[Scan]
initial_time=2016-01-18T17:29:14
final_time=2016-01-18T17:29:34
ip_count=19
run=1024
dataset=2
scan=145
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09371E0
qbias_imon=-1.08756E-4
ql1_vset=
ql1_vmon=-8.16369E-1
ql1_imon=1.36282E-8
ql2_vset=
ql2_vmon=-7.97987E-1
ql2_imon=1.92976E-9
ql3_vset=
ql3_vmon=-9.13231E0
ql3_imon=1.59836E-10
ql4_vset=
ql4_vmon=-9.14302E0
ql4_imon=-1.82986E-11
mult1=-9.25347E-9
mult2=-2.83183E-9
rf_tmon=-5.02505E-3
rf_agc=3.42004E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.6478E-3
ql5_imon=1.66223E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67755E0
bslens_imon=2.49089E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19815E1
lens5a_imon=2.00722E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.04927E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53826E1
cs_ef1b_imon=2.84899E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02229E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04477E1
cs_ea1_imon=2.57176E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35153E0
lens1_imon=2.55217E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64921E1
os_ef1alow_imon=2.98126E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03732E1
cs_ea2_imon=1.4827E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84532E1
cs_ef1a_imon=2.95135E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.34055E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=4.26751E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15155E1
os_ea1_imon=2.35979E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63473E1
os_ef1bup_imon=3.08109E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21304E0
cs_ionrep_imon=1.20008E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9197E2
cs_nozzle_imon=1.93481E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.00962E1
cs_anode1_imon=2.96684E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20394E0
olens4_imon=3.34405E-8
tplens_vset=1.4E-1
tplens_vmon=1.67328E0
tplens_imon=-2.95741E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26176E1
iondef3_imon=1.5083E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26721E1
iondef2_imon=1.56201E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03105E2
lens6_imon=2.98238E-4
ql6_vset=1.0E-1
ql6_vmon=9.63688E-2
ql6_imon=4.07276E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26231E0
ionrepsh_imon=1.79814E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33796E1
lens5b_imon=2.15647E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74537E1
cs_ef2b_imon=3.12037E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45337E0
os_ea2_imon=-6.74261E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06158E2
lens4b_imon=2.0041E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71306E1
cs_ef2a_imon=3.16038E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06117E0
os_ef2alow_imon=-2.41768E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.22051E-1
os_ef2bup_imon=-5.10264E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.114E1
os_restr2_imon=3.42851E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.28378E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01743E1
cs_anode2_imon=2.25073E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73414E1
iondef1_imon=1.09733E-5
iondef4_vset=2.691E1
iondef4_vmon=2.684E1
iondef4_imon=1.10395E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.12122E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81426E-1
olens1_imon=7.92282E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.03824E0
cs_ionaccel_imon=-1.68247E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02133E2
cs_ionfocb_imon=1.47367E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56309E1
einzel_imon=7.6482E-6
window_vset=0.0E0
window_vmon=2.6059E-1
window_imon=-8.89599E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82734E2
mask1_imon=2.39019E-4
mask2_vset=0.0E0
mask2_vmon=-1.86927E1
mask2_imon=-7.70669E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.29269E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93696E3
defgrida_imon=7.05476E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=6.64379E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39856E0
defgridb_imon=6.18597E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33292E1
os_fil1_imon=9.45321E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07672E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65181E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30834E1
cs_fil1_imon=9.96888E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62894E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66704E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52512E-2
os_fil2_imon=-2.81613E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01318E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.91057E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38327E-1
cs_fil2_imon=-2.82815E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.29549E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22881E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30239E-3
inlet_lpb_pmon=2.13296E-2
chamber_ion_pmon=2.23968E-9
chamber_cvt_pmon=2.51823E-3
foreline_cvt_pmon=2.51823E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.00137E-1
res40_imon=-2.56184E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-8.16417E-1	-7.97749E-1	-9.13239E0	-9.14295E0	3.55244E-3	9.62973E-2	2.7321E1	-3.26449E1	-3.26248E1	2.68279E1	2.22654E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.13698E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.16226E-1	-7.9751E-1	-9.13222E0	-9.1429E0	3.38554E-3	9.59396E-2	2.73392E1	-3.26536E1	-3.26206E1	2.68022E1	2.2159E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.13139E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.16226E-1	-7.97868E-1	-9.13219E0	-9.14316E0	3.62396E-3	9.63449E-2	2.73313E1	-3.26734E1	-3.26191E1	2.68369E1	2.22703E-9	2.51203E-3	2.51203E-3	6.3074E-3	2.13624E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.16131E-1	-7.97725E-1	-9.13236E0	-9.14323E0	3.76701E-3	9.62496E-2	2.73169E1	-3.2652E1	-3.26089E1	2.68082E1	2.22904E-9	2.51271E-3	2.51271E-3	6.3131E-3	2.13727E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.16083E-1	-7.97796E-1	-9.1325E0	-9.14319E0	3.69549E-3	9.61304E-2	2.73087E1	-3.26615E1	-3.26014E1	2.68352E1	2.22347E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.14964E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09379E0	-8.15988E-1	-7.97772E-1	-9.13236E0	-9.14316E0	3.93391E-3	9.61065E-2	2.72957E1	-3.26337E1	-3.26036E1	2.68458E1	2.24012E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.15189E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.1594E-1	-7.97868E-1	-9.1321E0	-9.14304E0	3.79086E-3	9.62019E-2	2.73369E1	-3.2648E1	-3.25923E1	2.68136E1	2.22063E-9	2.51525E-3	2.51525E-3	6.3074E-3	2.14964E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.15892E-1	-7.97796E-1	-9.13222E0	-9.14316E0	3.91006E-3	9.61542E-2	2.73153E1	-3.26218E1	-3.26044E1	2.67974E1	2.24207E-9	2.52757E-3	2.52757E-3	6.31288E-3	2.12772E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.1625E-1	-7.97653E-1	-9.13265E0	-9.14333E0	3.95775E-3	9.62019E-2	2.72892E1	-3.26384E1	-3.26301E1	2.68556E1	2.23915E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.14256E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.16202E-1	-7.97725E-1	-9.13234E0	-9.14311E0	3.93391E-3	9.6035E-2	2.73466E1	-3.26645E1	-3.2614E1	2.68352E1	2.23041E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.1407E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.16035E-1	-7.97629E-1	-9.13222E0	-9.14292E0	3.45707E-3	9.57966E-2	2.73057E1	-3.26134E1	-3.2587E1	2.68154E1	2.22726E-9	2.5131E-3	2.5131E-3	6.33436E-3	2.15148E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.16083E-1	-7.97749E-1	-9.1321E0	-9.14307E0	3.76701E-3	9.6035E-2	2.73111E1	-3.26855E1	-3.26194E1	2.68484E1	2.21793E-9	2.51804E-3	2.51804E-3	6.31858E-3	2.15803E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09333E0	-8.16226E-1	-7.97606E-1	-9.13229E0	-9.14316E0	3.45707E-3	9.61542E-2	2.73753E1	-3.2649E1	-3.25971E1	2.68196E1	2.22364E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.14815E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09348E0	-8.16226E-1	-7.97439E-1	-9.1321E0	-9.14314E0	3.76701E-3	9.63449E-2	2.72967E1	-3.26765E1	-3.26296E1	2.68695E1	2.22157E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.1332E-2
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09309E0	-8.16298E-1	-7.97772E-1	-9.13212E0	-9.14316E0	3.62396E-3	9.65595E-2	2.73284E1	-3.26456E1	-3.25985E1	2.684E1	2.23915E-9	2.51225E-3	2.51225E-3	6.31837E-3	2.12587E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09317E0	-8.16441E-1	-7.97653E-1	-9.13246E0	-9.14297E0	3.83854E-3	9.63211E-2	2.73381E1	-3.26077E1	-3.25523E1	2.68298E1	2.23764E-9	2.51804E-3	2.51804E-3	6.30182E-3	2.13901E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09348E0	-8.16607E-1	-7.97796E-1	-9.1325E0	-9.14314E0	3.33786E-3	9.64165E-2	2.73135E1	-3.26609E1	-3.26296E1	2.6846E1	2.24347E-9	2.51203E-3	2.51203E-3	6.31278E-3	2.13139E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.16679E-1	-7.9782E-1	-9.13222E0	-9.14297E0	3.76701E-3	9.65595E-2	2.7308E1	-3.26679E1	-3.2616E1	2.68308E1	2.23915E-9	2.51771E-3	2.51771E-3	6.34037E-3	2.14256E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09364E0	-8.16512E-1	-7.97892E-1	-9.13227E0	-9.14328E0	3.57628E-3	9.62496E-2	2.73139E1	-3.26447E1	-3.26348E1	2.68395E1	2.24251E-9	2.51739E-3	2.51739E-3	6.28592E-3	2.14781E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09371E0	-8.16369E-1	-7.97987E-1	-9.13231E0	-9.14302E0	3.6478E-3	9.63688E-2	2.73414E1	-3.26721E1	-3.26176E1	2.684E1	2.23968E-9	2.51823E-3	2.51823E-3	6.30239E-3	2.13296E-2
