1	2.22875E-9	2.51693E-3	2.51693E-3	6.24628E-3	2.11641E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.80028E1	-3.8147E-4	-8.80015E1	7.86781E-4	3.26633E-3	9.65357E-2	1.58249E1	-1.98351E1	-1.99447E1	1.50235E1	2.23818E-9	2.5188E-3	2.5188E-3	6.29098E-3	2.12957E-2
1.2E1	8.1E1	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80025E1	-2.14577E-4	-8.80013E1	8.82149E-4	3.29018E-3	9.65834E-2	1.58262E1	-1.98322E1	-1.9939E1	1.50624E1	2.23907E-9	2.51852E-3	2.51852E-3	6.34301E-3	2.1206E-2
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.80024E1	-2.6226E-4	-8.80015E1	7.15256E-4	3.74317E-3	9.61065E-2	1.58185E1	-1.98269E1	-1.99383E1	1.50153E1	2.24207E-9	2.51552E-3	2.51552E-3	6.36244E-3	2.12403E-2
1.4E1	9.3E1	0.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80027E1	-4.76837E-4	-8.80015E1	8.10623E-4	3.74317E-3	9.62734E-2	1.5815E1	-1.98157E1	-1.99225E1	1.49935E1	2.24304E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.11482E-2
1.5E1	6.3E1	0.0E0	6.06E2	4.11E2	-7.201E-2	-8.80028E1	-5.96046E-4	-8.80013E1	9.53674E-4	3.91006E-3	9.64165E-2	1.57914E1	-1.98452E1	-1.99596E1	1.50094E1	2.23487E-9	2.51954E-3	2.51954E-3	6.2645E-3	2.12051E-2
1.6E1	3.35E2	1.0E0	6.47E2	4.41E2	-7.17007E-2	-8.80028E1	-5.96046E-4	-8.80013E1	1.16825E-3	3.6478E-3	9.63449E-2	1.58607E1	-1.9879E1	-1.99414E1	1.50262E1	2.23678E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.11689E-2
1.7E1	7.87E2	0.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80027E1	-5.00679E-4	-8.80018E1	6.91414E-4	3.31402E-3	9.6488E-2	1.57939E1	-1.9829E1	-1.99354E1	1.50316E1	2.23863E-9	2.51581E-3	2.51581E-3	6.36349E-3	2.12204E-2
1.8E1	3.353E3	3.0E0	7.27E2	5.0E2	-7.20871E-2	-8.80029E1	-4.05312E-4	-8.80016E1	5.24521E-4	3.74317E-3	9.65834E-2	1.58362E1	-1.98181E1	-1.99408E1	1.50316E1	2.23138E-9	2.52538E-3	2.52538E-3	6.24198E-3	2.11666E-2
1.9E1	1.816E3	1.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80027E1	-7.15256E-5	-8.80014E1	7.62939E-4	3.76701E-3	9.66072E-2	1.58154E1	-1.98073E1	-1.99708E1	1.50088E1	2.24012E-9	2.51007E-3	2.51007E-3	6.37351E-3	2.12034E-2
2.0E1	2.0E1	0.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80028E1	-3.8147E-4	-8.80015E1	9.77516E-4	3.26633E-3	9.64642E-2	1.57975E1	-1.98543E1	-1.99119E1	1.5031E1	2.24012E-9	2.51552E-3	2.51552E-3	6.28552E-3	2.10931E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.8003E1	-3.57628E-4	-8.80014E1	7.86781E-4	3.69549E-3	9.65595E-2	1.58162E1	-1.98257E1	-1.99172E1	1.50208E1	2.24207E-9	2.52209E-3	2.52209E-3	6.37905E-3	2.12403E-2
2.2E1	7.0E0	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80032E1	-1.90735E-4	-8.80015E1	6.19888E-4	3.50475E-3	9.65118E-2	1.57035E1	-1.97243E1	-2.00953E1	1.50277E1	2.24921E-9	2.52276E-3	2.52276E-3	6.28056E-3	2.12232E-2
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.8003E1	-4.52995E-4	-8.80014E1	5.48363E-4	3.6478E-3	9.64165E-2	1.58437E1	-1.98386E1	-1.99522E1	1.50112E1	2.24012E-9	2.52099E-3	2.52099E-3	6.39014E-3	2.12403E-2
