[Scan]
initial_time=2016-01-18T18:00:19
final_time=2016-01-18T18:00:38
ip_count=19
run=1024
dataset=3
scan=178
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-8.80265E-1
ql1_imon=1.32739E-8
ql2_vset=
ql2_vmon=-8.96478E-1
ql2_imon=1.92617E-9
ql3_vset=
ql3_vmon=-9.04677E0
ql3_imon=2.42269E-10
ql4_vset=
ql4_vmon=-9.04212E0
ql4_imon=5.30958E-11
mult1=-9.66815E-9
mult2=-2.73059E-9
rf_tmon=-4.38625E-3
rf_agc=3.361E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.07696E-3
ql5_imon=1.72945E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68014E0
bslens_imon=2.57244E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19603E1
lens5a_imon=1.99419E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12514E2
lens4a_imon=2.04817E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54036E1
cs_ef1b_imon=2.83955E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04698E2
lens23_imon=1.02239E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04529E1
cs_ea1_imon=2.52237E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35481E0
lens1_imon=2.63488E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64689E1
os_ef1alow_imon=2.97915E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03556E1
cs_ea2_imon=1.49614E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84569E1
cs_ef1a_imon=2.94846E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.34934E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11516E1
os_restr1_imon=4.25649E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15036E1
os_ea1_imon=2.34129E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63492E1
os_ef1bup_imon=3.07047E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24047E0
cs_ionrep_imon=1.18393E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91964E2
cs_nozzle_imon=1.93409E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0209E1
cs_anode1_imon=2.98252E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.35517E-8
tplens_vset=1.4E-1
tplens_vmon=1.67939E0
tplens_imon=-3.32879E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26098E1
iondef3_imon=1.48695E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2644E1
iondef2_imon=1.55674E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03094E2
lens6_imon=2.98159E-4
ql6_vset=1.0E-1
ql6_vmon=9.58204E-2
ql6_imon=4.08987E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.257E0
ionrepsh_imon=1.77565E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33829E1
lens5b_imon=2.19143E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74576E1
cs_ef2b_imon=3.12287E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5239E0
os_ea2_imon=-7.36906E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00542E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71214E1
cs_ef2a_imon=3.15618E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05393E0
os_ef2alow_imon=-2.55186E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.14473E-1
os_ef2bup_imon=-5.37751E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11292E1
os_restr2_imon=3.41591E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23027E2
cs_ionfoca_imon=6.27247E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01678E1
cs_anode2_imon=2.24411E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73399E1
iondef1_imon=1.09835E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68466E1
iondef4_imon=1.09476E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.28935E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81355E-1
olens1_imon=7.91355E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13451E0
cs_ionaccel_imon=-1.79586E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02112E2
cs_ionfocb_imon=1.47338E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56299E1
einzel_imon=7.67661E-6
window_vset=0.0E0
window_vmon=2.43171E-1
window_imon=-7.36708E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82712E2
mask1_imon=2.39062E-4
mask2_vset=0.0E0
mask2_vmon=-1.86494E1
mask2_imon=-6.84312E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.13795E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.32254E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=6.86982E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.17679E0
defgridb_imon=6.02871E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33233E1
os_fil1_imon=9.42957E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07073E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65615E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3083E1
cs_fil1_imon=9.95409E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62266E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66742E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33141E-2
os_fil2_imon=-2.73112E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.76622E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75061E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35971E-1
cs_fil2_imon=-2.52527E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0676E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22669E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.03027E-1
chamber_ion_pmon=1.2212E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.31741E-1
res40_imon=-2.55186E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.7986E-1	-8.96955E-1	-9.04701E0	-9.04181E0	3.83854E-3	9.59635E-2	2.73195E1	-3.26903E1	-3.26302E1	2.68298E1	1.2212E-7	2.51915E-3	2.51915E-3	6.29624E-3	3.0041E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.79931E-1	-8.96573E-1	-9.04691E0	-9.04191E0	3.95775E-3	9.58681E-2	2.73117E1	-3.26428E1	-3.26128E1	2.68496E1	1.22067E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.01347E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-8.80146E-1	-8.96621E-1	-9.04698E0	-9.0415E0	4.52995E-3	9.57012E-2	2.7334E1	-3.26472E1	-3.26012E1	2.68401E1	1.22067E-7	2.53087E-3	2.53087E-3	6.3074E-3	3.03976E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.80051E-1	-8.96549E-1	-9.04694E0	-9.04195E0	4.22001E-3	9.57012E-2	2.72997E1	-3.26554E1	-3.26008E1	2.68244E1	1.2212E-7	2.52448E-3	2.52448E-3	6.3074E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09356E0	-8.80027E-1	-8.9674E-1	-9.0471E0	-9.04193E0	4.14848E-3	9.58443E-2	2.73225E1	-3.26987E1	-3.26152E1	2.6813E1	1.2212E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09364E0	-8.79979E-1	-8.96287E-1	-9.04701E0	-9.04224E0	4.24385E-3	9.5892E-2	2.73252E1	-3.26343E1	-3.26189E1	2.68528E1	1.2212E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.80241E-1	-8.96263E-1	-9.04717E0	-9.04238E0	4.17233E-3	9.57727E-2	2.73351E1	-3.26699E1	-3.26236E1	2.68166E1	1.2212E-7	2.52276E-3	2.52276E-3	6.34518E-3	3.0148E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09371E0	-8.80098E-1	-8.96263E-1	-9.0472E0	-9.04238E0	4.36306E-3	9.57251E-2	2.73051E1	-3.26596E1	-3.26071E1	2.68617E1	1.22174E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01347E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-8.80098E-1	-8.96645E-1	-9.04708E0	-9.04233E0	4.33922E-3	9.55343E-2	2.73063E1	-3.26603E1	-3.26076E1	2.68136E1	1.2212E-7	2.52647E-3	2.52647E-3	6.32936E-3	3.02922E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09364E0	-8.8017E-1	-8.96621E-1	-9.04708E0	-9.04233E0	4.55379E-3	9.55343E-2	2.73912E1	-3.26626E1	-3.26006E1	2.68448E1	1.2212E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.02396E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09394E0	-8.79979E-1	-8.96549E-1	-9.04703E0	-9.04217E0	4.17233E-3	9.57966E-2	2.73315E1	-3.26651E1	-3.26092E1	2.6843E1	1.2212E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00966E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09309E0	-8.79979E-1	-8.96525E-1	-9.04665E0	-9.04205E0	4.33922E-3	9.59635E-2	2.73141E1	-3.26855E1	-3.25984E1	2.68394E1	1.2212E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09302E0	-8.80241E-1	-8.96263E-1	-9.04682E0	-9.04212E0	4.60148E-3	9.56297E-2	2.73135E1	-3.26609E1	-3.2614E1	2.68148E1	1.2212E-7	2.52318E-3	2.52318E-3	6.30192E-3	2.9952E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09279E0	-8.80194E-1	-8.96454E-1	-9.04677E0	-9.042E0	4.81606E-3	9.55105E-2	2.73556E1	-3.26512E1	-3.26362E1	2.68208E1	1.2212E-7	2.52209E-3	2.52209E-3	6.29098E-3	3.01085E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09317E0	-8.80337E-1	-8.96215E-1	-9.04689E0	-9.04174E0	4.48227E-3	9.54628E-2	2.73781E1	-3.2648E1	-3.26283E1	2.68319E1	1.2212E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09333E0	-8.80218E-1	-8.96502E-1	-9.04694E0	-9.04214E0	4.52995E-3	9.56535E-2	2.73277E1	-3.26578E1	-3.26511E1	2.68298E1	1.2212E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.9892E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09325E0	-8.80265E-1	-8.96263E-1	-9.04696E0	-9.04183E0	4.43459E-3	9.57251E-2	2.73464E1	-3.26874E1	-3.26396E1	2.68118E1	1.2212E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09317E0	-8.80146E-1	-8.96263E-1	-9.04698E0	-9.04193E0	4.26769E-3	9.57012E-2	2.73159E1	-3.26314E1	-3.2623E1	2.68442E1	1.2212E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.0148E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.80313E-1	-8.96335E-1	-9.04706E0	-9.04219E0	4.41074E-3	9.5439E-2	2.73305E1	-3.26649E1	-3.25947E1	2.68401E1	1.2212E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.02396E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.80265E-1	-8.96478E-1	-9.04677E0	-9.04212E0	4.07696E-3	9.58204E-2	2.73399E1	-3.2644E1	-3.26098E1	2.68466E1	1.2212E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.03027E-1
