[Scan]
initial_time=2016-01-18T18:01:12
final_time=2016-01-18T18:01:32
ip_count=19
run=1024
dataset=3
scan=180
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0965E0
qbias_imon=-1.08774E-4
ql1_vset=
ql1_vmon=-8.79908E-1
ql1_imon=1.33764E-8
ql2_vset=
ql2_vmon=-8.96406E-1
ql2_imon=1.89571E-9
ql3_vset=
ql3_vmon=-9.04713E0
ql3_imon=2.00844E-10
ql4_vset=
ql4_vmon=-9.04176E0
ql4_imon=3.64304E-11
mult1=-9.74039E-9
mult2=-2.71462E-9
rf_tmon=-4.57251E-3
rf_agc=3.30151E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.95775E-3
ql5_imon=1.7222E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67742E0
bslens_imon=2.39106E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19571E1
lens5a_imon=1.99855E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12533E2
lens4a_imon=2.04909E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54091E1
cs_ef1b_imon=2.84251E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04705E2
lens23_imon=1.02188E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04669E1
cs_ea1_imon=2.50574E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33186E0
lens1_imon=2.74146E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64957E1
os_ef1alow_imon=2.97477E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03844E1
cs_ea2_imon=1.49347E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84725E1
cs_ef1a_imon=2.92864E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.33796E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11322E1
os_restr1_imon=4.26211E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15252E1
os_ea1_imon=2.36027E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63497E1
os_ef1bup_imon=3.06127E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21139E0
cs_ionrep_imon=1.20183E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91984E2
cs_nozzle_imon=1.93491E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02037E1
cs_anode1_imon=2.98378E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20432E0
olens4_imon=3.35251E-8
tplens_vset=1.4E-1
tplens_vmon=1.69511E0
tplens_imon=-3.83833E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26452E1
iondef3_imon=1.49772E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26651E1
iondef2_imon=1.58727E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03116E2
lens6_imon=2.98264E-4
ql6_vset=1.0E-1
ql6_vmon=9.56535E-2
ql6_imon=4.10762E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27392E0
ionrepsh_imon=1.77025E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33593E1
lens5b_imon=2.15747E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74423E1
cs_ef2b_imon=3.13263E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53171E0
os_ea2_imon=-6.31592E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06139E2
lens4b_imon=2.00435E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7157E1
cs_ef2a_imon=3.16434E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04615E0
os_ef2alow_imon=-2.4321E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89015E-1
os_ef2bup_imon=-5.36212E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11238E1
os_restr2_imon=3.41842E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.29433E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01713E1
cs_anode2_imon=2.24749E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73448E1
iondef1_imon=1.13705E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6846E1
iondef4_imon=1.09458E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71775E1
olens3_imon=5.27036E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.92268E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10912E0
cs_ionaccel_imon=-1.80861E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02111E2
cs_ionfocb_imon=1.47165E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56453E1
einzel_imon=7.86443E-6
window_vset=0.0E0
window_vmon=2.53382E-1
window_imon=-9.04015E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82752E2
mask1_imon=2.39037E-4
mask2_vset=0.0E0
mask2_vmon=-1.8629E1
mask2_imon=-6.37322E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.34624E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93685E3
defgrida_imon=6.19593E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.09848E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37603E0
defgridb_imon=6.08267E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33272E1
os_fil1_imon=9.42174E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06831E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65487E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30886E1
cs_fil1_imon=9.97891E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6257E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67381E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35722E-2
os_fil2_imon=-2.41369E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86902E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.86855E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38068E-1
cs_fil2_imon=-2.08933E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.3978E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22708E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.9892E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.49081E-1
res40_imon=-2.50057E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.80146E-1	-8.9643E-1	-9.04682E0	-9.04202E0	4.14848E-3	9.58681E-2	2.7355E1	-3.27005E1	-3.26338E1	2.68088E1	1.21032E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99175E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.80337E-1	-8.96311E-1	-9.04677E0	-9.0416E0	4.22001E-3	9.58204E-2	2.73424E1	-3.26741E1	-3.26134E1	2.68699E1	1.20959E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.80289E-1	-8.96287E-1	-9.04691E0	-9.04167E0	4.29153E-3	9.55343E-2	2.73293E1	-3.26626E1	-3.26278E1	2.68169E1	1.21743E-7	2.52027E-3	2.52027E-3	6.31299E-3	3.01742E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.80289E-1	-8.96668E-1	-9.04727E0	-9.04186E0	4.14848E-3	9.58681E-2	2.73393E1	-3.26673E1	-3.26006E1	2.68364E1	1.2212E-7	2.51814E-3	2.51814E-3	6.32328E-3	3.03383E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.80241E-1	-8.96549E-1	-9.04703E0	-9.04152E0	4.31538E-3	9.59396E-2	2.73369E1	-3.26639E1	-3.262E1	2.68154E1	1.2212E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.03712E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.80122E-1	-8.96716E-1	-9.04665E0	-9.04181E0	4.14848E-3	9.58204E-2	2.73153E1	-3.26284E1	-3.26164E1	2.68227E1	1.2212E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.01995E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.80027E-1	-8.96597E-1	-9.04672E0	-9.04214E0	4.05312E-3	9.56297E-2	2.73171E1	-3.26771E1	-3.2629E1	2.68487E1	1.2212E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.79955E-1	-8.96454E-1	-9.04636E0	-9.04164E0	3.98159E-3	9.56297E-2	2.73257E1	-3.26461E1	-3.26166E1	2.68233E1	1.2212E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.97963E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.80027E-1	-8.96502E-1	-9.04663E0	-9.04164E0	4.1008E-3	9.55343E-2	2.73357E1	-3.26554E1	-3.26152E1	2.68352E1	1.21591E-7	2.5188E-3	2.5188E-3	6.34037E-3	2.9978E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.80098E-1	-8.96597E-1	-9.04672E0	-9.04191E0	4.14848E-3	9.58204E-2	2.73302E1	-3.2675E1	-3.25746E1	2.6822E1	1.2212E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.01738E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.80575E-1	-8.96382E-1	-9.04682E0	-9.04217E0	4.14848E-3	9.55105E-2	2.73204E1	-3.26638E1	-3.26119E1	2.6822E1	1.2212E-7	2.52585E-3	2.52585E-3	6.31858E-3	3.02813E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.80408E-1	-8.96192E-1	-9.04639E0	-9.04202E0	4.14848E-3	9.56535E-2	2.73309E1	-3.26482E1	-3.26038E1	2.68166E1	1.2212E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.00966E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.80265E-1	-8.96621E-1	-9.04665E0	-9.042E0	3.8147E-3	9.57012E-2	2.73159E1	-3.26524E1	-3.26386E1	2.68334E1	1.22174E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.98222E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.80289E-1	-8.96358E-1	-9.04689E0	-9.04205E0	3.93391E-3	9.56297E-2	2.73033E1	-3.26657E1	-3.26248E1	2.68244E1	1.2212E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.9978E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09619E0	-8.79979E-1	-8.96382E-1	-9.04715E0	-9.04222E0	4.1008E-3	9.5582E-2	2.73369E1	-3.26657E1	-3.26122E1	2.68358E1	1.21908E-7	2.5188E-3	2.5188E-3	6.3514E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.79908E-1	-8.96382E-1	-9.04708E0	-9.04179E0	4.31538E-3	9.58681E-2	2.73086E1	-3.26526E1	-3.26095E1	2.6846E1	1.2212E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9978E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.80098E-1	-8.96478E-1	-9.04725E0	-9.0416E0	4.05312E-3	9.57251E-2	2.73532E1	-3.26609E1	-3.26633E1	2.6843E1	1.2212E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.80313E-1	-8.96597E-1	-9.04701E0	-9.04195E0	4.07696E-3	9.56535E-2	2.73351E1	-3.26518E1	-3.26056E1	2.68388E1	1.22016E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.00197E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.79717E-1	-8.96382E-1	-9.04727E0	-9.04167E0	3.95775E-3	9.55105E-2	2.73027E1	-3.26815E1	-3.26313E1	2.68226E1	1.2212E-7	2.52757E-3	2.52757E-3	6.32936E-3	2.97445E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0965E0	-8.79908E-1	-8.96406E-1	-9.04713E0	-9.04176E0	3.95775E-3	9.56535E-2	2.73448E1	-3.26651E1	-3.26452E1	2.6846E1	1.20158E-7	2.51203E-3	2.51203E-3	6.33436E-3	2.9892E-1
