[Scan]
initial_time=2016-01-18T18:01:39
final_time=2016-01-18T18:01:58
ip_count=19
run=1024
dataset=3
scan=181
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08797E-4
ql1_vset=
ql1_vmon=-8.80241E-1
ql1_imon=1.34287E-8
ql2_vset=
ql2_vmon=-8.96096E-1
ql2_imon=1.91189E-9
ql3_vset=
ql3_vmon=-9.04706E0
ql3_imon=2.33996E-10
ql4_vset=
ql4_vmon=-9.042E0
ql4_imon=5.97715E-11
mult1=-9.44025E-9
mult2=-2.83693E-9
rf_tmon=-5.5595E-3
rf_agc=3.27015E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.07696E-3
ql5_imon=1.70859E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67996E0
bslens_imon=2.5702E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19785E1
lens5a_imon=1.9773E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54125E1
cs_ef1b_imon=2.82613E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04652E2
lens23_imon=1.02254E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0494E1
cs_ea1_imon=2.52237E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32089E0
lens1_imon=2.66032E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65182E1
os_ef1alow_imon=2.98356E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03792E1
cs_ea2_imon=1.48342E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83994E1
cs_ef1a_imon=2.94638E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.34155E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11668E1
os_restr1_imon=4.24299E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14981E1
os_ea1_imon=2.36808E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63328E1
os_ef1bup_imon=3.08365E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24188E0
cs_ionrep_imon=1.18674E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91963E2
cs_nozzle_imon=1.93434E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01491E1
cs_anode1_imon=2.96375E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2043E0
olens4_imon=3.34574E-8
tplens_vset=1.4E-1
tplens_vmon=1.70212E0
tplens_imon=-4.21914E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26042E1
iondef3_imon=1.50614E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26897E1
iondef2_imon=1.54543E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03059E2
lens6_imon=2.9813E-4
ql6_vset=1.0E-1
ql6_vmon=9.55343E-2
ql6_imon=4.09548E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27914E0
ionrepsh_imon=1.80571E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33898E1
lens5b_imon=2.18855E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74733E1
cs_ef2b_imon=3.12049E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50565E0
os_ea2_imon=-6.77866E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71188E1
cs_ef2a_imon=3.16984E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07599E0
os_ef2alow_imon=-2.83523E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.14607E-1
os_ef2bup_imon=-5.20187E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11465E1
os_restr2_imon=3.43291E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23029E2
cs_ionfoca_imon=6.27549E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02197E1
cs_anode2_imon=2.20962E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73193E1
iondef1_imon=1.09806E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68352E1
iondef4_imon=1.09546E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.29869E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=7.88989E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.18864E0
cs_ionaccel_imon=-2.11585E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47539E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56307E1
einzel_imon=7.53493E-6
window_vset=0.0E0
window_vmon=2.2927E-1
window_imon=-8.89085E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82665E2
mask1_imon=2.39227E-4
mask2_vset=0.0E0
mask2_vmon=-1.86807E1
mask2_imon=-7.88302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.54143E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.47436E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.1557E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28126E0
defgridb_imon=6.01653E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33233E1
os_fil1_imon=9.43509E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07179E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65391E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30871E1
cs_fil1_imon=9.94271E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61538E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67271E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39615E-2
os_fil2_imon=-2.86612E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.74439E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.87319E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35894E-1
cs_fil2_imon=-3.19047E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25785E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22685E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.17909E-1
res40_imon=-2.68579E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-8.80218E-1	-8.96502E-1	-9.04722E0	-9.04186E0	3.83854E-3	9.56774E-2	2.73458E1	-3.27045E1	-3.26178E1	2.6828E1	1.2117E-7	2.52757E-3	2.52757E-3	6.32936E-3	3.01085E-1
2.0E0	2.6E1	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.80122E-1	-8.96406E-1	-9.04708E0	-9.04241E0	4.02927E-3	9.56059E-2	2.73137E1	-3.26499E1	-3.26352E1	2.68656E1	1.2164E-7	2.52008E-3	2.52008E-3	6.30464E-3	3.01411E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.80241E-1	-8.96454E-1	-9.04708E0	-9.04222E0	3.79086E-3	9.56535E-2	2.73439E1	-3.26695E1	-3.25779E1	2.6843E1					
4.0E0	1.1E1	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.79908E-1	-8.96406E-1	-9.04715E0	-9.0425E0	4.1008E-3	9.55343E-2	2.7334E1	-3.26443E1	-3.2613E1	2.68435E1	1.2212E-7	2.51814E-3	2.51814E-3	6.3074E-3	3.02621E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.79884E-1	-8.96382E-1	-9.04725E0	-9.04231E0	4.14848E-3	9.58443E-2	2.73081E1	-3.26579E1	-3.26008E1	2.68148E1	1.22173E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-8.80003E-1	-8.96406E-1	-9.04717E0	-9.04231E0	4.26769E-3	9.61781E-2	2.73117E1	-3.26567E1	-3.26002E1	2.68629E1	1.2212E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.80098E-1	-8.96239E-1	-9.04708E0	-9.04264E0	4.22001E-3	9.56297E-2	2.73249E1	-3.26476E1	-3.26008E1	2.68352E1	1.2212E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.80289E-1	-8.96382E-1	-9.04682E0	-9.04231E0	4.26769E-3	9.56297E-2	2.73104E1	-3.26366E1	-3.25989E1	2.68569E1	1.2212E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.80003E-1	-8.96454E-1	-9.04682E0	-9.04198E0	4.00543E-3	9.55582E-2	2.73091E1	-3.26704E1	-3.25993E1	2.68529E1	1.21756E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01223E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.79979E-1	-8.96573E-1	-9.04708E0	-9.04207E0	4.14848E-3	9.57012E-2	2.73032E1	-3.26998E1	-3.26139E1	2.68581E1	1.2212E-7	2.51472E-3	2.51472E-3	6.3126E-3	3.00989E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-8.80122E-1	-8.96263E-1	-9.04682E0	-9.04183E0	4.24385E-3	9.57251E-2	2.72856E1	-3.26531E1	-3.25912E1	2.6846E1	1.2212E-7	2.5257E-3	2.5257E-3	6.29581E-3	3.03976E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.80265E-1	-8.96168E-1	-9.0471E0	-9.04198E0	4.14848E-3	9.59873E-2	2.73231E1	-3.26771E1	-3.25888E1	2.68448E1	1.2212E-7	2.52867E-3	2.52867E-3	6.30192E-3	3.02396E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0934E0	-8.80289E-1	-8.96382E-1	-9.04713E0	-9.04214E0	4.02927E-3	9.60588E-2	2.73428E1	-3.26196E1	-3.26753E1	2.68377E1	1.2212E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.99941E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09309E0	-8.80361E-1	-8.96263E-1	-9.04701E0	-9.04222E0	4.12464E-3	9.5892E-2	2.73551E1	-3.26785E1	-3.26209E1	2.68208E1	1.21865E-7	2.51919E-3	2.51919E-3	6.30212E-3	2.99343E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09387E0	-8.80289E-1	-8.96168E-1	-9.04667E0	-9.04214E0	4.22001E-3	9.57489E-2	2.73243E1	-3.26681E1	-3.25996E1	2.68577E1	1.20697E-7	2.51926E-3	2.51926E-3	6.3074E-3	2.99789E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-8.80194E-1	-8.96311E-1	-9.0467E0	-9.04214E0	4.24385E-3	9.58204E-2	2.73279E1	-3.26765E1	-3.2608E1	2.68406E1	1.20466E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.99941E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.80003E-1	-8.96335E-1	-9.04689E0	-9.04198E0	4.22001E-3	9.5582E-2	2.73267E1	-3.26549E1	-3.26356E1	2.68294E1	1.19705E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.80051E-1	-8.96001E-1	-9.04701E0	-9.04217E0	4.36306E-3	9.56774E-2	2.73369E1	-3.265E1	-3.26386E1	2.6836E1	1.20017E-7	2.52757E-3	2.52757E-3	6.3074E-3	2.9874E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09371E0	-8.80051E-1	-8.9643E-1	-9.04701E0	-9.04205E0	4.17233E-3	9.55105E-2	2.73446E1	-3.26874E1	-3.26183E1	2.68142E1	1.20069E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.80241E-1	-8.96096E-1	-9.04706E0	-9.042E0	4.07696E-3	9.55343E-2	2.73193E1	-3.26897E1	-3.26042E1	2.68352E1	1.20055E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.01223E-1
