[Scan]
initial_time=2016-01-18T18:05:38
final_time=2016-01-18T18:05:58
ip_count=19
run=1024
dataset=3
scan=190
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09379E0
qbias_imon=-1.08782E-4
ql1_vset=
ql1_vmon=-8.79979E-1
ql1_imon=1.33698E-8
ql2_vset=
ql2_vmon=-8.96287E-1
ql2_imon=1.92847E-9
ql3_vset=
ql3_vmon=-9.04694E0
ql3_imon=1.41728E-10
ql4_vset=
ql4_vmon=-9.04214E0
ql4_imon=4.46796E-11
mult1=-9.00591E-9
mult2=-2.78049E-9
rf_tmon=-6.01449E-3
rf_agc=3.26787E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.22001E-3
ql5_imon=1.71553E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68296E0
bslens_imon=2.47647E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19935E1
lens5a_imon=2.01227E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.04797E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54259E1
cs_ef1b_imon=2.85188E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04588E2
lens23_imon=1.02157E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04369E1
cs_ea1_imon=2.52562E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34612E0
lens1_imon=2.89104E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64584E1
os_ef1alow_imon=2.97045E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04021E1
cs_ea2_imon=1.49496E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8467E1
cs_ef1a_imon=2.95747E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.3438E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1176E1
os_restr1_imon=4.2513E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15089E1
os_ea1_imon=2.36339E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.07929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22146E0
cs_ionrep_imon=1.18169E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91977E2
cs_nozzle_imon=1.93384E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02266E1
cs_anode1_imon=2.98991E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20427E0
olens4_imon=3.3467E-8
tplens_vset=1.4E-1
tplens_vmon=1.6901E0
tplens_imon=-4.61569E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2605E1
iondef3_imon=1.50758E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26506E1
iondef2_imon=1.55985E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03075E2
lens6_imon=2.98155E-4
ql6_vset=1.0E-1
ql6_vmon=9.59873E-2
ql6_imon=4.08634E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24549E0
ionrepsh_imon=1.79525E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33634E1
lens5b_imon=2.16873E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74339E1
cs_ef2b_imon=3.11569E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53509E0
os_ea2_imon=-7.35545E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06135E2
lens4b_imon=2.00698E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71432E1
cs_ef2a_imon=3.17083E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05216E0
os_ef2alow_imon=-2.62311E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01629E-1
os_ef2bup_imon=-5.24679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11382E1
os_restr2_imon=3.42347E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.29676E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01605E1
cs_anode2_imon=2.25866E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7355E1
iondef1_imon=1.08904E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68214E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.29863E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81522E-1
olens1_imon=7.90071E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12233E0
cs_ionaccel_imon=-1.67166E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47543E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56351E1
einzel_imon=7.47521E-6
window_vset=0.0E0
window_vmon=2.25752E-1
window_imon=-9.54471E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82742E2
mask1_imon=2.38983E-4
mask2_vset=0.0E0
mask2_vmon=-1.86194E1
mask2_imon=-5.61639E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.57748E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.44552E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.20977E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4166E0
defgridb_imon=6.05258E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33272E1
os_fil1_imon=9.42853E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06494E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65593E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30854E1
cs_fil1_imon=9.95765E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62468E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67283E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.43484E-2
os_fil2_imon=-2.67798E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.9299E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36255E-1
cs_fil2_imon=-2.17943E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07615E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22786E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.02154E-1
chamber_ion_pmon=1.2212E-7
chamber_cvt_pmon=2.52179E-3
foreline_cvt_pmon=2.52179E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.92328E-1
res40_imon=-2.57626E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.80289E-1	-8.96525E-1	-9.04698E0	-9.04217E0	4.24385E-3	9.60827E-2	2.73177E1	-3.26807E1	-3.26014E1	2.68244E1	1.2212E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.99686E-1
2.0E0	2.3E1	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.80241E-1	-8.96335E-1	-9.04698E0	-9.04181E0	3.76701E-3	9.59635E-2	2.73033E1	-3.26549E1	-3.26236E1	2.68112E1	1.20854E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.97963E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.80289E-1	-8.96215E-1	-9.04691E0	-9.04212E0	4.05312E-3	9.58681E-2	2.73198E1	-3.26573E1	-3.25735E1	2.68382E1	1.2035E-7	2.51581E-3	2.51581E-3	6.32978E-3	2.97762E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.80361E-1	-8.9643E-1	-9.04684E0	-9.04176E0	4.07696E-3	9.59873E-2	2.73236E1	-3.26364E1	-3.26272E1	2.68362E1	1.198E-7	2.51417E-3	2.51417E-3	6.33977E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.80361E-1	-8.96716E-1	-9.04696E0	-9.04202E0	4.07696E-3	9.56297E-2	2.73363E1	-3.26356E1	-3.26434E1	2.68376E1	1.20127E-7	2.51679E-3	2.51679E-3	6.30221E-3	3.00494E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-8.80432E-1	-8.96573E-1	-9.04684E0	-9.04164E0	4.07696E-3	9.59396E-2	2.72979E1	-3.26705E1	-3.25948E1	2.68472E1	1.19705E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0965E0	-8.80075E-1	-8.96597E-1	-9.04717E0	-9.0421E0	4.29153E-3	9.58204E-2	2.73255E1	-3.26765E1	-3.26609E1	2.68094E1	1.19861E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.02659E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.80289E-1	-8.96358E-1	-9.04722E0	-9.04229E0	4.36306E-3	9.6035E-2	2.72998E1	-3.26531E1	-3.26113E1	2.68256E1	1.20226E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.03712E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.80361E-1	-8.96358E-1	-9.04734E0	-9.04229E0	3.93391E-3	9.58204E-2	2.73057E1	-3.26476E1	-3.26356E1	2.68376E1	1.20435E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.80289E-1	-8.96406E-1	-9.04694E0	-9.04212E0	3.8147E-3	9.56297E-2	2.73159E1	-3.26561E1	-3.26458E1	2.68478E1	1.20017E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.98481E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.80122E-1	-8.96645E-1	-9.04694E0	-9.04224E0	4.02927E-3	9.5892E-2	2.72967E1	-3.26512E1	-3.26206E1	2.68791E1	1.20929E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.98156E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.79717E-1	-8.96502E-1	-9.04691E0	-9.0421E0	3.91006E-3	9.57012E-2	2.73558E1	-3.2639E1	-3.25977E1	2.6843E1	1.2033E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.99E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09356E0	-8.79908E-1	-8.96597E-1	-9.04706E0	-9.0421E0	4.14848E-3	9.58443E-2	2.73496E1	-3.26645E1	-3.25888E1	2.68214E1	1.19757E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09379E0	-8.80027E-1	-8.96621E-1	-9.04737E0	-9.04205E0	4.26769E-3	9.58443E-2	2.73291E1	-3.26254E1	-3.26068E1	2.68406E1	1.20069E-7	2.50898E-3	2.50898E-3	6.3074E-3	3.01609E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.8017E-1	-8.96478E-1	-9.04698E0	-9.04186E0	4.12464E-3	9.5892E-2	2.73123E1	-3.26573E1	-3.26482E1	2.68286E1	1.20363E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.02769E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.79955E-1	-8.96406E-1	-9.04734E0	-9.04226E0	4.48227E-3	9.60112E-2	2.73231E1	-3.26741E1	-3.26386E1	2.68313E1	1.19965E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.00824E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09394E0	-8.80027E-1	-8.96335E-1	-9.04706E0	-9.04207E0	4.19617E-3	9.55343E-2	2.73405E1	-3.26512E1	-3.25996E1	2.68476E1	1.21581E-7	2.52139E-3	2.52139E-3	6.32418E-3	3.00942E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.79908E-1	-8.9643E-1	-9.04698E0	-9.04205E0	4.14848E-3	9.57489E-2	2.72917E1	-3.26389E1	-3.26993E1	2.6872E1	1.21549E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.0071E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.79931E-1	-8.96525E-1	-9.0471E0	-9.04207E0	4.17233E-3	9.61065E-2	2.73257E1	-3.26716E1	-3.25848E1	2.68356E1	1.22022E-7	2.52058E-3	2.52058E-3	6.33297E-3	3.02342E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09379E0	-8.79979E-1	-8.96287E-1	-9.04694E0	-9.04214E0	4.22001E-3	9.59873E-2	2.7355E1	-3.26506E1	-3.2605E1	2.68214E1	1.2212E-7	2.52179E-3	2.52179E-3	6.3074E-3	3.02154E-1
