[Scan]
initial_time=2016-01-18T18:06:32
final_time=2016-01-18T18:06:51
ip_count=19
run=1024
dataset=3
scan=192
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08783E-4
ql1_vset=
ql1_vmon=-8.79812E-1
ql1_imon=1.33433E-8
ql2_vset=
ql2_vmon=-8.96215E-1
ql2_imon=1.91247E-9
ql3_vset=
ql3_vmon=-9.04713E0
ql3_imon=1.86145E-10
ql4_vset=
ql4_vmon=-9.04186E0
ql4_imon=2.77162E-11
mult1=-9.23256E-9
mult2=-2.59579E-9
rf_tmon=-4.67465E-3
rf_agc=3.28402E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.29153E-3
ql5_imon=1.71885E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65088E0
bslens_imon=2.16313E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19739E1
lens5a_imon=2.01309E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12537E2
lens4a_imon=2.04944E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53982E1
cs_ef1b_imon=2.85388E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04669E2
lens23_imon=1.02156E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04514E1
cs_ea1_imon=2.51066E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33687E0
lens1_imon=2.68873E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6479E1
os_ef1alow_imon=2.9761E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03567E1
cs_ea2_imon=1.49761E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84712E1
cs_ef1a_imon=2.93795E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.34752E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11214E1
os_restr1_imon=4.26094E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14729E1
os_ea1_imon=2.35065E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63583E1
os_ef1bup_imon=3.05706E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22874E0
cs_ionrep_imon=1.19744E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92009E2
cs_nozzle_imon=1.93498E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01835E1
cs_anode1_imon=2.97843E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20403E0
olens4_imon=3.34627E-8
tplens_vset=1.4E-1
tplens_vmon=1.6596E0
tplens_imon=-3.24725E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25579E1
iondef3_imon=1.49917E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26508E1
iondef2_imon=1.5529E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03079E2
lens6_imon=2.98003E-4
ql6_vset=1.0E-1
ql6_vmon=9.5582E-2
ql6_imon=4.07052E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27805E0
ionrepsh_imon=1.77132E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33626E1
lens5b_imon=2.17389E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74508E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47467E0
os_ea2_imon=-6.01153E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06121E2
lens4b_imon=2.00584E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71543E1
cs_ef2a_imon=3.15047E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04742E0
os_ef2alow_imon=-2.31533E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.8099E-1
os_ef2bup_imon=-5.33574E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11312E1
os_restr2_imon=3.42566E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.29266E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01672E1
cs_anode2_imon=2.2498E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73121E1
iondef1_imon=1.111E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68257E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.16787E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81259E-1
olens1_imon=7.8904E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10938E0
cs_ionaccel_imon=-1.75873E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02157E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56652E1
einzel_imon=7.82407E-6
window_vset=0.0E0
window_vmon=2.71066E-1
window_imon=-7.54523E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82758E2
mask1_imon=2.39002E-4
mask2_vset=0.0E0
mask2_vmon=-1.86552E1
mask2_imon=-5.2877E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.50869E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.3952E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=6.87408E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28006E0
defgridb_imon=6.26282E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33265E1
os_fil1_imon=9.42342E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07537E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65576E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30883E1
cs_fil1_imon=9.96542E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62631E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67353E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42813E-2
os_fil2_imon=-2.80796E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9536E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65138E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37622E-1
cs_fil2_imon=-2.29548E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.70244E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22807E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31761E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.1958E-7
chamber_cvt_pmon=2.52058E-3
foreline_cvt_pmon=2.52058E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.64025E-1
res40_imon=-2.4282E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.80146E-1	-8.9643E-1	-9.04672E0	-9.04217E0	3.93391E-3	9.58681E-2	2.73375E1	-3.26744E1	-3.26277E1	2.6825E1	1.19895E-7	2.51642E-3	2.51642E-3	6.31902E-3	3.01193E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09449E0	-8.80098E-1	-8.96621E-1	-9.04696E0	-9.04179E0	4.12464E-3	9.58443E-2	2.7317E1	-3.26447E1	-3.25281E1	2.68375E1	1.19683E-7	2.52093E-3	2.52093E-3	6.323E-3	3.02977E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.8017E-1	-8.96764E-1	-9.04646E0	-9.04167E0	4.31538E-3	9.54151E-2	2.73285E1	-3.26843E1	-3.26543E1	2.68436E1	1.19883E-7	2.51838E-3	2.51838E-3	6.3074E-3	3.02426E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.80289E-1	-8.96597E-1	-9.0466E0	-9.04198E0	4.05312E-3	9.59158E-2	2.73311E1	-3.26478E1	-3.26927E1	2.68298E1	1.19913E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.9978E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09627E0	-8.8017E-1	-8.96525E-1	-9.04677E0	-9.04226E0	4.07696E-3	9.5892E-2	2.72865E1	-3.26452E1	-3.25413E1	2.68394E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.97445E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09595E0	-8.80122E-1	-8.96406E-1	-9.04686E0	-9.04207E0	3.95775E-3	9.58681E-2	2.72935E1	-3.26676E1	-3.2708E1	2.68244E1	1.19861E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.80075E-1	-8.96478E-1	-9.04677E0	-9.04191E0	3.83854E-3	9.55343E-2	2.73269E1	-3.26543E1	-3.25706E1	2.68354E1	1.19809E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.80194E-1	-8.96454E-1	-9.0467E0	-9.04212E0	3.69549E-3	9.57727E-2	2.73429E1	-3.26398E1	-3.26446E1	2.68358E1	1.20004E-7	2.52061E-3	2.52061E-3	6.28592E-3	3.00197E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.79908E-1	-8.96716E-1	-9.04682E0	-9.04176E0	3.95775E-3	9.57727E-2	2.73293E1	-3.26673E1	-3.26909E1	2.6825E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.79908E-1	-8.96502E-1	-9.04677E0	-9.04195E0	3.83854E-3	9.57012E-2	2.73645E1	-3.26676E1	-3.26689E1	2.68226E1	1.19749E-7	2.51417E-3	2.51417E-3	6.29128E-3	3.0071E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.79836E-1	-8.96621E-1	-9.04675E0	-9.04205E0	3.95775E-3	9.57489E-2	2.73275E1	-3.26496E1	-3.25894E1	2.68184E1	1.19766E-7	2.51915E-3	2.51915E-3	6.31858E-3	3.00144E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.79502E-1	-8.96382E-1	-9.04694E0	-9.04174E0	3.95775E-3	9.57251E-2	2.7359E1	-3.26422E1	-3.26052E1	2.68111E1	1.19646E-7	2.51203E-3	2.51203E-3	6.30202E-3	2.99686E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.79979E-1	-8.96215E-1	-9.04675E0	-9.04214E0	4.17233E-3	9.58443E-2	2.7312E1	-3.26528E1	-3.25118E1	2.68063E1	1.20004E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.01738E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.79788E-1	-8.96478E-1	-9.04667E0	-9.04214E0	4.24385E-3	9.58443E-2	2.73165E1	-3.26645E1	-3.26915E1	2.68388E1	1.19925E-7	2.51693E-3	2.51693E-3	6.32978E-3	3.02277E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.80122E-1	-8.96549E-1	-9.04667E0	-9.04186E0	4.36306E-3	9.57012E-2	2.73826E1	-3.26494E1	-3.26386E1	2.68502E1	1.19861E-7	2.51443E-3	2.51443E-3	6.28006E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-8.79979E-1	-8.96358E-1	-9.04675E0	-9.04191E0	4.43459E-3	9.58443E-2	2.73193E1	-3.26378E1	-3.25004E1	2.6807E1	1.19925E-7	2.50914E-3	2.50914E-3	6.32418E-3	3.00676E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.79908E-1	-8.96263E-1	-9.04675E0	-9.04195E0	4.31538E-3	9.55105E-2	2.73247E1	-3.26799E1	-3.26738E1	2.68382E1	1.20106E-7	2.51954E-3	2.51954E-3	6.33977E-3	2.99686E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.79931E-1	-8.96358E-1	-9.04672E0	-9.04248E0	4.3869E-3	9.57012E-2	2.73387E1	-3.26486E1	-3.25524E1	2.6836E1	1.20017E-7	2.52757E-3	2.52757E-3	6.31837E-3	2.9952E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.79836E-1	-8.96382E-1	-9.04679E0	-9.04176E0	4.36306E-3	9.55343E-2	2.73314E1	-3.26366E1	-3.2687E1	2.68144E1	1.19991E-7	2.52131E-3	2.52131E-3	6.32858E-3	2.99343E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.79812E-1	-8.96215E-1	-9.04713E0	-9.04186E0	4.29153E-3	9.5582E-2	2.73121E1	-3.26508E1	-3.25579E1	2.68257E1	1.1958E-7	2.52058E-3	2.52058E-3	6.31761E-3	3.01609E-1
