[Scan]
initial_time=2016-01-18T17:07:55
final_time=2016-01-18T17:08:15
ip_count=19
run=1024
dataset=2
scan=97
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-8.178E-1
ql1_imon=1.38133E-8
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=2.00317E-9
ql3_vset=
ql3_vmon=-9.13234E0
ql3_imon=5.01132E-10
ql4_vset=
ql4_vmon=-9.14328E0
ql4_imon=-1.62911E-10
mult1=-9.69223E-9
mult2=-2.64875E-9
rf_tmon=-4.81284E-3
rf_agc=3.26426E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.93391E-3
ql5_imon=1.66616E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63069E0
bslens_imon=2.40797E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19184E1
lens5a_imon=1.99389E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1254E2
lens4a_imon=2.04859E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53989E1
cs_ef1b_imon=2.77908E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02168E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0473E1
cs_ea1_imon=2.62115E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34072E0
lens1_imon=2.67114E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64855E1
os_ef1alow_imon=2.97621E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03973E1
cs_ea2_imon=1.47694E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84538E1
cs_ef1a_imon=2.93981E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.22632E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1152E1
os_restr1_imon=4.27508E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15077E1
os_ea1_imon=2.4081E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63503E1
os_ef1bup_imon=3.07316E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22987E0
cs_ionrep_imon=1.17196E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92027E2
cs_nozzle_imon=1.93626E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01989E1
cs_anode1_imon=2.89404E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2042E0
olens4_imon=3.21447E-8
tplens_vset=1.4E-1
tplens_vmon=1.72194E0
tplens_imon=-2.59691E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26362E1
iondef3_imon=1.50866E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26765E1
iondef2_imon=1.58076E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03192E2
lens6_imon=2.98202E-4
ql6_vset=1.0E-1
ql6_vmon=9.65595E-2
ql6_imon=4.02348E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29416E0
ionrepsh_imon=1.72568E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3415E1
lens5b_imon=2.19432E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74555E1
cs_ef2b_imon=3.13587E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.36385E0
os_ea2_imon=-6.52631E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06186E2
lens4b_imon=2.00666E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71444E1
cs_ef2a_imon=3.1611E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07858E0
os_ef2alow_imon=-2.55103E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.81807E-1
os_ef2bup_imon=-5.13868E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11322E1
os_restr2_imon=3.39211E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23116E2
cs_ionfoca_imon=6.29387E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01743E1
cs_anode2_imon=2.23632E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7358E1
iondef1_imon=1.11211E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68256E1
iondef4_imon=1.10792E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71774E1
olens3_imon=4.81167E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81164E-1
olens1_imon=7.3958E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12534E0
cs_ionaccel_imon=-1.81221E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02151E2
cs_ionfocb_imon=1.47349E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56339E1
einzel_imon=7.75992E-6
window_vset=0.0E0
window_vmon=2.76808E-1
window_imon=-8.03104E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82762E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.87065E1
mask2_imon=-6.58946E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92608E3
multa_neg_imon=7.09441E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.53925E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.12325E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43164E0
defgridb_imon=6.05619E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33325E1
os_fil1_imon=9.4403E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07629E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6197E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30902E1
cs_fil1_imon=9.95669E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.623E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62972E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.58961E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.86337E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3509E-1
cs_fil2_imon=-2.56986E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07014E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2209E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28592E-3
inlet_lpb_pmon=2.11509E-2
chamber_ion_pmon=2.23964E-9
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.80916E-1
res40_imon=-2.63392E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.17823E-1	-7.98082E-1	-9.13219E0	-9.14288E0	3.67165E-3	9.64403E-2	2.73364E1	-3.26992E1	-3.26378E1	2.68256E1	2.23915E-9	2.51662E-3	2.51662E-3	6.36797E-3	2.12034E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.17513E-1	-7.98345E-1	-9.13212E0	-9.1428E0	3.52859E-3	9.63688E-2	2.73045E1	-3.26517E1	-3.26425E1	2.6828E1	2.23773E-9	2.52384E-3	2.52384E-3	6.2645E-3	2.13502E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.17895E-1	-7.98368E-1	-9.13219E0	-9.14259E0	3.43323E-3	9.6488E-2	2.73155E1	-3.26451E1	-3.2633E1	2.68163E1	2.23863E-9	2.51136E-3	2.51136E-3	6.34661E-3	2.1428E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.1811E-1	-7.98392E-1	-9.13227E0	-9.14271E0	3.52859E-3	9.65595E-2	2.73322E1	-3.26567E1	-3.26113E1	2.68412E1	2.24106E-9	2.51603E-3	2.51603E-3	6.36047E-3	2.13314E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.18086E-1	-7.98607E-1	-9.13203E0	-9.1428E0	3.69549E-3	9.64642E-2	2.73387E1	-3.26795E1	-3.26134E1	2.68322E1	2.23583E-9	2.51954E-3	2.51954E-3	6.2645E-3	2.11509E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.1811E-1	-7.98631E-1	-9.13196E0	-9.14245E0	3.48091E-3	9.63688E-2	2.73243E1	-3.26813E1	-3.26212E1	2.68478E1	2.23963E-9	2.51359E-3	2.51359E-3	6.26289E-3	2.12392E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.178E-1	-7.98368E-1	-9.13231E0	-9.14302E0	3.6478E-3	9.64642E-2	2.73464E1	-3.26419E1	-3.25912E1	2.68296E1	2.24347E-9	2.52384E-3	2.52384E-3	6.2645E-3	2.1187E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.17943E-1	-7.98607E-1	-9.13229E0	-9.14311E0	3.3617E-3	9.61304E-2	2.73134E1	-3.26449E1	-3.2616E1	2.68358E1	2.23392E-9	2.51954E-3	2.51954E-3	6.25382E-3	2.1332E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.17752E-1	-7.98678E-1	-9.13219E0	-9.14297E0	3.48091E-3	9.60588E-2	2.73105E1	-3.26801E1	-3.25984E1	2.68496E1	2.23526E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.13513E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.17633E-1	-7.98655E-1	-9.13224E0	-9.1428E0	3.79086E-3	9.63211E-2	2.73201E1	-3.26302E1	-3.26104E1	2.68082E1	2.24402E-9	2.52538E-3	2.52538E-3	6.37905E-3	2.13142E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.17728E-1	-7.98631E-1	-9.13188E0	-9.14307E0	3.55244E-3	9.63926E-2	2.72769E1	-3.2599E1	-3.2653E1	2.68611E1	2.23818E-9	2.51552E-3	2.51552E-3	6.37905E-3	2.12034E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.1768E-1	-7.98559E-1	-9.13193E0	-9.14283E0	3.62396E-3	9.64165E-2	2.73177E1	-3.26717E1	-3.26158E1	2.68358E1	2.23332E-9	2.51443E-3	2.51443E-3	6.26916E-3	2.13142E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.17728E-1	-7.9844E-1	-9.13222E0	-9.14278E0	3.57628E-3	9.65357E-2	2.73345E1	-3.26212E1	-3.2611E1	2.68587E1	2.23583E-9	2.52492E-3	2.52492E-3	6.2752E-3	2.1405E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.17633E-1	-7.98273E-1	-9.1321E0	-9.14292E0	3.62396E-3	9.66549E-2	2.73093E1	-3.26615E1	-3.25942E1	2.68358E1	2.2327E-9	2.52027E-3	2.52027E-3	6.34661E-3	2.11454E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.17823E-1	-7.98535E-1	-9.13196E0	-9.14278E0	3.71933E-3	9.62973E-2	2.72811E1	-3.26759E1	-3.26554E1	2.68508E1	2.23869E-9	2.52061E-3	2.52061E-3	6.37774E-3	2.12775E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.17704E-1	-7.98488E-1	-9.13205E0	-9.14311E0	3.43323E-3	9.68695E-2	2.73117E1	-3.26765E1	-3.26404E1	2.68304E1	2.21401E-9	2.51662E-3	2.51662E-3	6.40682E-3	2.12957E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.17823E-1	-7.98178E-1	-9.1321E0	-9.14319E0	3.55244E-3	9.66549E-2	2.72991E1	-3.26915E1	-3.26014E1	2.68334E1	2.21401E-9	2.5199E-3	2.5199E-3	6.40682E-3	2.1407E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.17537E-1	-7.98345E-1	-9.13177E0	-9.14299E0	3.19481E-3	9.65118E-2	2.73588E1	-3.26632E1	-3.26284E1	2.6834E1	2.21689E-9	2.51225E-3	2.51225E-3	6.36797E-3	2.13513E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.17728E-1	-7.98488E-1	-9.13212E0	-9.14335E0	3.83854E-3	9.65834E-2	2.73381E1	-3.26461E1	-3.25965E1	2.68331E1	2.22654E-9	2.5188E-3	2.5188E-3	6.29098E-3	2.1407E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.178E-1	-7.98678E-1	-9.13234E0	-9.14328E0	3.93391E-3	9.65595E-2	2.7358E1	-3.26765E1	-3.26362E1	2.68256E1	2.23964E-9	2.51847E-3	2.51847E-3	6.28592E-3	2.11509E-2
