[Scan]
initial_time=2016-01-18T17:31:01
final_time=2016-01-18T17:31:20
ip_count=19
run=1024
dataset=2
scan=149
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08771E-4
ql1_vset=
ql1_vmon=-8.16464E-1
ql1_imon=1.35763E-8
ql2_vset=
ql2_vmon=-7.97939E-1
ql2_imon=2.00223E-9
ql3_vset=
ql3_vmon=-9.13236E0
ql3_imon=1.07276E-10
ql4_vset=
ql4_vmon=-9.14295E0
ql4_imon=-2.94685E-11
mult1=-9.01795E-9
mult2=-2.78847E-9
rf_tmon=-5.08321E-3
rf_agc=3.31774E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.69549E-3
ql5_imon=1.65853E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64557E0
bslens_imon=2.47601E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20025E1
lens5a_imon=1.99678E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12528E2
lens4a_imon=2.04835E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53905E1
cs_ef1b_imon=2.83517E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02163E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04752E1
cs_ea1_imon=2.57724E-5
lens1_vset=-5.0E0
lens1_vmon=-5.30826E0
lens1_imon=2.6459E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64574E1
os_ef1alow_imon=2.97314E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03584E1
cs_ea2_imon=1.50374E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84452E1
cs_ef1a_imon=2.94221E-5
olens2_vset=9.7E-1
olens2_vmon=9.69768E-1
olens2_imon=1.34473E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.115E1
os_restr1_imon=4.26489E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15488E1
os_ea1_imon=2.33621E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.07357E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23027E0
cs_ionrep_imon=1.18767E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91997E2
cs_nozzle_imon=1.93463E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02064E1
cs_anode1_imon=2.97244E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20372E0
olens4_imon=3.34358E-8
tplens_vset=1.4E-1
tplens_vmon=1.67388E0
tplens_imon=-3.09505E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2614E1
iondef3_imon=1.49524E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26549E1
iondef2_imon=1.55223E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0312E2
lens6_imon=2.98463E-4
ql6_vset=1.0E-1
ql6_vmon=9.6035E-2
ql6_imon=4.06723E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25092E0
ionrepsh_imon=1.77344E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33982E1
lens5b_imon=2.17339E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.12153E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50281E0
os_ea2_imon=-5.43106E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06182E2
lens4b_imon=2.00602E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.15524E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0702E0
os_ef2alow_imon=-2.56416E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.11711E-1
os_ef2bup_imon=-5.29223E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11384E1
os_restr2_imon=3.44334E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.28583E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01832E1
cs_anode2_imon=2.23534E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7352E1
iondef1_imon=1.10237E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68453E1
iondef4_imon=1.09824E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.08608E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81259E-1
olens1_imon=7.95792E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13999E0
cs_ionaccel_imon=-1.74747E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02143E2
cs_ionfocb_imon=1.47386E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56562E1
einzel_imon=7.8199E-6
window_vset=0.0E0
window_vmon=2.64602E-1
window_imon=-7.39649E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82738E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86831E1
mask2_imon=-6.66668E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92714E3
multa_neg_imon=7.00645E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.43661E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=6.86842E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.25496E0
defgridb_imon=6.09328E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33261E1
os_fil1_imon=9.41053E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07596E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65342E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30816E1
cs_fil1_imon=9.96171E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63327E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66725E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.4332E-2
os_fil2_imon=-2.69235E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01082E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.98624E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35645E-1
cs_fil2_imon=-2.39117E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.68246E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22798E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.15331E-2
chamber_ion_pmon=2.24155E-9
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.75627E-1
res40_imon=-2.58153E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09379E0	-8.16178E-1	-7.97725E-1	-9.13248E0	-9.14316E0	3.83854E-3	9.63688E-2	2.73165E1	-3.26621E1	-3.26332E1	2.68232E1	2.23869E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.14964E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.16059E-1	-7.97701E-1	-9.13234E0	-9.14326E0	3.83854E-3	9.61065E-2	2.73273E1	-3.26886E1	-3.26311E1	2.68343E1	2.24634E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.13685E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-8.16131E-1	-7.97868E-1	-9.13231E0	-9.14314E0	3.95775E-3	9.62019E-2	2.73143E1	-3.26413E1	-3.26052E1	2.68358E1	2.23874E-9	2.51886E-3	2.51886E-3	6.323E-3	2.12782E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.16298E-1	-7.97868E-1	-9.13258E0	-9.14304E0	3.86238E-3	9.60827E-2	2.73357E1	-3.26735E1	-3.26386E1	2.68232E1	2.2381E-9	2.51498E-3	2.51498E-3	6.3074E-3	2.13149E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.16369E-1	-7.97749E-1	-9.13255E0	-9.14316E0	3.83854E-3	9.61304E-2	2.7348E1	-3.26744E1	-3.26172E1	2.68311E1	2.23678E-9	2.51203E-3	2.51203E-3	6.32356E-3	2.13502E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.16131E-1	-7.97725E-1	-9.13236E0	-9.14328E0	3.8147E-3	9.59396E-2	2.73075E1	-3.26543E1	-3.26308E1	2.68436E1	2.23379E-9	2.51752E-3	2.51752E-3	6.32784E-3	2.13129E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.16202E-1	-7.97725E-1	-9.13253E0	-9.14321E0	3.33786E-3	9.5892E-2	2.73227E1	-3.26398E1	-3.26127E1	2.68323E1	2.25113E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.12957E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-8.15964E-1	-7.97987E-1	-9.13265E0	-9.14311E0	3.52859E-3	9.59873E-2	2.72965E1	-3.26518E1	-3.26201E1	2.68373E1	2.23051E-9	2.51301E-3	2.51301E-3	6.29754E-3	2.13457E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.16035E-1	-7.97892E-1	-9.13255E0	-9.14314E0	3.60012E-3	9.63211E-2	2.73231E1	-3.26651E1	-3.25984E1	2.68522E1	2.24066E-9	2.5195E-3	2.5195E-3	6.34374E-3	2.15418E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.16536E-1	-7.98035E-1	-9.13215E0	-9.14326E0	3.74317E-3	9.59873E-2	2.73466E1	-3.26603E1	-3.2584E1	2.68304E1	2.2159E-9	2.51632E-3	2.51632E-3	6.33436E-3	2.14781E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.16798E-1	-7.98035E-1	-9.13241E0	-9.14326E0	3.6478E-3	9.57966E-2	2.73086E1	-3.26655E1	-3.26337E1	2.68563E1	2.21401E-9	2.51443E-3	2.51443E-3	6.31288E-3	2.13513E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.16727E-1	-7.98154E-1	-9.1326E0	-9.14326E0	3.71933E-3	9.6035E-2	2.7311E1	-3.26797E1	-3.26148E1	2.68472E1	2.21689E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.15189E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.16631E-1	-7.98059E-1	-9.13241E0	-9.14314E0	3.76701E-3	9.62257E-2	2.73405E1	-3.26402E1	-3.2616E1	2.68319E1	2.2406E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.14415E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.16536E-1	-7.9813E-1	-9.13241E0	-9.14314E0	3.88622E-3	9.59873E-2	2.7357E1	-3.26767E1	-3.2652E1	2.68522E1	2.23583E-9	2.52276E-3	2.52276E-3	6.32896E-3	2.15883E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.16631E-1	-7.97844E-1	-9.13239E0	-9.14314E0	3.50475E-3	9.60827E-2	2.7321E1	-3.26526E1	-3.2639E1	2.68508E1	2.23356E-9	2.51603E-3	2.51603E-3	6.3074E-3	2.15831E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.16703E-1	-7.98154E-1	-9.13246E0	-9.14304E0	3.40939E-3	9.60588E-2	2.73517E1	-3.26756E1	-3.26195E1	2.68238E1	2.22654E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.15189E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.16679E-1	-7.98154E-1	-9.13236E0	-9.1433E0	3.31402E-3	9.60112E-2	2.73429E1	-3.26404E1	-3.26164E1	2.68478E1	2.21308E-9	2.51814E-3	2.51814E-3	6.32858E-3	2.15108E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.16464E-1	-7.97987E-1	-9.13231E0	-9.14302E0	3.31402E-3	9.62019E-2	2.73482E1	-3.26579E1	-3.26183E1	2.68163E1	2.21305E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.15938E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.16321E-1	-7.97749E-1	-9.13234E0	-9.14302E0	3.71933E-3	9.6035E-2	2.73299E1	-3.2672E1	-3.26142E1	2.68478E1	2.21401E-9	2.52276E-3	2.52276E-3	6.33436E-3	2.15699E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.16464E-1	-7.97939E-1	-9.13236E0	-9.14295E0	3.69549E-3	9.6035E-2	2.7352E1	-3.26549E1	-3.2614E1	2.68453E1	2.24155E-9	2.51525E-3	2.51525E-3	6.32896E-3	2.15331E-2
