[Scan]
initial_time=2016-01-18T17:56:45
final_time=2016-01-18T17:57:05
ip_count=19
run=1024
dataset=3
scan=170
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08792E-4
ql1_vset=
ql1_vmon=-8.80337E-1
ql1_imon=1.33309E-8
ql2_vset=
ql2_vmon=-8.96764E-1
ql2_imon=1.96683E-9
ql3_vset=
ql3_vmon=-9.04698E0
ql3_imon=2.226E-10
ql4_vset=
ql4_vmon=-9.04202E0
ql4_imon=5.60045E-11
mult1=-9.49936E-9
mult2=-2.72718E-9
rf_tmon=-5.03449E-3
rf_agc=3.32619E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.14848E-3
ql5_imon=1.71875E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66515E0
bslens_imon=2.63422E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19798E1
lens5a_imon=2.00764E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.04882E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53978E1
cs_ef1b_imon=2.81147E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02277E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04592E1
cs_ea1_imon=2.51728E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32779E0
lens1_imon=2.66537E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64313E1
os_ef1alow_imon=2.96144E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0408E1
cs_ea2_imon=1.48204E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84607E1
cs_ef1a_imon=2.95953E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.34293E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11963E1
os_restr1_imon=4.26726E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14988E1
os_ea1_imon=2.37479E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63422E1
os_ef1bup_imon=3.02631E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24691E0
cs_ionrep_imon=1.18537E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91982E2
cs_nozzle_imon=1.93381E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01612E1
cs_anode1_imon=2.98204E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.35133E-8
tplens_vset=1.4E-1
tplens_vmon=1.63689E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25953E1
iondef3_imon=1.50501E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2639E1
iondef2_imon=1.56458E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03065E2
lens6_imon=2.98011E-4
ql6_vset=1.0E-1
ql6_vmon=9.61542E-2
ql6_imon=4.14957E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26118E0
ionrepsh_imon=1.75964E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3336E1
lens5b_imon=2.16883E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75264E1
cs_ef2b_imon=3.14613E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50322E0
os_ea2_imon=-7.7246E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00331E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7115E1
cs_ef2a_imon=3.12476E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-3.98365E0
os_ef2alow_imon=-2.57329E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.65475E-1
os_ef2bup_imon=-5.09946E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11759E1
os_restr2_imon=3.464E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.27436E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02426E1
cs_anode2_imon=2.24594E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73222E1
iondef1_imon=1.11139E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68286E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.33874E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81522E-1
olens1_imon=7.92156E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09898E0
cs_ionaccel_imon=-2.13064E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02121E2
cs_ionfocb_imon=1.47646E-4
einzel_vset=-2.1E1
einzel_vmon=-2.57047E1
einzel_imon=7.69929E-6
window_vset=0.0E0
window_vmon=3.87542E-1
window_imon=-1.24915E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82739E2
mask1_imon=2.39313E-4
mask2_vset=0.0E0
mask2_vmon=-1.87209E1
mask2_imon=-4.82139E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.71894E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.46528E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=6.74171E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28655E0
defgridb_imon=6.23557E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33249E1
os_fil1_imon=9.42299E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07126E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65504E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30833E1
cs_fil1_imon=9.9674E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62696E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66964E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35848E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.37153E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.83096E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3726E-1
cs_fil2_imon=-2.06919E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.30157E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22589E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.21705E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=1.09806E-1
res40_imon=-2.38631E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.80051E-1	-8.96144E-1	-9.04739E0	-9.04198E0	4.55379E-3	9.57966E-2	2.73293E1	-3.26614E1	-3.26213E1	2.68232E1	1.20019E-7	2.51085E-3	2.51085E-3	6.31332E-3	3.02175E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.80075E-1	-8.96096E-1	-9.04713E0	-9.04195E0	4.41074E-3	9.57489E-2	2.73345E1	-3.26664E1	-3.26058E1	2.67939E1	1.20158E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.03804E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.80098E-1	-8.9674E-1	-9.04717E0	-9.04202E0	4.673E-3	9.58204E-2	2.73493E1	-3.27121E1	-3.26142E1	2.68279E1	1.19925E-7	2.52027E-3	2.52027E-3	6.31299E-3	3.01209E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09394E0	-8.80051E-1	-8.96692E-1	-9.04727E0	-9.04205E0	4.62532E-3	9.57966E-2	2.73187E1	-3.2675E1	-3.25865E1	2.6863E1	1.19953E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.9943E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.80098E-1	-8.96382E-1	-9.04725E0	-9.04238E0	4.45843E-3	9.58204E-2	2.73252E1	-3.26868E1	-3.26278E1	2.68412E1	1.20158E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.9841E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09379E0	-8.80432E-1	-8.96239E-1	-9.04701E0	-9.04219E0	4.76837E-3	9.59396E-2	2.73478E1	-3.26603E1	-3.26116E1	2.68526E1	1.19902E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.80241E-1	-8.96382E-1	-9.04701E0	-9.0421E0	4.52995E-3	9.57966E-2	2.73057E1	-3.26738E1	-3.26024E1	2.68442E1	1.20122E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.80218E-1	-8.9643E-1	-9.0466E0	-9.04186E0	4.88758E-3	9.58443E-2	2.73326E1	-3.2634E1	-3.25917E1	2.68226E1	1.20055E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.0071E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.80122E-1	-8.96049E-1	-9.04703E0	-9.04233E0	4.55379E-3	9.58204E-2	2.73327E1	-3.26561E1	-3.26248E1	2.68424E1	1.20084E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.00144E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.8017E-1	-8.96335E-1	-9.04708E0	-9.04198E0	4.62532E-3	9.57251E-2	2.73339E1	-3.26687E1	-3.26242E1	2.68088E1	1.20226E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.01085E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.80218E-1	-8.96358E-1	-9.04715E0	-9.04207E0	4.48227E-3	9.57727E-2	2.73219E1	-3.27065E1	-3.26416E1	2.68286E1	1.19913E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.80003E-1	-8.96597E-1	-9.04713E0	-9.04195E0	4.62532E-3	9.58204E-2	2.7321E1	-3.26573E1	-3.26136E1	2.68136E1	1.20017E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.79955E-1	-8.96239E-1	-9.04684E0	-9.04186E0	4.50611E-3	9.5892E-2	2.73075E1	-3.26639E1	-3.25906E1	2.68366E1	1.19902E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00197E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.80075E-1	-8.96692E-1	-9.04679E0	-9.04171E0	4.17233E-3	9.6035E-2	2.73454E1	-3.26212E1	-3.26182E1	2.68282E1	1.2033E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.01871E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09394E0	-8.80098E-1	-8.96525E-1	-9.0471E0	-9.04148E0	4.48227E-3	9.6035E-2	2.73405E1	-3.26543E1	-3.26242E1	2.6818E1	1.19809E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.02659E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09348E0	-8.79884E-1	-8.96287E-1	-9.0471E0	-9.04126E0	4.48227E-3	9.61304E-2	2.73225E1	-3.26404E1	-3.26014E1	2.68331E1	1.19653E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01871E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09364E0	-8.80051E-1	-8.96406E-1	-9.04725E0	-9.04171E0	4.62532E-3	9.56774E-2	2.73081E1	-3.26452E1	-3.26236E1	2.68325E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-8.79931E-1	-8.96525E-1	-9.04715E0	-9.04162E0	4.3869E-3	9.5892E-2	2.73033E1	-3.26514E1	-3.2616E1	2.6834E1	1.20802E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09364E0	-8.80098E-1	-8.96668E-1	-9.04713E0	-9.04179E0	4.36306E-3	9.58204E-2	2.72255E1	-3.25004E1	-3.2708E1	2.6836E1	1.21342E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.03027E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.80337E-1	-8.96764E-1	-9.04698E0	-9.04202E0	4.14848E-3	9.61542E-2	2.73222E1	-3.2639E1	-3.25953E1	2.68286E1	1.21705E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.01738E-1
