[Scan]
initial_time=2016-01-18T18:05:12
final_time=2016-01-18T18:05:31
ip_count=19
run=1024
dataset=3
scan=189
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09333E0
qbias_imon=-1.08813E-4
ql1_vset=
ql1_vmon=-8.79908E-1
ql1_imon=1.33275E-8
ql2_vset=
ql2_vmon=-8.96502E-1
ql2_imon=1.93114E-9
ql3_vset=
ql3_vmon=-9.0471E0
ql3_imon=1.32346E-10
ql4_vset=
ql4_vmon=-9.04217E0
ql4_imon=4.44531E-11
mult1=-9.71631E-9
mult2=-2.7765E-9
rf_tmon=-5.64198E-3
rf_agc=3.23122E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.1008E-3
ql5_imon=1.68316E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66914E0
bslens_imon=2.41158E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19761E1
lens5a_imon=1.99749E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05053E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53845E1
cs_ef1b_imon=2.84683E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.02308E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04471E1
cs_ea1_imon=2.54004E-5
lens1_vset=-5.0E0
lens1_vmon=-5.31849E0
lens1_imon=2.70358E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65095E1
os_ef1alow_imon=2.95855E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03672E1
cs_ea2_imon=1.47838E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84448E1
cs_ef1a_imon=2.94342E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.34446E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11532E1
os_restr1_imon=4.2531E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14759E1
os_ea1_imon=2.36051E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.06631E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19742E0
cs_ionrep_imon=1.1907E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9197E2
cs_nozzle_imon=1.93499E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02007E1
cs_anode1_imon=2.98703E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=3.34801E-8
tplens_vset=1.4E-1
tplens_vmon=1.68469E0
tplens_imon=-4.32729E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2593E1
iondef3_imon=1.52164E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26627E1
iondef2_imon=1.55769E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03067E2
lens6_imon=2.9805E-4
ql6_vset=1.0E-1
ql6_vmon=9.58681E-2
ql6_imon=4.06466E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26231E0
ionrepsh_imon=1.76281E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3376E1
lens5b_imon=2.17882E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74597E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49363E0
os_ea2_imon=-7.28335E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06144E2
lens4b_imon=2.00698E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71474E1
cs_ef2a_imon=3.15353E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04435E0
os_ef2alow_imon=-2.68798E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.20249E-1
os_ef2bup_imon=-5.36933E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11406E1
os_restr2_imon=3.42347E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23017E2
cs_ionfoca_imon=6.28162E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.2356E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73111E1
iondef1_imon=1.11824E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68364E1
iondef4_imon=1.09927E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.23227E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8145E-1
olens1_imon=7.90411E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14035E0
cs_ionaccel_imon=-1.77618E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02105E2
cs_ionfocb_imon=1.47439E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56477E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=2.5999E-1
window_imon=-8.78788E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82726E2
mask1_imon=2.3908E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-6.76965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.31792E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93682E3
defgrida_imon=6.2833E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.19896E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31434E0
defgridb_imon=6.15352E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33265E1
os_fil1_imon=9.43243E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06735E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65609E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30891E1
cs_fil1_imon=9.9523E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62126E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67283E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.22848E-2
os_fil2_imon=-2.62993E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.6966E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36514E-1
cs_fil2_imon=-2.58188E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.23872E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22652E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.02253E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.16355E-1
res40_imon=-2.59428E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.79836E-1	-8.96406E-1	-9.04722E0	-9.04188E0	4.00543E-3	9.55582E-2	2.73275E1	-3.26803E1	-3.25322E1	2.68298E1	1.2212E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.9952E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.79836E-1	-8.96335E-1	-9.04739E0	-9.04202E0	4.19617E-3	9.55343E-2	2.73159E1	-3.26506E1	-3.26026E1	2.6852E1	1.2212E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.03027E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.79955E-1	-8.96239E-1	-9.04734E0	-9.042E0	4.31538E-3	9.56059E-2	2.73167E1	-3.26515E1	-3.26388E1	2.68146E1	1.22014E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01085E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.79979E-1	-8.96287E-1	-9.04734E0	-9.0421E0	4.36306E-3	9.53436E-2	2.7311E1	-3.26685E1	-3.26478E1	2.68454E1	1.20363E-7	2.51847E-3	2.51847E-3	6.28592E-3	3.02253E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.79908E-1	-8.96096E-1	-9.0472E0	-9.04193E0	4.1008E-3	9.54866E-2	2.73228E1	-3.26468E1	-3.26444E1	2.68538E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.01738E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.79955E-1	-8.96454E-1	-9.04682E0	-9.04174E0	4.12464E-3	9.56059E-2	2.73063E1	-3.2652E1	-3.26242E1	2.68346E1	1.21222E-7	2.52264E-3	2.52264E-3	6.29645E-3	3.00954E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.80122E-1	-8.96525E-1	-9.04675E0	-9.04183E0	4.12464E-3	9.6035E-2	2.73231E1	-3.26621E1	-3.25719E1	2.68352E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.80003E-1	-8.96335E-1	-9.04682E0	-9.04226E0	4.02927E-3	9.57727E-2	2.7349E1	-3.26753E1	-3.25779E1	2.68319E1	1.20069E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0941E0	-8.79931E-1	-8.96549E-1	-9.04667E0	-9.04191E0	4.05312E-3	9.56535E-2	2.73087E1	-3.26398E1	-3.2608E1	2.6818E1	1.21486E-7	2.52757E-3	2.52757E-3	6.32386E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.79765E-1	-8.96549E-1	-9.04667E0	-9.04191E0	4.17233E-3	9.57727E-2	2.72979E1	-3.26645E1	-3.26765E1	2.684E1	1.21591E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.02133E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.79979E-1	-8.96859E-1	-9.04679E0	-9.04198E0	3.8147E-3	9.58681E-2	2.73063E1	-3.26585E1	-3.26018E1	2.68418E1	1.2212E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.01223E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.79669E-1	-8.96525E-1	-9.04691E0	-9.04226E0	3.95775E-3	9.57727E-2	2.73417E1	-3.26627E1	-3.26332E1	2.6807E1	1.22014E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9926E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.80146E-1	-8.96478E-1	-9.04715E0	-9.04191E0	3.88622E-3	9.55343E-2	2.73171E1	-3.2653E1	-3.26296E1	2.68575E1	1.21275E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01347E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.79812E-1	-8.96096E-1	-9.04689E0	-9.04222E0	3.98159E-3	9.55105E-2	2.73297E1	-3.26591E1	-3.26176E1	2.6843E1	1.22067E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.02133E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.80075E-1	-8.96215E-1	-9.04715E0	-9.04238E0	4.00543E-3	9.58681E-2	2.73033E1	-3.26561E1	-3.26597E1	2.68214E1	1.2212E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.01609E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.80027E-1	-8.96358E-1	-9.04715E0	-9.04269E0	4.07696E-3	9.59873E-2	2.73647E1	-3.26844E1	-3.26443E1	2.68322E1	1.21808E-7	2.51417E-3	2.51417E-3	6.28592E-3	2.9892E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.80003E-1	-8.96525E-1	-9.04739E0	-9.04193E0	4.43459E-3	9.57966E-2	2.72949E1	-3.2644E1	-3.26362E1	2.68244E1	1.20802E-7	2.51007E-3	2.51007E-3	6.34037E-3	2.98481E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.8017E-1	-8.9643E-1	-9.04748E0	-9.042E0	3.74317E-3	9.56774E-2	2.73216E1	-3.26779E1	-3.26301E1	2.68316E1	1.19601E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01085E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.80122E-1	-8.96597E-1	-9.0472E0	-9.0421E0	3.93391E-3	9.58204E-2	2.73051E1	-3.26663E1	-3.25587E1	2.68635E1	1.19902E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09333E0	-8.79908E-1	-8.96502E-1	-9.0471E0	-9.04217E0	4.1008E-3	9.58681E-2	2.73111E1	-3.26627E1	-3.2593E1	2.68364E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.02253E-1
