[Scan]
initial_time=2016-01-18T17:59:25
final_time=2016-01-18T17:59:45
ip_count=19
run=1024
dataset=3
scan=176
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08837E-4
ql1_vset=
ql1_vmon=-8.79979E-1
ql1_imon=1.34517E-8
ql2_vset=
ql2_vmon=-8.96573E-1
ql2_imon=1.9311E-9
ql3_vset=
ql3_vmon=-9.0471E0
ql3_imon=2.25139E-10
ql4_vset=
ql4_vmon=-9.04229E0
ql4_imon=6.33955E-11
mult1=-9.66815E-9
mult2=-2.84836E-9
rf_tmon=-5.16132E-3
rf_agc=3.25405E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=1.70047E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64852E0
bslens_imon=2.47955E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19317E1
lens5a_imon=1.99996E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05026E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53935E1
cs_ef1b_imon=2.82773E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04646E2
lens23_imon=1.02079E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04404E1
cs_ea1_imon=2.5376E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35368E0
lens1_imon=2.69899E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64867E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03389E1
cs_ea2_imon=1.50091E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8446E1
cs_ef1a_imon=2.93333E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.35177E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11514E1
os_restr1_imon=4.25995E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15022E1
os_ea1_imon=2.33621E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63485E1
os_ef1bup_imon=3.07388E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24384E0
cs_ionrep_imon=1.19404E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91979E2
cs_nozzle_imon=1.9354E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=2.98775E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=3.35992E-8
tplens_vset=1.4E-1
tplens_vmon=1.66149E0
tplens_imon=-4.54621E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26368E1
iondef3_imon=1.50091E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26729E1
iondef2_imon=1.554E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03061E2
lens6_imon=2.9802E-4
ql6_vset=1.0E-1
ql6_vmon=9.59873E-2
ql6_imon=4.07747E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25741E0
ionrepsh_imon=1.78583E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3377E1
lens5b_imon=2.17516E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7479E1
cs_ef2b_imon=3.12145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50281E0
os_ea2_imon=-8.75811E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06115E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71059E1
cs_ef2a_imon=3.15749E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05396E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04031E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1143E1
os_restr2_imon=3.4177E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.27805E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.23272E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73087E1
iondef1_imon=1.1236E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68389E1
iondef4_imon=1.09494E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.32669E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81331E-1
olens1_imon=7.91414E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12293E0
cs_ionaccel_imon=-1.79419E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02114E2
cs_ionfocb_imon=1.47352E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56639E1
einzel_imon=7.71307E-6
window_vset=0.0E0
window_vmon=2.26953E-1
window_imon=-9.25639E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82713E2
mask1_imon=2.38983E-4
mask2_vset=0.0E0
mask2_vmon=-1.8647E1
mask2_imon=-6.69758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.24359E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.472E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.09848E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46166E0
defgridb_imon=5.88092E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33223E1
os_fil1_imon=9.46505E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08651E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65119E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30816E1
cs_fil1_imon=9.9821E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62798E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67104E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42053E-2
os_fil2_imon=-2.73805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.78493E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.92423E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36255E-1
cs_fil2_imon=-2.53983E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.37998E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22678E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32592E-3
inlet_lpb_pmon=3.00505E-1
chamber_ion_pmon=1.2212E-7
chamber_cvt_pmon=2.5159E-3
foreline_cvt_pmon=2.5159E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.29569E-1
res40_imon=-2.57626E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.79884E-1	-8.96454E-1	-9.0472E0	-9.04181E0	3.91006E-3	9.58443E-2	2.73294E1	-3.26532E1	-3.26509E1	2.6818E1	1.22067E-7	2.52757E-3	2.52757E-3	6.34588E-3	2.97187E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.80098E-1	-8.95977E-1	-9.04694E0	-9.04179E0	3.8147E-3	9.58681E-2	2.73094E1	-3.26652E1	-3.26327E1	2.68208E1	1.2212E-7	2.52977E-3	2.52977E-3	6.31798E-3	2.99343E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.80098E-1	-8.96001E-1	-9.04672E0	-9.04195E0	3.79086E-3	9.57966E-2	2.73299E1	-3.26561E1	-3.26266E1	2.6834E1	1.21275E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.01871E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.80146E-1	-8.96358E-1	-9.04689E0	-9.04224E0	3.88622E-3	9.55343E-2	2.73345E1	-3.26711E1	-3.25912E1	2.68256E1	1.20226E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.01871E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.80241E-1	-8.96621E-1	-9.04696E0	-9.04222E0	4.17233E-3	9.59158E-2	2.73147E1	-3.26921E1	-3.26056E1	2.68538E1	1.19861E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.02133E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.79955E-1	-8.96978E-1	-9.04706E0	-9.04222E0	4.17233E-3	9.55343E-2	2.73492E1	-3.26389E1	-3.26107E1	2.68208E1	1.20907E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.8017E-1	-8.96621E-1	-9.04722E0	-9.04195E0	3.98159E-3	9.59396E-2	2.73442E1	-3.2647E1	-3.25936E1	2.68286E1	1.20802E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.80027E-1	-8.96621E-1	-9.04725E0	-9.04176E0	4.48227E-3	9.60112E-2	2.73097E1	-3.26417E1	-3.26231E1	2.68316E1	1.20106E-7	2.5131E-3	2.5131E-3	6.32896E-3	2.99941E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.80146E-1	-8.96621E-1	-9.04722E0	-9.042E0	4.24385E-3	9.59158E-2	2.73187E1	-3.26478E1	-3.26101E1	2.68783E1	1.20069E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.79908E-1	-8.96239E-1	-9.0472E0	-9.04183E0	4.24385E-3	9.5892E-2	2.73033E1	-3.26438E1	-3.26272E1	2.68328E1	1.20004E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.03027E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.8017E-1	-8.96502E-1	-9.04708E0	-9.04169E0	4.02927E-3	9.62019E-2	2.73159E1	-3.26663E1	-3.26254E1	2.68151E1	1.21328E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.00302E-1
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.80146E-1	-8.96502E-1	-9.04741E0	-9.0415E0	3.93391E-3	9.57727E-2	2.73303E1	-3.26464E1	-3.25809E1	2.68059E1	1.21012E-7	2.52154E-3	2.52154E-3	6.32661E-3	3.00041E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.80051E-1	-8.96549E-1	-9.04729E0	-9.04171E0	4.62532E-3	9.61065E-2	2.7321E1	-3.26655E1	-3.26183E1	2.68274E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.80241E-1	-8.96502E-1	-9.04734E0	-9.04205E0	4.57764E-3	9.62257E-2	2.73387E1	-3.26488E1	-3.26224E1	2.68448E1	1.2098E-7	2.52169E-3	2.52169E-3	6.35059E-3	2.99941E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09379E0	-8.80194E-1	-8.96525E-1	-9.04739E0	-9.042E0	4.43459E-3	9.58681E-2	2.73257E1	-3.2639E1	-3.25953E1	2.68542E1	1.21433E-7	2.52757E-3	2.52757E-3	6.32936E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09387E0	-8.80146E-1	-8.96478E-1	-9.04725E0	-9.04212E0	4.19617E-3	9.59158E-2	2.72799E1	-3.25713E1	-3.26122E1	2.68196E1	1.22068E-7	2.51096E-3	2.51096E-3	6.32356E-3	3.00453E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.79622E-1	-8.96645E-1	-9.04748E0	-9.0421E0	4.36306E-3	9.59158E-2	2.73273E1	-3.26771E1	-3.26212E1	2.68436E1	1.2212E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.80218E-1	-8.96883E-1	-9.04715E0	-9.04231E0	4.22001E-3	9.56535E-2	2.73305E1	-3.26661E1	-3.25706E1	2.68412E1	1.2212E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-8.80265E-1	-8.96764E-1	-9.04708E0	-9.04226E0	4.17233E-3	9.61065E-2	2.73288E1	-3.26435E1	-3.26585E1	2.6848E1	1.2212E-7	2.52538E-3	2.52538E-3	6.31288E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.79979E-1	-8.96573E-1	-9.0471E0	-9.04229E0	4.43459E-3	9.59873E-2	2.73087E1	-3.26729E1	-3.26368E1	2.68389E1	1.2212E-7	2.5159E-3	2.5159E-3	6.32592E-3	3.00505E-1
