[Scan]
initial_time=2016-01-18T16:59:45
final_time=2016-01-18T17:00:05
ip_count=19
run=1024
dataset=1
scan=79
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.7586E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-6.20818E-10
ql2_vset=
ql2_vmon=-2.14577E-4
ql2_imon=1.1911E-9
ql3_vset=
ql3_vmon=-8.80016E1
ql3_imon=-2.22359E-9
ql4_vset=
ql4_vmon=7.86781E-4
ql4_imon=1.39334E-8
mult1=-9.6561E-9
mult2=-2.73857E-9
rf_tmon=-4.44633E-3
rf_agc=3.35559E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.52859E-3
ql5_imon=5.91338E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6361E0
bslens_imon=2.54857E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19556E1
lens5a_imon=1.99533E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12527E2
lens4a_imon=2.04996E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53839E1
cs_ef1b_imon=2.79601E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04651E2
lens23_imon=1.02222E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04525E1
cs_ea1_imon=2.63016E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97226E0
lens1_imon=1.61849E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65011E1
os_ef1alow_imon=2.97838E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03895E1
cs_ea2_imon=1.48847E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84202E1
cs_ef1a_imon=2.92251E-5
olens2_vset=0.0E0
olens2_vmon=9.77516E-4
olens2_imon=1.02496E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11556E1
os_restr1_imon=4.28589E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15125E1
os_ea1_imon=2.39764E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63846E1
os_ef1bup_imon=3.07785E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21545E0
cs_ionrep_imon=1.17088E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92007E2
cs_nozzle_imon=1.93557E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.022E1
cs_anode1_imon=2.90882E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99971E1
olens4_imon=4.23306E-9
tplens_vset=0.0E0
tplens_vmon=-1.6907E0
tplens_imon=-2.27247E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99324E1
iondef3_imon=9.09156E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98585E1
iondef2_imon=9.27541E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03203E2
lens6_imon=2.9836E-4
ql6_vset=1.0E-1
ql6_vmon=9.67503E-2
ql6_imon=8.5541E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2503E0
ionrepsh_imon=1.73217E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33868E1
lens5b_imon=2.18675E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74471E1
cs_ef2b_imon=3.12974E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.22326E0
os_ea2_imon=-6.85076E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06205E2
lens4b_imon=2.00522E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7145E1
cs_ef2a_imon=3.16903E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04315E0
os_ef2alow_imon=-2.53301E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86612E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1122E1
os_restr2_imon=3.37373E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.29351E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01629E1
cs_anode2_imon=2.23235E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58558E1
iondef1_imon=5.5587E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5045E1
iondef4_imon=5.40653E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27952E1
olens3_imon=2.50464E-8
olens1_vset=0.0E0
olens1_vmon=1.81198E-3
olens1_imon=1.21029E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16798E0
cs_ionaccel_imon=-1.68608E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02148E2
cs_ionfocb_imon=1.47305E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56333E1
einzel_imon=7.88606E-6
window_vset=0.0E0
window_vmon=2.55785E-1
window_imon=-8.31936E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82764E2
mask1_imon=2.39117E-4
mask2_vset=0.0E0
mask2_vmon=-1.86915E1
mask2_imon=-6.0849E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=7.71086E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.55727E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.56666E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.54593E0
defgridb_imon=5.82547E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33295E1
os_fil1_imon=9.40792E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07449E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63028E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30914E1
cs_fil1_imon=9.95086E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.60143E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63539E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.77017E-2
os_fil2_imon=-2.79211E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01318E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.32844E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.67798E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.07965E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22391E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.12775E-2
chamber_ion_pmon=2.23773E-9
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.8512E-1
res40_imon=-2.59067E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.351E3	1.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80029E1	-6.91414E-4	-8.80014E1	9.53674E-4	3.83854E-3	9.68456E-2	1.58155E1	-1.98062E1	-1.99444E1	1.5011E1	2.23332E-9	2.51334E-3	2.51334E-3	6.32386E-3	2.11666E-2
2.0E0	3.009E3	2.0E0	3.16E2	1.6E2	-7.23189E-2	-8.80029E1	-6.67572E-4	-8.80013E1	6.19888E-4	3.71933E-3	9.64403E-2	1.58209E1	-1.97521E1	-1.99155E1	1.50365E1	2.24109E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.12403E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.80031E1	-6.91414E-4	-8.80015E1	6.67572E-4	3.79086E-3	9.68456E-2	1.58339E1	-1.99042E1	-1.9929E1	1.50097E1	2.24012E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.12034E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.80032E1	-8.10623E-4	-8.80015E1	7.62939E-4	3.45707E-3	9.66311E-2	1.58321E1	-1.9831E1	-1.99107E1	1.50226E1	2.23869E-9	2.52492E-3	2.52492E-3	6.33436E-3	2.12413E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.8003E1	-8.34465E-4	-8.80014E1	7.39098E-4	3.95775E-3	9.6488E-2	1.57861E1	-1.97529E1	-1.99419E1	1.5038E1	2.23773E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.12051E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80029E1	-6.4373E-4	-8.80015E1	1.00136E-3	3.74317E-3	9.65357E-2	1.58223E1	-1.99123E1	-1.99558E1	1.50425E1	2.23782E-9	2.52301E-3	2.52301E-3	6.34907E-3	2.12082E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80027E1	-6.67572E-4	-8.80015E1	6.91414E-4	3.57628E-3	9.67026E-2	1.58251E1	-1.97491E1	-1.99498E1	1.50479E1	2.24117E-9	2.51793E-3	2.51793E-3	6.34301E-3	2.12757E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80026E1	-4.52995E-4	-8.80014E1	9.05991E-4	3.57628E-3	9.64165E-2	1.58045E1	-1.98817E1	-1.99346E1	1.50288E1	2.23818E-9	2.51443E-3	2.51443E-3	6.33486E-3	2.12587E-2
1.2E1	7.1E1	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80026E1	-6.67572E-4	-8.80011E1	7.39098E-4	3.74317E-3	9.65834E-2	1.58038E1	-1.97667E1	-1.99172E1	1.50225E1	2.23526E-9	2.51698E-3	2.51698E-3	6.31837E-3	2.1185E-2
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80028E1	-6.4373E-4	-8.8001E1	9.05991E-4	3.40939E-3	9.65357E-2	1.58041E1	-1.99171E1	-1.99396E1	1.5016E1	2.23915E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.12403E-2
1.4E1	7.2E1	0.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80024E1	-6.4373E-4	-8.80012E1	6.67572E-4	3.91006E-3	9.70602E-2	1.57999E1	-1.97876E1	-1.99846E1	1.50226E1	2.23171E-9	2.51915E-3	2.51915E-3	6.30182E-3	2.1258E-2
1.5E1	7.1E1	0.0E0	6.06E2	4.11E2	-7.16233E-2	-8.80024E1	-5.48363E-4	-8.80013E1	1.04904E-3	4.12464E-3	9.67264E-2	1.58073E1	-1.98883E1	-1.99467E1	1.50178E1	2.23332E-9	2.51334E-3	2.51334E-3	6.3074E-3	2.12218E-2
1.6E1	3.06E2	2.0E0	6.47E2	4.41E2	-7.15461E-2	-8.80024E1	-5.96046E-4	-8.8001E1	8.82149E-4	4.05312E-3	9.71556E-2	1.58305E1	-1.98513E1	-1.99089E1	1.50353E1	2.23583E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.12413E-2
1.7E1	8.22E2	0.0E0	6.87E2	4.7E2	-7.17779E-2	-8.80025E1	-3.57628E-4	-8.80012E1	8.82149E-4	3.83854E-3	9.68456E-2	1.58162E1	-1.98328E1	-1.99372E1	1.50445E1	2.23468E-9	2.51693E-3	2.51693E-3	6.29624E-3	2.12204E-2
1.8E1	3.346E3	2.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80025E1	-4.52995E-4	-8.80017E1	9.05991E-4	3.95775E-3	9.60827E-2	1.5815E1	-1.98358E1	-1.99201E1	1.5037E1	2.23773E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.10968E-2
1.9E1	1.927E3	1.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80025E1	-6.4373E-4	-8.80014E1	9.53674E-4	4.07696E-3	9.64642E-2	1.58462E1	-1.9796E1	-1.99474E1	1.50022E1	2.2345E-9	2.51498E-3	2.51498E-3	6.32328E-3	2.11712E-2
2.0E1	1.9E1	0.0E0	8.08E2	5.58E2	-7.22418E-2	-8.80025E1	-3.57628E-4	-8.80013E1	9.29832E-4	3.55244E-3	9.68456E-2	1.58209E1	-1.98971E1	-1.99644E1	1.50474E1	2.21593E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.12034E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.80025E1	-4.05312E-4	-8.80016E1	8.58307E-4	3.91006E-3	9.67503E-2	1.57921E1	-1.99059E1	-1.996E1	1.49938E1	2.21873E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.12232E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80024E1	-1.19209E-4	-8.80015E1	9.77516E-4	3.69549E-3	9.69648E-2	1.58356E1	-1.98051E1	-1.99585E1	1.5019E1	2.22364E-9	2.51116E-3	2.51116E-3	6.34037E-3	2.12403E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80025E1	-2.14577E-4	-8.80016E1	7.86781E-4	3.52859E-3	9.67503E-2	1.58558E1	-1.98585E1	-1.99324E1	1.5045E1	2.23773E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.12775E-2
