[Scan]
initial_time=2016-01-18T17:54:59
final_time=2016-01-18T17:55:18
ip_count=19
run=1024
dataset=3
scan=166
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08803E-4
ql1_vset=
ql1_vmon=-8.80265E-1
ql1_imon=1.3421E-8
ql2_vset=
ql2_vmon=-8.9612E-1
ql2_imon=1.97333E-9
ql3_vset=
ql3_vmon=-9.04694E0
ql3_imon=2.12038E-10
ql4_vset=
ql4_vmon=-9.04148E0
ql4_imon=4.58002E-11
mult1=-9.33101E-9
mult2=-2.7266E-9
rf_tmon=-6.26684E-3
rf_agc=3.20298E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.1008E-3
ql5_imon=1.75214E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66149E0
bslens_imon=2.38752E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19813E1
lens5a_imon=1.99076E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12521E2
lens4a_imon=2.04863E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53945E1
cs_ef1b_imon=2.82266E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02054E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0477E1
cs_ea1_imon=2.55176E-5
lens1_vset=-5.0E0
lens1_vmon=-5.31416E0
lens1_imon=2.71669E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64805E1
os_ef1alow_imon=2.96236E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03543E1
cs_ea2_imon=1.50055E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84481E1
cs_ef1a_imon=2.93734E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.31131E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11535E1
os_restr1_imon=4.25412E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15134E1
os_ea1_imon=2.36523E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63757E1
os_ef1bup_imon=3.07183E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23617E0
cs_ionrep_imon=1.19121E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91995E2
cs_nozzle_imon=1.93232E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01653E1
cs_anode1_imon=2.95924E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20382E0
olens4_imon=3.30895E-8
tplens_vset=1.4E-1
tplens_vmon=1.67683E0
tplens_imon=-4.33385E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26663E1
iondef3_imon=1.49595E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26488E1
iondef2_imon=1.57205E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03071E2
lens6_imon=2.9825E-4
ql6_vset=1.0E-1
ql6_vmon=9.54866E-2
ql6_imon=4.12346E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25977E0
ionrepsh_imon=1.76034E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33899E1
lens5b_imon=2.16065E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74716E1
cs_ef2b_imon=3.11944E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50988E0
os_ea2_imon=-7.12998E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06149E2
lens4b_imon=2.00538E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71327E1
cs_ef2a_imon=3.16323E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03718E0
os_ef2alow_imon=-2.53288E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.03602E-1
os_ef2bup_imon=-5.2262E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11303E1
os_restr2_imon=3.42075E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.28619E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0196E1
cs_anode2_imon=2.24055E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73039E1
iondef1_imon=1.09671E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68304E1
iondef4_imon=1.10102E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71775E1
olens3_imon=5.39751E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=7.81117E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1313E0
cs_ionaccel_imon=-1.88648E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02098E2
cs_ionfocb_imon=1.47337E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5626E1
einzel_imon=7.66699E-6
window_vset=0.0E0
window_vmon=2.77344E-1
window_imon=-7.32698E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82752E2
mask1_imon=2.39081E-4
mask2_vset=0.0E0
mask2_vmon=-1.86489E1
mask2_imon=-7.81352E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=6.89319E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93696E3
defgrida_imon=6.28441E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.02415E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3465E0
defgridb_imon=6.20301E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33223E1
os_fil1_imon=9.40266E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07121E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64087E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30796E1
cs_fil1_imon=9.93813E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61978E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66075E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.66113E-2
os_fil2_imon=-2.83136E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.7328E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.51651E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.95879E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.77107E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22442E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.09597E-1
res40_imon=-2.53635E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.80051E-1	-8.96287E-1	-9.04741E0	-9.04224E0	4.17233E-3	9.56774E-2	2.73327E1	-3.26458E1	-3.26494E1	2.68575E1	1.19913E-7	2.5188E-3	2.5188E-3	6.34037E-3	2.9978E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.79979E-1	-8.9612E-1	-9.04737E0	-9.04171E0	4.24385E-3	9.57966E-2	2.73253E1	-3.26395E1	-3.26003E1	2.68376E1	1.19851E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.79622E-1	-8.96192E-1	-9.04722E0	-9.04205E0	3.95775E-3	9.5892E-2	2.7348E1	-3.2655E1	-3.26179E1	2.68274E1	1.19978E-7	2.5147E-3	2.5147E-3	6.31299E-3	3.02277E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.79741E-1	-8.96573E-1	-9.0472E0	-9.04198E0	4.17233E-3	9.57251E-2	2.73357E1	-3.26669E1	-3.26554E1	2.68532E1	1.20106E-7	2.51632E-3	2.51632E-3	6.35059E-3	2.98156E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.79955E-1	-8.96358E-1	-9.04701E0	-9.04207E0	4.12464E-3	9.56774E-2	2.73117E1	-3.26543E1	-3.25924E1	2.68279E1	1.20055E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.9841E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.79836E-1	-8.96478E-1	-9.04706E0	-9.04164E0	3.76701E-3	9.5582E-2	2.73381E1	-3.26434E1	-3.2599E1	2.68466E1	1.2033E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.79979E-1	-8.96382E-1	-9.04703E0	-9.04174E0	3.93391E-3	9.5439E-2	2.73552E1	-3.26732E1	-3.26101E1	2.6828E1	1.20383E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.80098E-1	-8.9643E-1	-9.04729E0	-9.0421E0	4.12464E-3	9.54151E-2	2.73033E1	-3.26717E1	-3.26128E1	2.68412E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.02133E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.8017E-1	-8.96692E-1	-9.04717E0	-9.04181E0	4.17233E-3	9.5582E-2	2.72961E1	-3.26735E1	-3.2611E1	2.68478E1	1.20004E-7	2.52276E-3	2.52276E-3	6.30202E-3	3.02769E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.79979E-1	-8.9674E-1	-9.04727E0	-9.04202E0	4.14848E-3	9.55582E-2	2.73736E1	-3.26735E1	-3.25942E1	2.68394E1	1.20122E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.03712E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.79955E-1	-8.96573E-1	-9.04708E0	-9.04181E0	3.88622E-3	9.55105E-2	2.72987E1	-3.26689E1	-3.26156E1	2.68314E1	1.20278E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00302E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.79669E-1	-8.96549E-1	-9.04686E0	-9.04191E0	3.93391E-3	9.53913E-2	2.7321E1	-3.26921E1	-3.26095E1	2.68088E1	1.19941E-7	2.52131E-3	2.52131E-3	6.32328E-3	3.01104E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.80051E-1	-8.96573E-1	-9.04698E0	-9.04224E0	4.14848E-3	9.54866E-2	2.73375E1	-3.26313E1	-3.25977E1	2.684E1	1.2035E-7	2.51693E-3	2.51693E-3	6.31858E-3	3.02277E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.80027E-1	-8.96454E-1	-9.04675E0	-9.04179E0	3.91006E-3	9.56297E-2	2.73466E1	-3.26522E1	-3.25998E1	2.68441E1	1.20383E-7	2.51116E-3	2.51116E-3	6.34037E-3	3.01347E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.80313E-1	-8.96525E-1	-9.04684E0	-9.04186E0	4.02927E-3	9.52005E-2	2.73305E1	-3.26686E1	-3.26006E1	2.68438E1	1.19725E-7	2.51854E-3	2.51854E-3	6.31761E-3	3.01365E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.80098E-1	-8.96049E-1	-9.04686E0	-9.04195E0	4.41074E-3	9.5582E-2	2.73151E1	-3.26567E1	-3.26378E1	2.68064E1	1.20005E-7	2.5199E-3	2.5199E-3	6.33065E-3	3.00363E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.79931E-1	-8.96406E-1	-9.04694E0	-9.04219E0	4.52995E-3	9.53674E-2	2.73646E1	-3.26945E1	-3.2599E1	2.68227E1	1.19965E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.80122E-1	-8.96668E-1	-9.04691E0	-9.04181E0	4.33922E-3	9.56059E-2	2.73187E1	-3.26585E1	-3.26319E1	2.68358E1	1.20004E-7	2.51417E-3	2.51417E-3	6.29128E-3	3.0071E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.80289E-1	-8.96406E-1	-9.0472E0	-9.04136E0	4.1008E-3	9.58204E-2	2.73474E1	-3.26573E1	-3.26196E1	2.68377E1	1.19953E-7	2.52276E-3	2.52276E-3	6.3074E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.80265E-1	-8.9612E-1	-9.04694E0	-9.04148E0	4.1008E-3	9.54866E-2	2.73039E1	-3.26488E1	-3.26663E1	2.68304E1	1.2026E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.99941E-1
