[Scan]
initial_time=2016-01-18T17:26:34
final_time=2016-01-18T17:26:54
ip_count=19
run=1024
dataset=2
scan=139
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.0878E-4
ql1_vset=
ql1_vmon=-8.16226E-1
ql1_imon=1.35766E-8
ql2_vset=
ql2_vmon=-7.97629E-1
ql2_imon=1.97283E-9
ql3_vset=
ql3_vmon=-9.13279E0
ql3_imon=1.53387E-10
ql4_vset=
ql4_vmon=-9.14323E0
ql4_imon=-3.46541E-11
mult1=-6.35925E-9
mult2=-1.88402E-9
rf_tmon=-1.06983E-2
rf_agc=2.67293E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.55244E-3
ql5_imon=1.64855E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67635E0
bslens_imon=2.3539E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19598E1
lens5a_imon=1.99208E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.04963E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54165E1
cs_ef1b_imon=2.84907E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02226E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04555E1
cs_ea1_imon=2.57464E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36655E0
lens1_imon=2.80452E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64846E1
os_ef1alow_imon=2.986E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0342E1
cs_ea2_imon=1.49929E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84498E1
cs_ef1a_imon=2.95055E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.34003E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11558E1
os_restr1_imon=4.27636E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15071E1
os_ea1_imon=2.34357E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63519E1
os_ef1bup_imon=3.07844E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23708E0
cs_ionrep_imon=1.1889E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92025E2
cs_nozzle_imon=1.9355E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02006E1
cs_anode1_imon=2.9648E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20394E0
olens4_imon=3.323E-8
tplens_vset=1.4E-1
tplens_vmon=1.66547E0
tplens_imon=-4.18309E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25415E1
iondef3_imon=1.49676E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.25819E1
iondef2_imon=1.57787E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03127E2
lens6_imon=2.98191E-4
ql6_vset=1.0E-1
ql6_vmon=9.60588E-2
ql6_imon=4.04819E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24128E0
ionrepsh_imon=1.75992E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33814E1
lens5b_imon=2.16765E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74432E1
cs_ef2b_imon=3.12848E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47681E0
os_ea2_imon=-8.22064E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06154E2
lens4b_imon=2.00601E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71379E1
cs_ef2a_imon=3.15767E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08294E0
os_ef2alow_imon=-2.51203E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.21558E-1
os_ef2bup_imon=-5.2123E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11355E1
os_restr2_imon=3.43396E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.29171E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01885E1
cs_anode2_imon=2.25411E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73112E1
iondef1_imon=1.11932E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68369E1
iondef4_imon=1.09303E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.11169E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81259E-1
olens1_imon=7.84099E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12435E0
cs_ionaccel_imon=-1.69882E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02112E2
cs_ionfocb_imon=1.47358E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56625E1
einzel_imon=7.91026E-6
window_vset=0.0E0
window_vmon=2.69235E-1
window_imon=-9.16887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82755E2
mask1_imon=2.39143E-4
mask2_vset=0.0E0
mask2_vmon=-1.8686E1
mask2_imon=-5.13757E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92711E3
multa_neg_imon=6.82404E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.16434E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50158E3
multb_neg_imon=6.94661E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.24818E0
defgridb_imon=5.86873E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33314E1
os_fil1_imon=9.42119E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07445E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65073E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30886E1
cs_fil1_imon=9.96153E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63356E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67012E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.37035E-2
os_fil2_imon=-2.62864E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99924E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.95955E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33772E-1
cs_fil2_imon=-2.57651E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2926E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22948E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.13502E-2
chamber_ion_pmon=2.23773E-9
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.27553E-1
res40_imon=-2.41125E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=199
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.1625E-1	-7.98035E-1	-9.13234E0	-9.14288E0	3.60012E-3	9.59158E-2	2.73781E1	-3.26596E1	-3.26086E1	2.68196E1	2.23332E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.13698E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.16345E-1	-7.98368E-1	-9.13248E0	-9.14309E0	3.50475E-3	9.61065E-2	2.7307E1	-3.2636E1	-3.26503E1	2.684E1	2.23678E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.13502E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.16703E-1	-7.98154E-1	-9.13229E0	-9.14304E0	3.60012E-3	9.57966E-2	2.73086E1	-3.26729E1	-3.26359E1	2.68545E1	2.22678E-9	2.51804E-3	2.51804E-3	6.31858E-3	2.1258E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.16774E-1	-7.9813E-1	-9.13217E0	-9.14311E0	3.67165E-3	9.59158E-2	2.73265E1	-3.2667E1	-3.26223E1	2.68184E1	2.22983E-9	2.51603E-3	2.51603E-3	6.33919E-3	2.15289E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.16464E-1	-7.98392E-1	-9.13248E0	-9.14309E0	3.50475E-3	9.61542E-2	2.72877E1	-3.26651E1	-3.26194E1	2.68304E1	2.22974E-9	2.51915E-3	2.51915E-3	6.3074E-3	2.16569E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.16584E-1	-7.98035E-1	-9.13253E0	-9.1433E0	3.67165E-3	9.61304E-2	2.73294E1	-3.26544E1	-3.26127E1	2.68302E1	2.23138E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.13884E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.16631E-1	-7.97987E-1	-9.13239E0	-9.14316E0	3.6478E-3	9.64165E-2	2.73694E1	-3.26591E1	-3.26116E1	2.6852E1	2.23964E-9	2.51525E-3	2.51525E-3	6.32896E-3	2.15699E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.16989E-1	-7.97963E-1	-9.13241E0	-9.14285E0	3.57628E-3	9.64403E-2	2.73478E1	-3.26729E1	-3.26146E1	2.68292E1	2.23623E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.14815E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-8.16679E-1	-7.98035E-1	-9.13248E0	-9.14316E0	3.55244E-3	9.61542E-2	2.7242E1	-3.26308E1	-3.2617E1	2.68629E1	2.24012E-9	2.51771E-3	2.51771E-3	6.29645E-3	2.14442E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.16488E-1	-7.97772E-1	-9.13243E0	-9.14307E0	3.62396E-3	9.62019E-2	2.72552E1	-3.25785E1	-3.26945E1	2.6843E1	2.23107E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.14232E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.16607E-1	-7.97915E-1	-9.13205E0	-9.14302E0	3.79086E-3	9.62734E-2	2.73171E1	-3.26861E1	-3.25882E1	2.68364E1	2.23041E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.12772E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.16417E-1	-7.9813E-1	-9.13212E0	-9.14314E0	3.71933E-3	9.62973E-2	2.73151E1	-3.26396E1	-3.26183E1	2.6831E1	2.23429E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.13513E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.16226E-1	-7.9813E-1	-9.13193E0	-9.14311E0	3.67165E-3	9.62973E-2	2.72462E1	-3.26573E1	-3.26591E1	2.68635E1	2.24207E-9	2.51552E-3	2.51552E-3	6.29645E-3	2.14442E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.16536E-1	-7.98202E-1	-9.13246E0	-9.14321E0	3.69549E-3	9.61542E-2	2.73004E1	-3.26071E1	-3.26354E1	2.68157E1	2.23964E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.15331E-2
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16441E-1	-7.98368E-1	-9.13236E0	-9.14285E0	3.62396E-3	9.60112E-2	2.73357E1	-3.26909E1	-3.2608E1	2.68334E1	2.23526E-9	2.51225E-3	2.51225E-3	6.31288E-3	2.15189E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.16536E-1	-7.98273E-1	-9.1325E0	-9.14299E0	3.45707E-3	9.60112E-2	2.73508E1	-3.27065E1	-3.25761E1	2.68532E1	2.23041E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.15002E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.16488E-1	-7.98011E-1	-9.13272E0	-9.14307E0	3.62396E-3	9.56774E-2	2.73315E1	-3.26681E1	-3.262E1	2.68611E1	2.23487E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.14781E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.16011E-1	-7.97939E-1	-9.1327E0	-9.14295E0	3.55244E-3	9.5892E-2	2.73027E1	-3.26422E1	-3.26543E1	2.68382E1	2.23665E-9	2.52027E-3	2.52027E-3	6.31299E-3	2.1447E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.1625E-1	-7.97844E-1	-9.13241E0	-9.14285E0	3.69549E-3	9.58681E-2	2.73752E1	-3.26417E1	-3.26127E1	2.6796E1	2.23583E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.12775E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-8.16226E-1	-7.97629E-1	-9.13279E0	-9.14323E0	3.55244E-3	9.60588E-2	2.73112E1	-3.25819E1	-3.25415E1	2.68369E1	2.23773E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.13502E-2
