[Scan]
initial_time=2016-01-18T17:23:55
final_time=2016-01-18T17:24:14
ip_count=19
run=1024
dataset=2
scan=133
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08791E-4
ql1_vset=
ql1_vmon=-8.16607E-1
ql1_imon=1.36398E-8
ql2_vset=
ql2_vmon=-7.97963E-1
ql2_imon=1.94072E-9
ql3_vset=
ql3_vmon=-9.13208E0
ql3_imon=1.67346E-10
ql4_vset=
ql4_vmon=-9.14295E0
ql4_imon=-3.05295E-11
mult1=-9.81854E-9
mult2=-2.62919E-9
rf_tmon=-4.69824E-3
rf_agc=3.3026E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.52859E-3
ql5_imon=1.6667E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65052E0
bslens_imon=2.48007E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19887E1
lens5a_imon=2.00434E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12515E2
lens4a_imon=2.04949E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53712E1
cs_ef1b_imon=2.83494E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02099E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04489E1
cs_ea1_imon=2.59375E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33351E0
lens1_imon=2.84417E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64939E1
os_ef1alow_imon=2.97838E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03492E1
cs_ea2_imon=1.50181E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84604E1
cs_ef1a_imon=2.94234E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.32134E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.26823E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15083E1
os_ea1_imon=2.37132E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63773E1
os_ef1bup_imon=3.08577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22386E0
cs_ionrep_imon=1.17845E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91982E2
cs_nozzle_imon=1.93517E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01911E1
cs_anode1_imon=2.96036E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2042E0
olens4_imon=3.30329E-8
tplens_vset=1.4E-1
tplens_vmon=1.68169E0
tplens_imon=-1.94802E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26136E1
iondef3_imon=1.49821E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26738E1
iondef2_imon=1.55697E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03144E2
lens6_imon=2.98342E-4
ql6_vset=1.0E-1
ql6_vmon=9.60588E-2
ql6_imon=4.04332E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24489E0
ionrepsh_imon=1.78011E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34259E1
lens5b_imon=2.17377E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74778E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4714E0
os_ea2_imon=-6.92286E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06169E2
lens4b_imon=2.00435E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71474E1
cs_ef2a_imon=3.16542E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06417E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04632E-1
os_ef2bup_imon=-5.25761E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11424E1
os_restr2_imon=3.42383E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.29676E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.24209E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73605E1
iondef1_imon=1.1013E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68496E1
iondef4_imon=1.10539E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.05241E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81188E-1
olens1_imon=7.82848E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13254E0
cs_ionaccel_imon=-1.80501E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02111E2
cs_ionfocb_imon=1.47374E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56645E1
einzel_imon=7.87525E-6
window_vset=0.0E0
window_vmon=2.58188E-1
window_imon=-8.24728E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82749E2
mask1_imon=2.39135E-4
mask2_vset=0.0E0
mask2_vmon=-1.8677E1
mask2_imon=-5.40015E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.19535E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.46355E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.28187E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3354E0
defgridb_imon=6.067E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3331E1
os_fil1_imon=9.41922E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07545E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64261E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30884E1
cs_fil1_imon=9.9675E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63573E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66417E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31876E-2
os_fil2_imon=-2.65996E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87503E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.52283E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.39567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23833E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22871E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=2.14815E-2
chamber_ion_pmon=2.23915E-9
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.71305E-1
res40_imon=-2.51138E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.16393E-1	-7.97868E-1	-9.13224E0	-9.14321E0	4.00543E-3	9.61065E-2	2.73572E1	-3.2655E1	-3.26341E1	2.68609E1	2.22171E-9	2.51443E-3	2.51443E-3	6.29645E-3	2.13698E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.16321E-1	-7.97772E-1	-9.13234E0	-9.14292E0	3.79086E-3	9.63926E-2	2.73173E1	-3.26462E1	-3.26107E1	2.68263E1	2.23731E-9	2.51498E-3	2.51498E-3	6.32328E-3	2.13314E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09619E0	-8.15988E-1	-7.97558E-1	-9.13203E0	-9.14292E0	3.98159E-3	9.63926E-2	2.73381E1	-3.26508E1	-3.2606E1	2.6825E1	2.24062E-9	2.51693E-3	2.51693E-3	6.31858E-3	2.13901E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09619E0	-8.16178E-1	-7.9751E-1	-9.13234E0	-9.14299E0	4.00543E-3	9.66072E-2	2.73075E1	-3.26729E1	-3.26158E1	2.68725E1	2.24155E-9	2.51739E-3	2.51739E-3	6.33436E-3	2.13867E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09634E0	-8.16202E-1	-7.97963E-1	-9.13229E0	-9.14257E0	3.6478E-3	9.62496E-2	2.73267E1	-3.26675E1	-3.26332E1	2.68352E1	2.23623E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.13698E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09627E0	-8.16345E-1	-7.97749E-1	-9.13229E0	-9.14283E0	3.55244E-3	9.61065E-2	2.73588E1	-3.26661E1	-3.26054E1	2.68412E1	2.22461E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.13142E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.16178E-1	-7.97868E-1	-9.13234E0	-9.1433E0	3.57628E-3	9.58443E-2	2.72941E1	-3.26202E1	-3.26289E1	2.68279E1	2.23297E-9	2.52599E-3	2.52599E-3	6.32896E-3	2.15148E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.16131E-1	-7.98082E-1	-9.13236E0	-9.14288E0	3.67165E-3	9.56774E-2	2.72816E1	-3.26826E1	-3.26171E1	2.68469E1	2.23637E-9	2.51709E-3	2.51709E-3	6.32328E-3	2.15831E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.1625E-1	-7.98082E-1	-9.13286E0	-9.14299E0	3.71933E-3	9.62257E-2	2.73405E1	-3.26458E1	-3.2647E1	2.68136E1	2.23344E-9	2.52222E-3	2.52222E-3	6.29002E-3	2.14727E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16202E-1	-7.9813E-1	-9.13255E0	-9.14309E0	3.76701E-3	9.60827E-2	2.73246E1	-3.26773E1	-3.26012E1	2.67812E1	2.22945E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.14442E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.16512E-1	-7.98392E-1	-9.13229E0	-9.14323E0	3.71933E-3	9.62257E-2	2.73417E1	-3.26195E1	-3.26166E1	2.68273E1	2.21779E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.13502E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.16393E-1	-7.97963E-1	-9.13246E0	-9.14321E0	3.74317E-3	9.61065E-2	2.73614E1	-3.26597E1	-3.25972E1	2.6834E1	2.22631E-9	2.52276E-3	2.52276E-3	6.28056E-3	2.14415E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.16607E-1	-7.98059E-1	-9.13243E0	-9.14309E0	3.67165E-3	9.60112E-2	2.72709E1	-3.26068E1	-3.26609E1	2.68176E1	2.21305E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.14815E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.16798E-1	-7.98178E-1	-9.13217E0	-9.14307E0	3.76701E-3	9.64403E-2	2.7334E1	-3.2639E1	-3.26154E1	2.68233E1	2.22579E-9	2.51248E-3	2.51248E-3	6.3074E-3	2.1485E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.16464E-1	-7.97749E-1	-9.13224E0	-9.14326E0	3.79086E-3	9.64642E-2	2.73574E1	-3.26723E1	-3.25719E1	2.6834E1	2.24155E-9	2.51203E-3	2.51203E-3	6.32356E-3	2.14781E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.16441E-1	-7.97963E-1	-9.13205E0	-9.14321E0	3.74317E-3	9.62019E-2	2.73529E1	-3.2662E1	-3.25835E1	2.68352E1	2.23818E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.13884E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.16536E-1	-7.97987E-1	-9.13212E0	-9.14357E0	3.76701E-3	9.63449E-2	2.73285E1	-3.26458E1	-3.26038E1	2.68046E1	2.23392E-9	2.51954E-3	2.51954E-3	6.33436E-3	2.15515E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.16727E-1	-7.97868E-1	-9.13224E0	-9.14307E0	3.8147E-3	9.64403E-2	2.73588E1	-3.26703E1	-3.26148E1	2.68209E1	2.23235E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.14442E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.16488E-1	-7.98059E-1	-9.13246E0	-9.14316E0	3.76701E-3	9.61304E-2	2.72861E1	-3.26689E1	-3.26303E1	2.68484E1	2.23297E-9	2.51632E-3	2.51632E-3	6.28592E-3	2.13867E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.16607E-1	-7.97963E-1	-9.13208E0	-9.14295E0	3.52859E-3	9.60588E-2	2.73605E1	-3.26738E1	-3.26136E1	2.68496E1	2.23915E-9	2.51552E-3	2.51552E-3	6.33486E-3	2.14815E-2
