[Scan]
initial_time=2016-01-18T17:08:22
final_time=2016-01-18T17:08:41
ip_count=19
run=1024
dataset=2
scan=98
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08838E-4
ql1_vset=
ql1_vmon=-8.1749E-1
ql1_imon=1.38258E-8
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=1.96681E-9
ql3_vset=
ql3_vmon=-9.13272E0
ql3_imon=4.29499E-10
ql4_vset=
ql4_vmon=-9.14302E0
ql4_imon=-1.65021E-10
mult1=-9.8955E-9
mult2=-2.75008E-9
rf_tmon=-4.88458E-3
rf_agc=3.26112E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.33786E-3
ql5_imon=1.70503E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63495E0
bslens_imon=2.52556E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1937E1
lens5a_imon=2.01093E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53864E1
cs_ef1b_imon=2.7813E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02379E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04457E1
cs_ea1_imon=2.61228E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34012E0
lens1_imon=2.67776E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64892E1
os_ef1alow_imon=2.9853E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03873E1
cs_ea2_imon=1.49277E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84585E1
cs_ef1a_imon=2.92935E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.22367E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11332E1
os_restr1_imon=4.27253E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1514E1
os_ea1_imon=2.37691E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63519E1
os_ef1bup_imon=3.07878E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23499E0
cs_ionrep_imon=1.16608E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92005E2
cs_nozzle_imon=1.93463E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01919E1
cs_anode1_imon=2.9005E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=3.21509E-8
tplens_vset=1.4E-1
tplens_vmon=1.70337E0
tplens_imon=-4.22766E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.51577E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2619E1
iondef2_imon=1.58656E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03173E2
lens6_imon=2.98349E-4
ql6_vset=1.0E-1
ql6_vmon=9.67026E-2
ql6_imon=4.01613E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25033E0
ionrepsh_imon=1.72849E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33811E1
lens5b_imon=2.17941E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74733E1
cs_ef2b_imon=3.12918E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.38188E0
os_ea2_imon=-5.32488E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06192E2
lens4b_imon=2.00502E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71292E1
cs_ef2a_imon=3.15872E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06267E0
os_ef2alow_imon=-2.51203E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83909E-1
os_ef2bup_imon=-5.28876E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11407E1
os_restr2_imon=3.39434E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.29503E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01914E1
cs_anode2_imon=2.23986E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73146E1
iondef1_imon=1.09564E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68394E1
iondef4_imon=1.09963E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=4.83452E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.80949E-1
olens1_imon=7.41894E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12493E0
cs_ionaccel_imon=-1.62931E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02152E2
cs_ionfocb_imon=1.47456E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56307E1
einzel_imon=7.72607E-6
window_vset=0.0E0
window_vmon=2.53597E-1
window_imon=-8.30005E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82787E2
mask1_imon=2.39143E-4
mask2_vset=0.0E0
mask2_vmon=-1.86964E1
mask2_imon=-7.67451E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92677E3
multa_neg_imon=7.26837E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.41537E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.28607E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41146E0
defgridb_imon=6.20301E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33314E1
os_fil1_imon=9.41117E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07196E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62187E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30933E1
cs_fil1_imon=9.95707E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62453E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62903E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.72444E-2
os_fil2_imon=-2.59968E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.08033E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.98833E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37143E-1
cs_fil2_imon=-2.4375E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28102E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22325E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3126E-3
inlet_lpb_pmon=2.12957E-2
chamber_ion_pmon=2.24058E-9
chamber_cvt_pmon=2.51575E-3
foreline_cvt_pmon=2.51575E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.73107E-1
res40_imon=-2.40082E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.1799E-1	-7.98583E-1	-9.13224E0	-9.14309E0	3.50475E-3	9.64165E-2	2.73069E1	-3.26526E1	-3.26278E1	2.6828E1	2.21401E-9	2.51525E-3	2.51525E-3	6.25382E-3	2.14598E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.1768E-1	-7.98559E-1	-9.13224E0	-9.14326E0	3.40939E-3	9.66311E-2	2.73247E1	-3.26731E1	-3.26603E1	2.6819E1	2.21401E-9	2.51417E-3	2.51417E-3	6.24849E-3	2.13685E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.17633E-1	-7.98655E-1	-9.13191E0	-9.14338E0	3.93391E-3	9.6488E-2	2.73175E1	-3.26649E1	-3.26313E1	2.68209E1	2.21499E-9	2.52139E-3	2.52139E-3	6.28511E-3	2.13334E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.18014E-1	-7.98726E-1	-9.13186E0	-9.14292E0	3.93391E-3	9.65595E-2	2.73381E1	-3.26797E1	-3.26484E1	2.68454E1	2.22237E-9	2.52236E-3	2.52236E-3	6.3074E-3	2.13493E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.18133E-1	-7.98535E-1	-9.13184E0	-9.14323E0	3.74317E-3	9.62496E-2	2.73231E1	-3.26573E1	-3.25876E1	2.68226E1	2.23623E-9	2.51662E-3	2.51662E-3	6.35692E-3	2.13327E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.17966E-1	-7.98464E-1	-9.13205E0	-9.14333E0	3.86238E-3	9.64165E-2	2.73279E1	-3.26669E1	-3.26014E1	2.68136E1	2.24012E-9	2.5188E-3	2.5188E-3	6.34037E-3	2.1185E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.18038E-1	-7.98655E-1	-9.13219E0	-9.14319E0	3.12328E-3	9.63926E-2	2.73375E1	-3.26482E1	-3.2587E1	2.68364E1	2.2372E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.12034E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.18157E-1	-7.98464E-1	-9.13215E0	-9.14311E0	3.50475E-3	9.66311E-2	2.73363E1	-3.26518E1	-3.2617E1	2.68286E1	2.24304E-9	2.52428E-3	2.52428E-3	6.25827E-3	2.1185E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.18181E-1	-7.9813E-1	-9.13224E0	-9.14299E0	3.67165E-3	9.66311E-2	2.73159E1	-3.26603E1	-3.26266E1	2.68352E1	2.23526E-9	2.51552E-3	2.51552E-3	6.25827E-3	2.12587E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.18133E-1	-7.98321E-1	-9.13186E0	-9.1428E0	3.71933E-3	9.65834E-2	2.73063E1	-3.26897E1	-3.2602E1	2.6822E1	2.2372E-9	2.51334E-3	2.51334E-3	6.28552E-3	2.12403E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.18062E-1	-7.98321E-1	-9.13205E0	-9.14295E0	3.79086E-3	9.65357E-2	2.73309E1	-3.26218E1	-3.2602E1	2.68328E1	2.23964E-9	2.51954E-3	2.51954E-3	6.28056E-3	2.12413E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.17919E-1	-7.98345E-1	-9.13217E0	-9.14283E0	3.60012E-3	9.67503E-2	2.73351E1	-3.26861E1	-3.2593E1	2.68382E1	2.23963E-9	2.51915E-3	2.51915E-3	6.36349E-3	2.1428E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-8.17943E-1	-7.98535E-1	-9.13212E0	-9.1428E0	3.76701E-3	9.65834E-2	2.73753E1	-3.2698E1	-3.26148E1	2.68324E1	2.23869E-9	2.52492E-3	2.52492E-3	6.3723E-3	2.1187E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09348E0	-8.178E-1	-7.98512E-1	-9.1321E0	-9.14302E0	3.71933E-3	9.69172E-2	2.7358E1	-3.26681E1	-3.26104E1	2.68448E1	2.23915E-9	2.52209E-3	2.52209E-3	6.26916E-3	2.13142E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09387E0	-8.17847E-1	-7.98488E-1	-9.13212E0	-9.14338E0	3.52859E-3	9.67264E-2	2.7324E1	-3.26797E1	-3.26679E1	2.68436E1	2.24442E-9	2.52061E-3	2.52061E-3	6.34518E-3	2.13139E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-8.17657E-1	-7.98798E-1	-9.13239E0	-9.14311E0	3.67165E-3	9.66787E-2	2.73321E1	-3.26597E1	-3.25906E1	2.68166E1	2.23869E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.12594E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09394E0	-8.17847E-1	-7.98488E-1	-9.13262E0	-9.14309E0	3.74317E-3	9.66072E-2	2.73387E1	-3.26703E1	-3.26673E1	2.68406E1	2.22075E-9	2.51662E-3	2.51662E-3	6.3514E-3	2.12587E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.17752E-1	-7.98273E-1	-9.13231E0	-9.14302E0	3.50475E-3	9.65834E-2	2.73249E1	-3.26482E1	-3.26014E1	2.68148E1	2.22848E-9	2.52099E-3	2.52099E-3	6.28552E-3	2.12957E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.17513E-1	-7.98583E-1	-9.13258E0	-9.14307E0	3.55244E-3	9.64165E-2	2.73398E1	-3.26741E1	-3.26042E1	2.68105E1	2.2406E-9	2.52599E-3	2.52599E-3	6.35059E-3	2.13139E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.1749E-1	-7.98416E-1	-9.13272E0	-9.14302E0	3.33786E-3	9.67026E-2	2.73146E1	-3.2619E1	-3.2626E1	2.68394E1	2.24058E-9	2.51575E-3	2.51575E-3	6.3126E-3	2.12957E-2
