[Scan]
initial_time=2016-01-18T17:35:54
final_time=2016-01-18T17:36:13
ip_count=19
run=1024
dataset=2
scan=160
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08787E-4
ql1_vset=
ql1_vmon=-8.16464E-1
ql1_imon=1.36345E-8
ql2_vset=
ql2_vmon=-7.9782E-1
ql2_imon=1.97796E-9
ql3_vset=
ql3_vmon=-9.13231E0
ql3_imon=1.49453E-10
ql4_vset=
ql4_vmon=-9.14321E0
ql4_imon=-2.98023E-13
mult1=-9.23928E-9
mult2=-2.65466E-9
rf_tmon=-6.00783E-3
rf_agc=3.23358E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.67165E-3
ql5_imon=1.64279E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62433E0
bslens_imon=2.21409E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19099E1
lens5a_imon=2.00987E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12555E2
lens4a_imon=2.05302E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53676E1
cs_ef1b_imon=2.84034E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0465E2
lens23_imon=1.01983E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04504E1
cs_ea1_imon=2.5691E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32773E0
lens1_imon=2.86888E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64855E1
os_ef1alow_imon=2.97802E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03678E1
cs_ea2_imon=1.50197E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84538E1
cs_ef1a_imon=2.94125E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.34332E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11382E1
os_restr1_imon=4.24877E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1422E1
os_ea1_imon=2.33656E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63857E1
os_ef1bup_imon=3.0692E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23027E0
cs_ionrep_imon=1.2043E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92042E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=2.96648E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.34714E-8
tplens_vset=1.4E-1
tplens_vmon=1.7193E0
tplens_imon=-5.39567E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2629E1
iondef3_imon=1.50445E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2629E1
iondef2_imon=1.59151E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03123E2
lens6_imon=2.98038E-4
ql6_vset=1.0E-1
ql6_vmon=9.61542E-2
ql6_imon=4.06731E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25741E0
ionrepsh_imon=1.73592E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34306E1
lens5b_imon=2.17658E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74549E1
cs_ef2b_imon=3.12037E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56003E0
os_ea2_imon=-1.11649E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06134E2
lens4b_imon=2.00198E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71282E1
cs_ef2a_imon=3.16218E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05396E0
os_ef2alow_imon=-2.50057E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99827E-1
os_ef2bup_imon=-5.23598E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11213E1
os_restr2_imon=3.42671E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23025E2
cs_ionfoca_imon=6.30742E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01995E1
cs_anode2_imon=2.24821E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74195E1
iondef1_imon=1.06485E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68458E1
iondef4_imon=1.10323E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.13031E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.94653E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13254E0
cs_ionaccel_imon=-1.84465E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02106E2
cs_ionfocb_imon=1.47356E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56291E1
einzel_imon=7.75632E-6
window_vset=0.0E0
window_vmon=2.81613E-1
window_imon=-8.10312E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82751E2
mask1_imon=2.39091E-4
mask2_vset=0.0E0
mask2_vmon=-1.86734E1
mask2_imon=-6.0849E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92806E3
multa_neg_imon=6.51801E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.65959E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.31084E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.15161E0
defgridb_imon=6.61712E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33218E1
os_fil1_imon=9.42246E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0766E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65241E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30663E1
cs_fil1_imon=9.95801E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62558E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66989E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25591E-2
os_fil2_imon=-2.80412E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9351E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.91284E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.29356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08816E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22741E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.25917E-2
chamber_ion_pmon=2.21786E-9
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.44275E-1
res40_imon=-2.56544E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.16655E-1	-7.97677E-1	-9.13198E0	-9.14295E0	4.12464E-3	9.6035E-2	2.72502E1	-3.26667E1	-3.26296E1	2.68366E1	2.21401E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.23757E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.17037E-1	-7.97701E-1	-9.13241E0	-9.14283E0	4.22001E-3	9.65118E-2	2.73176E1	-3.26298E1	-3.26591E1	2.68456E1	2.21401E-9	2.51417E-3	2.51417E-3	6.3074E-3	2.24905E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.16655E-1	-7.97582E-1	-9.13246E0	-9.14304E0	4.41074E-3	9.64642E-2	2.7337E1	-3.26585E1	-3.26036E1	2.68198E1	2.22974E-9	2.51581E-3	2.51581E-3	6.32978E-3	2.24971E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.16345E-1	-7.97486E-1	-9.13262E0	-9.14235E0	4.24385E-3	9.62019E-2	2.73063E1	-3.27157E1	-3.25971E1	2.68232E1	2.21495E-9	2.5131E-3	2.5131E-3	6.31817E-3	2.23567E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.16131E-1	-7.97606E-1	-9.13262E0	-9.14283E0	4.05312E-3	9.62257E-2	2.73446E1	-3.26526E1	-3.25865E1	2.68436E1	2.21401E-9	2.51771E-3	2.51771E-3	6.34037E-3	2.24352E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16083E-1	-7.97558E-1	-9.13265E0	-9.14304E0	3.83854E-3	9.60827E-2	2.73405E1	-3.26437E1	-3.26183E1	2.68511E1	2.21968E-9	2.51847E-3	2.51847E-3	6.33977E-3	2.23376E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.16202E-1	-7.97582E-1	-9.13253E0	-9.14304E0	3.98159E-3	9.62257E-2	2.73246E1	-3.26337E1	-3.2616E1	2.68358E1	2.21401E-9	2.51498E-3	2.51498E-3	6.32328E-3	2.24122E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09418E0	-8.16274E-1	-7.97462E-1	-9.13267E0	-9.14326E0	4.22001E-3	9.61065E-2	2.72901E1	-3.26819E1	-3.26098E1	2.68466E1	2.21401E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.23962E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.16345E-1	-7.97486E-1	-9.13272E0	-9.14333E0	3.83854E-3	9.62257E-2	2.73129E1	-3.2653E1	-3.26092E1	2.68478E1	2.21401E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.24547E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.16536E-1	-7.97462E-1	-9.1326E0	-9.14307E0	4.00543E-3	9.63211E-2	2.73275E1	-3.26496E1	-3.26142E1	2.68296E1	2.22171E-9	2.51334E-3	2.51334E-3	6.32936E-3	2.23574E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.16417E-1	-7.9751E-1	-9.13248E0	-9.14307E0	3.71933E-3	9.64642E-2	2.73111E1	-3.26711E1	-3.26338E1	2.68358E1	2.24012E-9	2.52659E-3	2.52659E-3	6.29684E-3	2.24498E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.16488E-1	-7.97892E-1	-9.13248E0	-9.14302E0	3.74317E-3	9.6488E-2	2.73544E1	-3.26801E1	-3.2599E1	2.6825E1	2.23566E-9	2.51915E-3	2.51915E-3	6.33538E-3	2.24772E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-8.16584E-1	-7.97772E-1	-9.13219E0	-9.14304E0	3.95775E-3	9.62734E-2	2.73889E1	-3.26596E1	-3.26148E1	2.68286E1	2.23869E-9	2.51954E-3	2.51954E-3	6.33977E-3	2.24139E-2
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.16441E-1	-7.97939E-1	-9.1325E0	-9.14278E0	3.88622E-3	9.62257E-2	2.72225E1	-3.26548E1	-3.26566E1	2.68238E1	2.22945E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.25133E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.16441E-1	-7.98082E-1	-9.13258E0	-9.14304E0	4.00543E-3	9.59158E-2	2.72498E1	-3.26903E1	-3.26494E1	2.68298E1	2.21401E-9	2.5225E-3	2.5225E-3	6.31299E-3	2.24971E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.16488E-1	-7.98011E-1	-9.13234E0	-9.14297E0	3.79086E-3	9.62973E-2	2.7242E1	-3.26735E1	-3.26488E1	2.68202E1	2.21401E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.24714E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16369E-1	-7.97868E-1	-9.13265E0	-9.14295E0	4.07696E-3	9.62496E-2	2.74541E1	-3.26633E1	-3.25623E1	2.68262E1	2.22461E-9	2.51552E-3	2.51552E-3	6.30192E-3	2.23962E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09387E0	-8.16274E-1	-7.97677E-1	-9.13227E0	-9.14276E0	3.93391E-3	9.62973E-2	2.72644E1	-3.26797E1	-3.26219E1	2.68337E1	2.22875E-9	2.52027E-3	2.52027E-3	6.30182E-3	2.24971E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09379E0	-8.16464E-1	-7.97868E-1	-9.13246E0	-9.14292E0	3.8147E-3	9.63688E-2	2.73269E1	-3.26915E1	-3.2606E1	2.68436E1	2.21865E-9	2.51709E-3	2.51709E-3	6.35514E-3	2.26197E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-8.16464E-1	-7.9782E-1	-9.13231E0	-9.14321E0	3.67165E-3	9.61542E-2	2.74195E1	-3.2629E1	-3.2629E1	2.68458E1	2.21786E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.25917E-2
