[Scan]
initial_time=2016-01-18T18:08:45
final_time=2016-01-18T18:09:04
ip_count=19
run=1024
dataset=3
scan=197
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08787E-4
ql1_vset=
ql1_vmon=-8.80694E-1
ql1_imon=1.33861E-8
ql2_vset=
ql2_vmon=-8.96549E-1
ql2_imon=1.89189E-9
ql3_vset=
ql3_vmon=-9.0472E0
ql3_imon=1.18887E-10
ql4_vset=
ql4_vmon=-9.04214E0
ql4_imon=9.63211E-12
mult1=-9.77651E-9
mult2=-2.74456E-9
rf_tmon=-3.479E-3
rf_agc=3.40005E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.12464E-3
ql5_imon=1.69423E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66857E0
bslens_imon=2.28134E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19966E1
lens5a_imon=2.00492E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12531E2
lens4a_imon=2.05075E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53959E1
cs_ef1b_imon=2.82485E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02135E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05077E1
cs_ea1_imon=2.52415E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34012E0
lens1_imon=2.83349E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64753E1
os_ef1alow_imon=2.98306E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03649E1
cs_ea2_imon=1.50161E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=2.93477E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.34194E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11526E1
os_restr1_imon=4.27148E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15264E1
os_ea1_imon=2.3355E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63671E1
os_ef1bup_imon=3.08109E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25446E0
cs_ionrep_imon=1.20324E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91975E2
cs_nozzle_imon=1.93533E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02157E1
cs_anode1_imon=2.97333E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20387E0
olens4_imon=3.35201E-8
tplens_vset=1.4E-1
tplens_vmon=1.69806E0
tplens_imon=-4.617E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25593E1
iondef3_imon=1.49737E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26627E1
iondef2_imon=1.56674E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0301E2
lens6_imon=2.9818E-4
ql6_vset=1.0E-1
ql6_vmon=9.57251E-2
ql6_imon=4.05556E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29693E0
ionrepsh_imon=1.76424E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34112E1
lens5b_imon=2.1833E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74735E1
cs_ef2b_imon=3.12217E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46505E0
os_ea2_imon=-6.20973E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06158E2
lens4b_imon=2.00287E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7127E1
cs_ef2a_imon=3.14776E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05456E0
os_ef2alow_imon=-2.58707E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08236E-1
os_ef2bup_imon=-5.40897E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1146E1
os_restr2_imon=3.42022E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23095E2
cs_ionfoca_imon=6.28583E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01635E1
cs_anode2_imon=2.24785E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73093E1
iondef1_imon=1.13776E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68354E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.20208E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81259E-1
olens1_imon=7.8888E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-1.82303E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02112E2
cs_ionfocb_imon=1.47302E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5676E1
einzel_imon=7.68063E-6
window_vset=0.0E0
window_vmon=2.47976E-1
window_imon=-7.41837E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82693E2
mask1_imon=2.39001E-4
mask2_vset=0.0E0
mask2_vmon=-1.8653E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=7.58338E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93746E3
defgrida_imon=6.04727E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=6.8224E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.19295E0
defgridb_imon=6.07913E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3326E1
os_fil1_imon=9.40714E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06753E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65904E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30878E1
cs_fil1_imon=9.93795E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62294E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67313E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.2939E-2
os_fil2_imon=-2.80412E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79094E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75212E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37938E-1
cs_fil2_imon=-2.49778E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.11859E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22811E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.73708E-1
res40_imon=-2.6123E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.79788E-1	-8.96287E-1	-9.04677E0	-9.042E0	4.31538E-3	9.58443E-2	2.7367E1	-3.2675E1	-3.25847E1	2.6847E1	1.20209E-7	2.51203E-3	2.51203E-3	6.30202E-3	2.9892E-1
2.0E0	4.6E1	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.80027E-1	-8.9643E-1	-9.04675E0	-9.0421E0	4.36306E-3	9.54866E-2	2.73296E1	-3.26689E1	-3.27093E1	2.68581E1	1.19851E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.79765E-1	-8.96573E-1	-9.04679E0	-9.0421E0	4.3869E-3	9.53674E-2	2.73281E1	-3.27003E1	-3.24709E1	2.68377E1	1.20137E-7	2.5147E-3	2.5147E-3	6.31299E-3	3.00676E-1
4.0E0	1.0E1	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.79931E-1	-8.96645E-1	-9.04689E0	-9.04174E0	4.26769E-3	9.58204E-2	2.73255E1	-3.26753E1	-3.2614E1	2.68466E1	1.19595E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.01738E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.80265E-1	-8.96502E-1	-9.04717E0	-9.04193E0	4.31538E-3	9.58204E-2	2.73411E1	-3.26549E1	-3.26431E1	2.6854E1	1.20106E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.03286E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.80313E-1	-8.96382E-1	-9.04748E0	-9.042E0	4.57764E-3	9.57012E-2	2.73275E1	-3.26661E1	-3.26472E1	2.68214E1	1.20174E-7	2.51225E-3	2.51225E-3	6.3074E-3	2.98222E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.80027E-1	-8.96335E-1	-9.04717E0	-9.042E0	4.52995E-3	9.5582E-2	2.73138E1	-3.26602E1	-3.25814E1	2.68406E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.98665E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.80146E-1	-8.9612E-1	-9.04701E0	-9.0421E0	4.19617E-3	9.54628E-2	2.73271E1	-3.2626E1	-3.24675E1	2.68575E1	1.19991E-7	2.52025E-3	2.52025E-3	6.33919E-3	2.97843E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.80051E-1	-8.96478E-1	-9.04715E0	-9.0421E0	4.26769E-3	9.50575E-2	2.73273E1	-3.26404E1	-3.25413E1	2.68621E1	1.19872E-7	2.51915E-3	2.51915E-3	6.34099E-3	2.9671E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.80337E-1	-8.96525E-1	-9.04717E0	-9.0421E0	4.17233E-3	9.52721E-2	2.73412E1	-3.26823E1	-3.26572E1	2.68593E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00563E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.80027E-1	-8.96525E-1	-9.04703E0	-9.04212E0	4.14848E-3	9.53197E-2	2.73345E1	-3.26663E1	-3.28021E1	2.68208E1	1.20191E-7	2.51915E-3	2.51915E-3	6.30182E-3	3.00676E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.7986E-1	-8.96478E-1	-9.04713E0	-9.04217E0	4.24385E-3	9.54866E-2	2.73147E1	-3.26585E1	-3.2593E1	2.68394E1	1.19757E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01871E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.80194E-1	-8.96335E-1	-9.04703E0	-9.04212E0	4.1008E-3	9.59396E-2	2.73079E1	-3.26708E1	-3.26372E1	2.68227E1	1.19749E-7	2.51203E-3	2.51203E-3	6.33436E-3	2.9943E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.80146E-1	-8.96502E-1	-9.04725E0	-9.04222E0	4.19617E-3	9.53436E-2	2.73499E1	-3.2639E1	-3.2467E1	2.68238E1	1.20028E-7	2.52509E-3	2.52509E-3	6.3074E-3	3.0E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.80265E-1	-8.96549E-1	-9.04717E0	-9.04193E0	4.29153E-3	9.55105E-2	2.73363E1	-3.26687E1	-3.24908E1	2.68545E1	1.1995E-7	2.51296E-3	2.51296E-3	6.31321E-3	3.00087E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.80003E-1	-8.96454E-1	-9.04706E0	-9.04195E0	4.19617E-3	9.55582E-2	2.73021E1	-3.26681E1	-3.26332E1	2.68406E1	1.1966E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.00676E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.79931E-1	-8.96597E-1	-9.0472E0	-9.04195E0	4.14848E-3	9.55343E-2	2.73254E1	-3.26411E1	-3.27106E1	2.68499E1	1.19851E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.02253E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.80075E-1	-8.96502E-1	-9.04689E0	-9.042E0	3.83854E-3	9.57727E-2	2.73231E1	-3.26398E1	-3.28297E1	2.68454E1	1.20055E-7	2.51632E-3	2.51632E-3	6.33977E-3	3.0071E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.80075E-1	-8.96454E-1	-9.04708E0	-9.04224E0	4.14848E-3	9.59635E-2	2.73269E1	-3.26461E1	-3.28224E1	2.6798E1	1.19861E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.97187E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.80694E-1	-8.96549E-1	-9.0472E0	-9.04214E0	4.12464E-3	9.57251E-2	2.73093E1	-3.26627E1	-3.25593E1	2.68354E1	1.20158E-7	2.52276E-3	2.52276E-3	6.32896E-3	2.99941E-1
