[Scan]
initial_time=2016-01-18T17:32:47
final_time=2016-01-18T17:33:07
ip_count=19
run=1024
dataset=2
scan=153
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.08823E-4
ql1_vset=
ql1_vmon=-8.16488E-1
ql1_imon=1.36641E-8
ql2_vset=
ql2_vmon=-7.97868E-1
ql2_imon=1.93124E-9
ql3_vset=
ql3_vmon=-9.13253E0
ql3_imon=1.59597E-10
ql4_vset=
ql4_vmon=-9.14295E0
ql4_imon=-2.74539E-11
mult1=-9.02999E-9
mult2=-2.67869E-9
rf_tmon=-5.24543E-3
rf_agc=3.27508E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.00543E-3
ql5_imon=1.64226E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65893E0
bslens_imon=2.18086E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19695E1
lens5a_imon=1.99785E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05158E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54481E1
cs_ef1b_imon=2.84323E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02226E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0461E1
cs_ea1_imon=2.56347E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41942E0
lens1_imon=2.70719E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64825E1
os_ef1alow_imon=2.9654E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03642E1
cs_ea2_imon=1.47441E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=2.94882E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.34914E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11201E1
os_restr1_imon=4.25598E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1524E1
os_ea1_imon=2.32879E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.07352E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21845E0
cs_ionrep_imon=1.18854E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91976E2
cs_nozzle_imon=1.93528E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02013E1
cs_anode1_imon=2.95711E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20387E0
olens4_imon=3.33506E-8
tplens_vset=1.4E-1
tplens_vmon=1.70752E0
tplens_imon=-2.09222E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25966E1
iondef3_imon=1.5083E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26657E1
iondef2_imon=1.57824E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03113E2
lens6_imon=2.98162E-4
ql6_vset=1.0E-1
ql6_vmon=9.59158E-2
ql6_imon=4.08002E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27613E0
ionrepsh_imon=1.76569E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33748E1
lens5b_imon=2.18387E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74754E1
cs_ef2b_imon=3.13299E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51826E0
os_ea2_imon=-8.14854E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06145E2
lens4b_imon=2.00439E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7145E1
cs_ef2a_imon=3.15605E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05936E0
os_ef2alow_imon=-2.6195E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05833E-1
os_ef2bup_imon=-5.36212E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11165E1
os_restr2_imon=3.41914E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.28378E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01965E1
cs_anode2_imon=2.23199E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73874E1
iondef1_imon=1.07534E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6837E1
iondef4_imon=1.038E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.1235E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81522E-1
olens1_imon=7.92271E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15777E0
cs_ionaccel_imon=-1.83384E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02116E2
cs_ionfocb_imon=1.48062E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5676E1
einzel_imon=7.70946E-6
window_vset=0.0E0
window_vmon=2.57587E-1
window_imon=-5.7245E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82745E2
mask1_imon=2.38875E-4
mask2_vset=0.0E0
mask2_vmon=-1.8668E1
mask2_imon=-7.38233E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92837E3
multa_neg_imon=5.36764E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93674E3
defgrida_imon=6.46715E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50297E3
multb_neg_imon=5.7029E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.01058E0
defgridb_imon=6.25085E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33305E1
os_fil1_imon=9.40858E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06927E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65273E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30787E1
cs_fil1_imon=9.95452E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62366E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6741E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.28007E-2
os_fil2_imon=-2.90623E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.73087E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.05493E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-1.86108E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=2.27147E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2272E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31299E-3
inlet_lpb_pmon=2.15422E-2
chamber_ion_pmon=2.22974E-9
chamber_cvt_pmon=2.52139E-3
foreline_cvt_pmon=2.52139E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.74909E-1
res40_imon=-2.78168E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.16131E-1	-7.97796E-1	-9.1326E0	-9.14321E0	3.62396E-3	9.62019E-2	2.72732E1	-3.26638E1	-3.26183E1	2.68528E1	2.24538E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.14964E-2
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.16202E-1	-7.98011E-1	-9.13253E0	-9.14299E0	3.60012E-3	9.62496E-2	2.72945E1	-3.26425E1	-3.26543E1	2.68863E1	2.24181E-9	2.52243E-3	2.52243E-3	6.31555E-3	2.15168E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0941E0	-8.16131E-1	-7.97725E-1	-9.13239E0	-9.14295E0	3.93391E-3	9.61304E-2	2.73419E1	-3.26585E1	-3.26422E1	2.68052E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.16107E-1	-7.97796E-1	-9.13253E0	-9.1429E0	3.86238E-3	9.62257E-2	2.74001E1	-3.26649E1	-3.26478E1	2.68208E1	2.2426E-9	2.51915E-3	2.51915E-3	6.32978E-3	2.1447E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.16154E-1	-7.97772E-1	-9.13239E0	-9.14276E0	3.8147E-3	9.61304E-2	2.73946E1	-3.26729E1	-3.26074E1	2.68532E1	2.22726E-9	2.5131E-3	2.5131E-3	6.32356E-3	2.13685E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16226E-1	-7.97915E-1	-9.1325E0	-9.14304E0	3.8147E-3	9.62496E-2	2.73735E1	-3.26632E1	-3.26006E1	2.68593E1	2.21305E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.13142E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.16107E-1	-7.97701E-1	-9.1327E0	-9.1428E0	3.88622E-3	9.63211E-2	2.72745E1	-3.26681E1	-3.2593E1	2.68742E1	2.22751E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.14256E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.16083E-1	-7.98059E-1	-9.13248E0	-9.14302E0	3.60012E-3	9.64165E-2	2.72304E1	-3.26324E1	-3.25866E1	2.68262E1	2.24347E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.14232E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.16059E-1	-7.97939E-1	-9.13253E0	-9.14311E0	3.98159E-3	9.65357E-2	2.72616E1	-3.26419E1	-3.2615E1	2.67686E1	2.22063E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.14415E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.16345E-1	-7.97963E-1	-9.13243E0	-9.14309E0	4.07696E-3	9.6488E-2	2.72809E1	-3.26396E1	-3.25953E1	2.68172E1	2.21978E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.15189E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09394E0	-8.16321E-1	-7.98154E-1	-9.13265E0	-9.14283E0	3.95775E-3	9.62019E-2	2.72727E1	-3.26425E1	-3.26449E1	2.68424E1	2.23583E-9	2.51954E-3	2.51954E-3	6.33977E-3	2.15699E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.16321E-1	-7.97892E-1	-9.13222E0	-9.14283E0	3.62396E-3	9.60588E-2	2.72883E1	-3.26464E1	-3.26603E1	2.68352E1	2.24155E-9	2.52599E-3	2.52599E-3	6.31278E-3	2.15331E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.16154E-1	-7.9782E-1	-9.13227E0	-9.14309E0	3.71933E-3	9.62973E-2	2.73177E1	-3.2641E1	-3.26585E1	2.68911E1	2.23429E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.15189E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.1625E-1	-7.9782E-1	-9.13236E0	-9.14304E0	3.79086E-3	9.6035E-2	2.72803E1	-3.26638E1	-3.26248E1	2.67932E1	2.22848E-9	2.51552E-3	2.51552E-3	6.28006E-3	2.15563E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.16298E-1	-7.98011E-1	-9.13246E0	-9.14283E0	3.74317E-3	9.56774E-2	2.72618E1	-3.26561E1	-3.26338E1	2.68749E1	2.24012E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.15189E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.16226E-1	-7.97987E-1	-9.13281E0	-9.14292E0	3.48091E-3	9.60827E-2	2.72534E1	-3.26488E1	-3.26536E1	2.68801E1	2.23583E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.14598E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16131E-1	-7.98035E-1	-9.13234E0	-9.14276E0	3.91006E-3	9.62019E-2	2.72654E1	-3.26723E1	-3.26458E1	2.68483E1	2.23915E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.12587E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-8.16321E-1	-7.98225E-1	-9.13236E0	-9.14295E0	4.07696E-3	9.60588E-2	2.72425E1	-3.2659E1	-3.26231E1	2.68007E1	2.23818E-9	2.51334E-3	2.51334E-3	6.34037E-3	2.13698E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09364E0	-8.16298E-1	-7.98154E-1	-9.13229E0	-9.14311E0	4.05312E-3	9.57251E-2	2.73345E1	-3.26842E1	-3.25789E1	2.67758E1	2.23263E-9	2.51814E-3	2.51814E-3	6.32328E-3	2.13851E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-8.16488E-1	-7.97868E-1	-9.13253E0	-9.14295E0	4.00543E-3	9.59158E-2	2.73874E1	-3.26657E1	-3.25966E1	2.6837E1	2.22974E-9	2.52139E-3	2.52139E-3	6.31299E-3	2.15422E-2
