[Scan]
initial_time=2016-01-18T18:10:05
final_time=2016-01-18T18:10:24
ip_count=19
run=1024
dataset=3
scan=200
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08792E-4
ql1_vset=
ql1_vmon=-8.80027E-1
ql1_imon=1.34257E-8
ql2_vset=
ql2_vmon=-8.96454E-1
ql2_imon=1.92554E-9
ql3_vset=
ql3_vmon=-9.04686E0
ql3_imon=1.33646E-10
ql4_vset=
ql4_vmon=-9.04195E0
ql4_imon=2.32339E-11
mult1=-9.70427E-9
mult2=-2.67869E-9
rf_tmon=-5.64198E-3
rf_agc=3.22942E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.07696E-3
ql5_imon=1.69629E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67155E0
bslens_imon=2.38634E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19899E1
lens5a_imon=1.9928E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12513E2
lens4a_imon=2.04934E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53983E1
cs_ef1b_imon=2.83458E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02078E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04411E1
cs_ea1_imon=2.51697E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35514E0
lens1_imon=2.75405E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64674E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0366E1
cs_ea2_imon=1.50289E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84574E1
cs_ef1a_imon=2.9445E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.34564E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11418E1
os_restr1_imon=4.25814E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15083E1
os_ea1_imon=2.367E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63419E1
os_ef1bup_imon=3.07568E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21965E0
cs_ionrep_imon=1.2044E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91967E2
cs_nozzle_imon=1.93323E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0256E1
cs_anode1_imon=2.98054E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2038E0
olens4_imon=3.35031E-8
tplens_vset=1.4E-1
tplens_vmon=1.68289E0
tplens_imon=-3.78655E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.259E1
iondef3_imon=1.48631E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.265E1
iondef2_imon=1.56237E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03084E2
lens6_imon=2.9813E-4
ql6_vset=1.0E-1
ql6_vmon=9.54866E-2
ql6_imon=4.07344E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26532E0
ionrepsh_imon=1.79706E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3379E1
lens5b_imon=2.17125E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74435E1
cs_ef2b_imon=3.13299E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51586E0
os_ea2_imon=-6.45421E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00738E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71174E1
cs_ef2a_imon=3.1647E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06537E0
os_ef2alow_imon=-2.46453E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.1184E-1
os_ef2bup_imon=-5.23238E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1134E1
os_restr2_imon=3.42959E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.3E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01773E1
cs_anode2_imon=2.25182E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73225E1
iondef1_imon=1.09878E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6798E1
iondef4_imon=1.09638E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.13333E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8145E-1
olens1_imon=7.87806E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14696E0
cs_ionaccel_imon=-1.7077E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02102E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56417E1
einzel_imon=7.60855E-6
window_vset=0.0E0
window_vmon=2.64795E-1
window_imon=-6.73362E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82714E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.86813E1
mask2_imon=-6.22906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=7.8154E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93696E3
defgrida_imon=6.87091E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.20617E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31434E0
defgridb_imon=5.9913E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33289E1
os_fil1_imon=9.4263E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.05131E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65856E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3086E1
cs_fil1_imon=9.95633E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63375E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67134E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.49933E-2
os_fil2_imon=-2.74405E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97714E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.743E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33536E-1
cs_fil2_imon=-2.24551E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1182E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22786E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.20592E-7
chamber_cvt_pmon=2.52428E-3
foreline_cvt_pmon=2.52428E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.87523E-1
res40_imon=-2.55824E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.79908E-1	-8.96263E-1	-9.04672E0	-9.04214E0	4.12464E-3	9.5582E-2	2.73228E1	-3.26844E1	-3.26266E1	2.68232E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.0071E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.80313E-1	-8.96263E-1	-9.0471E0	-9.04219E0	4.31538E-3	9.55343E-2	2.73431E1	-3.26511E1	-3.26266E1	2.68394E1	1.19749E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.99175E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.79908E-1	-8.96406E-1	-9.04703E0	-9.04217E0	4.50611E-3	9.56297E-2	2.7319E1	-3.26758E1	-3.26579E1	2.68226E1	1.19872E-7	2.51359E-3	2.51359E-3	6.3074E-3	2.98554E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.80075E-1	-8.96645E-1	-9.04696E0	-9.04183E0	4.05312E-3	9.57012E-2	2.73151E1	-3.26844E1	-3.25965E1	2.68389E1	1.19902E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-8.80051E-1	-8.96406E-1	-9.04677E0	-9.04148E0	3.95775E-3	9.55105E-2	2.73369E1	-3.2645E1	-3.25954E1	2.6846E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.80289E-1	-8.96382E-1	-9.04729E0	-9.04205E0	4.02927E-3	9.54151E-2	2.7337E1	-3.26467E1	-3.26419E1	2.68292E1	1.20122E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.8017E-1	-8.96311E-1	-9.04689E0	-9.04169E0	4.02927E-3	9.55582E-2	2.7334E1	-3.26508E1	-3.26443E1	2.68208E1	1.19913E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.02396E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.80361E-1	-8.96358E-1	-9.04675E0	-9.04198E0	4.05312E-3	9.53913E-2	2.73171E1	-3.26561E1	-3.2611E1	2.68458E1	1.20106E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.02253E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-8.80265E-1	-8.96549E-1	-9.04706E0	-9.04207E0	4.17233E-3	9.56535E-2	2.72915E1	-3.26732E1	-3.26472E1	2.68526E1	1.20055E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.02769E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.80432E-1	-8.96692E-1	-9.04713E0	-9.04224E0	4.22001E-3	9.53913E-2	2.73451E1	-3.26127E1	-3.26231E1	2.68383E1	1.19965E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.01347E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.79955E-1	-8.96478E-1	-9.0472E0	-9.04231E0	4.36306E-3	9.51767E-2	2.73338E1	-3.26809E1	-3.26011E1	2.68263E1	1.19891E-7	2.51287E-3	2.51287E-3	6.3074E-3	3.006E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.79955E-1	-8.96645E-1	-9.04729E0	-9.04233E0	4.24385E-3	9.52005E-2	2.73033E1	-3.26849E1	-3.26074E1	2.68418E1	1.19721E-7	2.51838E-3	2.51838E-3	6.30171E-3	2.989E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-8.79765E-1	-8.96478E-1	-9.04703E0	-9.04233E0	4.02927E-3	9.52959E-2	2.7329E1	-3.26609E1	-3.26762E1	2.6837E1	1.20017E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.98481E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09402E0	-8.80194E-1	-8.96716E-1	-9.04703E0	-9.04195E0	4.43459E-3	9.56297E-2	2.73478E1	-3.2611E1	-3.26512E1	2.68424E1	1.19809E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.01871E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.80075E-1	-8.96502E-1	-9.04696E0	-9.04188E0	4.07696E-3	9.57727E-2	2.73529E1	-3.26272E1	-3.26408E1	2.68232E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.79931E-1	-8.96311E-1	-9.04684E0	-9.04195E0	4.24385E-3	9.56297E-2	2.73333E1	-3.2678E1	-3.26327E1	2.68298E1	1.20174E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.00563E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.79836E-1	-8.96573E-1	-9.04682E0	-9.04205E0	4.43459E-3	9.59396E-2	2.73464E1	-3.26402E1	-3.26054E1	2.6825E1	1.20191E-7	2.52473E-3	2.52473E-3	6.32978E-3	2.99613E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.79884E-1	-8.96573E-1	-9.04701E0	-9.04152E0	4.43459E-3	9.57012E-2	2.73641E1	-3.26767E1	-3.2577E1	2.68406E1	1.20158E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.01995E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-8.80003E-1	-8.96835E-1	-9.04679E0	-9.04148E0	4.14848E-3	9.52721E-2	2.73183E1	-3.26518E1	-3.26254E1	2.68227E1	1.20004E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.04063E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.80027E-1	-8.96454E-1	-9.04686E0	-9.04195E0	4.07696E-3	9.54866E-2	2.73225E1	-3.265E1	-3.259E1	2.6798E1	1.20592E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.00824E-1
