[Scan]
initial_time=2016-01-18T17:27:01
final_time=2016-01-18T17:27:20
ip_count=19
run=1024
dataset=2
scan=140
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08779E-4
ql1_vset=
ql1_vmon=-8.16369E-1
ql1_imon=1.36497E-8
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=1.98851E-9
ql3_vset=
ql3_vmon=-9.13191E0
ql3_imon=1.66404E-10
ql4_vset=
ql4_vmon=-9.14323E0
ql4_imon=-2.49982E-11
mult1=-1.07511E-8
mult2=-3.78762E-9
rf_tmon=-2.70961E-3
rf_agc=3.26611E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.83854E-3
ql5_imon=1.65321E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65172E0
bslens_imon=2.2818E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1946E1
lens5a_imon=2.01119E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12558E2
lens4a_imon=2.05078E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54325E1
cs_ef1b_imon=2.84647E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.01883E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04171E1
cs_ea1_imon=2.58221E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37256E0
lens1_imon=2.66393E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6471E1
os_ef1alow_imon=2.9791E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03684E1
cs_ea2_imon=1.46828E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84604E1
cs_ef1a_imon=2.95783E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.3317E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11256E1
os_restr1_imon=4.27652E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14663E1
os_ea1_imon=2.37241E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6381E1
os_ef1bup_imon=3.08866E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26472E0
cs_ionrep_imon=1.20873E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91978E2
cs_nozzle_imon=1.93251E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02157E1
cs_anode1_imon=2.96468E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.32975E-8
tplens_vset=1.4E-1
tplens_vmon=1.63422E0
tplens_imon=-2.81321E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26064E1
iondef3_imon=1.52344E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.28152E1
iondef2_imon=1.55841E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03099E2
lens6_imon=2.98014E-4
ql6_vset=1.0E-1
ql6_vmon=9.60112E-2
ql6_imon=4.05409E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25991E0
ionrepsh_imon=1.79129E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33526E1
lens5b_imon=2.16224E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74423E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47741E0
os_ea2_imon=-9.77077E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0616E2
lens4b_imon=2.00843E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71582E1
cs_ef2a_imon=3.1647E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05276E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86011E-1
os_ef2bup_imon=-5.26842E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11382E1
os_restr2_imon=3.42779E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.27765E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02079E1
cs_anode2_imon=2.23524E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73841E1
iondef1_imon=1.08147E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68671E1
iondef4_imon=1.09206E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.10457E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=7.89477E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11933E0
cs_ionaccel_imon=-1.74734E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02144E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56177E1
einzel_imon=7.60134E-6
window_vset=0.0E0
window_vmon=2.63593E-1
window_imon=-6.91381E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82765E2
mask1_imon=2.38965E-4
mask2_vset=0.0E0
mask2_vmon=-1.86758E1
mask2_imon=-5.50827E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92601E3
multa_neg_imon=7.67481E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.46355E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50048E3
multb_neg_imon=7.05836E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.84067E0
defgridb_imon=6.067E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33307E1
os_fil1_imon=9.41471E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07041E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65295E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30874E1
cs_fil1_imon=9.93921E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63081E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66984E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24138E-2
os_fil2_imon=-2.6059E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80896E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.83452E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34313E-1
cs_fil2_imon=-2.52782E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.61694E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22905E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.13698E-2
chamber_ion_pmon=2.23526E-9
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.16645E-1
res40_imon=-2.54382E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16536E-1	-7.9813E-1	-9.13248E0	-9.14297E0	3.40939E-3	9.62257E-2	2.72898E1	-3.26602E1	-3.26349E1	2.68184E1	2.23915E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.13884E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.16202E-1	-7.98202E-1	-9.13241E0	-9.14314E0	3.67165E-3	9.58443E-2	2.73033E1	-3.26376E1	-3.26468E1	2.68484E1	2.23869E-9	2.51739E-3	2.51739E-3	6.29665E-3	2.14781E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.16274E-1	-7.98059E-1	-9.13203E0	-9.1433E0	3.8147E-3	9.60827E-2	2.72999E1	-3.26324E1	-3.2644E1	2.68597E1	2.23566E-9	2.51581E-3	2.51581E-3	6.32978E-3	2.13523E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.16584E-1	-7.98416E-1	-9.13222E0	-9.14323E0	3.60012E-3	9.6035E-2	2.73207E1	-3.26729E1	-3.25954E1	2.68466E1	2.24012E-9	2.51919E-3	2.51919E-3	6.31269E-3	2.14928E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.16464E-1	-7.98011E-1	-9.13212E0	-9.14311E0	4.00543E-3	9.61304E-2	2.72916E1	-3.26646E1	-3.2664E1	2.68556E1	2.23963E-9	2.51136E-3	2.51136E-3	6.31299E-3	2.1466E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.16321E-1	-7.98082E-1	-9.13234E0	-9.14342E0	3.76701E-3	9.60827E-2	2.72829E1	-3.26543E1	-3.26314E1	2.68184E1	2.24012E-9	2.51334E-3	2.51334E-3	6.30192E-3	2.13698E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.16607E-1	-7.98082E-1	-9.13227E0	-9.14278E0	3.91006E-3	9.61065E-2	2.73159E1	-3.26332E1	-3.26254E1	2.68389E1	2.23235E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.13513E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.16345E-1	-7.97868E-1	-9.13227E0	-9.14276E0	3.76701E-3	9.59635E-2	2.72559E1	-3.26208E1	-3.26527E1	2.68322E1	2.23623E-9	2.52867E-3	2.52867E-3	6.32386E-3	2.13142E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.16369E-1	-7.9813E-1	-9.13217E0	-9.1428E0	3.71933E-3	9.62019E-2	2.73285E1	-3.26681E1	-3.26272E1	2.68502E1	2.23487E-9	2.52276E-3	2.52276E-3	6.29665E-3	2.15148E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.16584E-1	-7.98202E-1	-9.13222E0	-9.14292E0	3.74317E-3	9.59158E-2	2.7406E1	-3.2675E1	-3.26071E1	2.67978E1	2.2406E-9	2.52384E-3	2.52384E-3	6.33436E-3	2.14232E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.16464E-1	-7.98178E-1	-9.13246E0	-9.14304E0	4.02927E-3	9.60112E-2	2.736E1	-3.26634E1	-3.26042E1	2.68138E1	2.24012E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.15002E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.16417E-1	-7.98082E-1	-9.13229E0	-9.1429E0	3.98159E-3	9.62019E-2	2.73039E1	-3.26536E1	-3.26404E1	2.68238E1	2.24359E-9	2.52139E-3	2.52139E-3	6.31299E-3	2.15612E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-8.16226E-1	-7.9782E-1	-9.13193E0	-9.14276E0	3.88622E-3	9.57727E-2	2.73381E1	-3.26396E1	-3.25971E1	2.68376E1	2.24012E-9	2.51771E-3	2.51771E-3	6.3514E-3	2.14256E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.16298E-1	-7.98035E-1	-9.13215E0	-9.14311E0	3.55244E-3	9.61304E-2	2.73424E1	-3.26524E1	-3.26224E1	2.68505E1	2.24251E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.14964E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.16298E-1	-7.98059E-1	-9.13234E0	-9.14288E0	3.74317E-3	9.5892E-2	2.73333E1	-3.26753E1	-3.26104E1	2.68288E1	2.23332E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.15002E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.16321E-1	-7.97963E-1	-9.13236E0	-9.14309E0	3.71933E-3	9.6035E-2	2.73478E1	-3.26615E1	-3.26296E1	2.68514E1	2.24402E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.14815E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09627E0	-8.16417E-1	-7.97868E-1	-9.13217E0	-9.14295E0	4.24385E-3	9.62257E-2	2.73099E1	-3.26783E1	-3.26344E1	2.68334E1	2.23915E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.14442E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16321E-1	-7.97915E-1	-9.13205E0	-9.14333E0	4.1008E-3	9.63926E-2	2.7344E1	-3.2672E1	-3.26443E1	2.68632E1	2.24012E-9	2.51443E-3	2.51443E-3	6.32936E-3	2.13884E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.1625E-1	-7.97844E-1	-9.13179E0	-9.14297E0	4.00543E-3	9.60827E-2	2.73375E1	-3.27104E1	-3.26313E1	2.68256E1	2.23392E-9	2.52384E-3	2.52384E-3	6.32896E-3	2.13502E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.16369E-1	-7.98225E-1	-9.13191E0	-9.14323E0	3.83854E-3	9.60112E-2	2.73841E1	-3.28152E1	-3.26064E1	2.68671E1	2.23526E-9	2.51443E-3	2.51443E-3	6.31288E-3	2.13698E-2
