[Scan]
initial_time=2016-01-18T17:55:52
final_time=2016-01-18T17:56:12
ip_count=19
run=1024
dataset=3
scan=168
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08808E-4
ql1_vset=
ql1_vmon=-8.80384E-1
ql1_imon=1.34173E-8
ql2_vset=
ql2_vmon=-8.96525E-1
ql2_imon=1.97066E-9
ql3_vset=
ql3_vmon=-9.04689E0
ql3_imon=2.24507E-10
ql4_vset=
ql4_vmon=-9.04167E0
ql4_imon=6.85692E-11
mult1=-9.83671E-9
mult2=-2.70863E-9
rf_tmon=-4.57251E-3
rf_agc=3.33816E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=1.72273E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68627E0
bslens_imon=2.45123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19553E1
lens5a_imon=1.99359E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12527E2
lens4a_imon=2.04944E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54049E1
cs_ef1b_imon=2.82629E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04579E2
lens23_imon=1.02047E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04752E1
cs_ea1_imon=2.53937E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35604E0
lens1_imon=2.57511E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64476E1
os_ef1alow_imon=2.97333E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04127E1
cs_ea2_imon=1.49878E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8458E1
cs_ef1a_imon=2.93945E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.33428E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11484E1
os_restr1_imon=4.25454E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15276E1
os_ea1_imon=2.34718E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63503E1
os_ef1bup_imon=3.06703E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21552E0
cs_ionrep_imon=1.19793E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91969E2
cs_nozzle_imon=1.93388E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=2.97081E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=3.34078E-8
tplens_vset=1.4E-1
tplens_vmon=1.63789E0
tplens_imon=-3.66136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.50692E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26687E1
iondef2_imon=1.57453E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03062E2
lens6_imon=2.98056E-4
ql6_vset=1.0E-1
ql6_vmon=9.57489E-2
ql6_imon=4.1236E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27215E0
ionrepsh_imon=1.77592E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3374E1
lens5b_imon=2.17976E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75096E1
cs_ef2b_imon=3.12542E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50104E0
os_ea2_imon=-7.51931E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00502E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71318E1
cs_ef2a_imon=3.15028E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05696E0
os_ef2alow_imon=-2.46453E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96823E-1
os_ef2bup_imon=-5.24679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11358E1
os_restr2_imon=3.43212E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.28902E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.24965E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73369E1
iondef1_imon=1.09777E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68124E1
iondef4_imon=1.09026E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.34475E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.87438E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12894E0
cs_ionaccel_imon=-1.85186E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47345E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56375E1
einzel_imon=7.56891E-6
window_vset=0.0E0
window_vmon=2.36564E-1
window_imon=-9.90511E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82715E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.8638E1
mask2_imon=-7.27421E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.61169E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.51447E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=6.71622E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28449E0
defgridb_imon=6.01896E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33235E1
os_fil1_imon=9.43297E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06158E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65342E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30799E1
cs_fil1_imon=9.95693E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62678E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66963E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17994E-2
os_fil2_imon=-2.76207E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.69483E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.89639E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36773E-1
cs_fil2_imon=-2.67798E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.23872E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22576E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.13041E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.80146E-1	-8.97074E-1	-9.04653E0	-9.04183E0	3.95775E-3	9.57727E-2	2.73446E1	-3.27127E1	-3.26337E1	2.68389E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9978E-1
2.0E0	2.4E1	0.0E0	3.16E2	1.6E2	-2.09634E0	-8.80194E-1	-8.96645E-1	-9.04713E0	-9.04205E0	4.26769E-3	9.57727E-2	2.73608E1	-3.26401E1	-3.25881E1	2.68699E1	1.20042E-7	2.52342E-3	2.52342E-3	6.33388E-3	3.00097E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.80265E-1	-8.96406E-1	-9.04677E0	-9.04195E0	4.24385E-3	9.57966E-2	2.73346E1	-3.26679E1	-3.26236E1	2.68065E1	1.19925E-7	2.52139E-3	2.52139E-3	6.3074E-3	3.01475E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.80003E-1	-8.96502E-1	-9.04706E0	-9.04171E0	4.22001E-3	9.56535E-2	2.73299E1	-3.26691E1	-3.26402E1	2.68148E1	1.19953E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.9943E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09627E0	-8.80075E-1	-8.96311E-1	-9.04682E0	-9.04167E0	4.52995E-3	9.59158E-2	2.73231E1	-3.26813E1	-3.2644E1	2.68653E1	1.19965E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.80194E-1	-8.96454E-1	-9.04698E0	-9.04183E0	4.72069E-3	9.57727E-2	2.73448E1	-3.27017E1	-3.2632E1	2.68406E1	1.20055E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99175E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.80027E-1	-8.96335E-1	-9.04734E0	-9.04145E0	4.64916E-3	9.57489E-2	2.73131E1	-3.26488E1	-3.25975E1	2.68345E1	1.19757E-7	2.52428E-3	2.52428E-3	6.31288E-3	3.04505E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09711E0	-8.80051E-1	-8.96072E-1	-9.04741E0	-9.04176E0	4.57764E-3	9.54866E-2	2.73197E1	-3.26871E1	-3.26044E1	2.68413E1	1.20127E-7	2.51886E-3	2.51886E-3	6.3074E-3	3.01981E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.7986E-1	-8.96311E-1	-9.04706E0	-9.04205E0	4.81606E-3	9.56059E-2	2.7252E1	-3.26756E1	-3.26236E1	2.68233E1	1.19895E-7	2.51411E-3	2.51411E-3	6.33648E-3	3.02581E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.79955E-1	-8.96335E-1	-9.04701E0	-9.04205E0	4.88758E-3	9.57251E-2	2.73577E1	-3.2645E1	-3.26248E1	2.68334E1	1.19965E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.02659E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.7986E-1	-8.96192E-1	-9.04713E0	-9.04191E0	4.50611E-3	9.57251E-2	2.73339E1	-3.26627E1	-3.25821E1	2.6837E1	1.2033E-7	2.51007E-3	2.51007E-3	6.33486E-3	3.01347E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.79622E-1	-8.96215E-1	-9.04703E0	-9.04186E0	4.33922E-3	9.59396E-2	2.73327E1	-3.2647E1	-3.26218E1	2.68316E1	1.20226E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-8.79908E-1	-8.96478E-1	-9.04703E0	-9.04188E0	4.50611E-3	9.59873E-2	2.73237E1	-3.26729E1	-3.26068E1	2.68556E1	1.19757E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9926E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.79741E-1	-8.96478E-1	-9.04727E0	-9.04183E0	4.26769E-3	9.56297E-2	2.73316E1	-3.26531E1	-3.26573E1	2.68268E1	1.19861E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00041E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.80098E-1	-8.96621E-1	-9.04722E0	-9.042E0	4.48227E-3	9.57727E-2	2.7357E1	-3.27658E1	-3.26608E1	2.6834E1	1.19953E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.9943E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.79931E-1	-8.96668E-1	-9.04691E0	-9.04202E0	4.14848E-3	9.5892E-2	2.72937E1	-3.26627E1	-3.2605E1	2.68442E1	1.20106E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.00197E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09634E0	-8.80027E-1	-8.96502E-1	-9.04682E0	-9.04214E0	4.07696E-3	9.59635E-2	2.73255E1	-3.26428E1	-3.26368E1	2.68267E1	1.20191E-7	2.52362E-3	2.52362E-3	6.32418E-3	3.01742E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.79955E-1	-8.96358E-1	-9.04698E0	-9.04186E0	3.98159E-3	9.59635E-2	2.73299E1	-3.26396E1	-3.26195E1	2.6834E1	1.198E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.02769E-1
2.2E1	3.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.8017E-1	-8.96454E-1	-9.04703E0	-9.04207E0	4.24385E-3	9.57727E-2	2.73193E1	-3.2649E1	-3.26366E1	2.68296E1	1.20055E-7	2.51525E-3	2.51525E-3	6.28056E-3	2.99686E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.80384E-1	-8.96525E-1	-9.04689E0	-9.04167E0	4.48227E-3	9.57489E-2	2.73369E1	-3.26687E1	-3.26248E1	2.68124E1	1.20055E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.01223E-1
