[Scan]
initial_time=2016-01-18T17:13:15
final_time=2016-01-18T17:13:35
ip_count=19
run=1024
dataset=2
scan=109
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08717E-4
ql1_vset=
ql1_vmon=-8.1687E-1
ql1_imon=1.36782E-8
ql2_vset=
ql2_vmon=-7.98297E-1
ql2_imon=1.94039E-9
ql3_vset=
ql3_vmon=-9.13208E0
ql3_imon=2.83682E-10
ql4_vset=
ql4_vmon=-9.14302E0
ql4_imon=-1.23918E-10
mult1=-9.51118E-9
mult2=-2.74285E-9
rf_tmon=-4.60976E-3
rf_agc=3.33622E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.52859E-3
ql5_imon=1.62821E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65206E0
bslens_imon=2.42646E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19553E1
lens5a_imon=1.99111E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12547E2
lens4a_imon=2.04888E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53826E1
cs_ef1b_imon=2.78196E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04652E2
lens23_imon=1.02376E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04469E1
cs_ea1_imon=2.60945E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35073E0
lens1_imon=2.71669E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.97729E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03525E1
cs_ea2_imon=1.48675E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84953E1
cs_ef1a_imon=2.93585E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.26309E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11472E1
os_restr1_imon=4.26391E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14663E1
os_ea1_imon=2.38151E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63593E1
os_ef1bup_imon=3.06739E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24797E0
cs_ionrep_imon=1.16679E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92012E2
cs_nozzle_imon=1.93639E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=2.92828E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20411E0
olens4_imon=3.24631E-8
tplens_vset=1.4E-1
tplens_vmon=1.69216E0
tplens_imon=-2.8119E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25995E1
iondef3_imon=1.51188E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26343E1
iondef2_imon=1.57134E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03146E2
lens6_imon=2.98066E-4
ql6_vset=1.0E-1
ql6_vmon=9.64403E-2
ql6_imon=4.02613E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27687E0
ionrepsh_imon=1.71008E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.19994E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.11569E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37067E0
os_ea2_imon=-5.39567E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06193E2
lens4b_imon=2.00481E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71041E1
cs_ef2a_imon=3.15101E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05276E0
os_ef2alow_imon=-2.38164E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.88414E-1
os_ef2bup_imon=-5.17832E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1143E1
os_restr2_imon=3.41121E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.30211E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01995E1
cs_anode2_imon=2.2511E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73523E1
iondef1_imon=1.09777E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68569E1
iondef4_imon=1.08774E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=4.95228E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81045E-1
olens1_imon=7.55134E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13314E0
cs_ionaccel_imon=-1.66085E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02145E2
cs_ionfocb_imon=1.475E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56447E1
einzel_imon=7.67342E-6
window_vset=0.0E0
window_vmon=2.86419E-1
window_imon=-7.09401E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82797E2
mask1_imon=2.39437E-4
mask2_vset=0.0E0
mask2_vmon=-1.86873E1
mask2_imon=-8.13916E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.35685E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.67375E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50167E3
multb_neg_imon=6.99937E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31697E0
defgridb_imon=6.04019E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33322E1
os_fil1_imon=9.42799E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07684E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62761E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30952E1
cs_fil1_imon=9.95999E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62828E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64423E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52184E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.30747E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.80412E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13622E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22501E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.13327E-2
chamber_ion_pmon=2.21689E-9
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.87813E-1
res40_imon=-2.38885E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=822
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-8.17013E-1	-7.98178E-1	-9.13246E0	-9.14261E0	3.62396E-3	9.61065E-2	2.73336E1	-3.26841E1	-3.26306E1	2.68462E1	2.23637E-9	2.51867E-3	2.51867E-3	6.30476E-3	2.13403E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.1706E-1	-7.98035E-1	-9.13212E0	-9.14268E0	3.91006E-3	9.62496E-2	2.73294E1	-3.26797E1	-3.26088E1	2.68883E1					
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.17132E-1	-7.98154E-1	-9.13219E0	-9.14283E0	3.83854E-3	9.65834E-2	2.72992E1	-3.26526E1	-3.2626E1	2.68134E1	2.23848E-9	2.51314E-3	2.51314E-3	6.31666E-3	2.13896E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.16846E-1	-7.98297E-1	-9.13219E0	-9.14257E0	3.93391E-3	9.63211E-2	2.73237E1	-3.26458E1	-3.2623E1	2.68292E1	2.24294E-9	2.52025E-3	2.52025E-3	6.31269E-3	2.13135E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.16989E-1	-7.98297E-1	-9.13203E0	-9.14283E0	3.95775E-3	9.65118E-2	2.73151E1	-3.26602E1	-3.26101E1	2.68689E1	2.23863E-9	2.51915E-3	2.51915E-3	6.31858E-3	2.13145E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.17013E-1	-7.9813E-1	-9.13236E0	-9.14261E0	3.8147E-3	9.61542E-2	2.73231E1	-3.26549E1	-3.26038E1	2.68454E1	2.22726E-9	2.51525E-3	2.51525E-3	6.33436E-3	2.13685E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.1706E-1	-7.98392E-1	-9.13205E0	-9.14273E0	3.86238E-3	9.62734E-2	2.73381E1	-3.26437E1	-3.26408E1	2.68593E1	2.21968E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.12957E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.17037E-1	-7.98512E-1	-9.132E0	-9.14297E0	3.88622E-3	9.65118E-2	2.72959E1	-3.26578E1	-3.26334E1	2.68334E1	2.21882E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.12957E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.17299E-1	-7.98321E-1	-9.13196E0	-9.14266E0	3.83854E-3	9.60827E-2	2.73086E1	-3.26655E1	-3.26065E1	2.67949E1	2.22088E-9	2.52139E-3	2.52139E-3	6.32418E-3	2.1258E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.17418E-1	-7.98225E-1	-9.13188E0	-9.14288E0	4.02927E-3	9.63688E-2	2.73159E1	-3.265E1	-3.26266E1	2.68238E1	2.21401E-9	2.51393E-3	2.51393E-3	6.31798E-3	2.14209E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09394E0	-8.17275E-1	-7.97987E-1	-9.13239E0	-9.14276E0	3.67165E-3	9.62496E-2	2.72567E1	-3.26455E1	-3.26962E1	2.68192E1	2.23171E-9	2.51693E-3	2.51693E-3	6.33538E-3	2.12392E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.17275E-1	-7.97987E-1	-9.13246E0	-9.14299E0	3.91006E-3	9.64165E-2	2.7318E1	-3.26511E1	-3.26266E1	2.68232E1	2.23583E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.12051E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.17466E-1	-7.98059E-1	-9.13208E0	-9.14321E0	4.07696E-3	9.64165E-2	2.73454E1	-3.26597E1	-3.25984E1	2.68202E1	2.24207E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.1407E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.17156E-1	-7.98154E-1	-9.13217E0	-9.14276E0	3.95775E-3	9.62973E-2	2.73093E1	-3.26609E1	-3.25984E1	2.68436E1	2.23665E-9	2.5225E-3	2.5225E-3	6.31299E-3	2.13334E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09379E0	-8.17275E-1	-7.9813E-1	-9.13236E0	-9.14271E0	4.14848E-3	9.62496E-2	2.72915E1	-3.26679E1	-3.26124E1	2.68316E1	2.23892E-9	2.52189E-3	2.52189E-3	6.3428E-3	2.12591E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.17275E-1	-7.98178E-1	-9.1321E0	-9.14288E0	3.91006E-3	9.66072E-2	2.73462E1	-3.26306E1	-3.26393E1	2.68244E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.17275E-1	-7.98035E-1	-9.132E0	-9.14271E0	3.57628E-3	9.65595E-2	2.73531E1	-3.26616E1	-3.26335E1	2.68575E1	2.24106E-9	2.51287E-3	2.51287E-3	6.31798E-3	2.13672E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.1706E-1	-7.98225E-1	-9.13236E0	-9.14299E0	3.76701E-3	9.64642E-2	2.73193E1	-3.26225E1	-3.26313E1	2.68273E1	2.21497E-9	2.51607E-3	2.51607E-3	6.31837E-3	2.1268E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.16798E-1	-7.9813E-1	-9.13205E0	-9.14295E0	3.71933E-3	9.66311E-2	2.73405E1	-3.2688E1	-3.26048E1	2.68358E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.1687E-1	-7.98297E-1	-9.13208E0	-9.14302E0	3.52859E-3	9.64403E-2	2.73523E1	-3.26343E1	-3.25995E1	2.68569E1	2.21689E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.13327E-2
