[Scan]
initial_time=2016-01-18T17:53:39
final_time=2016-01-18T17:53:58
ip_count=19
run=1024
dataset=3
scan=163
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08838E-4
ql1_vset=
ql1_vmon=-8.79979E-1
ql1_imon=1.3387E-8
ql2_vset=
ql2_vmon=-8.9643E-1
ql2_imon=1.91736E-9
ql3_vset=
ql3_vmon=-9.04708E0
ql3_imon=2.08724E-10
ql4_vset=
ql4_vmon=-9.04224E0
ql4_imon=1.18828E-10
mult1=-9.5357E-9
mult2=-2.69266E-9
rf_tmon=-5.67202E-3
rf_agc=3.26486E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.95775E-3
ql5_imon=1.68556E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68568E0
bslens_imon=2.30966E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1963E1
lens5a_imon=1.98333E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12512E2
lens4a_imon=2.04898E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53899E1
cs_ef1b_imon=2.84575E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04769E2
lens23_imon=1.02355E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04717E1
cs_ea1_imon=2.51955E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35309E0
lens1_imon=2.58219E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64897E1
os_ef1alow_imon=2.96396E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03678E1
cs_ea2_imon=1.48781E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84442E1
cs_ef1a_imon=2.94594E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.33945E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.2531E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15182E1
os_ea1_imon=2.35461E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63792E1
os_ef1bup_imon=3.06559E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25387E0
cs_ionrep_imon=1.1859E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91972E2
cs_nozzle_imon=1.9331E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=2.98342E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2042E0
olens4_imon=3.34521E-8
tplens_vset=1.4E-1
tplens_vmon=1.6609E0
tplens_imon=-3.73215E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26356E1
iondef3_imon=1.49206E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26579E1
iondef2_imon=1.55046E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0308E2
lens6_imon=2.9813E-4
ql6_vset=1.0E-1
ql6_vmon=9.54628E-2
ql6_imon=4.12734E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27864E0
ionrepsh_imon=1.78901E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33882E1
lens5b_imon=2.17941E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74477E1
cs_ef2b_imon=3.12434E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52109E0
os_ea2_imon=-8.1918E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0615E2
lens4b_imon=2.00725E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71402E1
cs_ef2a_imon=3.16182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04014E0
os_ef2alow_imon=-2.4393E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89015E-1
os_ef2bup_imon=-5.3405E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11208E1
os_restr2_imon=3.4332E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2304E2
cs_ionfoca_imon=6.26318E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.24028E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73225E1
iondef1_imon=1.11299E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68496E1
iondef4_imon=1.0917E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.42594E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81236E-1
olens1_imon=7.9143E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09831E0
cs_ionaccel_imon=-1.79059E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02136E2
cs_ionfocb_imon=1.4728E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.75632E-6
window_vset=0.0E0
window_vmon=2.696E-1
window_imon=-9.36451E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82761E2
mask1_imon=2.39026E-4
mask2_vset=0.0E0
mask2_vmon=-1.86392E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=6.90381E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.40829E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.28607E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28744E0
defgridb_imon=5.94463E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33201E1
os_fil1_imon=9.43976E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07924E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65438E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30773E1
cs_fil1_imon=9.96053E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6269E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66932E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26858E-2
os_fil2_imon=-2.65395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.72486E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.79388E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37809E-1
cs_fil2_imon=-2.6059E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.43674E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22523E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=3.02133E-1
chamber_ion_pmon=1.20226E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.10638E-1
res40_imon=-2.45012E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.80075E-1	-8.96406E-1	-9.04765E0	-9.04224E0	4.22001E-3	9.60112E-2	2.73287E1	-3.26602E1	-3.26018E1	2.68325E1	1.19342E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.01085E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.80027E-1	-8.95858E-1	-9.04744E0	-9.04193E0	4.02927E-3	9.57966E-2	2.73314E1	-3.2675E1	-3.26456E1	2.68487E1	1.1929E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.79979E-1	-8.95858E-1	-9.04741E0	-9.04181E0	3.91006E-3	9.60112E-2	2.73173E1	-3.2659E1	-3.26637E1	2.68331E1	1.1929E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.98481E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.79741E-1	-8.96168E-1	-9.04715E0	-9.04205E0	3.88622E-3	9.56297E-2	2.72979E1	-3.26855E1	-3.26218E1	2.68256E1	1.1929E-7	2.51632E-3	2.51632E-3	6.29665E-3	2.97901E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09394E0	-8.79908E-1	-8.96406E-1	-9.04706E0	-9.0421E0	4.24385E-3	9.58204E-2	2.73291E1	-3.2653E1	-3.26543E1	2.68371E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.80075E-1	-8.96311E-1	-9.04703E0	-9.042E0	4.48227E-3	9.62257E-2	2.72961E1	-3.26879E1	-3.26026E1	2.68357E1	1.1929E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.02253E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09394E0	-8.8017E-1	-8.96239E-1	-9.04722E0	-9.042E0	4.1008E-3	9.58681E-2	2.73159E1	-3.26693E1	-3.25821E1	2.68563E1	1.1929E-7	2.52139E-3	2.52139E-3	6.31299E-3	3.02545E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.79931E-1	-8.9643E-1	-9.0472E0	-9.04222E0	4.41074E-3	9.5582E-2	2.73219E1	-3.26681E1	-3.2608E1	2.68538E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0941E0	-8.79884E-1	-8.96287E-1	-9.04715E0	-9.04171E0	4.29153E-3	9.5892E-2	2.73299E1	-3.26685E1	-3.26172E1	2.68308E1	1.1929E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09325E0	-8.80146E-1	-8.96239E-1	-9.04751E0	-9.04186E0	4.14848E-3	9.54151E-2	2.73195E1	-3.2635E1	-3.26524E1	2.68436E1	1.19493E-7	2.5131E-3	2.5131E-3	6.34518E-3	3.00966E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-8.79812E-1	-8.96358E-1	-9.0472E0	-9.04205E0	4.02927E-3	9.56535E-2	2.73297E1	-3.26867E1	-3.2611E1	2.68617E1	1.19861E-7	2.52428E-3	2.52428E-3	6.34037E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.79741E-1	-8.96573E-1	-9.04725E0	-9.04198E0	4.07696E-3	9.57251E-2	2.73345E1	-3.26597E1	-3.26392E1	2.68412E1	1.19902E-7	2.52276E-3	2.52276E-3	6.30202E-3	2.99941E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09379E0	-8.80146E-1	-8.96382E-1	-9.04715E0	-9.04195E0	4.00543E-3	9.58443E-2	2.73093E1	-3.26621E1	-3.26122E1	2.68508E1	1.20122E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09356E0	-8.80289E-1	-8.9643E-1	-9.04715E0	-9.04188E0	4.12464E-3	9.57489E-2	2.73141E1	-3.26663E1	-3.2623E1	2.6825E1	1.20174E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.01609E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.80051E-1	-8.96263E-1	-9.04686E0	-9.04193E0	4.3869E-3	9.55105E-2	2.73231E1	-3.26801E1	-3.2626E1	2.68154E1	1.19872E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.03618E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.8017E-1	-8.96573E-1	-9.04717E0	-9.04229E0	4.22001E-3	9.55105E-2	2.72985E1	-3.26717E1	-3.26356E1	2.68352E1	1.20055E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.03027E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.80146E-1	-8.96716E-1	-9.04717E0	-9.04214E0	4.07696E-3	9.56774E-2	2.73417E1	-3.26425E1	-3.26189E1	2.68268E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.80194E-1	-8.96621E-1	-9.0472E0	-9.04207E0	4.12464E-3	9.56774E-2	2.73105E1	-3.26843E1	-3.26254E1	2.68271E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.99E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-8.80027E-1	-8.96549E-1	-9.04701E0	-9.04186E0	3.93391E-3	9.5439E-2	2.73694E1	-3.26681E1	-3.26296E1	2.68241E1	1.198E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.79979E-1	-8.9643E-1	-9.04708E0	-9.04224E0	3.95775E-3	9.54628E-2	2.73225E1	-3.26579E1	-3.26356E1	2.68496E1	1.20226E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.02133E-1
