[Scan]
initial_time=2016-01-18T17:18:08
final_time=2016-01-18T17:18:28
ip_count=19
run=1024
dataset=2
scan=120
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08798E-4
ql1_vset=
ql1_vmon=-8.16727E-1
ql1_imon=1.3673E-8
ql2_vset=
ql2_vmon=-7.98106E-1
ql2_imon=1.97855E-9
ql3_vset=
ql3_vmon=-9.13229E0
ql3_imon=1.64878E-10
ql4_vset=
ql4_vmon=-9.14297E0
ql4_imon=-9.63449E-11
mult1=-9.06612E-9
mult2=-2.6727E-9
rf_tmon=-3.86954E-3
rf_agc=3.3664E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.26769E-3
ql5_imon=1.67599E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6379E0
bslens_imon=2.37691E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19636E1
lens5a_imon=1.9989E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12532E2
lens4a_imon=2.05097E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53893E1
cs_ef1b_imon=2.81728E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02263E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04711E1
cs_ea1_imon=2.58998E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37492E0
lens1_imon=2.73085E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64921E1
os_ef1alow_imon=2.97549E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03619E1
cs_ea2_imon=1.46587E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84725E1
cs_ef1a_imon=2.94558E-5
olens2_vset=9.7E-1
olens2_vmon=9.69791E-1
olens2_imon=1.28628E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11646E1
os_restr1_imon=4.27544E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14869E1
os_ea1_imon=2.37125E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63545E1
os_ef1bup_imon=3.07604E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21611E0
cs_ionrep_imon=1.16785E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9198E2
cs_nozzle_imon=1.93678E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=2.93549E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20344E0
olens4_imon=3.27449E-8
tplens_vset=1.4E-1
tplens_vmon=1.68745E0
tplens_imon=-3.76754E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26296E1
iondef3_imon=1.52887E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26735E1
iondef2_imon=1.55577E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03159E2
lens6_imon=2.98151E-4
ql6_vset=1.0E-1
ql6_vmon=9.65595E-2
ql6_imon=3.98645E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24207E0
ionrepsh_imon=1.74937E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33604E1
lens5b_imon=2.16313E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74039E1
cs_ef2b_imon=3.13299E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43556E0
os_ea2_imon=-7.05919E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0617E2
lens4b_imon=2.00651E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71318E1
cs_ef2a_imon=3.1683E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05456E0
os_ef2alow_imon=-2.50778E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13642E-1
os_ef2bup_imon=-5.20355E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11382E1
os_restr2_imon=3.41482E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.29716E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01749E1
cs_anode2_imon=2.241E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73387E1
iondef1_imon=1.10768E-5
iondef4_vset=2.691E1
iondef4_vmon=2.684E1
iondef4_imon=1.09711E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=4.93129E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81069E-1
olens1_imon=7.71441E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-1.86988E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02117E2
cs_ionfocb_imon=1.47417E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56447E1
einzel_imon=7.71307E-6
window_vset=0.0E0
window_vmon=2.75006E-1
window_imon=-7.70669E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82759E2
mask1_imon=2.39189E-4
mask2_vset=0.0E0
mask2_vmon=-1.87029E1
mask2_imon=-5.68847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.21528E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.54279E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.29314E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.65655E0
defgridb_imon=5.97295E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33313E1
os_fil1_imon=9.37441E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07311E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63615E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3091E1
cs_fil1_imon=9.94167E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62354E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65201E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44586E-2
os_fil2_imon=-2.68399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87503E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.83922E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.5098E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.87833E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22683E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.12175E-2
chamber_ion_pmon=2.22933E-9
chamber_cvt_pmon=2.52454E-3
foreline_cvt_pmon=2.52454E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.55087E-1
res40_imon=-2.56544E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.16989E-1	-7.97725E-1	-9.13234E0	-9.14276E0	3.86238E-3	9.62257E-2	2.73201E1	-3.26356E1	-3.25888E1	2.68424E1	2.23964E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.12775E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.16917E-1	-7.97606E-1	-9.13246E0	-9.1428E0	3.8147E-3	9.61065E-2	2.73479E1	-3.26517E1	-3.26444E1	2.68004E1	2.24251E-9	2.52599E-3	2.52599E-3	6.32896E-3	2.12413E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.17013E-1	-7.97844E-1	-9.13217E0	-9.14278E0	3.83854E-3	9.63211E-2	2.73503E1	-3.2666E1	-3.26202E1	2.6814E1	2.23963E-9	2.5225E-3	2.5225E-3	6.3074E-3	2.12957E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.1706E-1	-7.97963E-1	-9.13246E0	-9.14264E0	3.74317E-3	9.62019E-2	2.73538E1	-3.26398E1	-3.26278E1	2.6834E1	2.23487E-9	2.52061E-3	2.52061E-3	6.33977E-3	2.13139E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09364E0	-8.16798E-1	-7.97915E-1	-9.13234E0	-9.14254E0	3.86238E-3	9.5892E-2	2.73169E1	-3.26531E1	-3.25924E1	2.68148E1	2.24155E-9	2.51847E-3	2.51847E-3	6.30202E-3	2.13139E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09371E0	-8.16965E-1	-7.9782E-1	-9.13212E0	-9.14266E0	4.14848E-3	9.62257E-2	2.73237E1	-3.26873E1	-3.26386E1	2.68148E1	2.23623E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.12034E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09402E0	-8.16965E-1	-7.97606E-1	-9.13227E0	-9.14283E0	4.26769E-3	9.62973E-2	2.73147E1	-3.26338E1	-3.262E1	2.6843E1	2.22751E-9	2.51552E-3	2.51552E-3	6.29098E-3	2.12587E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.16846E-1	-7.97725E-1	-9.13236E0	-9.14311E0	4.17233E-3	9.62019E-2	2.73165E1	-3.26639E1	-3.26068E1	2.68581E1	2.23915E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.13513E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0941E0	-8.16703E-1	-7.97915E-1	-9.13243E0	-9.14297E0	4.07696E-3	9.61304E-2	2.73117E1	-3.26464E1	-3.26212E1	2.68581E1	2.22558E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.13513E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09364E0	-8.16822E-1	-7.97939E-1	-9.1325E0	-9.14259E0	3.93391E-3	9.63688E-2	2.73273E1	-3.26765E1	-3.26074E1	2.68406E1	2.22268E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.13327E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09371E0	-8.16894E-1	-7.97772E-1	-9.13253E0	-9.14299E0	3.71933E-3	9.63926E-2	2.7334E1	-3.26632E1	-3.26095E1	2.68319E1	2.2159E-9	2.51525E-3	2.51525E-3	6.31278E-3	2.1405E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09309E0	-8.16703E-1	-7.97796E-1	-9.13258E0	-9.14295E0	4.19617E-3	9.62973E-2	2.73273E1	-3.26344E1	-3.25882E1	2.68118E1	2.2372E-9	2.52538E-3	2.52538E-3	6.33486E-3	2.13142E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09364E0	-8.16846E-1	-7.97963E-1	-9.13248E0	-9.14297E0	4.00543E-3	9.61304E-2	2.73394E1	-3.26468E1	-3.26438E1	2.68294E1	2.23138E-9	2.51662E-3	2.51662E-3	6.29098E-3	2.13142E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09402E0	-8.16441E-1	-7.97844E-1	-9.13241E0	-9.14307E0	4.1008E-3	9.62973E-2	2.73252E1	-3.2659E1	-3.26325E1	2.6843E1	2.23526E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.13698E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-8.16536E-1	-7.97772E-1	-9.13255E0	-9.14304E0	4.1008E-3	9.62734E-2	2.73177E1	-3.26488E1	-3.26506E1	2.68232E1	2.23041E-9	2.51443E-3	2.51443E-3	6.32936E-3	2.13884E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-8.17227E-1	-7.98011E-1	-9.13231E0	-9.14316E0	4.05312E-3	9.61065E-2	2.73201E1	-3.26158E1	-3.262E1	2.68124E1	2.21401E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.13513E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09348E0	-8.16607E-1	-7.98082E-1	-9.13208E0	-9.14285E0	3.79086E-3	9.63211E-2	2.73177E1	-3.26603E1	-3.2617E1	2.6837E1	2.21401E-9	2.51225E-3	2.51225E-3	6.31837E-3	2.13327E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0934E0	-8.16774E-1	-7.97892E-1	-9.13219E0	-9.14307E0	3.98159E-3	9.62496E-2	2.73546E1	-3.26749E1	-3.26299E1	2.68434E1	2.21401E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.12772E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.17013E-1	-7.97772E-1	-9.13215E0	-9.1429E0	3.8147E-3	9.62496E-2	2.7297E1	-3.26709E1	-3.26279E1	2.68381E1	2.22355E-9	2.51793E-3	2.51793E-3	6.31727E-3	2.13123E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.16727E-1	-7.98106E-1	-9.13229E0	-9.14297E0	4.26769E-3	9.65595E-2	2.73387E1	-3.26735E1	-3.26296E1	2.684E1	2.22933E-9	2.52454E-3	2.52454E-3	6.3074E-3	2.12175E-2
