[Scan]
initial_time=2016-01-18T17:56:19
final_time=2016-01-18T17:56:38
ip_count=19
run=1024
dataset=3
scan=169
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08702E-4
ql1_vset=
ql1_vmon=-8.79979E-1
ql1_imon=1.34297E-8
ql2_vset=
ql2_vmon=-8.96287E-1
ql2_imon=1.92994E-9
ql3_vset=
ql3_vmon=-9.04753E0
ql3_imon=2.01797E-10
ql4_vset=
ql4_vmon=-9.04186E0
ql4_imon=6.83427E-11
mult1=-9.18017E-9
mult2=-2.58803E-9
rf_tmon=-4.41509E-3
rf_agc=3.38046E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=1.76055E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66975E0
bslens_imon=2.35921E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19931E1
lens5a_imon=1.99784E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12514E2
lens4a_imon=2.05065E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54013E1
cs_ef1b_imon=2.82989E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02022E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04652E1
cs_ea1_imon=2.52096E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34365E0
lens1_imon=2.55742E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64729E1
os_ef1alow_imon=2.98126E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03419E1
cs_ea2_imon=1.47613E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84334E1
cs_ef1a_imon=2.93585E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.34535E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1131E1
os_restr1_imon=4.25418E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15146E1
os_ea1_imon=2.33868E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63737E1
os_ef1bup_imon=3.07352E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20255E0
cs_ionrep_imon=1.21528E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91994E2
cs_nozzle_imon=1.93512E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=2.9845E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20442E0
olens4_imon=3.35475E-8
tplens_vset=1.4E-1
tplens_vmon=1.66562E0
tplens_imon=-9.0062E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26225E1
iondef3_imon=1.49984E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26231E1
iondef2_imon=1.54975E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03094E2
lens6_imon=2.98169E-4
ql6_vset=1.0E-1
ql6_vmon=9.56059E-2
ql6_imon=4.0994E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23912E0
ionrepsh_imon=1.76495E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33823E1
lens5b_imon=2.16384E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75228E1
cs_ef2b_imon=3.13046E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47036E0
os_ea2_imon=-7.44853E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0613E2
lens4b_imon=2.00527E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.14848E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07738E0
os_ef2alow_imon=-2.5222E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.81807E-1
os_ef2bup_imon=-5.31527E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11201E1
os_restr2_imon=3.42887E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.31344E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01587E1
cs_anode2_imon=2.24929E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73428E1
iondef1_imon=1.10697E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6816E1
iondef4_imon=1.09638E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.36966E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=7.9166E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14215E0
cs_ionaccel_imon=-1.83023E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02121E2
cs_ionfocb_imon=1.47356E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56447E1
einzel_imon=7.67342E-6
window_vset=0.0E0
window_vmon=3.11646E-1
window_imon=-7.52649E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82743E2
mask1_imon=2.39008E-4
mask2_vset=0.0E0
mask2_vmon=-1.8629E1
mask2_imon=-7.38233E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.39933E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.13222E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.13387E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39965E0
defgridb_imon=6.05789E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33227E1
os_fil1_imon=9.42985E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07035E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65694E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30829E1
cs_fil1_imon=9.96023E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62138E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67247E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39521E-2
os_fil2_imon=-2.75006E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80896E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.71795E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36514E-1
cs_fil2_imon=-2.52782E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.55687E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22506E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.78513E-1
res40_imon=-2.41047E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.7986E-1	-8.9643E-1	-9.04741E0	-9.04186E0	4.22001E-3	9.58204E-2	2.73526E1	-3.26579E1	-3.26296E1	2.68466E1	1.20055E-7	2.52815E-3	2.52815E-3	6.31817E-3	3.00197E-1
2.0E0	2.4E1	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.79931E-1	-8.96215E-1	-9.04741E0	-9.04191E0	4.52995E-3	9.56059E-2	2.72985E1	-3.26699E1	-3.26206E1	2.68454E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01871E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.80122E-1	-8.96358E-1	-9.04727E0	-9.04236E0	4.72069E-3	9.57489E-2	2.7334E1	-3.26561E1	-3.26596E1	2.68454E1	1.20749E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00563E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.80241E-1	-8.96287E-1	-9.04732E0	-9.04207E0	4.48227E-3	9.57251E-2	2.73086E1	-3.26632E1	-3.26272E1	2.68377E1	1.19902E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.9943E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.80003E-1	-8.96287E-1	-9.04746E0	-9.0414E0	4.673E-3	9.57489E-2	2.73123E1	-3.2647E1	-3.26026E1	2.68418E1	1.20004E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.79955E-1	-8.96049E-1	-9.04737E0	-9.0416E0	4.41074E-3	9.56059E-2	2.73273E1	-3.26549E1	-3.26218E1	2.68352E1	1.20069E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.80146E-1	-8.96239E-1	-9.04727E0	-9.04119E0	4.19617E-3	9.56535E-2	2.73027E1	-3.26627E1	-3.26038E1	2.68346E1	1.20226E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.02922E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.79979E-1	-8.96144E-1	-9.04684E0	-9.04133E0	4.19617E-3	9.56774E-2	2.7301E1	-3.26384E1	-3.26337E1	2.68581E1	1.20122E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-8.80075E-1	-8.96311E-1	-9.04739E0	-9.04152E0	4.19617E-3	9.54151E-2	2.73484E1	-3.26711E1	-3.2644E1	2.68424E1	1.2026E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.9892E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09371E0	-8.7986E-1	-8.96454E-1	-9.04772E0	-9.04198E0	4.22001E-3	9.56535E-2	2.73134E1	-3.26366E1	-3.26313E1	2.68186E1	1.20069E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.97704E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09371E0	-8.79812E-1	-8.96597E-1	-9.04746E0	-9.0416E0	4.22001E-3	9.59158E-2	2.73237E1	-3.26248E1	-3.2647E1	2.68496E1	1.20226E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.95899E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09333E0	-8.79884E-1	-8.96621E-1	-9.04753E0	-9.04155E0	3.95775E-3	9.56297E-2	2.73249E1	-3.26452E1	-3.2626E1	2.68418E1	1.20106E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.9714E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0941E0	-8.79908E-1	-8.96597E-1	-9.04763E0	-9.04148E0	4.02927E-3	9.54628E-2	2.73354E1	-3.26542E1	-3.26159E1	2.68228E1	1.20226E-7	2.52647E-3	2.52647E-3	6.29098E-3	2.9952E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.79955E-1	-8.96168E-1	-9.04758E0	-9.04188E0	4.05312E-3	9.58443E-2	2.73211E1	-3.26574E1	-3.26319E1	2.68464E1	1.20026E-7	2.52151E-3	2.52151E-3	6.32684E-3	3.01957E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.80122E-1	-8.96239E-1	-9.04751E0	-9.04186E0	3.91006E-3	9.55105E-2	2.73342E1	-3.26605E1	-3.25936E1	2.68339E1	1.20026E-7	2.52054E-3	2.52054E-3	6.33658E-3	3.02887E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.7986E-1	-8.96025E-1	-9.0472E0	-9.04191E0	4.24385E-3	9.55582E-2	2.72973E1	-3.26536E1	-3.26146E1	2.68484E1	1.20109E-7	2.51867E-3	2.51867E-3	6.33211E-3	3.00726E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-8.80027E-1	-8.96072E-1	-9.04729E0	-9.04186E0	4.41074E-3	9.62496E-2	2.73243E1	-3.26747E1	-3.25821E1	2.6855E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.98222E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-8.80075E-1	-8.95977E-1	-9.04753E0	-9.04198E0	4.24385E-3	9.59396E-2	2.73157E1	-3.26762E1	-3.26077E1	2.68371E1	1.19913E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.9874E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09402E0	-8.80098E-1	-8.96192E-1	-9.04748E0	-9.04191E0	4.57764E-3	9.58204E-2	2.73458E1	-3.26508E1	-3.26107E1	2.6817E1	1.19749E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.79979E-1	-8.96287E-1	-9.04753E0	-9.04186E0	4.48227E-3	9.56059E-2	2.73428E1	-3.26231E1	-3.26225E1	2.6816E1	1.19902E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.00966E-1
