[Scan]
initial_time=2016-01-18T18:07:25
final_time=2016-01-18T18:07:44
ip_count=19
run=1024
dataset=3
scan=194
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08801E-4
ql1_vset=
ql1_vmon=-8.8017E-1
ql1_imon=1.33782E-8
ql2_vset=
ql2_vmon=-8.96358E-1
ql2_imon=1.90991E-9
ql3_vset=
ql3_vmon=-9.04682E0
ql3_imon=1.3541E-10
ql4_vset=
ql4_vmon=-9.04226E0
ql4_imon=1.13964E-11
mult1=-9.0902E-9
mult2=-2.68867E-9
rf_tmon=-5.81021E-3
rf_agc=3.17594E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.02927E-3
ql5_imon=1.70603E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66854E0
bslens_imon=2.31064E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19496E1
lens5a_imon=1.96865E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.05133E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53899E1
cs_ef1b_imon=2.82881E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04688E2
lens23_imon=1.02233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04814E1
cs_ea1_imon=2.52958E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32269E0
lens1_imon=2.82254E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64873E1
os_ef1alow_imon=2.9654E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0363E1
cs_ea2_imon=1.48054E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84508E1
cs_ef1a_imon=2.93729E-5
olens2_vset=9.7E-1
olens2_vmon=9.69768E-1
olens2_imon=1.35393E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11484E1
os_restr1_imon=4.25238E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14813E1
os_ea1_imon=2.33816E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.05838E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24849E0
cs_ionrep_imon=1.20404E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9194E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=2.9827E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20432E0
olens4_imon=3.35313E-8
tplens_vset=1.4E-1
tplens_vmon=1.67027E0
tplens_imon=-3.06556E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2486E1
iondef3_imon=1.5238E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26609E1
iondef2_imon=1.55048E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03032E2
lens6_imon=2.98061E-4
ql6_vset=1.0E-1
ql6_vmon=9.56059E-2
ql6_imon=4.08109E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28394E0
ionrepsh_imon=1.79706E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33952E1
lens5b_imon=2.17954E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.1247E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4738E0
os_ea2_imon=-8.76138E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06149E2
lens4b_imon=2.00468E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71378E1
cs_ef2a_imon=3.15028E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05576E0
os_ef2alow_imon=-2.6159E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95021E-1
os_ef2bup_imon=-5.36212E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11256E1
os_restr2_imon=3.43103E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.28811E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.24425E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73177E1
iondef1_imon=1.10743E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68184E1
iondef4_imon=1.09278E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.21193E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81092E-1
olens1_imon=7.87848E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14516E0
cs_ionaccel_imon=-1.81582E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47406E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56297E1
einzel_imon=7.7455E-6
window_vset=0.0E0
window_vmon=2.49178E-1
window_imon=-7.92292E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8272E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.865E1
mask2_imon=-7.52649E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.48375E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.60053E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.43688E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49179E0
defgridb_imon=6.01653E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33277E1
os_fil1_imon=9.42342E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06404E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65586E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30899E1
cs_fil1_imon=9.94756E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62546E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67266E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38325E-2
os_fil2_imon=-2.70201E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.76691E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.72882E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.75607E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.95952E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22699E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.19749E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.54196E-1
res40_imon=-2.56905E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.80122E-1	-8.96478E-1	-9.04675E0	-9.04176E0	4.17233E-3	9.59158E-2	2.73346E1	-3.26874E1	-3.25641E1	2.68406E1	1.20055E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.02769E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.79908E-1	-8.96621E-1	-9.04675E0	-9.0421E0	4.12464E-3	9.58443E-2	2.73105E1	-3.26549E1	-3.27582E1	2.68232E1	1.19902E-7	2.53354E-3	2.53354E-3	6.33977E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-8.80265E-1	-8.96573E-1	-9.04679E0	-9.04226E0	4.3869E-3	9.58443E-2	2.73231E1	-3.26764E1	-3.2575E1	2.68383E1	1.20592E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00041E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.80003E-1	-8.96788E-1	-9.04694E0	-9.04224E0	4.43459E-3	9.58204E-2	2.73281E1	-3.26549E1	-3.26124E1	2.68343E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.80289E-1	-8.96788E-1	-9.04701E0	-9.04241E0	4.48227E-3	9.55582E-2	2.73559E1	-3.26952E1	-3.26505E1	2.68456E1	1.20293E-7	2.52131E-3	2.52131E-3	6.31798E-3	2.99093E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.80146E-1	-8.96716E-1	-9.04727E0	-9.04224E0	4.43459E-3	9.58204E-2	2.73311E1	-3.26484E1	-3.25493E1	2.68466E1	1.20031E-7	2.5147E-3	2.5147E-3	6.33538E-3	2.97499E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.80051E-1	-8.96645E-1	-9.04729E0	-9.0421E0	4.36306E-3	9.55343E-2	2.72751E1	-3.26536E1	-3.26993E1	2.68354E1	1.19705E-7	2.51225E-3	2.51225E-3	6.3514E-3	2.98481E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.80361E-1	-8.96668E-1	-9.04703E0	-9.04193E0	3.98159E-3	9.57727E-2	2.73057E1	-3.2629E1	-3.25753E1	2.68424E1	1.19902E-7	2.51739E-3	2.51739E-3	6.29665E-3	2.99941E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.80384E-1	-8.96525E-1	-9.04698E0	-9.04219E0	4.00543E-3	9.57966E-2	2.73147E1	-3.26747E1	-3.26242E1	2.68322E1	1.20069E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.80098E-1	-8.96645E-1	-9.04686E0	-9.04198E0	4.33922E-3	9.57727E-2	2.73538E1	-3.26585E1	-3.26711E1	2.68226E1	1.198E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.01738E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.80122E-1	-8.96406E-1	-9.04675E0	-9.04207E0	4.26769E-3	9.58204E-2	2.73499E1	-3.26779E1	-3.25328E1	2.68447E1	1.19861E-7	2.52428E-3	2.52428E-3	6.3514E-3	2.9978E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.80241E-1	-8.96716E-1	-9.04706E0	-9.04207E0	4.17233E-3	9.57012E-2	2.73111E1	-3.2635E1	-3.25972E1	2.68316E1	1.20004E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.01995E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.80194E-1	-8.96502E-1	-9.04689E0	-9.04195E0	4.3869E-3	9.57012E-2	2.73339E1	-3.26597E1	-3.24716E1	2.68436E1	1.20017E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.02396E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.80146E-1	-8.96525E-1	-9.0471E0	-9.04224E0	4.45843E-3	9.55105E-2	2.73219E1	-3.26579E1	-3.26458E1	2.6837E1	1.19861E-7	2.51007E-3	2.51007E-3	6.3074E-3	2.9952E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.80265E-1	-8.96406E-1	-9.04696E0	-9.04205E0	4.24385E-3	9.57489E-2	2.73315E1	-3.26705E1	-3.27089E1	2.68178E1	1.20592E-7	2.5188E-3	2.5188E-3	6.3514E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.80289E-1	-8.96215E-1	-9.0466E0	-9.04176E0	4.31538E-3	9.56774E-2	2.73204E1	-3.26467E1	-3.24756E1	2.68478E1	1.19913E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.01085E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.80075E-1	-8.95882E-1	-9.04706E0	-9.04186E0	4.22001E-3	9.58204E-2	2.73334E1	-3.26726E1	-3.24325E1	2.68522E1	1.19646E-7	2.52384E-3	2.52384E-3	6.33977E-3	3.0148E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.80384E-1	-8.9581E-1	-9.0471E0	-9.04236E0	4.45843E-3	9.57012E-2	2.73123E1	-3.26663E1	-3.2438E1	2.67728E1	1.19953E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.0071E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.80027E-1	-8.96001E-1	-9.04698E0	-9.04188E0	4.26769E-3	9.61542E-2	2.7344E1	-3.26567E1	-3.24827E1	2.6843E1	1.20069E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.9874E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.8017E-1	-8.96358E-1	-9.04682E0	-9.04226E0	4.02927E-3	9.56059E-2	2.73177E1	-3.26609E1	-3.2486E1	2.68184E1	1.19749E-7	2.51739E-3	2.51739E-3	6.29128E-3	2.9943E-1
