[Scan]
initial_time=2016-01-18T17:04:49
final_time=2016-01-18T17:05:08
ip_count=19
run=1024
dataset=2
scan=90
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.0874E-4
ql1_vset=
ql1_vmon=-8.18276E-1
ql1_imon=1.40489E-8
ql2_vset=
ql2_vmon=-7.98154E-1
ql2_imon=1.95053E-9
ql3_vset=
ql3_vmon=-9.132E0
ql3_imon=9.32443E-10
ql4_vset=
ql4_vmon=-9.14297E0
ql4_imon=-1.58858E-10
mult1=-9.81854E-9
mult2=-2.74089E-9
rf_tmon=-3.71311E-3
rf_agc=3.34507E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.71933E-3
ql5_imon=1.68093E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69394E0
bslens_imon=2.54326E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19134E1
lens5a_imon=1.99253E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12533E2
lens4a_imon=2.04983E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53592E1
cs_ef1b_imon=2.76045E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0466E2
lens23_imon=1.02337E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04416E1
cs_ea1_imon=2.62007E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3702E0
lens1_imon=2.75208E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64846E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03732E1
cs_ea2_imon=1.46905E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84423E1
cs_ef1a_imon=2.92761E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.22307E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11326E1
os_restr1_imon=4.26663E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14745E1
os_ea1_imon=2.41195E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6367E1
os_ef1bup_imon=3.08191E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.29044E0
cs_ionrep_imon=1.1905E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92E2
cs_nozzle_imon=1.93448E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02145E1
cs_anode1_imon=2.90676E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20456E0
olens4_imon=3.2111E-8
tplens_vset=1.4E-1
tplens_vmon=1.69983E0
tplens_imon=-2.17481E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26408E1
iondef3_imon=1.49347E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2649E1
iondef2_imon=1.57559E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0319E2
lens6_imon=2.9842E-4
ql6_vset=1.0E-1
ql6_vmon=9.65118E-2
ql6_imon=3.99066E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27569E0
ionrepsh_imon=1.69239E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33693E1
lens5b_imon=2.18507E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74692E1
cs_ef2b_imon=3.12744E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.363E0
os_ea2_imon=-7.41313E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06162E2
lens4b_imon=2.00449E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71107E1
cs_ef2a_imon=3.16393E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08931E0
os_ef2alow_imon=-2.55026E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.73483E-1
os_ef2bup_imon=-5.25748E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11401E1
os_restr2_imon=3.40198E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.33538E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01948E1
cs_anode2_imon=2.24542E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73346E1
iondef1_imon=1.0921E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68454E1
iondef4_imon=1.07183E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.86493E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=7.4378E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14404E0
cs_ionaccel_imon=-1.58414E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02151E2
cs_ionfocb_imon=1.47379E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56509E1
einzel_imon=7.73649E-6
window_vset=0.0E0
window_vmon=2.69815E-1
window_imon=-7.84827E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82809E2
mask1_imon=2.39164E-4
mask2_vset=0.0E0
mask2_vmon=-1.86877E1
mask2_imon=-7.08371E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=7.15865E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.54987E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.44534E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37603E0
defgridb_imon=5.8526E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33323E1
os_fil1_imon=9.40329E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06958E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61812E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30922E1
cs_fil1_imon=9.93912E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63107E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63249E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.92705E-2
os_fil2_imon=-2.56493E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81968E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.14273E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35145E-1
cs_fil2_imon=-2.26374E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.12463E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22308E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.12232E-2
chamber_ion_pmon=2.23678E-9
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.13652E-1
res40_imon=-2.34522E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=198
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.18324E-1	-7.98821E-1	-9.13219E0	-9.14288E0	3.67165E-3	9.64642E-2	2.73312E1	-3.26579E1	-3.26295E1	2.68105E1	2.23869E-9	2.51847E-3	2.51847E-3	6.33977E-3	2.12775E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.183E-1	-7.98702E-1	-9.13224E0	-9.1428E0	3.88622E-3	9.65357E-2	2.73131E1	-3.26719E1	-3.26511E1	2.68207E1	2.23731E-9	2.51919E-3	2.51919E-3	6.2863E-3	2.12244E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.18133E-1	-7.98655E-1	-9.13241E0	-9.14285E0	3.6478E-3	9.64403E-2	2.73476E1	-3.26874E1	-3.26236E1	2.68557E1	2.23468E-9	2.52139E-3	2.52139E-3	6.35223E-3	2.12204E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.18253E-1	-7.98655E-1	-9.13222E0	-9.14316E0	3.60012E-3	9.63449E-2	2.73535E1	-3.26455E1	-3.25753E1	2.68169E1	2.24347E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.12051E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.18276E-1	-7.98535E-1	-9.13239E0	-9.14297E0	3.40939E-3	9.65357E-2	2.73231E1	-3.26308E1	-3.26032E1	2.68194E1	2.21779E-9	2.51525E-3	2.51525E-3	6.29665E-3	2.1187E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.18181E-1	-7.98655E-1	-9.13186E0	-9.14299E0	3.67165E-3	9.63926E-2	2.73249E1	-3.26771E1	-3.2608E1	2.68424E1	2.21401E-9	2.51915E-3	2.51915E-3	6.32978E-3	2.1258E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.18324E-1	-7.98678E-1	-9.13229E0	-9.14314E0	3.71933E-3	9.64403E-2	2.73129E1	-3.26428E1	-3.26374E1	2.68232E1	2.21401E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.1405E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.18253E-1	-7.98798E-1	-9.13229E0	-9.14297E0	3.55244E-3	9.64403E-2	2.73275E1	-3.26514E1	-3.2629E1	2.68839E1	2.21497E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.12034E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.18253E-1	-7.9875E-1	-9.13231E0	-9.14273E0	3.71933E-3	9.6488E-2	2.73351E1	-3.26573E1	-3.25773E1	2.68442E1	2.22157E-9	2.5131E-3	2.5131E-3	6.32356E-3	2.12957E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.18396E-1	-7.98774E-1	-9.13258E0	-9.1429E0	3.6478E-3	9.63688E-2	2.73228E1	-3.26695E1	-3.26174E1	2.68107E1	2.22678E-9	2.51359E-3	2.51359E-3	6.31858E-3	2.1258E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.18372E-1	-7.98869E-1	-9.13267E0	-9.14288E0	3.50475E-3	9.65834E-2	2.72883E1	-3.25858E1	-3.25653E1	2.69307E1	2.2372E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.12218E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.18396E-1	-7.98821E-1	-9.13253E0	-9.14307E0	2.95639E-3	9.64403E-2	2.73285E1	-3.26831E1	-3.2608E1	2.68041E1	2.23818E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.13513E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09387E0	-8.17966E-1	-7.98821E-1	-9.13248E0	-9.1428E0	3.33786E-3	9.6488E-2	2.73222E1	-3.26443E1	-3.26343E1	2.68532E1	2.24109E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.12772E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09394E0	-8.18181E-1	-7.98774E-1	-9.13281E0	-9.14302E0	3.3617E-3	9.65118E-2	2.73165E1	-3.262E1	-3.25954E1	2.68082E1	2.23429E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.11482E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.18157E-1	-7.98464E-1	-9.13262E0	-9.1428E0	3.48091E-3	9.65595E-2	2.73412E1	-3.26542E1	-3.26132E1	2.68545E1	2.23487E-9	2.51739E-3	2.51739E-3	6.33436E-3	2.12957E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.18062E-1	-7.98559E-1	-9.13219E0	-9.14307E0	3.71933E-3	9.67979E-2	2.73228E1	-3.26632E1	-3.2626E1	2.68532E1	2.24161E-9	2.51359E-3	2.51359E-3	6.32418E-3	2.1108E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.18133E-1	-7.98464E-1	-9.13219E0	-9.14302E0	3.62396E-3	9.66311E-2	2.73297E1	-3.26801E1	-3.26182E1	2.6837E1	2.23623E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.13142E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.18348E-1	-7.98368E-1	-9.13208E0	-9.14311E0	3.57628E-3	9.66787E-2	2.73405E1	-3.26891E1	-3.26693E1	2.68334E1	2.23202E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.12232E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.18443E-1	-7.98535E-1	-9.13219E0	-9.14304E0	3.79086E-3	9.66549E-2	2.72679E1	-3.26791E1	-3.27204E1	2.68372E1	2.24012E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.12403E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.18276E-1	-7.98154E-1	-9.132E0	-9.14297E0	3.71933E-3	9.65118E-2	2.73346E1	-3.2649E1	-3.26408E1	2.68454E1	2.23678E-9	2.51525E-3	2.51525E-3	6.32896E-3	2.12232E-2
