[Scan]
initial_time=2016-01-18T17:30:07
final_time=2016-01-18T17:30:27
ip_count=19
run=1024
dataset=2
scan=147
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08778E-4
ql1_vset=
ql1_vmon=-8.16679E-1
ql1_imon=1.36336E-8
ql2_vset=
ql2_vmon=-7.97772E-1
ql2_imon=1.95795E-9
ql3_vset=
ql3_vmon=-9.13241E0
ql3_imon=1.61052E-10
ql4_vset=
ql4_vmon=-9.1429E0
ql4_imon=-1.60694E-11
mult1=-1.01016E-8
mult2=-2.81243E-9
rf_tmon=-4.71671E-3
rf_agc=3.30812E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.79086E-3
ql5_imon=1.68109E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65811E0
bslens_imon=2.43209E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1953E1
lens5a_imon=1.99905E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12526E2
lens4a_imon=2.04982E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54018E1
cs_ef1b_imon=2.86056E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02245E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04621E1
cs_ea1_imon=2.57315E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36671E0
lens1_imon=2.67781E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64873E1
os_ef1alow_imon=2.98576E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03749E1
cs_ea2_imon=1.4878E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84464E1
cs_ef1a_imon=2.94425E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.33988E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11469E1
os_restr1_imon=4.26827E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14922E1
os_ea1_imon=2.33955E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63619E1
os_ef1bup_imon=3.0821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22497E0
cs_ionrep_imon=1.18782E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91979E2
cs_nozzle_imon=1.93455E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01972E1
cs_anode1_imon=2.97084E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20358E0
olens4_imon=3.34668E-8
tplens_vset=1.4E-1
tplens_vmon=1.70632E0
tplens_imon=-2.32625E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26386E1
iondef3_imon=1.50408E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26747E1
iondef2_imon=1.56312E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03119E2
lens6_imon=2.98292E-4
ql6_vset=1.0E-1
ql6_vmon=9.60827E-2
ql6_imon=3.99302E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26539E0
ionrepsh_imon=1.78746E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33992E1
lens5b_imon=2.17903E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74701E1
cs_ef2b_imon=3.13691E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48825E0
os_ea2_imon=-6.41107E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.0061E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71458E1
cs_ef2a_imon=3.16643E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05023E0
os_ef2alow_imon=-2.46778E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.02289E-1
os_ef2bup_imon=-5.20859E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11215E1
os_restr2_imon=3.42332E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.29737E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01929E1
cs_anode2_imon=2.23812E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.10996E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68233E1
iondef4_imon=1.10579E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.14118E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81116E-1
olens1_imon=7.95051E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12744E0
cs_ionaccel_imon=-1.84501E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02114E2
cs_ionfocb_imon=1.47298E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56356E1
einzel_imon=7.81434E-6
window_vset=0.0E0
window_vmon=2.6912E-1
window_imon=-8.29774E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82745E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86993E1
mask2_imon=-6.4489E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.40089E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.77221E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.02432E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48533E0
defgridb_imon=6.10205E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33297E1
os_fil1_imon=9.42858E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07654E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65221E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30817E1
cs_fil1_imon=9.96388E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62956E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6672E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.48157E-2
os_fil2_imon=-2.66957E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90386E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.91008E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34429E-1
cs_fil2_imon=-2.27494E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16325E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22838E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.1575E-2
chamber_ion_pmon=2.22751E-9
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.73658E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=144
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.16631E-1	-7.97939E-1	-9.1326E0	-9.14323E0	3.69549E-3	9.62496E-2	2.73381E1	-3.26524E1	-3.26152E1	2.68322E1	2.24097E-9	2.52499E-3	2.52499E-3	6.33611E-3	2.14088E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.1625E-1	-7.97653E-1	-9.1325E0	-9.14304E0	3.76701E-3	9.58443E-2	2.73387E1	-3.26667E1	-3.25971E1	2.68314E1	2.24161E-9	2.51915E-3	2.51915E-3	6.31858E-3	2.13145E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.16488E-1	-7.97415E-1	-9.13243E0	-9.14328E0	3.86238E-3	9.58204E-2	2.73526E1	-3.26434E1	-3.26272E1	2.6813E1	2.23202E-9	2.52384E-3	2.52384E-3	6.32356E-3	2.13502E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.16298E-1	-7.97486E-1	-9.13234E0	-9.14321E0	3.76701E-3	9.64403E-2	2.73087E1	-3.26711E1	-3.2602E1	2.68058E1	2.2345E-9	2.52131E-3	2.52131E-3	6.32328E-3	2.1403E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-8.16298E-1	-7.97629E-1	-9.13236E0	-9.14283E0	3.79086E-3	9.63688E-2	2.73255E1	-3.26518E1	-3.26362E1	2.68053E1	2.22171E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.15002E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.16512E-1	-7.97653E-1	-9.13219E0	-9.14304E0	3.91006E-3	9.62257E-2	2.73135E1	-3.26627E1	-3.25954E1	2.67489E1	2.23041E-9	2.52428E-3	2.52428E-3	6.27461E-3	2.14256E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-8.16393E-1	-7.97629E-1	-9.13215E0	-9.14297E0	4.26769E-3	9.63926E-2	2.73122E1	-3.26475E1	-3.26343E1	2.68077E1	2.24082E-9	2.5138E-3	2.5138E-3	6.29432E-3	2.15179E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.16536E-1	-7.97653E-1	-9.13212E0	-9.14302E0	4.00543E-3	9.62734E-2	2.7321E1	-3.26508E1	-3.26018E1	2.68575E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-8.16536E-1	-7.97629E-1	-9.13229E0	-9.14283E0	4.26769E-3	9.63926E-2	2.73219E1	-3.26561E1	-3.26446E1	2.68007E1	2.24064E-9	2.52106E-3	2.52106E-3	6.3016E-3	2.12957E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.16512E-1	-7.9782E-1	-9.13253E0	-9.14299E0	4.12464E-3	9.64403E-2	2.73682E1	-3.26756E1	-3.25888E1	2.67836E1	2.24251E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.12957E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09379E0	-8.16226E-1	-7.97534E-1	-9.13246E0	-9.14316E0	3.86238E-3	9.61542E-2	2.73417E1	-3.26242E1	-3.26308E1	2.68292E1	2.23623E-9	2.51552E-3	2.51552E-3	6.30192E-3	2.15002E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.16298E-1	-7.97749E-1	-9.13227E0	-9.14314E0	3.88622E-3	9.59158E-2	2.73562E1	-3.26543E1	-3.2626E1	2.68563E1	2.23235E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.15189E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.16631E-1	-7.9782E-1	-9.13217E0	-9.1429E0	3.93391E-3	9.61304E-2	2.72985E1	-3.26777E1	-3.26278E1	2.68274E1	2.2372E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.15563E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.1594E-1	-7.97606E-1	-9.13219E0	-9.14309E0	4.00543E-3	9.60112E-2	2.73309E1	-3.26651E1	-3.26374E1	2.68364E1	2.24347E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.14781E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-8.16131E-1	-7.97606E-1	-9.13217E0	-9.14302E0	3.91006E-3	9.6035E-2	2.73165E1	-3.26627E1	-3.26356E1	2.68466E1	2.24109E-9	2.51552E-3	2.51552E-3	6.29645E-3	2.15563E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09394E0	-8.16488E-1	-7.97272E-1	-9.13215E0	-9.14314E0	3.71933E-3	9.58443E-2	2.73321E1	-3.26859E1	-3.26352E1	2.68573E1	2.24161E-9	2.51248E-3	2.51248E-3	6.31858E-3	2.15994E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.16464E-1	-7.97963E-1	-9.13227E0	-9.14295E0	3.6478E-3	9.62019E-2	2.7321E1	-3.26511E1	-3.26187E1	2.68186E1	2.24147E-9	2.52521E-3	2.52521E-3	6.3112E-3	2.15793E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.16607E-1	-7.97772E-1	-9.13253E0	-9.14316E0	3.43323E-3	9.60112E-2	2.73322E1	-3.26638E1	-3.26077E1	2.68571E1	2.24062E-9	2.52027E-3	2.52027E-3	6.31858E-3	2.15422E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.16655E-1	-7.97749E-1	-9.13241E0	-9.14299E0	3.6478E-3	9.57966E-2	2.73434E1	-3.26644E1	-3.25912E1	2.68791E1	2.24106E-9	2.51814E-3	2.51814E-3	6.31798E-3	2.14928E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.16679E-1	-7.97772E-1	-9.13241E0	-9.1429E0	3.79086E-3	9.60827E-2	2.73051E1	-3.26747E1	-3.26386E1	2.68233E1	2.22751E-9	2.51225E-3	2.51225E-3	6.30192E-3	2.1575E-2
