[Scan]
initial_time=2016-01-18T18:03:25
final_time=2016-01-18T18:03:45
ip_count=19
run=1024
dataset=3
scan=185
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08805E-4
ql1_vset=
ql1_vmon=-8.80075E-1
ql1_imon=1.34058E-8
ql2_vset=
ql2_vmon=-8.95786E-1
ql2_imon=1.92184E-9
ql3_vset=
ql3_vmon=-9.04701E0
ql3_imon=1.84464E-10
ql4_vset=
ql4_vmon=-9.042E0
ql4_imon=3.24845E-11
mult1=-9.69223E-9
mult2=-2.68667E-9
rf_tmon=-5.5098E-3
rf_agc=3.2901E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.26769E-3
ql5_imon=1.70587E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67152E0
bslens_imon=2.07252E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19447E1
lens5a_imon=2.00032E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12514E2
lens4a_imon=2.04891E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53893E1
cs_ef1b_imon=2.8376E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02128E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04728E1
cs_ea1_imon=2.5468E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35958E0
lens1_imon=2.66006E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64979E1
os_ef1alow_imon=2.97314E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03566E1
cs_ea2_imon=1.48639E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=2.93665E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.35183E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11523E1
os_restr1_imon=4.25238E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15241E1
os_ea1_imon=2.36983E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63624E1
os_ef1bup_imon=3.07357E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21847E0
cs_ionrep_imon=1.16891E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91939E2
cs_nozzle_imon=1.9342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01867E1
cs_anode1_imon=2.97626E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2043E0
olens4_imon=3.34942E-8
tplens_vset=1.4E-1
tplens_vmon=1.69629E0
tplens_imon=-1.50232E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26819E1
iondef3_imon=1.49843E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26573E1
iondef2_imon=1.55895E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03102E2
lens6_imon=2.98441E-4
ql6_vset=1.0E-1
ql6_vmon=9.58443E-2
ql6_imon=4.10359E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28277E0
ionrepsh_imon=1.77486E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33439E1
lens5b_imon=2.15251E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74571E1
cs_ef2b_imon=3.1257E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48983E0
os_ea2_imon=-5.50185E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06175E2
lens4b_imon=2.00488E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71229E1
cs_ef2a_imon=3.14864E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04124E0
os_ef2alow_imon=-2.53288E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9086E-1
os_ef2bup_imon=-5.33393E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11332E1
os_restr2_imon=3.42492E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2303E2
cs_ionfoca_imon=6.28123E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01989E1
cs_anode2_imon=2.25272E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73514E1
iondef1_imon=1.11546E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68442E1
iondef4_imon=1.09303E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.23305E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8145E-1
olens1_imon=7.90951E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14288E0
cs_ionaccel_imon=-1.85173E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.47355E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56347E1
einzel_imon=7.69827E-6
window_vset=0.0E0
window_vmon=2.53597E-1
window_imon=-8.30005E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82709E2
mask1_imon=2.39025E-4
mask2_vset=0.0E0
mask2_vmon=-1.86599E1
mask2_imon=-8.09154E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.29668E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93688E3
defgrida_imon=6.71268E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=6.97106E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46461E0
defgridb_imon=6.11806E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33262E1
os_fil1_imon=9.41296E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06958E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65704E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30897E1
cs_fil1_imon=9.95366E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62163E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67185E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42053E-2
os_fil2_imon=-2.6576E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79651E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75212E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35145E-1
cs_fil2_imon=-2.69815E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.07602E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22708E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.50142E-1
res40_imon=-2.59891E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-8.80003E-1	-8.96502E-1	-9.04672E0	-9.042E0	4.24385E-3	9.57251E-2	2.73448E1	-3.2635E1	-3.26344E1	2.68418E1	1.21912E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99686E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.80146E-1	-8.96716E-1	-9.0466E0	-9.04191E0	4.19617E-3	9.56297E-2	2.73424E1	-3.26554E1	-3.26199E1	2.68525E1	1.20592E-7	2.51662E-3	2.51662E-3	6.28552E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.80051E-1	-8.96406E-1	-9.04686E0	-9.04214E0	4.24385E-3	9.57012E-2	2.73717E1	-3.2633E1	-3.2626E1	2.68319E1	1.20644E-7	2.52428E-3	2.52428E-3	6.34588E-3	2.98222E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.79812E-1	-8.96454E-1	-9.04679E0	-9.04186E0	4.1008E-3	9.55343E-2	2.73285E1	-3.26356E1	-3.26428E1	2.68352E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09588E0	-8.80027E-1	-8.9643E-1	-9.04675E0	-9.0421E0	3.93391E-3	9.58204E-2	2.73263E1	-3.26744E1	-3.2606E1	2.6833E1	1.19965E-7	2.52977E-3	2.52977E-3	6.31288E-3	3.01347E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.80218E-1	-8.96525E-1	-9.04684E0	-9.0421E0	4.02927E-3	9.5439E-2	2.73387E1	-3.26687E1	-3.25906E1	2.68395E1	1.19749E-7	2.51096E-3	2.51096E-3	6.32896E-3	2.9892E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.79884E-1	-8.96454E-1	-9.04679E0	-9.04183E0	3.62396E-3	9.55582E-2	2.7301E1	-3.2652E1	-3.26419E1	2.68382E1	1.19861E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.97445E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.80289E-1	-8.96454E-1	-9.04665E0	-9.04176E0	3.8147E-3	9.5439E-2	2.73429E1	-3.26404E1	-3.26092E1	2.6834E1	1.20209E-7	2.51525E-3	2.51525E-3	6.28592E-3	2.96128E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.79979E-1	-8.96668E-1	-9.04672E0	-9.04195E0	3.91006E-3	9.59396E-2	2.73165E1	-3.26615E1	-3.25954E1	2.6855E1	1.20174E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.96671E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.80122E-1	-8.9643E-1	-9.04696E0	-9.04212E0	4.12464E-3	9.5582E-2	2.73254E1	-3.26359E1	-3.26321E1	2.68535E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.99175E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.80337E-1	-8.9643E-1	-9.0472E0	-9.04212E0	4.14848E-3	9.56774E-2	2.73448E1	-3.26538E1	-3.26108E1	2.68192E1	1.19725E-7	2.51447E-3	2.51447E-3	6.28703E-3	3.02342E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.80265E-1	-8.96454E-1	-9.04675E0	-9.04198E0	4.26769E-3	9.54628E-2	2.73201E1	-3.26675E1	-3.2626E1	2.68172E1	1.19977E-7	2.51468E-3	2.51468E-3	6.29533E-3	3.02332E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.80361E-1	-8.96454E-1	-9.04677E0	-9.04191E0	4.76837E-3	9.6035E-2	2.73123E1	-3.26759E1	-3.26573E1	2.68304E1	1.19809E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01871E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.80265E-1	-8.96406E-1	-9.04691E0	-9.04193E0	4.60148E-3	9.5892E-2	2.72997E1	-3.26921E1	-3.26206E1	2.68298E1	1.20174E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.02133E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.80241E-1	-8.96478E-1	-9.04694E0	-9.04202E0	4.50611E-3	9.59396E-2	2.73369E1	-3.26518E1	-3.25972E1	2.6846E1	1.19965E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.80146E-1	-8.96573E-1	-9.0467E0	-9.04195E0	4.22001E-3	9.58443E-2	2.73177E1	-3.26567E1	-3.26428E1	2.68124E1	1.20122E-7	2.51225E-3	2.51225E-3	6.30192E-3	2.9978E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.80265E-1	-8.96263E-1	-9.0467E0	-9.04188E0	4.48227E-3	9.56535E-2	2.73311E1	-3.26567E1	-3.2606E1	2.68707E1	1.2033E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-8.8017E-1	-8.95977E-1	-9.04682E0	-9.04193E0	4.29153E-3	9.56059E-2	2.73175E1	-3.2636E1	-3.26113E1	2.68401E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.01223E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.79955E-1	-8.95953E-1	-9.04686E0	-9.04195E0	4.43459E-3	9.56535E-2	2.73411E1	-3.2632E1	-3.26074E1	2.68166E1	1.19902E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.80075E-1	-8.95786E-1	-9.04701E0	-9.042E0	4.26769E-3	9.58443E-2	2.73514E1	-3.26573E1	-3.26819E1	2.68442E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00302E-1
