[Scan]
initial_time=2016-01-18T18:08:18
final_time=2016-01-18T18:08:38
ip_count=19
run=1024
dataset=3
scan=196
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.08756E-4
ql1_vset=
ql1_vmon=-8.79979E-1
ql1_imon=1.33965E-8
ql2_vset=
ql2_vmon=-8.96049E-1
ql2_imon=1.94114E-9
ql3_vset=
ql3_vmon=-9.04725E0
ql3_imon=1.46258E-10
ql4_vset=
ql4_vmon=-9.04176E0
ql4_imon=1.26481E-11
mult1=-9.6617E-9
mult2=-2.74891E-9
rf_tmon=-5.47417E-3
rf_agc=3.20862E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.95775E-3
ql5_imon=1.68988E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67211E0
bslens_imon=2.35213E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19588E1
lens5a_imon=1.99465E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.04951E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53839E1
cs_ef1b_imon=2.82737E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02132E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04581E1
cs_ea1_imon=2.53017E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38849E0
lens1_imon=2.62466E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65005E1
os_ef1alow_imon=2.96864E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0326E1
cs_ea2_imon=1.48746E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84382E1
cs_ef1a_imon=2.93116E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.33932E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11244E1
os_restr1_imon=4.25923E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15123E1
os_ea1_imon=2.35957E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63815E1
os_ef1bup_imon=3.07208E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21788E0
cs_ionrep_imon=1.20076E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91971E2
cs_nozzle_imon=1.93441E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01683E1
cs_anode1_imon=2.97874E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20434E0
olens4_imon=3.34683E-8
tplens_vset=1.4E-1
tplens_vmon=1.70278E0
tplens_imon=-2.45796E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26486E1
iondef3_imon=1.51082E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26457E1
iondef2_imon=1.54586E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03063E2
lens6_imon=2.98233E-4
ql6_vset=1.0E-1
ql6_vmon=9.57727E-2
ql6_imon=4.09306E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28572E0
ionrepsh_imon=1.79008E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33746E1
lens5b_imon=2.15499E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74796E1
cs_ef2b_imon=3.13082E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49396E0
os_ea2_imon=-6.24513E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06137E2
lens4b_imon=2.00679E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.13911E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05696E0
os_ef2alow_imon=-2.42489E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.14843E-1
os_ef2bup_imon=-5.38014E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11093E1
os_restr2_imon=3.43031E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.28937E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01719E1
cs_anode2_imon=2.22839E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73202E1
iondef1_imon=1.1229E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68534E1
iondef4_imon=1.10179E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.16273E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=7.89873E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14756E0
cs_ionaccel_imon=-1.78338E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47241E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56609E1
einzel_imon=7.87164E-6
window_vset=0.0E0
window_vmon=2.53382E-1
window_imon=-9.32847E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82714E2
mask1_imon=2.39012E-4
mask2_vset=0.0E0
mask2_vmon=-1.86362E1
mask2_imon=-8.06708E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=8.16384E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.23486E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50109E3
multb_neg_imon=6.79055E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.60045E0
defgridb_imon=6.27733E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33291E1
os_fil1_imon=9.45502E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.05455E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65904E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30877E1
cs_fil1_imon=9.96396E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62858E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67206E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39521E-2
os_fil2_imon=-2.85818E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82097E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.68505E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3742E-1
cs_fil2_imon=-2.31758E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.50594E-5
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22684E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.97901E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.74909E-1
res40_imon=-2.50057E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-8.79717E-1	-8.96192E-1	-9.04737E0	-9.04233E0	4.00543E-3	9.6035E-2	2.73652E1	-3.26476E1	-3.25894E1	2.6869E1	1.20004E-7	2.52815E-3	2.52815E-3	6.32356E-3	2.9841E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.79622E-1	-8.96358E-1	-9.04698E0	-9.04217E0	4.24385E-3	9.59873E-2	2.72959E1	-3.26542E1	-3.25366E1	2.68088E1	1.20017E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01347E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.79669E-1	-8.96311E-1	-9.04706E0	-9.04202E0	3.86238E-3	9.56774E-2	2.73254E1	-3.26556E1	-3.24719E1	2.68343E1	1.1966E-7	2.51581E-3	2.51581E-3	6.29624E-3	3.00676E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.79669E-1	-8.96287E-1	-9.04706E0	-9.04195E0	3.93391E-3	9.58204E-2	2.73193E1	-3.26673E1	-3.25181E1	2.68256E1	1.19891E-7	2.51498E-3	2.51498E-3	6.31798E-3	3.02621E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.79836E-1	-8.96144E-1	-9.04684E0	-9.04198E0	4.33922E-3	9.59158E-2	2.73279E1	-3.26506E1	-3.26753E1	2.68142E1	1.198E-7	2.52061E-3	2.52061E-3	6.29665E-3	3.02253E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.80003E-1	-8.96502E-1	-9.0471E0	-9.04229E0	4.19617E-3	9.59396E-2	2.73488E1	-3.26649E1	-3.26885E1	2.68454E1	1.19913E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.02922E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.80075E-1	-8.96263E-1	-9.04696E0	-9.04233E0	4.14848E-3	9.6035E-2	2.73126E1	-3.26104E1	-3.26179E1	2.68556E1	1.2026E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.02511E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.80098E-1	-8.96239E-1	-9.04701E0	-9.04217E0	4.05312E-3	9.61304E-2	2.73104E1	-3.26962E1	-3.26691E1	2.68435E1	1.21188E-7	2.52635E-3	2.52635E-3	6.3131E-3	3.03794E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.79765E-1	-8.96358E-1	-9.04708E0	-9.04207E0	4.17233E-3	9.58681E-2	2.73369E1	-3.26346E1	-3.27478E1	2.684E1	1.2186E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.00453E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.79955E-1	-8.9643E-1	-9.04684E0	-9.04202E0	4.00543E-3	9.59873E-2	2.73652E1	-3.26693E1	-3.26518E1	2.6813E1	1.21644E-7	2.52209E-3	2.52209E-3	6.28552E-3	3.00302E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.8017E-1	-8.96502E-1	-9.04696E0	-9.04219E0	4.00543E-3	9.57966E-2	2.7301E1	-3.26726E1	-3.26378E1	2.68454E1	1.21581E-7	2.51025E-3	2.51025E-3	6.31299E-3	3.00144E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.80075E-1	-8.96597E-1	-9.04717E0	-9.04191E0	4.26769E-3	9.60112E-2	2.73321E1	-3.26518E1	-3.26296E1	2.68325E1	1.20517E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.01738E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.79884E-1	-8.96192E-1	-9.04737E0	-9.04229E0	4.02927E-3	9.60112E-2	2.73511E1	-3.26767E1	-3.26467E1	2.68346E1	1.20174E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.02133E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.80146E-1	-8.96358E-1	-9.04694E0	-9.04205E0	3.91006E-3	9.57727E-2	2.73466E1	-3.26579E1	-3.26194E1	2.6822E1	1.21238E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.0071E-1
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.80432E-1	-8.9643E-1	-9.04696E0	-9.04198E0	3.88622E-3	9.58204E-2	2.73357E1	-3.26651E1	-3.25371E1	2.68328E1	1.20069E-7	2.52099E-3	2.52099E-3	6.36244E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-8.80218E-1	-8.96358E-1	-9.04713E0	-9.04222E0	4.07696E-3	9.6035E-2	2.72968E1	-3.26449E1	-3.27015E1	2.68082E1	1.20174E-7	2.52318E-3	2.52318E-3	6.34037E-3	3.00041E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.80289E-1	-8.96144E-1	-9.04725E0	-9.04198E0	4.02927E-3	9.63449E-2	2.73279E1	-3.26645E1	-3.26218E1	2.68244E1	1.20055E-7	2.51847E-3	2.51847E-3	6.34518E-3	3.00966E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.79931E-1	-8.9612E-1	-9.04684E0	-9.04205E0	4.17233E-3	9.59158E-2	2.73321E1	-3.26464E1	-3.25149E1	2.68424E1	1.19809E-7	2.52099E-3	2.52099E-3	6.28552E-3	3.03712E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.79836E-1	-8.96311E-1	-9.04727E0	-9.04176E0	4.14848E-3	9.59635E-2	2.73458E1	-3.26443E1	-3.25216E1	2.68232E1	1.20122E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00302E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-8.79979E-1	-8.96049E-1	-9.04725E0	-9.04176E0	3.95775E-3	9.57727E-2	2.73202E1	-3.26457E1	-3.26486E1	2.68534E1	1.19851E-7	2.52276E-3	2.52276E-3	6.31817E-3	2.97901E-1
