[Scan]
initial_time=2016-01-18T17:01:42
final_time=2016-01-18T17:02:02
ip_count=19
run=1024
dataset=2
scan=83
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08806E-4
ql1_vset=
ql1_vmon=-8.19564E-1
ql1_imon=1.44518E-8
ql2_vset=
ql2_vmon=-7.98702E-1
ql2_imon=1.9704E-9
ql3_vset=
ql3_vmon=-9.13162E0
ql3_imon=2.65503E-9
ql4_vset=
ql4_vmon=-9.14323E0
ql4_imon=-2.92158E-10
mult1=-9.77126E-9
mult2=-2.73502E-9
rf_tmon=-4.22632E-3
rf_agc=3.31498E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.24385E-3
ql5_imon=1.61538E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64391E0
bslens_imon=2.48007E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19761E1
lens5a_imon=2.00326E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12545E2
lens4a_imon=2.04931E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53256E1
cs_ef1b_imon=2.7488E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04519E1
cs_ea1_imon=2.62439E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3323E0
lens1_imon=2.718E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64482E1
os_ef1alow_imon=2.98811E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03246E1
cs_ea2_imon=1.49893E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85523E1
cs_ef1a_imon=2.95243E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.2329E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11165E1
os_restr1_imon=4.24157E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15155E1
os_ea1_imon=2.38142E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63179E1
os_ef1bup_imon=3.06235E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25871E0
cs_ionrep_imon=1.17232E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92039E2
cs_nozzle_imon=1.93471E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02121E1
cs_anode1_imon=2.93549E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2038E0
olens4_imon=3.2479E-8
tplens_vset=1.4E-1
tplens_vmon=1.70031E0
tplens_imon=-4.25519E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26107E1
iondef3_imon=1.51551E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26561E1
iondef2_imon=1.57463E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03255E2
lens6_imon=2.98396E-4
ql6_vset=1.0E-1
ql6_vmon=9.66311E-2
ql6_imon=3.96853E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24849E0
ionrepsh_imon=1.72243E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34373E1
lens5b_imon=2.20514E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74868E1
cs_ef2b_imon=3.11785E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.34463E0
os_ea2_imon=-6.41816E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0617E2
lens4b_imon=2.00807E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70819E1
cs_ef2a_imon=3.14308E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03354E0
os_ef2alow_imon=-2.28794E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.73998E-1
os_ef2bup_imon=-5.01254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1146E1
os_restr2_imon=3.42527E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.29712E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.26479E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73434E1
iondef1_imon=1.09085E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68238E1
iondef4_imon=1.07332E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.82246E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=7.44947E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11753E0
cs_ionaccel_imon=-1.45542E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02181E2
cs_ionfocb_imon=1.47716E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56171E1
einzel_imon=7.41033E-6
window_vset=0.0E0
window_vmon=2.87019E-1
window_imon=-6.87777E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82836E2
mask1_imon=2.39545E-4
mask2_vset=0.0E0
mask2_vmon=-1.87305E1
mask2_imon=-9.58075E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92666E3
multa_neg_imon=6.91777E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93696E3
defgrida_imon=6.20759E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.09081E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47074E0
defgridb_imon=6.14271E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33307E1
os_fil1_imon=9.39543E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06717E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61867E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30875E1
cs_fil1_imon=9.94846E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61933E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63472E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.86045E-2
os_fil2_imon=-2.41369E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.80794E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36773E-1
cs_fil2_imon=-2.99633E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05813E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22373E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.12594E-2
chamber_ion_pmon=2.21779E-9
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.47569E-1
res40_imon=-2.03206E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=219
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.20017E-1	-7.98631E-1	-9.13141E0	-9.14295E0	3.50475E-3	9.65595E-2	2.73263E1	-3.27564E1	-3.26484E1	2.68268E1	2.23915E-9	2.5199E-3	2.5199E-3	6.34037E-3	2.1185E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.19826E-1	-7.98678E-1	-9.13155E0	-9.14316E0	3.8147E-3	9.66311E-2	2.73443E1	-3.26493E1	-3.2637E1	2.68154E1	2.23773E-9	2.52492E-3	2.52492E-3	6.33436E-3	2.12232E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.19778E-1	-7.98512E-1	-9.13167E0	-9.14347E0	3.57628E-3	9.62496E-2	2.73189E1	-3.26296E1	-3.26458E1	2.68478E1	2.23863E-9	2.5225E-3	2.5225E-3	6.33538E-3	2.1428E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.20017E-1	-7.98416E-1	-9.13167E0	-9.14326E0	3.76701E-3	9.64642E-2	2.73275E1	-3.27104E1	-3.26461E1	2.67896E1	2.24347E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.12957E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.19874E-1	-7.98798E-1	-9.13179E0	-9.14304E0	3.93391E-3	9.63926E-2	2.73273E1	-3.26032E1	-3.25996E1	2.6865E1	2.23623E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.11666E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09595E0	-8.20303E-1	-7.98678E-1	-9.13146E0	-9.1428E0	3.83854E-3	9.66787E-2	2.73269E1	-3.26956E1	-3.25877E1	2.68334E1	2.2406E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.11689E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.20184E-1	-7.98726E-1	-9.13153E0	-9.14302E0	3.88622E-3	9.63926E-2	2.73161E1	-3.26309E1	-3.26003E1	2.68454E1	2.24402E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.1185E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.20279E-1	-7.98631E-1	-9.13155E0	-9.14292E0	4.12464E-3	9.62734E-2	2.73372E1	-3.26614E1	-3.2601E1	2.68267E1	2.23675E-9	2.52088E-3	2.52088E-3	6.31163E-3	2.1196E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.2016E-1	-7.98559E-1	-9.13169E0	-9.14292E0	3.60012E-3	9.62973E-2	2.73375E1	-3.25517E1	-3.25995E1	2.68509E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.1985E-1	-7.98392E-1	-9.13172E0	-9.14285E0	3.79086E-3	9.65834E-2	2.73423E1	-3.27629E1	-3.26086E1	2.68731E1	2.24427E-9	2.52042E-3	2.52042E-3	6.31519E-3	2.12957E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.1985E-1	-7.98559E-1	-9.13196E0	-9.14316E0	3.98159E-3	9.63926E-2	2.72678E1	-3.26194E1	-3.26597E1	2.6795E1	2.22926E-9	2.51894E-3	2.51894E-3	6.35086E-3	2.115E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.20017E-1	-7.98416E-1	-9.13174E0	-9.14316E0	3.45707E-3	9.66072E-2	2.73151E1	-3.25865E1	-3.26225E1	2.68285E1	2.22171E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.11666E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.19778E-1	-7.98416E-1	-9.13186E0	-9.14292E0	3.71933E-3	9.66311E-2	2.73405E1	-3.27312E1	-3.26488E1	2.6855E1	2.21684E-9	2.51632E-3	2.51632E-3	6.30202E-3	2.12232E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.19635E-1	-7.98607E-1	-9.13169E0	-9.14323E0	3.79086E-3	9.6488E-2	2.73327E1	-3.26591E1	-3.26314E1	2.68154E1	2.23526E-9	2.51771E-3	2.51771E-3	6.29645E-3	2.12403E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.1954E-1	-7.98345E-1	-9.13179E0	-9.14311E0	3.76701E-3	9.66311E-2	2.73111E1	-3.262E1	-3.26308E1	2.68406E1	2.23332E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.11482E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.19302E-1	-7.98345E-1	-9.13186E0	-9.14311E0	4.05312E-3	9.64642E-2	2.73165E1	-3.26002E1	-3.26056E1	2.68286E1	2.23623E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.12403E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.19516E-1	-7.98297E-1	-9.13203E0	-9.14276E0	3.91006E-3	9.64642E-2	2.73279E1	-3.26981E1	-3.26266E1	2.68412E1	2.23526E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.12403E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-8.19468E-1	-7.98631E-1	-9.13184E0	-9.14285E0	4.07696E-3	9.63449E-2	2.7355E1	-3.26687E1	-3.2614E1	2.6837E1	2.23964E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.12413E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.19731E-1	-7.98821E-1	-9.13174E0	-9.14297E0	3.79086E-3	9.63688E-2	2.73322E1	-3.26661E1	-3.26514E1	2.68348E1	2.22751E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.12403E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.19564E-1	-7.98702E-1	-9.13162E0	-9.14323E0	4.24385E-3	9.66311E-2	2.73434E1	-3.26561E1	-3.26107E1	2.68238E1	2.21779E-9	2.51096E-3	2.51096E-3	6.33436E-3	2.12594E-2
