[Scan]
initial_time=2016-01-18T17:11:28
final_time=2016-01-18T17:11:48
ip_count=19
run=1024
dataset=2
scan=105
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08794E-4
ql1_vset=
ql1_vmon=-8.1718E-1
ql1_imon=1.37596E-8
ql2_vset=
ql2_vmon=-7.97844E-1
ql2_imon=1.96223E-9
ql3_vset=
ql3_vmon=-9.13212E0
ql3_imon=2.85554E-10
ql4_vset=
ql4_vmon=-9.14268E0
ql4_imon=-1.43862E-10
mult1=-9.16244E-9
mult2=-2.73059E-9
rf_tmon=-5.78617E-3
rf_agc=3.23602E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.88622E-3
ql5_imon=1.68885E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67515E0
bslens_imon=2.40076E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19622E1
lens5a_imon=1.99497E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12547E2
lens4a_imon=2.05024E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54169E1
cs_ef1b_imon=2.80394E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.02153E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04742E1
cs_ea1_imon=2.60637E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3299E0
lens1_imon=2.67835E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.97693E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03522E1
cs_ea2_imon=1.50361E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84334E1
cs_ef1a_imon=2.92143E-5
olens2_vset=9.7E-1
olens2_vmon=9.69768E-1
olens2_imon=1.24639E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=4.2877E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15149E1
os_ea1_imon=2.36448E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63545E1
os_ef1bup_imon=3.07064E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22566E0
cs_ionrep_imon=1.18097E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91987E2
cs_nozzle_imon=1.93525E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=2.90522E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20432E0
olens4_imon=3.22723E-8
tplens_vset=1.4E-1
tplens_vmon=1.69911E0
tplens_imon=-2.66901E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26218E1
iondef3_imon=1.50469E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26543E1
iondef2_imon=1.56886E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03189E2
lens6_imon=2.98256E-4
ql6_vset=1.0E-1
ql6_vmon=9.63688E-2
ql6_imon=3.96836E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24309E0
ionrepsh_imon=1.72604E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33688E1
lens5b_imon=2.18026E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.13515E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42033E0
os_ea2_imon=-6.77866E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06196E2
lens4b_imon=2.00464E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7148E1
cs_ef2a_imon=3.15065E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04735E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86011E-1
os_ef2bup_imon=-5.24679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1143E1
os_restr2_imon=3.404E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.29496E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02133E1
cs_anode2_imon=2.22803E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73129E1
iondef1_imon=1.11031E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68328E1
iondef4_imon=1.09602E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.86751E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.49951E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10251E0
cs_ionaccel_imon=-1.84465E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02132E2
cs_ionfocb_imon=1.47342E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.80317E-6
window_vset=0.0E0
window_vmon=2.56386E-1
window_imon=-7.92292E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82768E2
mask1_imon=2.39232E-4
mask2_vset=0.0E0
mask2_vmon=-1.86969E1
mask2_imon=-6.22906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.84424E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93744E3
defgrida_imon=6.49239E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.18454E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3354E0
defgridb_imon=6.11026E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33324E1
os_fil1_imon=9.4039E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07936E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62654E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30887E1
cs_fil1_imon=9.94582E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62708E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63678E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6154E-2
os_fil2_imon=-2.71402E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.52308E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37161E-1
cs_fil2_imon=-2.5098E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.578E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2241E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.1405E-2
chamber_ion_pmon=2.24251E-9
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.09147E-1
res40_imon=-2.47174E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.17084E-1	-7.98726E-1	-9.13243E0	-9.14283E0	3.67165E-3	9.64165E-2	2.73393E1	-3.26679E1	-3.26431E1	2.68142E1	2.23332E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.13327E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.17037E-1	-7.98225E-1	-9.13248E0	-9.14278E0	3.83854E-3	9.63688E-2	2.73255E1	-3.26476E1	-3.26128E1	2.6843E1	2.24155E-9	2.51739E-3	2.51739E-3	6.33436E-3	2.1332E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.16989E-1	-7.9813E-1	-9.13239E0	-9.1428E0	3.93391E-3	9.63688E-2	2.73269E1	-3.26767E1	-3.26254E1	2.68238E1	2.24402E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.12957E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.17084E-1	-7.98202E-1	-9.13222E0	-9.14285E0	3.6478E-3	9.64165E-2	2.73159E1	-3.26747E1	-3.26362E1	2.68528E1	2.2406E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.12232E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.17299E-1	-7.98154E-1	-9.13227E0	-9.14257E0	3.57628E-3	9.67741E-2	2.73204E1	-3.26467E1	-3.26254E1	2.6831E1	2.22268E-9	2.51771E-3	2.51771E-3	6.29098E-3	2.13142E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.17204E-1	-7.98368E-1	-9.13222E0	-9.14295E0	3.60012E-3	9.67741E-2	2.72973E1	-3.26543E1	-3.26092E1	2.68226E1	2.21401E-9	2.51334E-3	2.51334E-3	6.32386E-3	2.1407E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.1737E-1	-7.98178E-1	-9.13234E0	-9.14273E0	3.76701E-3	9.65357E-2	2.73159E1	-3.26561E1	-3.2629E1	2.68478E1	2.22631E-9	2.52707E-3	2.52707E-3	6.31278E-3	2.12775E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.17585E-1	-7.97987E-1	-9.1321E0	-9.14276E0	3.88622E-3	9.65357E-2	2.73189E1	-3.26554E1	-3.2614E1	2.68334E1	2.23526E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.13327E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.17537E-1	-7.97915E-1	-9.13243E0	-9.14285E0	4.12464E-3	9.66072E-2	2.73346E1	-3.26756E1	-3.26172E1	2.684E1	2.23041E-9	2.51334E-3	2.51334E-3	6.3074E-3	2.12587E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.17657E-1	-7.98297E-1	-9.13243E0	-9.14307E0	3.95775E-3	9.66787E-2	2.73225E1	-3.26338E1	-3.2596E1	2.68279E1	2.21873E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.1332E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.1768E-1	-7.97987E-1	-9.13215E0	-9.14268E0	3.93391E-3	9.63926E-2	2.73093E1	-3.26825E1	-3.26705E1	2.68406E1	2.24402E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.13327E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.17633E-1	-7.97987E-1	-9.1321E0	-9.14266E0	3.67165E-3	9.64165E-2	2.73526E1	-3.26741E1	-3.26074E1	2.68454E1	2.24207E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.13698E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.17347E-1	-7.97939E-1	-9.13227E0	-9.14292E0	3.57628E-3	9.66072E-2	2.73309E1	-3.26386E1	-3.26062E1	2.68196E1	2.24597E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.13327E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.17537E-1	-7.97939E-1	-9.13224E0	-9.14292E0	3.60012E-3	9.66787E-2	2.73075E1	-3.265E1	-3.2593E1	2.68418E1	2.23623E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.13698E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.17251E-1	-7.98106E-1	-9.13262E0	-9.14295E0	3.55244E-3	9.68218E-2	2.73499E1	-3.26419E1	-3.25759E1	2.6801E1	2.24109E-9	2.52428E-3	2.52428E-3	6.30192E-3	2.14442E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0934E0	-8.17299E-1	-7.97963E-1	-9.13236E0	-9.14288E0	3.45707E-3	9.68218E-2	2.73428E1	-3.26579E1	-3.26095E1	2.68286E1	2.23392E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.12775E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09387E0	-8.17323E-1	-7.98225E-1	-9.13243E0	-9.14285E0	3.60012E-3	9.67026E-2	2.73398E1	-3.26488E1	-3.26579E1	2.68283E1	2.23964E-9	2.51417E-3	2.51417E-3	6.34518E-3	2.14415E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.17418E-1	-7.97868E-1	-9.13215E0	-9.14278E0	3.71933E-3	9.62973E-2	2.73636E1	-3.26508E1	-3.26088E1	2.68303E1	2.23414E-9	2.50955E-3	2.50955E-3	6.34385E-3	2.13659E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.17084E-1	-7.97915E-1	-9.13205E0	-9.14285E0	3.8147E-3	9.66072E-2	2.73246E1	-3.2672E1	-3.26343E1	2.68412E1	2.24476E-9	2.51527E-3	2.51527E-3	6.33648E-3	2.13545E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.1718E-1	-7.97844E-1	-9.13212E0	-9.14268E0	3.88622E-3	9.63688E-2	2.73129E1	-3.26543E1	-3.26218E1	2.68328E1	2.24251E-9	2.52384E-3	2.52384E-3	6.32356E-3	2.1405E-2
